CN101377192B

CN101377192B - Fluid delivery device

Info

Publication number: CN101377192B
Application number: CN2007101472391A
Authority: CN
Inventors: 陈世昌; 郑江河; 余荣侯; 蔡志宏; 邱士哲
Original assignee: Microjet Technology Co Ltd
Current assignee: Microjet Technology Co Ltd
Priority date: 2007-08-30
Filing date: 2007-08-30
Publication date: 2012-06-13
Anticipated expiration: 2027-08-30
Also published as: KR100976911B1; JP2009057963A; JP4947601B2; EP2031248A2; CN101377192A; EP2031248B1; KR20090023210A; EP2031248A3; US20090060750A1

Abstract

The invention is a fluid delivery device, comprising: a valve body seat having an outlet passage and an inlet passage; the valve body cover body is arranged on the valve body seat; the valve body film is arranged between the valve body seat and the valve body cover body, is provided with a plurality of valve switches and comprises a first valve switch and a second valve switch; the temporary storage chambers comprise a first temporary storage chamber and a second temporary storage chamber; the vibration film is separated from the valve body cover body when the vibration film is in an unactuated state so as to form a pressure chamber; and an actuator connected to the vibration film; when the actuator is driven by voltage to bend and deform, the vibration film is linked to change the volume of the pressure chamber to generate a pressure difference so as to push fluid to flow out of the outlet channel from the inlet channel through the first valve switch, the first temporary storage chamber, the pressure chamber, the second temporary storage chamber and the second valve switch.

Description

Fluid delivery system

Technical field

The present invention relates to a kind of fluid delivery system, relate in particular to a kind of fluid delivery system that is applicable to micro-pump structure.

Background technique

In each field, no matter be industry such as medicine, computer technology, printing, the energy at present; Product all develops towards sophistication and microminiaturization direction; Wherein the fluid delivery structure that product comprised such as Micropump, sprayer, ink gun, industrial printing device are its key technology; Be with, how the mat innovation structure is broken through its technical bottleneck, is the important content of development.

See also Fig. 1 a; Its structural representation that is known micro-pump structure when start not; Known micro-pump structure 10 comprises inlet channel 13, micro-actuator 15, drive block 14, partition film 12, pressing chamber 111, substrate 11 and outlet passage 16; Wherein the definition of 12 of substrate 11 and partition film forms a pressing chamber 111, mainly is used for storaging liquid, will make that the volume of pressing chamber 111 is changed because of the deformation influence of partition film 12.

When a voltage acts on the two poles of the earth up and down of micro-actuator 15, can produce an electric field, make micro-actuator 15 under this effect of electric field, produce crooked and move to partition film 12 and pressing chamber 111 directions; Because micro-actuator 15 is arranged on the drive block 14; Therefore drive block 14 can be passed to partition film 12 with the thrust that micro-actuator 15 is produced, and makes partition film 12 also and then be extruded distortion, promptly shown in Fig. 1 b; Liquid can flow according to the direction of arrow X among the figure; Make by the liquid that are stored in the pressing chamber 111 after inlet channel 13 inflows to be squeezed, and flow to other predefined spaces, to reach the purpose of supplying with fluid via outlet passage 16.

Please consult Fig. 2 again, it is the plan view of the micro-pump structure shown in Fig. 1 a, and is as shown in the figure; The throughput direction of fluid is shown in the direction of arrow of label Y among the figure when micro-pump structure 10 starts, and inlet expands the cone structure that stream device 17 varies in size for both ends open, and the end that opening is bigger is connected with entrance channel 191; And be connected with little pressing chamber 111 with the less end of opening; Simultaneously, the expansion stream device 18 that connects pressing chamber 111 and outlet flow 192 expands stream device 17 with inlet and is provided with in the same way, and it is connected in pressing chamber 111 with the bigger end of opening; And be connected with outlet flow 192 with the less end of opening; The inlet at pressing chamber 111 two ends expands stream device 17 and outlet expansion stream device 18 is equidirectional setting owing to be connected in, thus expansion capable of using stream device two direction flow resistance different characteristic, and the harmomegathus of pressing chamber 111 volumes makes fluid produce unidirectional net flow rate; Flow in the pressing chamber 111 so that fluid can expand stream device 17 via inlet from entrance channel 191, expand stream device 18 by outlet again and flow out through outlet flow 192.

The micro-pump structure 10 of this kind incorporeity valve is easy to generate a large amount of situations that reflux of fluid, and institute thinks and impel flow rate to increase that pressing chamber 111 needs bigger compression ratio, presses to produce enough chambeies, so need expend higher cost on actuator 15.

Therefore, how to develop a kind of fluid delivery system that improves above-mentioned known technology disappearance, real in pressing for the problem of solution at present.

Summary of the invention

Main purpose of the present invention is to provide a kind of fluid delivery system; Mainly stack and form by valve block, valve body film, valve body cover, vibration film and actuator; It drives vibration film during by the actuator start and produces deformation, makes the stereomutation of the pressure chamber between between vibration film and valve body cover, to produce positive and negative pressure difference; Simultaneously; Because its folding of valve mechanism on the valve body film is swift in response, and makes pressure chamber can produce bigger fluid suction and thrust in the moment of harmomegathus, so can make fluid reach high efficiency transmission; And can effectively stop the adverse current of fluid, in the transport process of fluid, be prone to produce the phenomenon of fluid reflux in order to do the micro-pump structure that solves known technology.

For reaching above-mentioned purpose, of the present invention than the broad sense mode of execution for a kind of fluid delivery system is provided, in order to transmit fluid, it comprises: valve block, it has outlet passage and inlet channel; Valve body cover, it is arranged on the valve block; Valve body film, its thickness is substantially the same, and is arranged between valve block and the valve body cover, and has a plurality of hollow out threshold switchs, comprises first threshold switch and second threshold switch; A plurality of temporary rooms form first temporary room between valve body film and valve body cover, and between valve body film and this valve block, form second temporary room; Vibration film, its periphery is fixedly arranged on valve body cover, and when actuator state not, vibration film separates with valve body cover, forms pressure chamber with definition; And actuator, it is connected with vibration film; Wherein, When actuator receives driven and causes bending deflection; The vibration film that is connected with actuator is with interlock and the results in pressure chamber volume changes; And then produce pressure difference and promote this fluid, flow through behind first threshold switch, first temporary room, pressure chamber, second temporary room, second threshold switch by this inlet channel, flow out from outlet passage.

Description of drawings

The structural representation that Fig. 1 a is known micro-pump structure when start not.

Fig. 1 b is the structural representation of Fig. 1 a when start.

Fig. 2 is the plan view of the micro-pump structure shown in Fig. 1 a.

Fig. 3 is the structural representation of the fluid delivery system of the present invention's first preferred embodiment.

Fig. 4 is a valve block side structure schematic representation shown in Figure 3.

Fig. 5 a is the structure schematic representation of valve body cover shown in Figure 3.

Fig. 5 b is the cross-sectional view of Fig. 5 a.

Fig. 6 is a valve body film structural representation shown in Figure 3.

Fig. 7 a is the not actuator state schematic representation of the fluid delivery system of preferred embodiment of the present invention.

Fig. 7 b is pressure chamber's swelling state schematic representation of Fig. 7 a.

Fig. 7 c is pressure chamber's compressive state schematic representation of Fig. 7 b.

Fig. 8 is the manufacturing flow chart of the fluid delivery system of the present invention's second preferred embodiment.

The primary component symbol description:

Micro-pump structure: 10 substrates: 11

Pressing chamber: 111 partition film: 12

Inlet channel: 13 drive blocks: 14

Micro-actuator: 15 outlet passages: 16

Inlet expands the stream device: the stream device is expanded in 17 outlets: 18

Flow direction: X, Y direction: a, b

Fluid delivery system: 20 fluid valve bases: 201

Valve block: 21 valve body cover: 22

Valve body film: 23 actuators: 24

Lid: 25 vibration films: 241

Actuator: 242 entrance channels: 191,211

Outlet flow: 192,212 openings: 213,214

Upper surface: 210,220 outlet temporary storage cavity: 215

Lower surface: 228 inlet temporary storage cavity: 223

Inlet valve passage: 221 outlet valve passages: 222

Groove: 216,217,218,224,225,227,229

Pressure chamber: 226 seal rings: 26,27,28

Inlet valve structure: 231 outlet valve structures: 2 32

Inlet valve block: 2313 outlet valve blocks: 2323

Extension part: 2311,2321 holes: 2312,2322

S81-S89: the manufacturing process of fluid delivery system

Embodiment

Some exemplary embodiments that embody characteristic of the present invention and advantage will be described in detail in the explanation of back segment.Be understood that the present invention can have various variations on different aspects, its neither departing from the scope of the present invention, and explanation wherein and be shown in the usefulness of being used as explanation in essence, but not in order to restriction the present invention.

See also Fig. 3; It is for the structural representation of the fluid delivery system of the present invention's first preferred embodiment, and is as shown in the figure, and fluid delivery system 20 of the present invention is given birth to industry such as skill, computer technology, printing or the energy applicable to medicine; But and conveying gas or liquid; But not as limit, fluid delivery system 20 mainly is made up of valve block 21, valve body cover 22, valve body film 23, a plurality of temporary room,

actuator

24 and 25 of lids, and wherein valve block 21, valve body cover 22, valve body film 23 form a fluid valve seat 201; And between valve body cover 22 and actuator 24, form a pressure chamber 226, mainly be used for store fluid.

The assembling mode of this fluid delivery system 20 is arranged at valve body film 23 between valve block 21 and the valve body cover 22; And make valve body film 23 and valve block 21 and valve body cover 22 corresponding settings; And between valve body film 23 and valve body cover 22, form one first temporary room, and between valve body film 23 and valve block 21, form one second temporary room, and the opposite position on valve body cover 22 more is provided with actuator 24; Actuator 24 is assembled by a vibration film 241 and an actuator 242; In order to the start of driving fluid feedway 20, at last, again lid 25 is arranged at the top of actuator 24; So it stacks setting with valve block 21, valve body film 23, valve body cover 22, actuator 24 and lid 25 are corresponding in regular turn, to accomplish the assembling of fluid delivery system 20.

Wherein, valve block 21 and valve body cover 22 see also Fig. 4 and cooperate Fig. 3 for the main structure of direct fluid turnover in the fluid delivery system 20 of the present invention; Wherein Fig. 4 is the side structure schematic representation of valve block shown in Figure 3, and as shown in the figure, valve block 21 has an entrance channel 211 and an outlet flow 212; Fluid can be imported by the external world, is sent to an opening 213 of valve block 21 upper surfaces 210 via entrance channel 211, and; In present embodiment; Formed second temporary room is the outlet temporary storage cavity 215 shown in the figure between valve body film 23 and the valve block 21, but not as limit, its by the upper surface 210 of valve block 21 in producing the part depression with outlet flow 212 corresponding positions and forming; And be connected with outlet flow 212; This exports temporary storage cavity 215 in order to temporary transient store fluid, and makes this fluid be delivered to outlet passage 212 by outlet temporary storage cavity 215 via an opening 214, flows out outside the valve block 21 again.And; On valve block 21, have more a plurality of groove structures, use for a seal ring 26 (shown in Fig. 7 a) to be provided with on it, in present embodiment; Valve block 21 has the groove 216,218 around opening 213 peripheries, and is surrounded on the groove 217 of outlet temporary storage cavity 215 peripheries.

See also Fig. 5 a and cooperate Fig. 3; Wherein Fig. 5 a is the structure schematic representation of valve body cover shown in Figure 3; As shown in the figure, valve body cage 22 has a upper surface 220 and a lower surface 228, and on valve body cage 22, also has inlet valve passage 221 and the outlet valve passage 222 that runs through upper surface 220 to lower surface 228; And this inlet valve passage 221 is arranged at the opening 213 corresponding positions with valve block 21; Outlet valve passage 222 then be arranged at the outlet temporary storage cavity of valve block 21 215 in opening 214 corresponding positions, and, in present embodiment; Formed first temporary room is the inlet temporary storage cavity 223 shown in the figure between valve body film 23 and the valve body cover 22; And not as limit, in producing partly depression with inlet valve passage 221 corresponding positions and form, and it is communicated in inlet valve passage 221 by the lower surface 228 of valve body cover 22 for it.

See also Fig. 5 b, it is the cross-sectional view of Fig. 5 a, and is as shown in the figure; The upper surface 220 of valve body cover 22 is depression partly, forming a pressure chamber 226, and itself and the actuator 242 corresponding settings of actuator 24; Pressure chamber 226 is communicated in inlet temporary storage cavity 223 via inlet valve passage 221, and is connected with outlet valve passage 222 simultaneously, therefore; When actuator 242 receives voltage actuation actuator 24 epireliefs are out of shape, the volumetric expansion of build-up of pressure chamber 226 and produce Negative Pressure Difference can make fluid in inlet valve passage 221 flow to pressure chamber 226; Thereafter, after the direction of an electric field that puts on actuator 242 changes, actuator 242 will make actuator 24 concave deformation pressure chamber 226 shrink and volume reduces; Make pressure chamber 226 and the extraneous positive pressure difference that produces, impel fluid by outside the outlet valve passage 222 outflow pressure chambers 226, simultaneously in this; There is segment fluid flow can flow in inlet valve passage 221 and the inlet temporary room 223 equally; Yet because the inlet valve structure 231 (shown in Fig. 6 c) of this moment is for making the pressurized closing state, so this fluid can not produce the phenomenon that flows backwards through inlet valve block 231, as for the fluid that temporarily is stored in the inlet temporary storage cavity 223; Then receive voltage actuation again in actuator 242; Repeat to make actuator 24 again when epirelief distortion and boost pressure chamber 226 volumes, again by inlet temporary storage cavity 223 through and in the feed pressure chamber 226, to carry out the conveying of fluid to inlet valve passage 221.

In addition; Have a plurality of groove structures on the valve body cover 22 equally; With the present embodiment is example, has the groove 227 that is provided with around pressure chamber 226 at the upper surface 220 of valve body cage 22, on lower surface 228, then has around the groove 224 that is arranged at inlet temporary storage cavity 223, around groove that is arranged at outlet valve passage 222 225 and groove 229; Likewise, above-mentioned groove structure is used for a seal ring 27 (shown in Fig. 7 a) and is arranged at wherein.

See also Fig. 6 a and cooperate Fig. 3, wherein Fig. 6 a is the structural representation of valve body film shown in Figure 3, and is as shown in the figure; Valve body film 23 is mainly made with tradition processing or gold-tinted etching or laser beam machining or modes such as electroforming processing or electro discharge machining, and is the substantially the same flake structure of a thickness, has a plurality of hollow out threshold switchs on it; Comprise first threshold switch and second threshold switch, in present embodiment, first threshold switch is an inlet valve structure 231; And second threshold switch is an outlet valve structure 232, and wherein, inlet valve structure 231 has inlet valve block 2313 and a plurality of cut-out openings 2312 that is provided with around inlet valve block 2313 peripheries; In addition; Between hole 2312, have more and the extension part 2311 that is connected of inlet valve block 2313, bear one when valve body film 23 and transmit and when coming downward stress, shown in Fig. 7 c from pressure chamber 226; Inlet valve structure 231 is whole smooth on valve block 21 downwards; Entering the mouth valve block 2313 this moment can be near groove 216 upper sealing rings 26 projection, and seals up the opening 213 on the valve block 21, and its peripheral cut-

out openings

2312 and 2311 of extension parts floating being affixed on the valve block 21 of taking advantage of a situation; So therefore the closing function of inlet valve structure 231 can't flow out fluid.

And under valve body film 23 is under pressure the suction that chamber 226 volumes increase and produce; Owing to be arranged at seal rings 26 in the groove 216 of the valve block 21 valve mechanism 231 1 preparatory power (Preforce) that provided access; Thereby inlet valve block 2313 can produce the bigger tight effect of preparatory lid by the support of extension part 2311; In case non-return stream up produces displacement (shown in Fig. 6 b) when the negative pressure because of pressure chamber 226 makes inlet valve structure 231, at this moment; Fluid then can be flow to the inlet temporary storage cavity 223 of valve body cover 22 via the hole 2312 of hollow out by valve block 21; And be sent in the pressure chamber 226 via inlet temporary storage cavity 223 and inlet valve passage 221, thus, the positive/negative pressure difference that inlet valve structure 231 can produce in response to pressure chamber 226 and open rapidly or close; With the turnover of control fluid, and fluid can be back on the valve block 21.

Likewise, be positioned at another valve mechanism on the same valve body film 23 then for outlet valve structure 232, outlet valve block 2323 wherein, extension part 2321 and hole 2322 to make flowing mode all identical with inlet valve structure 231; Thereby repeat no more, the seal ring 27 that the seal rings 26 of thought outlet valve structure 232 peripheries are provided with direction and inlet valve structure 231 oppositely is provided with, shown in Fig. 6 c; Thereby when producing a thrust when pressure chamber 226 compression; The groove 225 interior seal rings 27 that are arranged at valve body cover 22 will provide the outlet valve mechanism 232 1 preparatory power (Preforce), make outlet valve block 2323 to produce the bigger tight effect of preparatory lid by the support of extension part 2321, in case non-return stream; When making outlet valve mechanism 232, the malleation because of pressure chamber 226 down produces displacement; At this moment, fluid then can be flow in the outlet temporary storage cavity 215 of valve block 21 through valve body cover 22 by pressure chamber 226 via the hole 2322 of hollow out, and can discharge via opening 214 and outlet flow 212; Thus; Then can fluid be released in pressure chamber 226, to reach the function of FLUID TRANSPORTATION via the mechanism of outlet valve structure 232 unlatchings.

See also Fig. 7 a, it is for the not actuator state schematic representation of the fluid delivery system of preferred embodiment of the present invention, in present embodiment; All groove structures 216,217,218 are provided with seal ring 26 respectively; And seal ring 27 also is set respectively in the groove 224,225,229, but its material is the good rubber material of endurance, and not as limit; Wherein, Be arranged on the valve block 21 and can be a circle structure around the seal ring in the groove 216 of opening 213, its thickness makes to be arranged at upper surface 210 formations one micro-convex structure that groove 216 interior seal ring 26 parts protrude from valve block 21 greater than groove 216 degree of depth; Thereby the inlet valve block 2313 of the inlet valve structure 231 that is arranged at the valve body film 23 on the valve block 21 of make fitting forms a protuberance upwards because of the micro-convex structure of seal ring 26; And the remaining part of valve body film 23 is replaced with valve body cover 22 mutually, and so micro-convex structure produces a preparatory power (Preforce) effect to inlet valve 231 pushing tows, helps to produce the bigger tight effect of preparatory lid; In case non-return stream; And since seal ring 26 upwards the micro-convex structure of protuberance be positioned at inlet valve structure 231 places of valve body film 23, have a gap so inlet valve structure 231 is made between the upper surface 210 of enter the mouth valve block 2313 and valve block 21 when start not, likewise; In the time of in seal ring 27 is arranged at around the groove 225 of outlet valve passage 222; Because its seal ring 27 is arranged at the lower surface 228 of valve body cover 22, thereby the sealing ring 27 outlet valve structure protrusion and form and swell downwards in the micro-convex structure of valve body cover 22 downwards that makes valve body film 23, this micro-convex structure only its direction is provided with for reverse with the micro-convex structure that is formed at inlet valve structure 231; Yet its function is all with aforementioned identical, thereby repeats no more.Be arranged at the

seal ring

26,27 and 28 in groove structure 217,218 and 224,229 and 227 respectively as for all the other; Mainly be used for making respectively when fitting tightly between valve block 21 and valve body film 23, valve body film 23 and valve body cover 22 and valve body cover 22 and the actuator 24, anti-fluid leaks.

Certainly; Above-mentioned micro-convex structure is except using groove and seal ring to arrange in pairs or groups to form; In some embodiments; The micro-convex structure of valve block 21 and valve body cover 22 also can adopt manufacture of semiconductor, and for example: gold-tinted etching or plated film or galvanoplastics directly form on valve block 21 and valve body cover 22.

Please consult Fig. 7 a, 7b, 7c simultaneously; As shown in the figure; When lid 25, actuator 24, valve body cover 22, valve body film 23, seal ring 26 and valve block 21 correspond to each other the assembling be provided with after; Opening 213 on the valve block 21 is corresponding with inlet valve structure 231 and the inlet valve passage 221 on the valve body cover 22 on the valve body film 23; And 214 of openings on the valve block 21 are corresponding with outlet valve block 232 and the outlet valve passage 222 on the valve body cover 22 on the valve body film 23; And,, make inlet valve structure 231 dimplings of valve body film 23 arise from the valve block 21 because seal ring 26 is arranged in the groove 216; And ((Preforce) acts on to produce a preparatory power by the seal ring that is positioned at groove 216 26 contacts valve body film 23; Make inlet valve structure 231 when start not, then form a gap with the upper surface 210 of valve block 21, likewise, outlet valve structure 232 is also by lower surface 228 formation one gap of seal ring 27 being established as for the same way as in the groove 225 and valve body cover 22.

When with a driven actuator 242; Actuator 24 produces bending deflection; Shown in Fig. 7 b, actuator 24 is bent upwards distortion towards the direction of arrow a indication, makes the volume of pressure chamber 226 increase; Thereby produce a suction; Make inlet valve structure 231, the outlet valve structure 232 of valve body film 23 bear the pulling force that makes progress, and make the inlet valve block 2313 of the inlet valve structure 231 that has a preparatory power (Preforce) open (shown in Fig. 6 b) rapidly, make liquid in large quantities the inlet channel on valve block 21 211 drawn; And the hole 2312 of the opening 213 on the valve block 21 of flowing through, the inlet valve structure 231 on the valve body film 23, the inlet temporary storage cavity 223 on the valve body cover 22, inlet valve block passage 221 and within the feed pressure chamber 226; At this moment, because inlet valve structure 231, the outlet valve structure 232 of valve body film 23 are born this to upper pulling force, make the outlet valve block 2323 that is positioned on the valve body film 23 seal up outlet valve passage 222 because of this to upper pulling force so be positioned at the outlet valve structure 232 of the other end; And make outlet valve structure 232 close, thereby fluid countercurrent current.

When actuator 24 changes the arrow b downwarping distortion shown in Fig. 7 c because of direction of an electric field; Volume that then can compression pressure chamber 226 makes the fluid of 226 pairs of inside of pressure chamber produce a thrust, and makes inlet valve structure 231, the outlet valve structure 232 of valve body film 23 bear a downward thrust; At this moment; Be arranged at the seal ring 27 upper outlet valve mechanisms 232 in the groove 225 outlet valve block 2323 its can open (shown in Fig. 6 c) rapidly, and liquid moment is led off in a large number, by pressure chamber 226 via the outlet valve passage 222 on the valve body cover 22, on the valve body film 23 outlet valve structure 232 hole 2322, on the valve block 21 outlet temporary storage cavity 215, opening 214 and outlet passage 212 and outside the effluent fluid feedway 20; Thereby the transmission course of completion fluid; Likewise, this moment is because inlet valve structure 231 is born this downward thrust, thereby feasible inlet valve block 2313 seals up opening 213; Thereby close inlet valve structure 231; Make not adverse current of fluid, and, be equipped with the design of the

seal ring

26,27 in the groove 216,225 on valve block 21 and valve body cover 22 by inlet valve structure 231 and outlet valve structure 232; Can make fluid in transport process, can not produce the situation of backflow, reach high efficiency transmission.

In addition; In present embodiment; The material of valve block 21 and valve body cover 22 can adopt thermoplastic plastic's material; For example polycarbonate resin (Polycarbonate PC), gather and mock (Polysulfone, PSF), ABS resin (Acrylonitrile Butadiene Styrene), vertical property low density polyethylene (LLDPE), low density polyethylene (LDPE), high density polyethylene (HDPE) (HDPE), polypropylene (PP), polyphenylene sulfide (PolyphenyleneSulfide, PPS), syndiotatic polystyrene (SPS), PPO (PPO), polyoxymethylene (Polyacetal; POM), polybutyl terapthalate (PBT), polyvinylidene fluoride (PVDF), ethylene tetrafluoroethylene copolymer (ETFE), cyclic olefin polymer thermoplastic plastic's materials such as (COC); But not as limit, and in present embodiment, the degree of depth of pressure chamber 226 is between 100 μ m to 300 μ m; Diameter is between 10-30mm, and not as limit.

In present embodiment; Clearance distance between this valve body film 23 and valve block 21 and the valve body cover 22 can be 10 μ m to 790 μ m, and the best is 180 μ m to 300 μ m, and in some embodiments; The separation distance that the vibration film 241 of this actuator 24 and valve body cover are 22; Be the gap, can be 10 μ m to 790 μ m, the preferably is 100 μ m to 300 μ m.

And valve body film 23 can tradition processing or gold-tinted etching or laser beam machining or modes such as electroforming processing or electro discharge machining make, its material can be good high-molecular organic material of any endurance or metal, when valve body film 23 adopts these macromolecular materials; Its elasticity coefficient is 2-20Gpa, for example pi (Polyimide, PI); Its elasticity coefficient, promptly young's modulus (E value) can be 10GPa, when valve body film 23 adopts metallic material; For example aluminium, aluminum alloy, nickel, nickel alloy, copper, Cuprum alloy or stainless steel and other metal materials, its young's modulus is 2-240GPa, if this metallic material is an aluminum metal; Its elasticity coefficient is 70GPa, or the nickel metal, and its elasticity coefficient is 210GPa; Or stainless steel metal, its elasticity coefficient is 240GPa etc., and not as limit.Thickness as for valve body film 23 can be between 10 μ m to 50 μ m, and the best is 21 μ m to 40 μ m.

Made method proposes explanation when below using unlike material with regard to valve body film 23 respectively.

When the material of valve body film 23 be pi (Polyimide, in the time of PI), its production method is mainly utilized reactive ion gas dry etching (reactive ion etching; RIE) method is coated on the valve mechanism with the photosensitivity photoresistance, and after exposure imaging goes out the valve mechanism pattern; Again to carry out etching; (Polyimide, PI) sheet is not etched, thereby can etch the valve mechanism on the valve body film 23 owing to there is photoresistance covering place can protect pi.

If the material of valve body film 23 is a stainless steel metal; Then can the gold-tinted etching, laser beam machining and machining etc. makes valve mechanism; Wherein the etched mode of gold-tinted obtains the photoresistance pattern of the valve mechanism on stainless steel sheets, is soaked in FeC13 again and adds and carry out wet etching in the HCl solution, and is similar with preceding method; There is photoresistance covering place can protect stainless steel sheets not to be etched, thereby can etches the valve mechanism on the valve body film 23.

And, if the material of valve body film 23 is a metallic nickel, then utilize the method for electrotyping process; Utilize the gold-tinted engraving method equally, obtain the photoresistance pattern of the valve mechanism on stainless steel substrate, carry out the nickel electroforming then; There is photoresistance covering place can electroforming; After the nickel metal of electroforming reaches certain thickness, it is broken away from from stainless steel substrate, then can obtain the valve body film 23 of tool valve mechanism 231,232.

In addition; Except above-mentioned production method; All materials that are applied to valve body film 23 are the processing method of available accurate punching all, or uses traditional mechanical processing mode, laser beam machining or modes such as electroforming processing or electro discharge machining and produce the valve structure on it, but not as limit.

And; Actuator 242 in the actuator 24 is a piezoelectric board; Can adopt the piezoelectricity powder manufacturing of lead zirconate titanate (PZT) series of high tension electricity coefficient to form, wherein the thickness of actuator 242 can be between 100 μ m to 500 μ m, and preferred thickness is 150 μ m to 250 μ m; Young's modulus is 100 to 150GPa, and not as limit.

And the thickness that attaches the vibration film 241 of actuator 242 is 10 μ m to 300 μ m, and preferred thickness is 100 μ m to 250 μ m, and its material can be a single-layer metal and constitutes; Stainless steel metal for example, its young's modulus is 240Gpa, thickness is between 140 μ m to 160 μ m; Copper for example, its young's modulus is 100Gpa, thickness is between 190 μ m to 210 μ m; And not as limit, or its material can be on the metallic material and to attach the double layer construction of the anti-biochemical macromolecule thin plate of one deck to constitute.

In some embodiments, in response to big flow fluid transmission requirements, can on the actuator 242 of actuator 24, bestow operating frequency is 10-50Hz, and cooperates following condition:

The thickness of actuator 242 is about the rigidity characteristics of 100 μ m to 500 μ m, and preferred thickness is 150 μ m to 250 μ m, and young's modulus is about 100-150Gpa.

And the thickness of vibration film 241 is between 10 μ m to the 300 μ m, and preferred thickness is 100 μ m to 250 μ m, and young's modulus is 60-300GPa; Its material can be a single-layer metal and constitutes, stainless steel metal for example, and its young's modulus is 240Gpa; Thickness is between 140 μ m to 160 μ m, copper for example, and its young's modulus is 100Gpa; Thickness is between 190 μ m to 210 μ m, and not as limit, or its material can be and attaches the double layer construction of the anti-biochemical macromolecule thin plate of one deck to constitute on the metallic material.

The degree of depth of this pressure chamber 226 is between 100 μ m to 300 μ m, and diameter is between 10-30mm.

And the thickness of the valve mechanism 231,232 on the valve body film 23 is 10 μ m to 50 μ m, and young's modulus is 2-240Gpa; Can be good high-molecular organic material of any endurance or metal, this valve body film 23 adopts this macromolecular material, and its elasticity coefficient is 2-20Gpa; For example pi (Polyimide, PI), its elasticity coefficient; Be that young's modulus (E value) can be 10Gpa, this valve body film 23 adopts metallic material, for example aluminium, aluminum alloy, nickel, nickel alloy, copper, Cuprum alloy or stainless steel and other metal materials; Its young's modulus is 2-240GPa; The aluminum metal elasticity coefficient is 70GPa, or nickel metallic elastic coefficient is 210GPa, or the stainless steel metal elasticity coefficient be 240Gpa and; Clearance distance between valve body film 23 and valve block 21 and the valve body cover 22 can be 10 μ m to 790 μ m, and the best is 180 μ m to 300 μ m.

By the collocation of relevant parameter conditions such as above-mentioned actuator 242, vibration film 241, pressure chamber 226 and valve body film 23; Then the inlet valve structure 231 of actuatable valve body thin film 23 and outlet valve structure 232 open and close effect; Order about fluid and carry out one-way flow, and make the fluid of the pressure chamber 226 that flows through to reach the above big flow output of per minute 5cc.

In sum; Fluid conveying device 20 of the present invention can be via the driving of actuator 24; And valve body film 23 and last integrally formed inlet valve structure 231 thereof can be equipped with the soft seal ring 26 in the groove 216 of valve block 21, make inlet valve structure 231 open and deliver the fluid to pressure chamber 226, change the volume of pressure chamber 226 again because of actuator 24; Thereby make outlet valve mechanism 232 be equipped with the soft seal ring 27 in the groove 225 on valve body cover 22 and open; So that outside FLUID TRANSPORTATION to the pressure chamber 226, because pressure chamber 226 can produce bigger fluid suction and thrust in the moment of volume harmomegathus, its reaction of folding rapidly of the valve mechanism on the proportioning valve body thin film 23; Feasible event can make fluid reach the transmission of big flow, and effectively stops the adverse current of fluid.

See also Fig. 8 and the Fig. 3 that arranges in pairs or groups, wherein Fig. 8 at first need form a valve body layer for the manufacturing flow chart of the fluid delivery system of the present invention's second preferred embodiment; Be valve block 21 (shown in step S81) as shown in Figure 3, thereafter, form a valve body cover layer; In present embodiment, this valve body cover layer is valve body cover shown in Figure 3 22, and it has a pressure chamber 226 (shown in step S82); Then, on valve block 21 and valve body cover 22, form a micro-convex structure (shown in step S83) respectively, the generation type of this micro-convex structure can have dual mode; And not as limit: one, please refer to Fig. 3 and embodiments of the invention; Need promptly have groove 216 on the valve block 21 shown in figure prior to forming at least one groove respectively on valve block 21 and the valve body cover 22, and in a seal ring 26 (shown in Fig. 7 a) is set in the groove 216; Owing to be arranged at the upper surface 210 that groove 216 interior seal rings 26 partly protrude from valve block 21; Thereby can form a micro-convex structure in the upper surface 210 of valve block 21, likewise, groove 225 and seal ring 26 can also form a micro-convex structure (shown in Fig. 5 b) by aforesaid way on the lower surface 228 of valve body cover 22; Two, can adopt manufacture of semiconductor, for example: gold-tinted etching or plated film or galvanoplastics, but, directly on valve block 21 and valve body cover 22, form a micro-convex structure not as limit.

Then, form a flexible film, it has at least one valve structure; Be valve body film 23 of the present invention and the inlet valve structure 231 that is had and outlet valve structure 232 (shown in step S84), then, form one again and activate film; Be vibration film 241 of the present invention (shown in step S85), and form an actuator 242 (shown in step S86), afterwards; Actuator 242 attachings are positioned on the vibration film 241, constitute one with assembling and activate device 24, and make actuator 242 and pressure chamber's 226 corresponding settings (shown in step S87); After step S87, valve body film 23 is arranged between valve block 21 and the valve body cover 22; And make the setting (shown in step S88) that corresponds to each other of valve block 21, valve body film 23 and valve body cover 22, last, actuator 24 correspondences are arranged on the valve body cover 22; And make the pressure chamber 226 of valve body film 23 closed valve lids 22, to form a fluid feedway (shown in step S89).

In sum, fluid delivery system of the present invention is applicable to micro-pump structure, is mainly stacked by valve block, valve body film, valve body cover, vibration film and actuator to form; It is piezoelectric actuated by actuator, makes the stereomutation of pressure chamber, and then opens or close the inlet/outlet valve mechanism that forms on the same valve body film; Cooperate soft seal ring and be arranged at valve block or valve body cover on groove, and carry out the conveying of fluid, but because fluid delivery system conveying gas of the present invention and fluid; Splendid flow rate and delivery pressure are not only arranged; Can have more High Accuracy Control property in original state oneself draw liquid, but and because of its conveying gas; Therefore more can get rid of bubble in fluid delivery process, to reach high efficiency transmission.Be with, fluid delivery system of the present invention has the value of industry.

The present invention must be appointed by those skilled in the art and executes that the craftsman thinks and be to modify as all, right neither take off such as attach claims desire Protector.

Claims

1. A fluid delivery device for delivering a fluid, comprising:

a valve body seat having an outlet channel and an inlet channel;

a valve body cover, which is arranged on the valve body seat;

A valve body film, the thickness of which is basically the same, and is arranged between the valve body seat and the valve body cover, and has a plurality of hollow valve switches, including a first valve switch and a second valve switch, the first valve switch The first valve switch and the second valve switch respectively have a valve plate, the periphery of the valve plate has a plurality of hollow holes arranged around the periphery of the valve plate, and there are extensions connected with the valve plate between the holes;

a plurality of temporary storage chambers, a first temporary storage chamber is formed between the valve body film and the valve body cover, and a second temporary storage chamber is formed between the valve body film and the valve body seat;

a vibrating membrane, the periphery of which is fixed on the valve body cover, and the vibrating membrane is separated from the valve body cover in an unactuated state to define a pressure chamber; and

an actuator connected to the diaphragm;

Wherein, the valve body seat and the valve body cover have a slightly convex structure, which is used to apply a pre-force to the valve body film. When the actuator is driven to cause deformation, the valve connected to the actuator The vibrating membrane will be linked to cause the volume of the pressure chamber to change, and then generate a pressure difference to push the fluid to flow through the first valve switch, the first temporary storage chamber, the pressure chamber, and the second valve switch from the inlet channel. After the temporary storage chamber and the second valve are switched on and off, they flow out from the outlet channel.

2. The fluid delivery device of claim 1, wherein the fluid comprises gas and liquid.

3. The fluid delivery device according to claim 1, wherein the slightly convex structure is a plurality of sealing rings, which are respectively arranged in a plurality of grooves of the valve body seat and the valve body cover, and the The part of the sealing ring protrudes from the groove to apply a pre-force to the valve body film.

4. The fluid delivery device according to claim 3, wherein the sealing ring is made of rubber material.

5 . The fluid delivery device according to claim 1 , wherein the valve body film has a thickness of 10 μm to 50 μm.

6. The fluid delivery device according to claim 1, wherein the optimum thickness of the valve body film is 21 μm to 40 μm.

7 . The fluid delivery device according to claim 1 , wherein the material of the valve body film is a polymer material, and its modulus of elasticity is 2-20 GPa.

8. The fluid delivery device as claimed in claim 7, wherein the polymer material is polyimide.

9 . The fluid delivery device according to claim 1 , wherein the material of the valve body film is a metal material, and its elastic modulus is 2 GPa to 240 GPa.

10. The fluid delivery device according to claim 9, wherein the metal material is aluminum, aluminum alloy, nickel, nickel alloy, copper, copper alloy or stainless steel.

11. The fluid delivery device of claim 1, wherein the actuator is a piezoelectric plate with a thickness of 100 μm to 500 μm.

12. The fluid delivery device of claim 1, wherein the optimum thickness of the actuator is 150 μm to 250 μm.

13. The fluid delivery device of claim 1, wherein the vibrating membrane is a single-layer metal structure.

14. The fluid conveying device according to claim 1, wherein the vibrating membrane is a double-layer structure, which is formed by laminating metal materials and polymer materials.

15. The fluid delivery device according to claim 1, wherein the thickness of the vibrating membrane is 10 μm to 300 μm.

16. The fluid delivery device according to claim 1, wherein the optimal thickness of the diaphragm is 100 μm to 250 μm.

17. The fluid delivery device according to claim 13, wherein the vibrating membrane is copper metal with a thickness of 190 μm to 210 μm.

18. The fluid delivery device according to claim 13, wherein the vibrating membrane is made of stainless steel with a thickness of 140 μm to 160 μm.

19. The fluid delivery device according to claim 1, wherein the pressure chamber has a depth of 100 μm to 300 μm and a diameter of 10 mm to 30 mm.

20. The fluid delivery device as claimed in claim 1, wherein the valve body seat and the valve body cover are made of thermoplastic plastic material.

21. The fluid delivery device according to claim 1, wherein the micro-protrusion structure is formed on the valve body seat and the valve body cover by semiconductor process.

22. The fluid delivery device according to claim 21, wherein the semiconductor manufacturing process is photolithography or coating or electroforming technology.

23. A fluid delivery device for delivering a fluid comprising:

a valve body seat having an outlet channel and an inlet channel;

a valve body cover, which is arranged on the valve body seat;

A plurality of temporary storage chambers, a first temporary storage chamber is formed between the valve body film and the valve body cover, and a second temporary storage room is formed between the valve body film and the valve body seat;

A vibrating film, the periphery of which is fixed on the valve body cover, and the vibrating film is separated from the valve body cover in a non-actuated state, and the separation distance is 100 μm to 300 μm to define a pressure chamber; as well as

an actuator connected to the diaphragm;

24. A fluid delivery device for delivering a fluid comprising:

a valve body seat having an inlet passage, an outlet passage and at least one groove;

a valve body cover, which is arranged on the valve body seat and has at least one groove;

a vibrating film, the periphery of which is fixed on the valve body cover, and in the non-actuated state, the vibrating film is separated from the valve body cover to define a pressure chamber;

an actuator connected to the diaphragm; and

A plurality of sealing rings, which are respectively arranged in the groove of the valve body seat and the valve body cover, and the sealing ring part protrudes from the groove, and is used to apply a pre-force to the valve plate of the valve body film ;

Wherein, when the actuator is driven to cause deformation, the vibrating membrane connected with the actuator will be linked to cause the volume of the pressure chamber to change, thereby generating a pressure difference to push the fluid to flow through the inlet channel After the first valve is switched, the first temporary storage chamber, the pressure chamber, the second temporary storage chamber and the second valve are switched, the flow will flow out from the outlet channel.

25. A fluid delivery device for delivering a fluid comprising:

a valve body seat having an outlet channel and an inlet channel;

a valve body cover, which is arranged on the valve body seat;

A valve body film, the thickness of which is 10 μm to 50 μm, and is basically the same, the valve body film is arranged between the valve body seat and the valve body cover, and has a plurality of hollow valve switches, including a first valve switch And a second valve switch, the first valve switch and the second valve switch respectively have a valve plate, the periphery of the valve plate has a plurality of hollow holes arranged around the periphery of the valve plate, and there are more holes between the holes and the valve plate connected extensions;

A vibrating film, the periphery of which is fixed on the valve body cover, and the vibrating film is separated from the valve body cover in the non-actuated state, and the separation distance is 100 μm to 300 μm to define a pressure chamber; as well as

an actuator connected to the diaphragm;

Wherein, the valve body seat and the valve body cover have a slightly convex structure, which is used to apply a pre-force to the valve body film. When the actuator is driven to cause deformation, the actuator connected to the actuator The vibrating membrane will be linked to cause the volume of the pressure chamber to change, thereby generating a pressure difference to push the fluid through the inlet passage through the first valve switch, the first temporary storage chamber, the pressure chamber, and the second temporary storage chamber. After the storage chamber and the second valve switch, flow out from the outlet channel.

26. A fluid delivery device for delivering a fluid comprising:

an actuator connected to the diaphragm; and

27. A fluid delivery device for delivering a fluid comprising:

a plurality of temporary storage chambers, forming a first temporary storage chamber and a second temporary storage chamber between the valve body film and the valve body cover;

A vibrating film, the periphery of which is fixed on the valve body cover. When the fluid conveying device is not actuated, the vibrating film is separated from the valve body cover, and the separation distance is 100 μm to 300 μm to define a pressure chamber;

an actuator coupled to the diaphragm; and

28. A fluid delivery device for delivering a fluid comprising:

A vibrating film, the periphery of which is fixed on the valve body cover, and the vibrating film is separated from the valve body cover in a non-actuated state, and the separation distance is 100 μm to 300 μm to define a pressure chamber;

an actuating device connected to the diaphragm; and