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KR950012094A - 미소부 물성정보 측정장치 - Google Patents

미소부 물성정보 측정장치 Download PDF

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Publication number
KR950012094A
KR950012094A KR1019940025036A KR19940025036A KR950012094A KR 950012094 A KR950012094 A KR 950012094A KR 1019940025036 A KR1019940025036 A KR 1019940025036A KR 19940025036 A KR19940025036 A KR 19940025036A KR 950012094 A KR950012094 A KR 950012094A
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South Korea
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probe
test sample
property information
magnetic field
physical property
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KR1019940025036A
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English (en)
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시게유끼 호소끼
쯔요시 하세가와
Original Assignee
가나이 쯔또무
가부시끼가이샤 히다찌세이사꾸쇼
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Publication of KR950012094A publication Critical patent/KR950012094A/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/30—Scanning potential microscopy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/02—Multiple-type SPM, i.e. involving more than one SPM techniques
    • G01Q60/04—STM [Scanning Tunnelling Microscopy] combined with AFM [Atomic Force Microscopy]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/02—Multiple-type SPM, i.e. involving more than one SPM techniques
    • G01Q60/08—MFM [Magnetic Force Microscopy] combined with AFM [Atomic Force Microscopy
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G01Q60/14—STP [Scanning Tunnelling Potentiometry]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/20—Arrangements or instruments for measuring magnetic variables involving magnetic resonance
    • G01R33/44—Arrangements or instruments for measuring magnetic variables involving magnetic resonance using nuclear magnetic resonance [NMR]
    • G01R33/48—NMR imaging systems
    • G01R33/54—Signal processing systems, e.g. using pulse sequences ; Generation or control of pulse sequences; Operator console
    • G01R33/56—Image enhancement or correction, e.g. subtraction or averaging techniques, e.g. improvement of signal-to-noise ratio and resolution
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/70—Nanostructure
    • Y10S977/832—Nanostructure having specified property, e.g. lattice-constant, thermal expansion coefficient
    • Y10S977/838—Magnetic property of nanomaterial
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/863—Atomic force probe
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/865—Magnetic force probe
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/902—Specified use of nanostructure
    • Y10S977/932—Specified use of nanostructure for electronic or optoelectronic application
    • Y10S977/953—Detector using nanostructure
    • Y10S977/96—Of magnetic property

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Signal Processing (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)

Abstract

터널현미경, 원자력 현미경등 표면미소부 형상이나 국소전자상태 또는 국소원자핵 상태를 관찰 계측하는 프로브현이경에 적용해서 유효한 기술에 관한 것으로써. 테스트시료 표면의 원자스케일 미소부로부터의 원자스핀, 핵자기모먼트, 핵4중극모먼트등이 물성정보를 고감도로 계측하기 위해, 원자력 현미경의 프로브(2)를 테스트시료(1)의 표면에 접근시키고, 테스트시료(1)에는 자계발생코일(27) 및 자로(22)~(26)에 의해 자계를, 또 코일(16), (17)에 의해서 고주파전자계를 각각 인가하고, 이 고주파전자계에 공명하는 테스트시료(1)의 표면에 존재하는 원자로부터의 신호를 프로브(2)에 의해 검출한다.
이러한 장치에 의해, 물성정보를 고감도로 계측할 수 있게 된다.

Description

미소부 물성정보 측정장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제2도는 본 발명의 실시예의 개략도,
제5도는 본 발명의 제4의 실시예의 장치 구성도,
제 6도는 본 발명의 제 5의 실시예의 개략도.

Claims (12)

  1. 캔틸레버, 적어도 선단표면의 일부가 도전물로 구성되어 상기 캔틸레버에 마련된 프로브, 캔틸레버의 변위를 검출해서 소정의 위치로 제어하는 서보제어수단 및 시료에 정자계와 고주파전자계를 부여하는 공명 신호발생기를 포함하는 것을 특징으로 하는 미소부 물성정보 측정장치.
  2. 프로브, 상기 프로브와 시료사이에 터널전류를 흐르게하여 프로브의 위치를 제어하는 서보회로, 시료에 정자계와 고주파전계를 인가해서 공명신호를 발생하는 수단 및 시료와 프로브의 간극에 있어서의 검출대상으로써 터널전류 및 공명신호중 어느 것인가를 선택하는 전환수단을 포함하는 것을 특징으로 하는 미소부 물성정보 측정장치.
  3. 제 2항에 있어서, 상기 전환수단은 프로브측과 고주파전계공급측에 마련한 것을 특징으로 하는 미소부 물성정보 측정장치.
  4. 제3항에 있어서, 상기 전환수단은 프로브측과 고주파전계 공급측에서 동기해서 작동하는 것을 특징으로 하는 미소부 물성정보 측정장치.
  5. 프로브현미경의 금속 프로브 또는 금속을 피복한 프로브에 의해 테스트시료의 미소부의 전자스핀, 핵 자기모먼트 또는 핵4중극모먼트의 고주파전자계에 의한 공명신호에 관한 물성정보를 고주파신호로써 계측하는 것을 특징으로 하는 미소부 물성정보 측정장치.
  6. 제5항에 있어서, 상기 테스트시료에 대해서 자계를 인가하는 자계인가수단을 포함하는 것을 특징으로 하는 미소부 물성정보 측정장치.
  7. 제5항 또는 제 7항에 있어서, 상기 테스트시료를 냉각하는 냉각수단을 포함하는 것을 특징으로 하는 미소부 물성정보 측정장치
  8. 제5~제7항에 있어서, 상기 물성정보를 상기 프로브현미경의 프로브신호로써 계측하는 것을 특징으로 하는 미소부 물성정보 측정장치.
  9. 제5~제8항에 있어서, 상기 테스트시료가 진공중에 유지되고, 진공분위기중에서 상기 물성정보의 계측이 실행되는 것을 특징으로 하는 미소부 물성정보 측정장치.
  10. 제5~제8항에 있어서, 상기 테스트시료가 액체중에 유지되고 , 액체중에서 상기 물성정보의 계측이 실행되는 것을 특징으로 하는 미소부 물성정보 측정장치.
  11. 제6항에 있어서, 상기 자계인가수단중 상기 테스트시료에 직접 자계를 인가하는 자극부분은 진공중에 있고, 상기 자계를 발생하는 코일부분은 진공밖에 있는 것을 특징으로 하는 미소부 물성정보 측정장치.
  12. 제11항에 있어서, 상기 자극부분과 상기 코일부분은 서로 분할, 분리하는 것이 가능한 것을 특징으로 하는 미소부 물성정보 측정장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019940025036A 1993-10-04 1994-09-30 미소부 물성정보 측정장치 KR950012094A (ko)

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JP93-248231 1993-10-04
JP24823193 1993-10-04

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US (1) US5585722A (ko)
EP (1) EP0648999B1 (ko)
KR (1) KR950012094A (ko)
DE (1) DE69416563T2 (ko)

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DE69416563D1 (de) 1999-03-25
US5585722A (en) 1996-12-17
EP0648999A1 (en) 1995-04-19
EP0648999B1 (en) 1999-02-17
DE69416563T2 (de) 1999-09-23

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