KR20040053375A - 외관검사장치 - Google Patents
외관검사장치 Download PDFInfo
- Publication number
- KR20040053375A KR20040053375A KR10-2004-7008035A KR20047008035A KR20040053375A KR 20040053375 A KR20040053375 A KR 20040053375A KR 20047008035 A KR20047008035 A KR 20047008035A KR 20040053375 A KR20040053375 A KR 20040053375A
- Authority
- KR
- South Korea
- Prior art keywords
- illumination light
- light source
- reflecting
- optical system
- reflection
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPJP-P-2000-00253924 | 2000-08-24 | ||
| JP2000253924 | 2000-08-24 | ||
| PCT/JP2001/007216 WO2002016916A1 (fr) | 2000-08-24 | 2001-08-23 | Projecteur pour controle d'aspect |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020027004474A Division KR20020065480A (ko) | 2000-08-24 | 2001-08-23 | 외관검사용 투광장치 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20040053375A true KR20040053375A (ko) | 2004-06-23 |
Family
ID=18742953
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR10-2004-7008035A KR20040053375A (ko) | 2000-08-24 | 2001-08-23 | 외관검사장치 |
| KR1020027004474A KR20020065480A (ko) | 2000-08-24 | 2001-08-23 | 외관검사용 투광장치 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020027004474A KR20020065480A (ko) | 2000-08-24 | 2001-08-23 | 외관검사용 투광장치 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP4383047B2 (ja) |
| KR (2) | KR20040053375A (ja) |
| CN (2) | CN1272624C (ja) |
| TW (1) | TW514725B (ja) |
| WO (1) | WO2002016916A1 (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100834853B1 (ko) * | 2007-03-27 | 2008-06-03 | 호서대학교 산학협력단 | 디스플레이 장치용 대형 유리판의 검사를 위한 조명 장치 |
| KR101032079B1 (ko) * | 2004-11-18 | 2011-05-02 | 엘아이지에이디피 주식회사 | 기판 검사 장치 |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100508190B1 (ko) * | 2003-11-11 | 2005-08-17 | 주식회사 에이디피엔지니어링 | 대형기판 검사용 조명장치 |
| TW200614412A (en) * | 2004-09-27 | 2006-05-01 | Olympus Corp | Macroscopic inspection apparatus and macroscopic inspection method |
| JP4633499B2 (ja) * | 2005-02-28 | 2011-02-16 | オリンパス株式会社 | 外観検査装置及び外観検査方法 |
| CN100590487C (zh) * | 2007-06-12 | 2010-02-17 | 友达光电股份有限公司 | 平板处理设备 |
| JP2011175735A (ja) * | 2008-06-27 | 2011-09-08 | Abel Systems Inc | 光加算装置 |
| CN102778461A (zh) * | 2012-08-21 | 2012-11-14 | 深圳市华星光电技术有限公司 | 液晶显示器中玻璃基板的检测方法及检测装置 |
| CN103868938A (zh) * | 2012-12-17 | 2014-06-18 | 中国振华集团永光电子有限公司 | Led模块的灌装质量检测方法及装置 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09106705A (ja) * | 1995-10-11 | 1997-04-22 | Mitsubishi Electric Corp | 光源装置及びこれを用いた投写型表示装置 |
| JP3625953B2 (ja) * | 1996-04-03 | 2005-03-02 | オリンパス株式会社 | 外観検査用投光装置 |
| JP4576006B2 (ja) * | 1998-09-21 | 2010-11-04 | オリンパス株式会社 | 外観検査用投光装置 |
-
2001
- 2001-08-23 CN CNB01802520XA patent/CN1272624C/zh not_active Expired - Fee Related
- 2001-08-23 JP JP2002521961A patent/JP4383047B2/ja not_active Expired - Fee Related
- 2001-08-23 KR KR10-2004-7008035A patent/KR20040053375A/ko active Search and Examination
- 2001-08-23 WO PCT/JP2001/007216 patent/WO2002016916A1/ja not_active Application Discontinuation
- 2001-08-23 CN CNA2004100578198A patent/CN1645115A/zh active Pending
- 2001-08-23 KR KR1020027004474A patent/KR20020065480A/ko active Search and Examination
- 2001-08-24 TW TW090120969A patent/TW514725B/zh not_active IP Right Cessation
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101032079B1 (ko) * | 2004-11-18 | 2011-05-02 | 엘아이지에이디피 주식회사 | 기판 검사 장치 |
| KR100834853B1 (ko) * | 2007-03-27 | 2008-06-03 | 호서대학교 산학협력단 | 디스플레이 장치용 대형 유리판의 검사를 위한 조명 장치 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4383047B2 (ja) | 2009-12-16 |
| CN1388897A (zh) | 2003-01-01 |
| TW514725B (en) | 2002-12-21 |
| KR20020065480A (ko) | 2002-08-13 |
| WO2002016916A1 (fr) | 2002-02-28 |
| CN1272624C (zh) | 2006-08-30 |
| CN1645115A (zh) | 2005-07-27 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A107 | Divisional application of patent | ||
| A201 | Request for examination | ||
| PA0104 | Divisional application for international application |
Comment text: Divisional Application for International Patent Patent event code: PA01041R01D Patent event date: 20040527 |
|
| PA0201 | Request for examination | ||
| PG1501 | Laying open of application | ||
| E902 | Notification of reason for refusal | ||
| PE0902 | Notice of grounds for rejection |
Comment text: Notification of reason for refusal Patent event date: 20040906 Patent event code: PE09021S01D |
|
| AMND | Amendment | ||
| E902 | Notification of reason for refusal | ||
| PE0902 | Notice of grounds for rejection |
Comment text: Notification of reason for refusal Patent event date: 20050506 Patent event code: PE09021S01D |
|
| AMND | Amendment | ||
| E601 | Decision to refuse application | ||
| PE0601 | Decision on rejection of patent |
Patent event date: 20051230 Comment text: Decision to Refuse Application Patent event code: PE06012S01D Patent event date: 20050506 Comment text: Notification of reason for refusal Patent event code: PE06011S01I Patent event date: 20040906 Comment text: Notification of reason for refusal Patent event code: PE06011S01I |
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| J201 | Request for trial against refusal decision | ||
| PJ0201 | Trial against decision of rejection |
Patent event date: 20060131 Comment text: Request for Trial against Decision on Refusal Patent event code: PJ02012R01D Patent event date: 20051230 Comment text: Decision to Refuse Application Patent event code: PJ02011S01I Appeal kind category: Appeal against decision to decline refusal Decision date: 20070531 Appeal identifier: 2006101000868 Request date: 20060131 |
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| AMND | Amendment | ||
| PB0901 | Examination by re-examination before a trial |
Comment text: Amendment to Specification, etc. Patent event date: 20060217 Patent event code: PB09011R02I Comment text: Request for Trial against Decision on Refusal Patent event date: 20060131 Patent event code: PB09011R01I Comment text: Amendment to Specification, etc. Patent event date: 20050805 Patent event code: PB09011R02I Comment text: Amendment to Specification, etc. Patent event date: 20041105 Patent event code: PB09011R02I |
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| E801 | Decision on dismissal of amendment | ||
| PE0801 | Dismissal of amendment |
Patent event code: PE08012E01D Comment text: Decision on Dismissal of Amendment Patent event date: 20060320 Patent event code: PE08011R01I Comment text: Amendment to Specification, etc. Patent event date: 20060217 Patent event code: PE08011R01I Comment text: Amendment to Specification, etc. Patent event date: 20050805 Patent event code: PE08011R01I Comment text: Amendment to Specification, etc. Patent event date: 20041105 |
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| B601 | Maintenance of original decision after re-examination before a trial | ||
| PB0601 | Maintenance of original decision after re-examination before a trial | ||
| J301 | Trial decision |
Free format text: TRIAL DECISION FOR APPEAL AGAINST DECISION TO DECLINE REFUSAL REQUESTED 20060131 Effective date: 20070531 |
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| PJ1301 | Trial decision |
Patent event code: PJ13011S01D Patent event date: 20070531 Comment text: Trial Decision on Objection to Decision on Refusal Appeal kind category: Appeal against decision to decline refusal Request date: 20060131 Decision date: 20070531 Appeal identifier: 2006101000868 |