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TW200614412A - Macroscopic inspection apparatus and macroscopic inspection method - Google Patents

Macroscopic inspection apparatus and macroscopic inspection method

Info

Publication number
TW200614412A
TW200614412A TW094133013A TW94133013A TW200614412A TW 200614412 A TW200614412 A TW 200614412A TW 094133013 A TW094133013 A TW 094133013A TW 94133013 A TW94133013 A TW 94133013A TW 200614412 A TW200614412 A TW 200614412A
Authority
TW
Taiwan
Prior art keywords
substrate
holder
macroscopic inspection
macroscopic
floating
Prior art date
Application number
TW094133013A
Other languages
Chinese (zh)
Inventor
Hiroyuki Okahira
Nobuo Fujisaki
Hiroshi Kato
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Publication of TW200614412A publication Critical patent/TW200614412A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nonlinear Science (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Health & Medical Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Liquid Crystal (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

This macroscopic inspection apparatus includes: a substrate holder for holding a substrate to be inspected; a macroscopic lightening optical system for irradiating an irradiation light onto the substrate; a substrate driving device for supporting the substrate, and for controlling a posture of the substrate while the substrate is irradiated by the irradiation light; a substrate transferring device for transferring the substrate to the substrate holder and for receiving the substrate from the substrate holder; a substrate floating device for floating the substrate by blowing air towards the substrate; a substrate positioning device for positioning the substrate to a reference position on the substrate holder while the substrate is floated by the substrate floating device; a substrate fixation device for fixing the substrate positioned by the substrate positioning device, onto the substrate holder.
TW094133013A 2004-09-27 2005-09-23 Macroscopic inspection apparatus and macroscopic inspection method TW200614412A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2004279991 2004-09-27
JP2004279992 2004-09-27
JP2004279990 2004-09-27

Publications (1)

Publication Number Publication Date
TW200614412A true TW200614412A (en) 2006-05-01

Family

ID=36118849

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094133013A TW200614412A (en) 2004-09-27 2005-09-23 Macroscopic inspection apparatus and macroscopic inspection method

Country Status (5)

Country Link
JP (1) JP4729499B2 (en)
KR (1) KR100791132B1 (en)
CN (1) CN1906476B (en)
TW (1) TW200614412A (en)
WO (1) WO2006035703A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI416095B (en) * 2006-09-11 2013-11-21 Olympus Corp Substrate inspection apparatus

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5553532B2 (en) * 2009-06-04 2014-07-16 パナソニック株式会社 Optical inspection device
JP2011141127A (en) * 2010-01-05 2011-07-21 Avanstrate Taiwan Inc Visual inspection method and visual inspection device for defect part of glass plate
KR101367910B1 (en) * 2011-12-30 2014-02-28 엘아이지에이디피 주식회사 Substrate Aligner and Substrate Inspecting System With the Same
CN102591044A (en) * 2012-01-12 2012-07-18 北京凌云光视数字图像技术有限公司 TFT (thin film transistor) liquid crystal screen quality detection method
CN102540515B (en) * 2012-01-12 2015-07-08 北京凌云光视数字图像技术有限公司 Quality detection system for thin film transistor (TFT) liquid crystal display screen
KR102177156B1 (en) 2014-03-10 2020-11-10 삼성전자주식회사 robot and substrate processing apparatus including the same
CN106198570B (en) * 2016-08-15 2019-02-22 武汉华星光电技术有限公司 A kind of substrate detection apparatus
CN106770364A (en) * 2017-01-26 2017-05-31 江苏东旭亿泰智能装备有限公司 Substrate positioning mechanism, macro inspection apparatus and macro inspection method
CN106918934A (en) * 2017-03-27 2017-07-04 武汉华星光电技术有限公司 Substrate macro -graph machine
WO2018194022A1 (en) * 2017-04-20 2018-10-25 日本電気硝子株式会社 Glass plate production method and production apparatus
CN108613990A (en) * 2018-07-13 2018-10-02 江苏东旭亿泰智能装备有限公司 A kind of microcosmic and compound check machine of macroscopic view
CN109192673B (en) * 2018-08-27 2021-09-17 苏州精濑光电有限公司 Wafer detection method
WO2025070260A1 (en) * 2023-09-29 2025-04-03 吉野石膏株式会社 Sampling apparatus, apparatus for manufacturing plate member, and apparatus for manufacturing gypsum building material

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2807905B2 (en) * 1989-09-14 1998-10-08 日立電子エンジニアリング株式会社 Substrate chuck mechanism
JP3264276B2 (en) * 1991-05-09 2002-03-11 株式会社日立製作所 Method for detecting nucleic acid fragment molecular weight separation pattern
JP2001194312A (en) * 1999-10-25 2001-07-19 Olympus Optical Co Ltd Holder mechanism for macro-inspection
KR20020065480A (en) * 2000-08-24 2002-08-13 올림파스 고가꾸 고교 가부시키가이샤 Floodlight for appearance inspection
JP2003302346A (en) * 2002-04-12 2003-10-24 Hitachi Electronics Eng Co Ltd Surface inspection device for sheet work

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI416095B (en) * 2006-09-11 2013-11-21 Olympus Corp Substrate inspection apparatus

Also Published As

Publication number Publication date
KR100791132B1 (en) 2008-01-03
JP4729499B2 (en) 2011-07-20
KR20070037563A (en) 2007-04-05
CN1906476B (en) 2010-10-06
CN1906476A (en) 2007-01-31
WO2006035703A1 (en) 2006-04-06
JPWO2006035703A1 (en) 2008-05-15

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