KR100976911B1 - 유체 이송 장치 - Google Patents
유체 이송 장치 Download PDFInfo
- Publication number
- KR100976911B1 KR100976911B1 KR1020080084343A KR20080084343A KR100976911B1 KR 100976911 B1 KR100976911 B1 KR 100976911B1 KR 1020080084343 A KR1020080084343 A KR 1020080084343A KR 20080084343 A KR20080084343 A KR 20080084343A KR 100976911 B1 KR100976911 B1 KR 100976911B1
- Authority
- KR
- South Korea
- Prior art keywords
- valve
- recess structure
- valve seat
- actuator
- pressure cavity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000012530 fluid Substances 0.000 title claims abstract description 113
- 238000012546 transfer Methods 0.000 title claims abstract description 62
- 239000012528 membrane Substances 0.000 claims abstract description 79
- 238000007789 sealing Methods 0.000 claims description 55
- 238000000034 method Methods 0.000 claims description 18
- 239000010410 layer Substances 0.000 claims description 10
- 229910052751 metal Inorganic materials 0.000 claims description 10
- 239000002184 metal Substances 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 5
- 239000007769 metal material Substances 0.000 claims description 4
- 229920000642 polymer Polymers 0.000 claims description 3
- 239000002356 single layer Substances 0.000 claims description 3
- 230000006835 compression Effects 0.000 description 13
- 238000007906 compression Methods 0.000 description 13
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 12
- 239000010935 stainless steel Substances 0.000 description 10
- 229910001220 stainless steel Inorganic materials 0.000 description 10
- 239000004642 Polyimide Substances 0.000 description 7
- 238000005530 etching Methods 0.000 description 7
- 238000005192 partition Methods 0.000 description 7
- 238000000206 photolithography Methods 0.000 description 7
- 229920001721 polyimide Polymers 0.000 description 7
- 238000005323 electroforming Methods 0.000 description 6
- 229910052759 nickel Inorganic materials 0.000 description 6
- 229920002120 photoresistant polymer Polymers 0.000 description 6
- 238000012545 processing Methods 0.000 description 6
- 230000005684 electric field Effects 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- -1 Polypropylene Polymers 0.000 description 4
- 238000004891 communication Methods 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 238000003754 machining Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- 229910000881 Cu alloy Inorganic materials 0.000 description 2
- 229920000089 Cyclic olefin copolymer Polymers 0.000 description 2
- 239000004713 Cyclic olefin copolymer Substances 0.000 description 2
- 229910000990 Ni alloy Inorganic materials 0.000 description 2
- 239000002033 PVDF binder Substances 0.000 description 2
- 239000004721 Polyphenylene oxide Substances 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- 229920010524 Syndiotactic polystyrene Polymers 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 229920000840 ethylene tetrafluoroethylene copolymer Polymers 0.000 description 2
- 229920001903 high density polyethylene Polymers 0.000 description 2
- 239000004700 high-density polyethylene Substances 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 229920001684 low density polyethylene Polymers 0.000 description 2
- 239000004702 low-density polyethylene Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229920000620 organic polymer Polymers 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 229920002492 poly(sulfone) Polymers 0.000 description 2
- 229920001707 polybutylene terephthalate Polymers 0.000 description 2
- 229920006324 polyoxymethylene Polymers 0.000 description 2
- 229920006380 polyphenylene oxide Polymers 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229920010126 Linear Low Density Polyethylene (LLDPE) Polymers 0.000 description 1
- 229930182556 Polyacetal Natural products 0.000 description 1
- 229920000265 Polyparaphenylene Polymers 0.000 description 1
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 1
- 229920000122 acrylonitrile butadiene styrene Polymers 0.000 description 1
- 239000004676 acrylonitrile butadiene styrene Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000001523 electrospinning Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/10—Valves; Arrangement of valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2210/00—Working fluid
- F05B2210/10—Kind or type
- F05B2210/11—Kind or type liquid, i.e. incompressible
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2260/00—Function
- F05B2260/60—Fluid transfer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S417/00—Pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2007101472391A CN101377192B (zh) | 2007-08-30 | 2007-08-30 | 流体输送装置 |
| CN200710147239.1 | 2007-08-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20090023210A KR20090023210A (ko) | 2009-03-04 |
| KR100976911B1 true KR100976911B1 (ko) | 2010-08-18 |
Family
ID=40052135
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020080084343A Active KR100976911B1 (ko) | 2007-08-30 | 2008-08-28 | 유체 이송 장치 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20090060750A1 (de) |
| EP (1) | EP2031248B1 (de) |
| JP (1) | JP4947601B2 (de) |
| KR (1) | KR100976911B1 (de) |
| CN (1) | CN101377192B (de) |
Families Citing this family (61)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB0224986D0 (en) | 2002-10-28 | 2002-12-04 | Smith & Nephew | Apparatus |
| GB0325129D0 (en) | 2003-10-28 | 2003-12-03 | Smith & Nephew | Apparatus in situ |
| EP1905465B2 (de) | 2006-09-28 | 2013-11-27 | Smith & Nephew, Inc. | Tragbares Wundtherapiesystem |
| GB0723855D0 (en) | 2007-12-06 | 2008-01-16 | Smith & Nephew | Apparatus and method for wound volume measurement |
| US8646479B2 (en) * | 2010-02-03 | 2014-02-11 | Kci Licensing, Inc. | Singulation of valves |
| US9096313B2 (en) * | 2010-03-23 | 2015-08-04 | The Florida State University Research Foundation, Inc. | High frequency pulsed microjet actuation |
| GB201015656D0 (en) | 2010-09-20 | 2010-10-27 | Smith & Nephew | Pressure control apparatus |
| CN102444566B (zh) * | 2010-10-12 | 2014-07-16 | 研能科技股份有限公司 | 流体输送装置 |
| EP2698107B1 (de) | 2011-04-11 | 2021-07-14 | Murata Manufacturing Co., Ltd. | Ventil und flüssigkeits-steuervorrichtung |
| CN103648543A (zh) * | 2011-05-06 | 2014-03-19 | 赛诺菲-安万特德国有限公司 | 用于刚性材料应用的可弯曲阀几何形状 |
| CN102865215A (zh) * | 2011-07-08 | 2013-01-09 | 研能科技股份有限公司 | 电能转换机械能的流体输送装置 |
| US9084845B2 (en) | 2011-11-02 | 2015-07-21 | Smith & Nephew Plc | Reduced pressure therapy apparatuses and methods of using same |
| JP5803641B2 (ja) * | 2011-12-09 | 2015-11-04 | オムロンヘルスケア株式会社 | 電子血圧計 |
| DE102012202103A1 (de) | 2012-02-13 | 2013-08-14 | Robert Bosch Gmbh | Druckausgleichselement mit einer Membran, Gehäuse, Batteriezellenmodul sowie Kraftfahrzeug |
| US9427505B2 (en) | 2012-05-15 | 2016-08-30 | Smith & Nephew Plc | Negative pressure wound therapy apparatus |
| CN104235438B (zh) * | 2013-06-24 | 2017-03-29 | 研能科技股份有限公司 | 微型阀门装置 |
| FR3016811A1 (fr) * | 2014-01-24 | 2015-07-31 | Saint Gobain Performance Plast | Recipient-melangeur |
| FR3021074B1 (fr) * | 2014-05-14 | 2016-05-27 | Saint Gobain Performance Plastics France | Pompe a membrane |
| CN105618318B (zh) * | 2014-10-31 | 2018-11-06 | 研能科技股份有限公司 | 喷孔片模块 |
| CN105618317B (zh) * | 2014-10-31 | 2018-11-16 | 研能科技股份有限公司 | 喷孔片模块 |
| JP6725529B2 (ja) | 2014-12-22 | 2020-07-22 | スミス アンド ネフュー ピーエルシーＳｍｉｔｈ ＆ Ｎｅｐｈｅｗ Ｐｕｂｌｉｃ Ｌｉｍｉｔｅｄ Ｃｏｍｐａｎｙ | 陰圧閉鎖療法の装置および方法 |
| DE102015224624B3 (de) * | 2015-12-08 | 2017-04-06 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Freistrahldosiersystem zur Verabreichung eines Fluids in oder unter die Haut |
| US10584695B2 (en) | 2016-01-29 | 2020-03-10 | Microjet Technology Co., Ltd. | Miniature fluid control device |
| EP3203079B1 (de) | 2016-01-29 | 2021-05-19 | Microjet Technology Co., Ltd | Piezoelektrischer aktuator |
| US10451051B2 (en) | 2016-01-29 | 2019-10-22 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
| US10487820B2 (en) | 2016-01-29 | 2019-11-26 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
| US10388849B2 (en) | 2016-01-29 | 2019-08-20 | Microjet Technology Co., Ltd. | Piezoelectric actuator |
| EP3203081B1 (de) | 2016-01-29 | 2021-06-16 | Microjet Technology Co., Ltd | Miniaturfluidsteuerungsvorrichtung |
| US10378529B2 (en) | 2016-01-29 | 2019-08-13 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
| US10615329B2 (en) | 2016-01-29 | 2020-04-07 | Microjet Technology Co., Ltd. | Piezoelectric actuator |
| US10529911B2 (en) | 2016-01-29 | 2020-01-07 | Microjet Technology Co., Ltd. | Piezoelectric actuator |
| US10371136B2 (en) | 2016-01-29 | 2019-08-06 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
| EP3203076B1 (de) | 2016-01-29 | 2021-05-12 | Microjet Technology Co., Ltd | Miniaturfluidsteuerungsvorrichtung |
| DE102016115016A1 (de) * | 2016-08-12 | 2018-02-15 | Plan Optik Ag | Mikropumpe und Verfahren zur Herstellung einer Mikropumpe |
| US10683861B2 (en) | 2016-11-10 | 2020-06-16 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
| US10655620B2 (en) | 2016-11-10 | 2020-05-19 | Microjet Technology Co., Ltd. | Miniature fluid control device |
| CN108071580A (zh) * | 2016-11-10 | 2018-05-25 | 研能科技股份有限公司 | 微型气压动力装置 |
| US10746169B2 (en) | 2016-11-10 | 2020-08-18 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
| CN108071578A (zh) * | 2016-11-10 | 2018-05-25 | 研能科技股份有限公司 | 微型气压动力装置 |
| CN108331741A (zh) * | 2017-01-20 | 2018-07-27 | 研能科技股份有限公司 | 流体输送装置 |
| TWI618858B (zh) * | 2017-02-24 | 2018-03-21 | 研能科技股份有限公司 | 流體輸送裝置 |
| TWI627354B (zh) * | 2017-05-31 | 2018-06-21 | 研能科技股份有限公司 | 流體輸送裝置 |
| TWI634523B (zh) * | 2017-07-10 | 2018-09-01 | 研能科技股份有限公司 | 具致動傳感模組之電子裝置 |
| CN109578687B (zh) * | 2017-09-29 | 2021-07-23 | 研能科技股份有限公司 | 流体系统 |
| CN109578688B (zh) * | 2017-09-29 | 2021-07-23 | 研能科技股份有限公司 | 流体系统 |
| CN109578686B (zh) * | 2017-09-29 | 2021-07-27 | 研能科技股份有限公司 | 流体系统 |
| CN109578689B (zh) * | 2017-09-29 | 2021-07-27 | 研能科技股份有限公司 | 流体系统 |
| CN109805939B (zh) * | 2017-11-20 | 2022-05-10 | 研能科技股份有限公司 | 血糖检测装置 |
| TWI653968B (zh) | 2017-11-20 | 2019-03-21 | 研能科技股份有限公司 | 血糖偵測裝置 |
| CN109805940B (zh) * | 2017-11-20 | 2022-07-12 | 研能科技股份有限公司 | 血糖监测控制系统 |
| CN110902644B (zh) * | 2018-09-17 | 2023-01-10 | 研能科技股份有限公司 | 微机电泵的制造方法 |
| CN110905785B (zh) * | 2018-09-17 | 2023-01-10 | 研能科技股份有限公司 | 微机电泵的制造方法 |
| WO2020062245A1 (zh) * | 2018-09-30 | 2020-04-02 | 深圳市大疆软件科技有限公司 | 隔膜泵及农业无人机 |
| CN208950819U (zh) * | 2018-09-30 | 2019-06-07 | 深圳市大疆软件科技有限公司 | 隔膜泵及农业无人机 |
| WO2020062244A1 (zh) * | 2018-09-30 | 2020-04-02 | 深圳市大疆软件科技有限公司 | 隔膜泵及农业无人机 |
| WO2021072729A1 (en) * | 2019-10-18 | 2021-04-22 | Healtell (Guangzhou) Medical Technology Co., Ltd. | Microfluidic chip pumps and methods thereof |
| TWI736356B (zh) * | 2020-07-10 | 2021-08-11 | 研能科技股份有限公司 | 鼻塞過濾裝置組 |
| TWI736366B (zh) * | 2020-07-22 | 2021-08-11 | 研能科技股份有限公司 | 鼻塞過濾裝置組 |
| TW202217146A (zh) * | 2020-10-20 | 2022-05-01 | 研能科技股份有限公司 | 薄型氣體傳輸裝置 |
| CN116658400B (zh) * | 2023-08-01 | 2023-09-29 | 常州威图流体科技有限公司 | 一种流体输送装置、液冷散热模组及微流控芯片 |
| CN119565870B (zh) * | 2025-02-08 | 2025-05-27 | 沈阳芯源微电子设备股份有限公司 | 一种适用于并联管路的控制系统及方法 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050074340A1 (en) | 2003-10-01 | 2005-04-07 | Agency For Science, Technology And Research | Micro-pump |
| JP2006046272A (ja) * | 2004-08-06 | 2006-02-16 | Alps Electric Co Ltd | 圧電ポンプ及びその製造方法、並びに逆止弁構造 |
| JP2006063960A (ja) * | 2004-08-30 | 2006-03-09 | Star Micronics Co Ltd | 逆止弁及びダイヤフラムポンプ |
| KR20060040030A (ko) * | 2004-11-04 | 2006-05-10 | 삼성전자주식회사 | 일방향 셔터를 구비한 압전 방식의 잉크젯 프린트헤드 |
Family Cites Families (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2928409A (en) * | 1955-01-31 | 1960-03-15 | Textron Inc | Non-magnetic electro hydraulic transfer valve |
| US4181477A (en) * | 1978-03-02 | 1980-01-01 | Pace Incorporated | Pump valve |
| US4573888A (en) * | 1983-09-09 | 1986-03-04 | Aspen Laboratories, Inc. | Fluid pump |
| DE3725589C2 (de) * | 1987-08-01 | 1996-05-23 | Staiger Steuerungstech | Membranventil |
| JPH03217672A (ja) * | 1990-01-23 | 1991-09-25 | Seiko Epson Corp | マイクロポンプの吐出量制御方法 |
| JPH0450485A (ja) * | 1990-06-20 | 1992-02-19 | Seiko Epson Corp | マイクロポンプにおける検出装置 |
| JPH0434477U (de) * | 1990-07-19 | 1992-03-23 | ||
| DE4332720C2 (de) * | 1993-09-25 | 1997-02-13 | Karlsruhe Forschzent | Mikromembranpumpe |
| DE4412668C2 (de) * | 1994-04-13 | 1998-12-03 | Knf Flodos Ag | Pumpe |
| DE4446170A1 (de) * | 1994-12-23 | 1996-06-27 | Bosch Gmbh Robert | Sperrventilanordnung für eine Pumpvorrichtung |
| US6227809B1 (en) * | 1995-03-09 | 2001-05-08 | University Of Washington | Method for making micropumps |
| DE19719862A1 (de) * | 1997-05-12 | 1998-11-19 | Fraunhofer Ges Forschung | Mikromembranpumpe |
| DE19720482C5 (de) * | 1997-05-16 | 2006-01-26 | INSTITUT FüR MIKROTECHNIK MAINZ GMBH | Mikromembranpumpe |
| WO2000029770A2 (en) * | 1998-11-16 | 2000-05-25 | California Institute Of Technology | Parylene micro check valve and fabrication method thereof |
| JP3740673B2 (ja) * | 1999-11-10 | 2006-02-01 | 株式会社日立製作所 | ダイヤフラムポンプ |
| US6334761B1 (en) * | 2000-03-02 | 2002-01-01 | California Institute Of Technology | Check-valved silicon diaphragm pump and method of fabricating the same |
| US6604915B1 (en) * | 2002-03-20 | 2003-08-12 | Csa Engineering, Inc. | Compact, high efficiency, smart material actuated hydraulic pump |
| DE10238585B3 (de) * | 2002-08-22 | 2004-04-22 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Zweiteiliges Fluidmodul |
| EP1403519A1 (de) * | 2002-09-27 | 2004-03-31 | Novo Nordisk A/S | Membranpumpe mit dehnbarer Pumpenmembran |
| US20040120836A1 (en) * | 2002-12-18 | 2004-06-24 | Xunhu Dai | Passive membrane microvalves |
| CN2706605Y (zh) * | 2003-05-06 | 2005-06-29 | 王勤 | 带压力互锁的微量薄膜泵 |
| JP4367086B2 (ja) * | 2003-10-24 | 2009-11-18 | セイコーエプソン株式会社 | ポンプの駆動方法 |
| JP4279662B2 (ja) * | 2003-12-26 | 2009-06-17 | アルプス電気株式会社 | 小型ポンプ |
| JP4036834B2 (ja) * | 2004-01-21 | 2008-01-23 | 松下電器産業株式会社 | マイクロポンプ用逆止弁の製造方法 |
| TWI256374B (en) * | 2004-10-12 | 2006-06-11 | Ind Tech Res Inst | PDMS valve-less micro pump structure and method for producing the same |
| JP4544114B2 (ja) * | 2004-12-22 | 2010-09-15 | パナソニック電工株式会社 | ダイヤフラムポンプ液体吐出制御装置 |
| US7717682B2 (en) * | 2005-07-13 | 2010-05-18 | Purity Solutions Llc | Double diaphragm pump and related methods |
| US8256465B2 (en) * | 2006-05-01 | 2012-09-04 | Google Inc. | Microfluidic valve structure |
| JP2008180161A (ja) * | 2007-01-25 | 2008-08-07 | Star Micronics Co Ltd | ダイヤフラムポンプ |
| JP2008180179A (ja) * | 2007-01-25 | 2008-08-07 | Star Micronics Co Ltd | ダイヤフラムポンプ |
-
2007
- 2007-08-30 CN CN2007101472391A patent/CN101377192B/zh active Active
-
2008
- 2008-08-19 US US12/222,882 patent/US20090060750A1/en not_active Abandoned
- 2008-08-20 JP JP2008211418A patent/JP4947601B2/ja active Active
- 2008-08-28 KR KR1020080084343A patent/KR100976911B1/ko active Active
- 2008-08-28 EP EP08015209.3A patent/EP2031248B1/de active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050074340A1 (en) | 2003-10-01 | 2005-04-07 | Agency For Science, Technology And Research | Micro-pump |
| JP2006046272A (ja) * | 2004-08-06 | 2006-02-16 | Alps Electric Co Ltd | 圧電ポンプ及びその製造方法、並びに逆止弁構造 |
| JP2006063960A (ja) * | 2004-08-30 | 2006-03-09 | Star Micronics Co Ltd | 逆止弁及びダイヤフラムポンプ |
| KR20060040030A (ko) * | 2004-11-04 | 2006-05-10 | 삼성전자주식회사 | 일방향 셔터를 구비한 압전 방식의 잉크젯 프린트헤드 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP2031248A2 (de) | 2009-03-04 |
| US20090060750A1 (en) | 2009-03-05 |
| KR20090023210A (ko) | 2009-03-04 |
| EP2031248A3 (de) | 2010-01-20 |
| JP2009057963A (ja) | 2009-03-19 |
| JP4947601B2 (ja) | 2012-06-06 |
| CN101377192A (zh) | 2009-03-04 |
| CN101377192B (zh) | 2012-06-13 |
| EP2031248B1 (de) | 2014-05-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR100976911B1 (ko) | 유체 이송 장치 | |
| US8105057B2 (en) | Fluid transportation device having multiple double-chamber actuating structures | |
| US20090159830A1 (en) | Fluid transportation device | |
| US20210363983A1 (en) | MIcro Pump Systems and Processing Techniques | |
| US20090242061A1 (en) | Dual-cavity fluid conveying apparatus | |
| TW200938730A (en) | Fluid transmission device capable of generating micre drop fluid | |
| TWI376456B (en) | Manufacturing method of fluid transmission device | |
| US10359036B2 (en) | Fluid transportation device | |
| US10598169B2 (en) | Fluid transportation device comprising a valve body, a valve membrane, a valve chamber seat, and an actuator each sequentially stacked within a accommodation space of an outer sleeve having a ring-shaped protrusion structure | |
| TWI398577B (zh) | 大流體輸送裝置 | |
| CN101377191B (zh) | 流体输送装置的制造方法 | |
| CN101520038B (zh) | 微液滴流体输送装置 | |
| US20190145396A1 (en) | Microelectromechanical Systems Fabricated with Roll to Roll Processing | |
| CN101520041B (zh) | 大流量流体输送装置 | |
| CN108506196B (zh) | 流体输送装置 | |
| CN101408164B (zh) | 大流量流体输送装置 | |
| TWI376455B (en) | Fluid transmission device | |
| TWI388727B (zh) | 流體閥座 | |
| CN101377193B (zh) | 大流体输送装置 | |
| CN101520035B (zh) | 流体输送装置 | |
| US20120147097A1 (en) | Micro-ejector and method of manufacturing the same | |
| Kim | An integrated electrostatic peristaltic gas micropump with active microvalves | |
| TW200938729A (en) | Fluid transmission device capable of transmitting large fluid rate |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination | ||
| PA0109 | Patent application |
Patent event code: PA01091R01D Comment text: Patent Application Patent event date: 20080828 |
|
| PA0201 | Request for examination | ||
| PG1501 | Laying open of application | ||
| E902 | Notification of reason for refusal | ||
| PE0902 | Notice of grounds for rejection |
Comment text: Notification of reason for refusal Patent event date: 20100122 Patent event code: PE09021S01D |
|
| E701 | Decision to grant or registration of patent right | ||
| PE0701 | Decision of registration |
Patent event code: PE07011S01D Comment text: Decision to Grant Registration Patent event date: 20100712 |
|
| GRNT | Written decision to grant | ||
| PR0701 | Registration of establishment |
Comment text: Registration of Establishment Patent event date: 20100812 Patent event code: PR07011E01D |
|
| PR1002 | Payment of registration fee |
Payment date: 20100812 End annual number: 3 Start annual number: 1 |
|
| PG1601 | Publication of registration | ||
| FPAY | Annual fee payment |
Payment date: 20130521 Year of fee payment: 4 |
|
| PR1001 | Payment of annual fee |
Payment date: 20130521 Start annual number: 4 End annual number: 4 |
|
| FPAY | Annual fee payment |
Payment date: 20140708 Year of fee payment: 5 |
|
| PR1001 | Payment of annual fee |
Payment date: 20140708 Start annual number: 5 End annual number: 5 |
|
| FPAY | Annual fee payment |
Payment date: 20150605 Year of fee payment: 6 |
|
| PR1001 | Payment of annual fee |
Payment date: 20150605 Start annual number: 6 End annual number: 6 |
|
| FPAY | Annual fee payment |
Payment date: 20160720 Year of fee payment: 7 |
|
| PR1001 | Payment of annual fee |
Payment date: 20160720 Start annual number: 7 End annual number: 7 |
|
| FPAY | Annual fee payment |
Payment date: 20170719 Year of fee payment: 8 |
|
| PR1001 | Payment of annual fee |
Payment date: 20170719 Start annual number: 8 End annual number: 8 |
|
| FPAY | Annual fee payment |
Payment date: 20180719 Year of fee payment: 9 |
|
| PR1001 | Payment of annual fee |
Payment date: 20180719 Start annual number: 9 End annual number: 9 |
|
| FPAY | Annual fee payment |
Payment date: 20190805 Year of fee payment: 10 |
|
| PR1001 | Payment of annual fee |
Payment date: 20190805 Start annual number: 10 End annual number: 10 |
|
| PR1001 | Payment of annual fee |
Payment date: 20230725 Start annual number: 14 End annual number: 14 |
|
| PR1001 | Payment of annual fee |
Payment date: 20240723 Start annual number: 15 End annual number: 15 |