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TWI256374B - PDMS valve-less micro pump structure and method for producing the same - Google Patents

PDMS valve-less micro pump structure and method for producing the same

Info

Publication number
TWI256374B
TWI256374B TW093130898A TW93130898A TWI256374B TW I256374 B TWI256374 B TW I256374B TW 093130898 A TW093130898 A TW 093130898A TW 93130898 A TW93130898 A TW 93130898A TW I256374 B TWI256374 B TW I256374B
Authority
TW
Taiwan
Prior art keywords
micro pump
pdms
lead
producing
same
Prior art date
Application number
TW093130898A
Other languages
Chinese (zh)
Other versions
TW200611872A (en
Inventor
Min-Sheng Liu
Chi-Chuan Wang
Bing-Chwen Yang
Yu-Ching Cheng
Wen-Jeng Chang
Original Assignee
Ind Tech Res Inst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ind Tech Res Inst filed Critical Ind Tech Res Inst
Priority to TW093130898A priority Critical patent/TWI256374B/en
Priority to US11/041,956 priority patent/US20060083639A1/en
Publication of TW200611872A publication Critical patent/TW200611872A/en
Application granted granted Critical
Publication of TWI256374B publication Critical patent/TWI256374B/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)

Abstract

A PDMS valve-less micro pump structure includes a PDMS body having a contour surface, a membrane covering the contour surface of the PDMS body, and a PZT actuator located on the membrane. The contour surface of the PDMS body to be sealed by the membrane and the PZT actuator has in series a lead-in cavity, a lead-in nozzle structure, a main cavity, a lead-out nozzle structure, and a lead-out cavity. The PZT actuator is located right above the main cavity. By providing the PDMS as a material to form the body of the micro pump, the micro pump can then be mass-produced with less cost and simpler structuring. Also, substantial elasticity and bio-compatibility for the micro pump can be achieved.
TW093130898A 2004-10-12 2004-10-12 PDMS valve-less micro pump structure and method for producing the same TWI256374B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW093130898A TWI256374B (en) 2004-10-12 2004-10-12 PDMS valve-less micro pump structure and method for producing the same
US11/041,956 US20060083639A1 (en) 2004-10-12 2005-01-26 PDMS valve-less micro pump structure and method for producing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW093130898A TWI256374B (en) 2004-10-12 2004-10-12 PDMS valve-less micro pump structure and method for producing the same

Publications (2)

Publication Number Publication Date
TW200611872A TW200611872A (en) 2006-04-16
TWI256374B true TWI256374B (en) 2006-06-11

Family

ID=36180959

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093130898A TWI256374B (en) 2004-10-12 2004-10-12 PDMS valve-less micro pump structure and method for producing the same

Country Status (2)

Country Link
US (1) US20060083639A1 (en)
TW (1) TWI256374B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8147221B2 (en) 2008-10-31 2012-04-03 National Pingtung University Of Science And Technology Electromagnetic micro-pump

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US20070085449A1 (en) * 2005-10-13 2007-04-19 Nanyang Technological University Electro-active valveless pump
US20070122299A1 (en) * 2005-11-29 2007-05-31 Chih-Yung Wen Valveless micro impedance pump
KR101033077B1 (en) * 2006-12-09 2011-05-06 가부시키가이샤 무라타 세이사쿠쇼 Piezoelectric pump
JP2008303805A (en) * 2007-06-08 2008-12-18 Alps Electric Co Ltd Diaphragm air pump
US20090050299A1 (en) * 2007-08-21 2009-02-26 Tektronix, Inc. Cooling facility for an electronic component
CN101377192B (en) * 2007-08-30 2012-06-13 研能科技股份有限公司 Fluid delivery device
CN101389200B (en) * 2007-09-14 2011-08-31 富准精密工业(深圳)有限公司 Miniature fluid cooling system and miniature fluid driving device
CN101463808B (en) * 2007-12-21 2010-12-08 研能科技股份有限公司 Fluid delivery device
AU2009347420B2 (en) * 2009-06-03 2016-02-11 The Technology Partnership Plc Fluid disc pump
EP2513953B1 (en) * 2009-12-16 2017-10-18 The Board of Trustees of the University of Illionis Electrophysiology using conformal electronics
CN102539617B (en) * 2010-12-27 2015-04-15 中国科学院大连化学物理研究所 Micro-fluidic driving pump and application thereof
CN102252666B (en) * 2011-06-21 2014-04-23 南京航空航天大学 A gyroscope based on a valveless piezoelectric pump with conical helical flow tube
CN103542956A (en) * 2013-09-29 2014-01-29 柳州市宏亿科技有限公司 Zigbee temperature sensor manufacturing method
CN104832404A (en) * 2015-05-13 2015-08-12 长春工业大学 Piezoelectric micropump based on PDMS (Polydimethylsiloxane)
CN106849747A (en) * 2017-02-28 2017-06-13 厦门大学 A kind of MEMS piezoelectric ultrasonic pumps
JP2021014787A (en) * 2017-09-28 2021-02-12 日本電産株式会社 Liquid application device
CN111692400B (en) * 2020-06-23 2022-06-07 东北电力大学 Micro valve for controlling flow velocity of micro-fluidic chip based on piezoelectric film feedback
CN113586409A (en) * 2021-06-28 2021-11-02 宁波工程学院 Valveless three-dimensional piezoelectric pump

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8147221B2 (en) 2008-10-31 2012-04-03 National Pingtung University Of Science And Technology Electromagnetic micro-pump
TWI392639B (en) * 2008-10-31 2013-04-11 Univ Nat Pingtung Sci & Tech Electromagnetic micro-pump

Also Published As

Publication number Publication date
TW200611872A (en) 2006-04-16
US20060083639A1 (en) 2006-04-20

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees