CN108071580A - Miniature pneumatic power device - Google Patents

Abstract

A micro pneumatic power plant comprising: the micro fluid control device comprises an air inlet plate, a resonance sheet, a piezoelectric actuator and an air collecting plate which are arranged in a stacked mode, wherein the air collecting plate is provided with a length ranging from 4mm to 10mm and a width ranging from 4mm to 10mm, a first cavity formed by a gap is arranged between the resonance sheet and the piezoelectric actuator, and when the piezoelectric actuator is driven, gas is led in from the air inlet plate, enters the first cavity through the resonance sheet and is then transmitted downwards to form a pressure gradient flow channel to continuously push out the gas; the microvalve device includes a stacked valve plate and an outlet plate; when the gas is transmitted from the micro fluid control device to the micro valve device, the valve hole of the valve plate is opened or closed in response to the unidirectional flow of the gas, so as to collect or release the pressure.

Description

Micro Pneumatic Power Device

【Technical field】

This case is about a pneumatic power device, especially a miniature, ultra-thin and silent miniature pneumatic power device.

【Background technique】

At present, in various fields, whether it is medicine, computer technology, printing, energy and other industries, products are developing towards refinement and miniaturization. Among them, the fluid delivery structures included in products such as micropumps, sprayers, inkjet heads, and industrial printing devices As its key technology, how to break through its technical bottleneck through innovative structure is an important content of development.

For example, in the pharmaceutical industry, many instruments or equipment that need to be driven by pneumatic power usually use traditional motors and pneumatic valves to achieve the purpose of gas delivery. However, limited by the volume limitations of the traditional motors and gas valves, it is difficult to reduce the volume of the overall device of this type of equipment, that is, it is difficult to achieve the goal of thinning, let alone achieve the purpose of portability. In addition, these traditional motors and gas valves also generate noise during operation, resulting in inconvenience and discomfort in use.

Therefore, how to develop a kind of miniature pneumatic power device that can improve the above-mentioned known technology deficiency, can make the instrument or equipment that traditionally adopts the fluid control device achieve small volume, miniaturization and silence, and then achieve the purpose of light and comfortable portable, realize problems that urgently need to be solved at present.

【Content of invention】

The main purpose of this case is to provide a micro-pneumatic power device suitable for portable or wearable instruments or equipment, by integrating a micro-fluid control device and a micro-valve device, so as to solve the problem of using pneumatic power-driven instruments in the known technology Or the device has a large volume, is difficult to thin, cannot achieve the purpose of portability, and lacks such as loud noise.

In order to achieve the above purpose, a more general implementation of this case is to provide a micro-pneumatic power device, including: a micro-fluid control device and a micro-valve device, the micro-fluid control device includes an air intake plate, A resonant plate, a piezoelectric actuator and a gas collecting plate, wherein the resonating plate has a hollow hole, the gas collecting plate has a length between 4mm and 10mm, and a width between 4mm and 10mm , and the ratio between the length and the width is between 0.4 times and 2.5 times, there is a gap between the resonant plate and the piezoelectric actuator to form a first chamber, when the piezoelectric actuator is driven, the gas It enters from the intake plate, flows through the resonant sheet, and then enters the first chamber for transmission; and the micro valve device includes a valve plate and an outlet plate that are stacked in sequence and positioned on the gas collector of the micro fluid control device. On the plate, the valve plate has a valve hole, and the outlet plate has the same length and width as the side length of the gas collecting plate of the microfluidic control device, wherein when the gas is transmitted from the microfluidic control device to the microvalve device , to carry out pressure collection or pressure relief operations.

【Description of drawings】

FIG. 1A is a schematic diagram of the front exploded structure of the miniature pneumatic power device of the preferred embodiment in this case.

FIG. 1B is a schematic diagram of the front assembled structure of the micro pneumatic power device shown in FIG. 1A .

FIG. 2A is a schematic diagram of the rear exploded structure of the micro pneumatic power device shown in FIG. 1A .

FIG. 2B is a schematic diagram of the rear assembled structure of the micro pneumatic power device shown in FIG. 1A .

FIG. 3A is a schematic diagram of the front assembled structure of the piezoelectric actuator of the micro pneumatic power device shown in FIG. 1A .

FIG. 3B is a schematic diagram of the rear assembly structure of the piezoelectric actuator of the micro-pneumatic power device shown in FIG. 1A .

FIG. 3C is a schematic cross-sectional structure diagram of the piezoelectric actuator of the micro pneumatic power device shown in FIG. 1A .

4A to 4C are schematic diagrams of various implementation aspects of the piezoelectric actuator shown in FIG. 3A .

FIGS. 5A to 5E are partial schematic views of the micro-fluid control device of the micro-pneumatic power device shown in FIG. 1A .

FIG. 6A is a schematic diagram of the pressure collection action of the micro-valve device of the micro-pneumatic power device shown in FIG. 1A .

FIG. 6B is a schematic diagram of the pressure relief action of the micro-valve device of the micro-pneumatic power device shown in FIG. 1A .

FIG. 7A to FIG. 7E are schematic diagrams of the pressure collecting action of the micro pneumatic power device shown in FIG. 1A .

FIG. 8 is a schematic diagram of the decompression or decompression action of the micro-pneumatic power device shown in FIG. 1A .

【Detailed ways】

Some typical embodiments embodying the features and advantages of the present application will be described in detail in the description in the following paragraphs. It should be understood that this case can have various changes in different aspects, all of which do not depart from the scope of this case, and the descriptions and diagrams therein are used as illustrations in nature, rather than construed to limit this case.

The micro-pneumatic power device 1 of this case can be applied to industries such as medical biotechnology, energy, computer technology or printing, so as to transmit gas, but not limited thereto. Please refer to Fig. 1A, Fig. 1B, Fig. 2A, Fig. 2B and Fig. 7A to Fig. 7E, Fig. 1A is a schematic diagram of the front exploded structure of the micro-pneumatic power device of the preferred embodiment of this case, and Fig. 1B is the micro-pneumatic power device shown in Fig. 1A The schematic diagram of the front combined structure of the device, Fig. 2A is a schematic diagram of the back exploded structure of the micro-pneumatic power device shown in Fig. 1A, Fig. 2B is a schematic diagram of the back combined structure of the micro-pneumatic power device shown in Fig. The schematic diagram of the pressure collection action of the micro pneumatic power device shown in Fig. 1A. As shown in Figure 1A and Figure 2A, the micro-pneumatic power device 1 of this case is composed of a micro-fluid control device 1A and a micro-valve device 1B, wherein the micro-fluid control device 1A has a housing 1a, a piezoelectric actuator 13 , insulating sheets 141, 142 and conductive sheet 15, wherein the casing 1a includes the gas collecting plate 16 and the base 10, and the base 10 includes the air inlet plate 11 and the resonant sheet 12, but not limited thereto. The piezoelectric actuator 13 is arranged corresponding to the resonant sheet 12, and makes the intake plate 11, the resonant sheet 12, the piezoelectric actuator 13, the insulating sheet 141, the conductive sheet 15, another insulating sheet 142, the gas collecting plate 16, etc. are stacked in sequence, and the piezoelectric actuator 13 is assembled by a suspension plate 130, an outer frame 131, at least one bracket 132 and a piezoelectric ceramic plate 133; and the micro valve device 1B includes A valve plate 17 and an outlet plate 18 are not limited thereto. And in this embodiment, as shown in FIG. 1A, the gas collecting plate 16 is not only a single plate structure, but also a frame structure with side walls 168 on the periphery, and the gas collecting plate 16 has a thickness between 4mm and 10mm. Between the length, the width between 4mm to 10mm, and the length and the width ratio is between 0.4 times to 2.5 times, or the gas collecting plate 16 has a length between 6mm to 8mm, between 6mm to 8mm, and the length and the width ratio are between 0.75 times and 1.33 times, or the gas collecting plate 16 is preferably 6mm in length and 6mm in width, and the gas collecting plate is defined by the periphery The formed side wall 168 and the plate at the bottom jointly define an accommodating space 16a for the piezoelectric actuator 13 to be arranged in the accommodating space 16a, so when the micro pneumatic power device 1 of this case is assembled , then its front schematic diagram will be shown in Figure 1B, and as shown in Figure 7A to Figure 7E, it can be seen that the micro fluid control device 1A is assembled corresponding to the micro valve device 1B, that is, the valve of the micro valve device 1B The sheet 17 and the outlet plate 18 are sequentially stacked and positioned on the gas collecting plate 16 of the microfluidic control device 1A. And the rear schematic view of its assembly then shows the pressure relief through hole 181 and the outlet 19 on the outlet plate 18, the outlet 19 is used to connect with a device (not shown), and the pressure relief through hole 181 is then used to make the micro valve device The gas in 1B is discharged to achieve the effect of pressure relief. By virtue of the assembly arrangement of the microfluidic control device 1A and the microvalve device 1B, the gas is inhaled from at least one gas inlet hole 110 on the gas inlet plate 11 of the microfluidic control device 1A, and passes through the piezoelectric actuator 13, it flows through multiple pressure chambers (not shown) and is transmitted downwards, so that the gas can flow in one direction in the micro-valve device 1B, and the pressure can be accumulated at the outlet of the micro-valve device 1B In a device (not shown) connected to each other, and when pressure relief is required, the output of the micro-fluid control device 1A is regulated so that the gas passes through the pressure relief through hole 181 on the outlet plate 18 of the micro-valve device 1B. Drain to relieve pressure.

Please continue to refer to FIG. 1A and FIG. 2A. As shown in FIG. 1A, the air inlet plate 11 of the microfluidic control device 1A has a first surface 11a, a second surface 11b and at least one air inlet 110. In this embodiment, The number of air intake holes 110 is 4, but not limited thereto. It penetrates through the first surface 11a and the second surface 11b of the air intake plate 11, and is mainly used for supplying gas from the outside of the device to comply with the effect of atmospheric pressure. It flows into the microfluidic control device 1A from the at least one air inlet 110 . And as shown in FIG. 2A, it can be seen from the first surface 11b of the air inlet plate 11 that there is at least one bus hole 112 corresponding to the at least one air inlet hole 110 on the second surface 11a of the air inlet plate 11. set up. There is a central concave portion 111 at the central communication place of these busbar holes 112, and the central concave portion 111 communicates with the busbar hole 112, so that the gas entering the busbar hole 112 from the at least one air inlet hole 110 can be guided and The confluent flow is concentrated to the central recess 111 for downward transfer. Therefore, in this embodiment, the air inlet plate 11 has an integrally formed air inlet hole 110, a confluence row hole 112, and a central concave portion 111, and a confluence chamber for confluent gas is correspondingly formed at the central concave portion 111 for supplying Gas storage. In some embodiments, the material of the air intake plate 11 can be but not limited to be made of a stainless steel material, and its thickness is preferably between 0.3 mm and 0.5 mm, and its preferred value is 0.4 mm, but not limited thereto. In some other embodiments, the depth of the confluence chamber formed by the central recess 111 is the same as the depth of the confluence row holes 112, and the preferred value of the depth of the confluence chamber and the confluence row holes 112 is between Between 0.15mm and 0.25mm, but not limited thereto. The resonant plate 12 is made of a flexible material, but not limited thereto, and has a hollow hole 120 on the resonant plate 12, which is set corresponding to the central recess 111 of the first surface 11b of the air intake plate 11 , so that the gas can flow downward. In some other embodiments, the resonant piece can be made of a copper material, but not limited thereto, and the preferred value of its thickness is between 0.02mm and 0.07mm, and its preferred value is 0.04mm , but not limited to this.

Please refer to Fig. 3A, Fig. 3B and Fig. 3C at the same time, which are respectively the front structural diagram, the rear structural diagram and the cross-sectional structural diagram of the piezoelectric actuator of the micro-pneumatic power device shown in Fig. 1A, the piezoelectric actuator 13 It is assembled by a suspension board 130, an outer frame 131, at least one bracket 132 and a piezoelectric ceramic board 133, wherein the piezoelectric ceramic board 133 is attached to the first surface 130b of the suspension board 130 for Apply voltage to generate deformation to drive the suspension plate 130 to bend and vibrate. The suspension plate 130 has a central portion 130d and an outer peripheral portion 130e, so that when the piezoelectric ceramic plate 133 is driven by voltage, the suspension plate 130 can move from the central portion 130d to the outer peripheral portion 130e bending vibration, and the at least one bracket 132 is connected between the suspension board 130 and the outer frame 131. In this embodiment, the bracket 132 is connected and arranged between the suspension board 130 and the outer frame 131, and its two ends are Respectively connected to the outer frame 131 and the suspension board 130 to provide elastic support, and there is at least one gap 135 between the bracket 132, the suspension board 130 and the outer frame 131 for gas circulation, and the suspension board 130, the outer The type and quantity of the frame 131 and the bracket 132 have many variations. In addition, the outer frame 131 is disposed around the outer side of the suspension board 130 and has a conductive pin 134 protruding outward for power supply connection, but not limited thereto. In this embodiment, the suspension board 130 has a stepped surface structure, which means that the second surface 130a of the suspension board 130 further has a convex portion 130c, and the convex portion 130c can be but not limited to a circular protrusion structure, and the height of the protrusion 130c is preferably between 0.02mm to 0.08mm, and preferably 0.03mm, and its diameter is 1.1mm to 2.4mm, but not limited thereto. 3A and 3C at the same time, it can be seen that the convex portion 130c of the suspension board 130 is coplanar with the second surface 131a of the outer frame 131, and the second surface 130a of the suspension board 130 and the second surface 132a of the bracket 132 are also They are coplanar, and there is a specific depth between the protrusion 130c of the suspension board 130 and the second surface 131a of the outer frame 131 , the second surface 130a of the suspension board 130 and the second surface 132a of the bracket 132 . As for the first surface 130b of the suspension plate 130, as shown in Figure 3B and Figure 3C, it is a flat coplanar structure with the first surface 131b of the outer frame 131 and the first surface 132b of the bracket 132, and the piezoelectric ceramic plate 133 is attached to the first surface 130b of the flat suspension board 130 . In some other embodiments, the shape of the suspension board 130 can also be a plate-shaped square structure with both sides flat, and it is not limited thereto, and can be changed arbitrarily according to the actual implementation situation. In some embodiments, the suspension board 130 , the bracket 132 and the outer frame 131 can be integrally formed, and can be made of a metal plate, such as stainless steel, but not limited thereto. And in some embodiments, the preferred value of the thickness of the suspension board 130 is between 0.1 mm and 0.3 mm, and the preferred value is 0.2 mm, and the preferred value of the length of the suspension board 130 is between 2 mm and 0.3 mm. 4.5mm, and its preferred value can be 2.5mm to 3.5mm, the preferred width is between 2mm to 4.5mm, and its preferred value can be 2.5mm to 3.5mm, but not limited thereto. The preferred value of the thickness of the outer frame 131 is between 0.1 mm to 0.4 mm, and the preferred value is 0.3 mm, but not limited thereto.

Still in some other embodiments, the preferred value of the thickness of the piezoelectric ceramic plate 133 is between 0.05mm to 0.3mm, and its preferred value is 0.10mm, and the thickness of the piezoelectric ceramic plate 133 is not greater than the The side length of the suspension board 130 has a length between 2mm and 4.5mm, and its preferred value can be 2.5mm to 3.5mm, and a width between 2mm and 4.5mm, and its preferred value can be 2.5 mm to 3.5 mm, and the preferred value of the ratio of length to width is between 0.44 times and 2.25 times, but it is not limited thereto. In some other embodiments, the side length of the piezoelectric ceramic plate 133 may be smaller than the side length of the suspension plate 130 , and it is also designed as a square plate structure corresponding to the suspension plate 130 , but it is not limited thereto.

In the micro pneumatic power device 1 of this case, the reason why the piezoelectric actuator 13 with a square appearance design is adopted is that compared with the design of the conventional known circular piezoelectric actuator, the piezoelectric actuator with a square appearance The device 13 obviously has the advantage of saving power, and the comparison of its power consumption is shown in Table 1 below:

Table I Piezo Actuator Type operating frequency Power consumption Square (10mm side length) 18kHz 1.1W Round (10mm diameter) 28kHz 1.5W Square (9mm side length) 22kHz 1.3W Round (9mm diameter) 34kHz 2W Square (8mm side length) 27kHz 1.5W Round (8mm diameter) 42kHz 2.5W

Therefore, it can be seen from the above table of the experiment that the piezo-electric actuator 13 with a side length (8 mm to 10 mm) square design is more power-saving than a circular piezoelectric actuator with a diameter (8 mm to 10 mm). . The reason for its power saving can be inferred as: because of the capacitive load operating at the resonant frequency, its power consumption will increase with the increase of the frequency, and because the resonant frequency of the piezoelectric actuator 13 designed with a square side length is obviously higher The piezoelectric actuator of the same diameter circle is low, so its relative power consumption is also significantly lower, that is, the piezoelectric actuator 13 of the square design adopted in the present invention is compared with the circular piezoelectric actuator in the past. The design has the advantage of saving power, especially for wearable devices, where power saving is a very important design focus.

Please continue to refer to FIGS. 4A , 4B and 4C , which are schematic views of various implementations of the piezoelectric actuator shown in FIG. 3A . As shown in the figure, it can be seen that the suspension plate 130, the outer frame 131 and the support 132 of the piezoelectric actuator 13 can have various types, and at least can have as many as (a) to (l) shown in Figure 4A. One aspect, for example, (a) the outer frame a1 and the floating board a0 are square structures, and the two are connected by a plurality of brackets a2, for example: 8, but not in the form of This is the limit, and there is a gap a3 between the bracket a2, the suspension board a0, and the outer frame a1 for gas circulation. In another (i) aspect, the outer frame i1 and the suspension plate i0 are also square structures, but only two brackets i2 are used to connect them; in addition, in (j)～(l) aspects, The suspension board j0 and the like can be a circular structure, and the outer frame j0 and the like can also be a slightly curved frame structure, but they are not limited thereto. Therefore, it can be seen from various implementation aspects that the shape of the suspension plate 130 can be square or circular, and similarly, the piezoelectric ceramic plate 133 attached to the first surface 130b of the suspension plate 130 can also be square or circular. Circular shape is not limited to this; and as shown in Figure 4B and 4C, the suspension plate of the piezoelectric actuator 13 can also have (m)～(r) as shown in Figure 4B and ( s) to (x) and other forms, but in these forms, the suspension board 130 and the outer frame 131 are all square structures. For example, the outer frame m1 and the suspension board m0 of the (m) aspect are both square structures, and the two are connected by a plurality of brackets m2, for example: 4, but not limited thereto, Moreover, there is a gap m3 between the support m2, the suspension board m0, and the outer frame m1 for fluid circulation. And in this embodiment, the bracket m2 connected between the outer frame m1 and the suspension board m0 can be but not limited to a board connection part m2, and the board connection part m2 has two ends m2' and m2", One end m2' is connected to the outer frame m1, and the other end m2" is connected to the suspension board m0, and the two ends m2' and m2" are corresponding to each other and arranged on the same axis. In (n ) aspect, it also has an outer frame n1, a suspension board n0, a bracket n2 connected between the outer frame n1 and the suspension board n0, and a gap n3 for fluid circulation, and the bracket n2 can also be but not limited to a The board connecting portion n2, the board connecting portion n2 also has two ends n2' and n2", and the end n2' is connected to the outer frame n1, and the other end n2" is connected to the suspension board n0, but in this embodiment Among them, the board connection part n2 is connected to the outer frame n1 and the suspension board n0 at an oblique angle ranging from 0 to 45 degrees. In other words, the two ends n2' and n2" are not arranged on the same horizontal axis. It is a setting relationship for mutual misalignment. In the aspect (o), the structure of the outer frame o1, the suspension board o0, the support o2 connected between the outer frame o1 and the suspension board o0, and the gap o3 for fluid circulation are similar to those of the previous embodiment, except that The design form of the plate connection part o2 as a bracket is slightly different from that of (m), but in this form, the two ends o2' and o2" of the plate connection part o2 are still corresponding to each other and set on the same axis.

Also in the aspect (p), it also has structures such as the outer frame p1, the floating plate p0, the bracket p2 connected between the outer frame p1 and the floating plate p0, and the gap p3 for fluid circulation, and the aspect is implemented here Among them, the board connection part p2 as a bracket further has structures such as a suspension board connection part p20, a beam part p21 and an outer frame connection part p22, wherein the beam part p21 is arranged in the gap p3 between the suspension board p0 and the outer frame p1, and The direction of its arrangement is parallel to the outer frame p1 and the suspension board p0, and the suspension board connection part p20 is connected between the beam part p21 and the suspension board p0, and the outer frame connection part p22 is connected to the beam part p21 and the outer frame p1 Between, and the suspension board connecting portion p20 and the outer frame connecting portion p22 also correspond to each other and are arranged on the same axis.

In the aspect (q), the structure of the outer frame q1, the suspension plate q0, the bracket q2 connected between the outer frame q1 and the suspension plate q0, and the gap q3 for fluid flow are all the same as those of the aforementioned (m), (o ) are similar in style, except that the design form of the plate connecting part q2 used as a support is slightly different from that of (m) and (o). In this form, the suspension plate q0 is in the form of a square, and Each of its sides has two plate connecting parts q2 connected to the outer frame q1, and the two ends q2' and q2" of each plate connecting part q2 are also corresponding to each other and arranged on the same axis. However, in (r ) form, it also has components such as the outer frame r1, the suspension board r0, the bracket r2, and the gap r3, and the bracket r2 can also be but not limited to a board connection part r2. In this embodiment, the board connection part r2 It is a V-shaped structure. In other words, the board connection part r2 is also connected to the outer frame r1 and the suspension board r0 at an oblique angle ranging from 0 to 45 degrees. Therefore, each board connection part r2 has an end part r2" and The suspension board r0 is connected, and has two ends r2 ′ connected to the outer frame r1 , which means that the two ends b2 ′ and the end b2 ″ are not arranged on the same horizontal axis.

Continued as shown in Figure 4C, the appearance patterns of these (s)～(x) patterns roughly correspond to the patterns of (m)～(r) shown in Figure 4B, but in these (s)～( x) In the aspect, the suspension plate 130 of each piezoelectric actuator 13 is provided with a convex portion 130c, that is, the structures such as s4, t4, u4, v4, w4, x4 as shown in the figure, and whether it is (m)～(r) or (s)～(x) etc., the suspension board 130 and the outer frame 131 are all designed as a square type, so as to achieve the aforementioned low power consumption effect; and by It can be seen from these implementations that no matter whether the suspension board 130 is a double-sided flat plate structure, or a stepped structure with a convex part on one surface, it is within the scope of protection of this case, and it is connected to the suspension board 130 and the outer frame 131 The shape and quantity of the brackets 132 in between can also be changed arbitrarily according to the actual implementation situation, and are not limited to the configuration shown in this case. As mentioned above, these suspension boards 130, outer frame 131 and bracket 132 are structures that can be integrally formed, but not limited thereto, as for their manufacturing methods, they can be processed by traditional processing, or yellow photolithography, or laser processing, Or electroforming, or electric discharge machining, etc., are not limited to this.

In addition, please continue to refer to FIG. 1A and FIG. 2A. In the microfluidic control device 1A, an insulating sheet 141, a conductive sheet 15 and another insulating sheet 142 are sequentially and correspondingly arranged under the piezoelectric actuator 13, and their The form roughly corresponds to the form of the outer frame of the piezoelectric actuator 13 . In some embodiments, the insulating sheets 141 and 142 are made of insulating materials, such as plastic, but not limited thereto, for insulation purposes; in other embodiments, the conductive sheet 15 is made of Constructed of conductive materials, such as, but not limited to, metal, for the purpose of conducting electricity. And, in this embodiment, a conductive pin 151 may also be provided on the conductive sheet 15 for electrical conduction.

Please refer to FIG. 1A and FIG. 5A to FIG. 5E at the same time, wherein FIG. 5A to FIG. 5E are partial action diagrams of the micro fluid control device of the micro pneumatic power device shown in FIG. 1A . First, as shown in FIG. 5A, it can be seen that the microfluidic control device 1A is formed by stacking the gas inlet plate 11, the resonant plate 12, the piezoelectric actuator 13, the insulating plate 141, the conductive plate 15 and another insulating plate 142 in sequence. into, and there is a gap g0 between the resonant piece 12 and the piezoelectric actuator 13, in this embodiment, it is the gap g0 between the resonant piece 12 and the periphery of the outer frame 131 of the piezoelectric actuator 13 Fill a material, such as: conductive glue, but not limited to, so that the depth of the gap g0 can be maintained between the resonant plate 12 and the convex portion 130c of the suspension plate 130 of the piezoelectric actuator 13, and then can lead The bleed air flows more quickly, and because the convex portion 130c of the suspension plate 130 and the resonant plate 12 keep an appropriate distance, the mutual contact interference is reduced, and the noise generation can be reduced; in other embodiments, it can also be achieved by increasing the pressure The height of the outer frame 131 of the electric actuator 13 is such that a gap is added when it is assembled with the resonant plate 12 , but it is not limited thereto.

Please continue to refer to FIGS. 5A to 5E. As shown in the figure, when the air intake plate 11, the resonant plate 12 and the piezoelectric actuator 13 are assembled in sequence, the hollow hole 120 of the resonant plate 12 can be connected with the The gas inlet plate 11 together forms a chamber for converging gas, and a first chamber 121 is further formed between the resonant plate 12 and the piezoelectric actuator 13 for temporarily storing gas, and the first chamber 121 is transparent. Through the hollow hole 120 of the resonant plate 12, it communicates with the cavity at the central recess 111 of the first surface 11b of the intake plate 11, and the two sides of the first cavity 121 are connected by the bracket 132 of the piezoelectric actuator 13. The gap 135 between them communicates with the micro valve device 1B arranged thereunder.

When the micro-fluid control device 1A of the micro-pneumatic power device 1 is actuated, the piezoelectric actuator 13 is mainly actuated by voltage to vibrate vertically reciprocatingly with the support 132 as a fulcrum. As shown in Figure 5B, when the piezoelectric actuator 13 is actuated by the voltage to vibrate downward, since the resonant plate 12 is a light and thin sheet structure, when the piezoelectric actuator 13 vibrates, the resonance The sheet 12 will also resonate and carry out vertical reciprocating vibration accordingly, that is, the part of the resonant sheet 12 corresponding to the central concave part 111 will also be deformed by bending vibration, that is, the part corresponding to the central concave part 111 is the movable part of the resonant sheet 12. The part 12a is based on that when the piezoelectric actuator 13 bends and vibrates downward, the movable part 12a of the resonant plate 12 corresponding to the central concave part 111 will vibrate due to the introduction and pushing of the fluid and the vibration of the piezoelectric actuator 13. Driven, and as the piezoelectric actuator 13 bends and vibrates downwards, the gas enters from at least one air inlet 110 on the air inlet plate 11, and passes through at least one bus hole 112 on the first surface 11b to Collected at the central central concave portion 111, and then flow down into the first chamber 121 through the central hole 120 corresponding to the central concave portion 111 on the resonant plate 12, and then, driven by the vibration of the piezoelectric actuator 13 , the resonant piece 12 will also carry out vertical reciprocating vibration with the resonance, as shown in Figure 5C, at this time, the movable part 12a of the resonant piece 12 will also vibrate downward, and stick to the piezoelectric actuator 13, on the convex portion 130c of the floating plate 130, the space between the area other than the convex portion 130c of the floating plate 130 and the fixed portion 12b on both sides of the resonant sheet 12 will not become smaller, and thereby resonate The deformation of the sheet 12 compresses the volume of the first chamber 121 and closes the circulation space in the middle of the first chamber 121, so that the gas in it is pushed to flow to both sides, and then passes between the brackets 132 of the piezoelectric actuator 13 The gap 135 in between flows down through it. As for Fig. 5D, the movable part 12a of the resonant plate 12 bends and vibrates upwards to return to the initial position, and the piezoelectric actuator 13 is driven by voltage to vibrate upwards, thus squeezing the volume of the first chamber 121 , but at this time, since the piezoelectric actuator 13 is lifted upwards, the displacement of the lift can be d, so that the gas in the first chamber 121 will flow to both sides, and then drive the gas to continuously flow from the gas inlet plate 11 At least one air inlet 110 enters, and then flows into the cavity formed by the central concave portion 111. As shown in FIG. The movable part 12a also returns to the initial position, so that the gas in the central concave part 111 flows into the first chamber 121 through the central hole 120 of the resonant plate 12, and passes between the brackets 132 of the piezoelectric actuator 13 The microfluidic control device 1A passes downward through the gap 135 . From this embodiment, it can be seen that when the resonant piece 12 vibrates vertically, the maximum distance of its vertical displacement can be increased by the gap g0 between it and the piezoelectric actuator 13, in other words, between the two A gap g0 is set between the structures so that the resonant plate 12 can produce a larger up-and-down displacement during resonance, and the vibration displacement of the piezoelectric actuator is d, and the difference between the gap g0 and the gap g0 is x, that is, x= g0-d, after testing, when x≦0um, it is in a noisy state; when x=1um to 5um, the maximum output air pressure of the micro-pneumatic power device 1 can reach 350mmHg; when x=5um to 10um, the maximum output air pressure of the micro-pneumatic power device 1 It can reach 250mmHg; when x=10um to 15um, the maximum output air pressure of the micro-pneumatic power device 1 can reach 150mmHg, and the corresponding relationship between the values is shown in Table 2 below. The above values are for operating voltages between ±10V and ±20V. In this way, a pressure gradient is generated in the flow channel design of the microfluid control device 1A, so that the gas flows at a high speed, and the gas is transmitted from the suction end to the discharge end through the impedance difference in the flow channel in and out direction, and there is a pressure gradient at the discharge end. Under the state of air pressure, it still has the ability to continuously push out the gas, and can achieve the effect of silence.

Table II

In addition, in some embodiments, the vertical reciprocating vibration frequency of the resonant plate 12 can be the same as the vibration frequency of the piezoelectric actuator 13, that is, both can go up or down at the same time, which can be based on the actual implementation situation. Any changes are not limited to the action shown in this embodiment.

Please refer to Fig. 1A, Fig. 2A and Fig. 6A, Fig. 6B at the same time, wherein Fig. 6A is a schematic diagram of the pressure collection action of the micro valve device of the micro pneumatic power device shown in Fig. 1A, and Fig. 6B is the micro valve device shown in Fig. 1A Schematic diagram of the pressure relief action of the micro-valve device of the pneumatic power unit. As shown in Figure 1A and Figure 6A, the micro-valve device 1B of the micro-pneumatic power device 1 of this case is formed by stacking the valve plate 17 and the outlet plate 18 in sequence, and works with the gas collecting plate 16 of the micro-fluid control device 1A .

In this embodiment, the gas collecting plate 16 has a surface 160 and a reference surface 161, the surface 160 is recessed to form a gas collecting chamber 162, and the gas transported downward by the microfluidic control device 1A is temporarily accumulated in the In the gas collecting chamber 162, and in the gas collecting plate 16, there are a plurality of through holes, which include a first through hole 163 and a second through hole 164, one end of the first through hole 163 and the second through hole 164 It communicates with the gas collecting chamber 162 , and the other end communicates with the first pressure relief chamber 165 and the first outlet chamber 166 on the reference surface 161 of the gas collecting plate 16 respectively. And, a protrusion structure 167 is further added at the first outlet chamber 166, such as but not limited to a cylindrical structure. The height of the protrusion structure 167 is higher than the reference surface 161 of the gas collecting plate 16, and The height of the protrusion structure 167 is between 0.1 mm and 0.55 mm, and a preferred value is 0.2 mm.

The outlet plate 18 has the same length and width as the gas collecting plate 16, and includes a pressure relief through hole 181 and an outlet through hole 182. The pressure relief through hole 181 and the outlet through hole 182 pass through the outlet plate 18. The reference surface 180 and the second surface 187, and the outlet plate 18 has a reference surface 180, a second pressure relief chamber 183 and a second outlet chamber 184 are recessed on the reference surface 180, and the pressure relief through hole 181 is provided In the central part of the second pressure relief chamber 183, the outlet through hole 182 communicates with the second outlet chamber 184, and there is a communication channel between the second pressure relief chamber 183 and the second outlet chamber 184 185 for gas circulation, and one end of the outlet through hole 182 communicates with the second outlet chamber 184, and the other end communicates with the outlet 19. In this embodiment, the outlet 19 can be connected with a device ( not shown), for example: a press, but not limited thereto.

The valve plate 17 has a valve hole 170 and a plurality of positioning holes 171. The thickness of the valve plate 17 is between 0.1mm and 0.3mm, and the preferred value is 0.2mm.

When the valve plate 17 is assembled with the gas collecting plate 16 and the outlet plate 18, the pressure relief through hole 181 of the outlet plate 18 corresponds to the first through hole 163 of the gas collecting plate 16, and the second pressure relief chamber 183 Corresponding to the first pressure relief chamber 165 of the gas collecting plate 16, the second outlet chamber 184 corresponds to the first outlet chamber 166 of the gas collecting plate 16, and the valve plate 17 is arranged on the gas collecting plate 16 Between the first pressure relief chamber 165 and the second pressure relief chamber 183, the valve hole 170 of the valve plate 17 is arranged between the second through hole 164 and the outlet through hole 182. Between, and the valve hole 170 is located in the convex portion structure 167 of the first outlet chamber 166 of the gas collecting plate 16 and is set correspondingly. With the design of this single valve hole 170, the gas can achieve one-way flow in response to its pressure difference. flow purpose.

And one end of the pressure relief through hole 181 of the outlet plate 18 can be further provided with a protruding convex structure 181a, such as but not limited to a cylindrical structure, the height of the convex structure 181a is between 0.1mm to Between 0.55mm, the preferred value is 0.2mm, and the convex structure 181a is improved to increase its height, the height of the convex structure 181a is higher than the reference surface 180 of the outlet plate 18, to strengthen the valve plate 17 quickly collides and closes the pressure relief through hole 181, and achieves a pre-forced conflicting effect of complete sealing; and, the outlet plate 18 has at least one limiting structure 188, the height of the limiting structure 188 is 0.2mm, to This embodiment is taken as an example, the limiting structure 188 is arranged in the second pressure relief chamber 183, and is an annular block structure, and is not limited to this, it is mainly for when the micro valve device 1B performs the pressure collecting operation , for auxiliary support of the valve plate 17, to prevent the valve plate 17 from collapsing, and to enable the valve plate 17 to be opened or closed more quickly.

When the micro-valve device 1B is pressure-collecting and actuated, as shown in Figure 6A, it can respond to the pressure provided by the gas transmitted downward from the micro-fluid control device 1A, or when the external atmospheric pressure is greater than that of the outlet. 19, when the internal pressure of the device (not shown) connected to 19, the gas will be transmitted from the microfluidic control device 1A to the gas collection chamber 162 of the micro valve device 1B, and then pass through the first through hole 163 and the second through hole respectively. 164 and flows downward into the first pressure relief chamber 165 and the first outlet chamber 166. At this time, the downward gas pressure makes the flexible valve plate 17 bend and deform downward, and then the first pressure relief chamber The volume of the chamber 165 is increased, and the place corresponding to the first through hole 163 is flatly attached downwards and abuts against the end of the pressure relief through hole 181, thereby closing the pressure relief through hole 181 of the outlet plate 18, so the second pressure relief through hole 181 can be closed. The gas in the pressure chamber 183 will not flow out from the pressure relief through hole 181 . Of course, in this embodiment, the design of adding a convex structure 181a at the end of the pressure relief through hole 181 can be used to strengthen the valve plate 17 to quickly contact and close the pressure relief through hole 181, and achieve a pre-forced resistance to complete sealing. As a result, at the same time, through the limiting structure 188 arranged around the pressure relief through hole 181, the valve piece 17 is supported to prevent it from collapsing. On the other hand, since the gas flows downward from the second through hole 164 into the first outlet chamber 166, and the valve plate 17 corresponding to the first outlet chamber 166 is also bent downward, so that its corresponding The valve hole 170 is opened downwards, and the gas can flow from the first outlet chamber 166 through the valve hole 170 into the second outlet chamber 184, and flow to the outlet 19 and the device connected to the outlet 19 by the outlet through hole 182. (not shown), the device is used to collect pressure.

Please continue to refer to FIG. 6B. When the micro-valve device 1B is depressurized, the gas can no longer be input into the gas-collecting chamber 162 by regulating the gas transmission volume of the micro-fluid control device 1A, or when it is connected with the outlet 19 When the internal pressure of the connected device (not shown) is greater than the external atmospheric pressure, the micro valve device 1B can be released. At this time, the gas will be input into the second outlet chamber 184 from the outlet through hole 182 connected with the outlet 19, so that the volume of the second outlet chamber 184 will expand, and then the flexible valve plate 17 will be bent upwards and deformed, and Flatly stick upwards and against the gas collecting plate 16 , so the valve hole 170 of the valve plate 17 will be closed due to being against the gas collecting plate 16 . Of course, in this embodiment, the design of adding a convex structure 167 to the first outlet chamber 166 can be used, so that the flexible valve plate 17 can be bent upwards and quickly resisted, so that the valve hole 170 is more favorable to achieve a predetermined value. The force resistance effect is completely attached to the closed state of the seal. Therefore, when it is in the initial state, the valve hole 170 of the valve plate 17 will be closed due to being close to the convex structure 167, and the inside of the second outlet chamber 184 will be closed. The gas will not flow back into the first outlet chamber 166, so as to achieve a better effect of preventing gas leakage. And, the gas in the second outlet chamber 184 can flow into the second pressure relief chamber 183 through the communication channel 185, thereby expanding the volume of the second pressure relief chamber 183 and making the gas corresponding to the second pressure relief chamber 183 The valve plate 17 of the pressure chamber 183 is also bent and deformed upwards. At this time, because the valve plate 17 is not closed against the end of the pressure relief through hole 181, the pressure relief through hole 181 is in an open state, that is, the second pressure relief chamber The gas in the chamber 183 can flow out through the pressure relief through hole 181 for pressure relief operation. Of course, in this embodiment, the flexible valve plate 17 can be made upward by using the convex structure 181a added at the end of the pressure relief through hole 181 or through the limiting structure 188 provided in the second pressure relief chamber 183. The bending shape changes quickly, which is more favorable for breaking away from the state of closing the pressure relief through hole 181 . In this way, the gas in the device (not shown) connected to the outlet 19 can be discharged to lower the pressure through the one-way pressure relief operation, or the gas in the device (not shown) connected to the outlet 19 can be discharged completely to complete the pressure relief operation.

Please refer to FIG. 1A , FIG. 2A and FIG. 7A to FIG. 7E at the same time, wherein FIG. 7A to FIG. 7E are schematic views of the pressure collection action of the micro pneumatic power device shown in FIG. 1A . As shown in Figure 7A, the micro-pneumatic power device 1 is composed of a micro-fluid control device 1A and a micro-valve device 1B, wherein the micro-fluid control device 1A is composed of an air inlet plate 11, a resonance plate 12, The piezoelectric actuator 13, the insulating sheet 141, the conductive sheet 15, another insulating sheet 142 and the gas collecting plate 16 are stacked and assembled for positioning, and between the resonant sheet 12 and the piezoelectric actuator 13 is a G0, and there is a first chamber 121 between the resonant plate 12 and the piezoelectric actuator 13, and the micro-valve device 1B is also sequentially stacked and assembled by the valve plate 17 and the outlet plate 18, etc. Formed on the gas collecting plate 16 of the control device 1A, and between the gas collecting plate 16 and the piezoelectric actuator 13 of the microfluidic control device 1A, there is a gas collecting chamber 162 and a reference surface 161 on the gas collecting plate 16 Further recess a first pressure relief chamber 165 and a first outlet chamber 166, and further recess a second pressure relief chamber 183 and a second outlet chamber 184 on the reference surface 180 of the outlet plate 18, in this embodiment In the example, the operating voltage of the micro-pneumatic power device is ±10V to ±16V, and these multiple different pressure chambers are matched with the drive of the piezoelectric actuator 13 and the vibration of the resonant plate 12 and the valve plate 17, so as to The gas is transported downward under pressure.

As shown in Figure 7B, when the piezoelectric actuator 13 of the micro-fluid control device 1A is actuated by voltage to vibrate downward, the gas will enter the micro-fluid control device 1A from the air inlet 110 on the gas inlet plate 11 , and through at least one busbar hole 112 to gather at its central recess 111 , and then flow down into the first chamber 121 through the hollow hole 120 on the resonant plate 12 . Thereafter, as shown in FIG. 7C, due to the resonance effect of the vibration of the piezoelectric actuator 13, the resonant plate 12 will also vibrate reciprocatingly, that is, it vibrates downward and is close to the piezoelectric actuator 13. On the convex portion 130c of the floating plate 130, the volume of the cavity at the central concave portion 111 of the intake plate 11 is increased by the deformation of the resonant plate 12, and the volume of the first cavity 121 is compressed at the same time, thereby promoting The gas in the first chamber 121 pushes to flow to both sides, and then passes through the gap 135 between the brackets 132 of the piezoelectric actuator 13 to flow downwards, so as to flow to the micro fluid control device 1A and the micro valve device 1B In the air-collecting chamber 162 between them, the first through-hole 163 and the second through-hole 164 communicated with the air-collecting chamber 162 flow down to the first depressurization chamber 165 and the first outlet chamber correspondingly. In the chamber 166, it can be seen from this embodiment that when the resonant plate 12 performs vertical reciprocating vibration, the maximum distance of its vertical displacement can be increased by the gap g0 between it and the piezoelectric actuator 13, in other words A gap g0 is provided between the two structures so that the resonant plate 12 can have a greater vertical displacement during resonance.

Then, as shown in FIG. 7D, since the resonant plate 12 of the microdynamic fluid control device 1A returns to the initial position, the piezoelectric actuator 13 is driven by voltage to vibrate upward, and the vibration displacement of the piezoelectric actuator is is d, and the difference from the gap g0 is x, that is, x=g0-d. After testing, when x=1 to 5um and the operating voltage is ±10V to ±16V, its maximum output air pressure can reach at least 300mmHg, but This is not the limit. In this way, the volume of the first chamber 121 is also squeezed, so that the gas in the first chamber 121 flows toward both sides, and is continuously input into the gas collection chamber through the gap 135 between the brackets 132 of the piezoelectric actuator 13 162, in the first pressure relief chamber 165 and the first outlet chamber 166, so that the air pressure in the first pressure relief chamber 165 and the first outlet chamber 166 is greater, and then pushes the flexible valve plate 17 When bending deformation occurs downward, in the second pressure relief chamber 183, the valve plate 17 is flatly pressed downwards and abuts against the convex structure 181a at the end of the pressure relief through hole 181, thereby closing the pressure relief through hole 181, And in the second outlet chamber 184, the valve hole 170 corresponding to the outlet through hole 182 on the valve plate 17 is opened downwards, so that the gas in the second outlet chamber 184 can be passed down to the outlet 19 by the outlet through hole 182. And any device (not shown) connected with the outlet 19, and then to achieve the purpose of pressure-gathering operation. Finally, as shown in FIG. 7E , when the resonant plate 12 of the microfluidic control device 1A resonates and moves upward, the gas in the central recess 111 of the first surface 11 b of the gas inlet plate 11 can flow in through the hollow hole 120 of the resonant plate 12 In the first chamber 121, through the gap 135 between the brackets 132 of the piezoelectric actuator 13, it is continuously transmitted downwards to the micro valve device 1B. Since the gas pressure continues to increase downwards, the gas is still Will continue to flow to the outlet 19 and any device connected to the outlet 19 through the gas collection chamber 162, the second through hole 164, the first outlet chamber 166, the second outlet chamber 184 and the outlet through hole 182, The pressure-gathering operation can be driven by the pressure difference between the external atmospheric pressure and the device, but it is not limited thereto.

When the internal pressure of the device (not shown) connected to the outlet 19 was greater than the external pressure, then the miniature pneumatic power device 1 could perform decompression or decompression operations as shown in Figure 8, and its decompression or decompression The action mode of pressure is mainly as mentioned above, the gas can no longer be input into the gas collection chamber 162 by regulating the gas transmission volume of the micro-fluid control device 1A, at this time, the gas will flow from the outlet connected to the outlet 19 The through hole 182 is input into the second outlet chamber 184, so that the volume of the second outlet chamber 184 expands, and then the flexible valve plate 17 is bent and deformed upwards, and flattened upwards and abutted against the first outlet chamber 166 on the protrusion structure 167, so that the valve hole 170 of the valve plate 17 is closed, that is, the gas in the second outlet chamber 184 will not flow back into the first outlet chamber 166; and, in the second outlet chamber 184 The gas can flow into the second pressure relief chamber 183 through the communication channel 185, and then perform the pressure relief operation through the pressure relief through hole 181; in this way, the one-way gas transmission operation of the micro valve structure 1B will The gas in the device connected to the outlet 19 is discharged to reduce the pressure, or completely discharged to complete the pressure relief operation.

As can be seen from the above description, in the micro-pneumatic power device 1 of this case, along with the miniaturization of the micro-pneumatic power device 1, its various performance changes are as shown in Table 3 below:

Table three

It can be seen that after sampling 20 micro-pneumatic power device 1 products for practical experiments, the maximum output air pressure can be steadily increased by gradually reducing the side length of the square-shaped suspension plate 130 from large to the optimal size of 2.5mm to 3.5mm. It can reach at least 300mmHg or more. In this case, the square shape of the suspension board 130 and the considerations of gradually shrinking side lengths are adopted to improve the rigidity of the suspension board 130, which not only increases the maximum output air pressure, but also reduces the horizontal deformation of the suspension board 130 when it vibrates vertically. It can more stably cooperate with the piezoelectric ceramic plate 133 to operate, so that the vibration of the piezoelectric actuator 13 can be maintained in the same direction during operation, thereby reducing the gap between the piezoelectric actuator 13 and the resonant plate 12 or other assembly components. The collision interference between the suspension plate 130 and the resonant plate 12 maintains a certain distance, and the noise is quite suppressed. At the same time, in the final quality inspection of the product, the number of defective products is also reduced, which is helpful for manufacturing. Improve quality and efficiency. In addition, when the size of the suspension plate 130 of the piezoelectric actuator 13 is reduced, the piezoelectric actuator 13 can also be made smaller, thereby reducing the volume of the gas flow channel inside the piezoelectric actuator 13, which is beneficial to The air is pushed or compressed, so the performance can be improved and the overall component size can be reduced at the same time. Moreover, as mentioned above, for the piezoelectric actuator 13 equipped with a larger-sized suspension plate 130 and piezoelectric ceramic plate 133, due to the poor rigidity of the suspension plate 130, it is easy to twist and deform when vibrating, so that It is easy to collide with the resonant plate 12 or other assembly components, so the noise ratio is relatively high, and the noise problem is also one of the reasons for the defective products. Therefore, the large-size suspension plate 130 and the piezoelectric ceramic plate 133 The defect rate is relatively high. Therefore, when the levitation plate 130 and the piezoelectric ceramic plate 133 are reduced in size, in addition to improving performance and reducing noise, the defect rate of the product can also be reduced.

But in any case, the above-mentioned functions of increasing the yield rate and increasing the maximum output air pressure due to the reduction of the side length of the suspension board 130 are all obtained through experiments, and cannot be directly derived by theoretical formulas. The reason for the enhanced function The speculation is only used as a reference for the rationality of the experiment.

Certainly, in order to achieve the trend of thinning, the micro-pneumatic power device 1 of this case maintains the total thickness of the micro-fluid control device 1A assembled with the micro-valve device 1B to a height between 1.5mm and 4mm, so that the micro-pneumatic power device can achieve a light and comfortable Portable purpose, and can be widely used in medical equipment and related equipment.

To sum up, the micro-pneumatic power device provided in this case mainly uses the mutual assembly of the micro-fluid control device and the micro-valve device to allow gas to enter from the air inlet on the micro-fluid control device, and uses piezoelectric actuation The action of the device causes the gas to generate a pressure gradient in the designed flow channel and pressure chamber, and then makes the gas flow at a high speed and is transmitted to the micro valve device, and then through the one-way valve design of the micro valve device, the gas is passed to the micro valve device. Unidirectional flow, which can accumulate pressure in any device connected to the outlet; and when depressurization or pressure relief is desired, the transmission volume of the microfluidic control device is regulated, and the gas can be transmitted from the device connected to the outlet To the second outlet chamber of the micro-valve device, the gas is transmitted to the second pressure relief chamber through the communication flow channel, and then flows out through the pressure relief through hole, so as to achieve the rapid transmission of gas and at the same time achieve silence The effect can also reduce the overall volume and thinness of the micro gas power device, and then make the micro gas power device achieve the purpose of light and comfortable portability, and can be widely used in medical equipment and related equipment. Therefore, the miniature gas power device in this case is of great industrial value, so please file an application in accordance with the law.

Even though the present invention has been described in detail by the above-mentioned embodiments, it can be modified in various ways by those skilled in the art, all of which are within the scope of the attached patent application.

【Symbol Description】

1: Miniature Pneumatic Power Device

1A: Microfluidic Control Device

1B: Micro-valving device

1a: Housing

10: base

11: Air intake plate

11a: The second surface of the intake plate

11b: The first surface of the intake plate

110: air intake hole

111: Central concave part

112: busbar hole

12: Resonant plate

12a: Movable part

12b: fixed part

120: hollow hole

121: First Chamber

13: Piezoelectric Actuator

130: Hoverboard

130a: second surface of the hoverboard

130b: first surface of the hoverboard

130c: convex part

130d: center part

130e: Peripheral part

131: Outer frame

131a: the second surface of the outer frame

131b: the first surface of the outer frame

132: bracket

132a: Second surface of bracket

132b: first surface of bracket

133: Piezoelectric ceramic plate

134, 151: Conductive pins

135: Void

141, 142: insulating sheet

15: Conductive sheet

16: Gas collecting plate

16a: Accommodating space

160: surface

161: datum surface

162: Gathering chamber

163: First through hole

164: second through hole

165: the first pressure relief chamber

166: First exit chamber

167, 181a: Convex structure

168: side wall

17: Valve sheet

170: valve hole

171: Locating holes

18: Export plate

180: datum surface

181: Pressure relief through hole

182: Outlet through hole

183: Second decompression chamber

184: Second exit chamber

185: Connected flow channel

187: Second Surface

188: Limiting structure

19: Export

g0: Gap

(a)～(x): Different implementations of piezoelectric actuators

a0, i0, j0, m0, n0, o0, p0, q0, r0: hoverboard

a1, i1, j1, m1, n1, o1, p1, q1, r1: outer frame

a2, i2, m2, n2, o2, p2, q2, r2: bracket, board connection part

a3, m3, n3, o3, p3, q3, r3: gaps

d: Vibration displacement of piezoelectric actuator s4, t4, u4, v4, w4, x4: Convex part

m2', n2', o2', q2', r2': the bracket is connected to the end of the outer frame

m2”, n2”, o2”, q2”, r2”: the bracket is connected to the end of the suspension board

Claims (28)

1. a kind of micro pressure power set, it is characterised in that including：

One minisize fluid control device, including sequentially stacking setting：

One inlet plate；

One resonance plate has a hollow bore；

One piezoelectric actuator；

One gas collection plate, have between 4mm between 10mm length, between 4mm to the width between 10mm, and the length and should Between width ratio is 0.4 times to 2.5 times；

Wherein between the resonance plate and the piezoelectric actuator there is a gap to form a first chamber, the piezoelectric actuator is driven When, gas is entered by the inlet plate, flows through the resonance plate, is transmitted again with entering in the first chamber；And

One micro valve device sequentially stacks setting including a valve sheet and an exit plate and is positioned at minisize fluid control dress On the gas collection plate put, which has a valve opening, which has the gas collection plate with the minisize fluid control device Identical length and the length of side of width；

Wherein, when gas is transmitted to from the minisize fluid control device in the micro valve device, in order to carrying out collection pressure or release is made Industry.

2. micro pressure power set as described in claim 1, which is characterized in that the gas collection plate have between 6mm to 8mm it Between length, between 6mm to the width between 8mm, and the length and the width ratio is between 0.75 times to 1.33 times.

3. micro pressure power set as described in claim 1, which is characterized in that the gas collection plate has the length and 6mm of 6mm Width.

4. micro pressure power set as described in claim 1, which is characterized in that the inlet plate have an at least air admission hole, At least one confluence round and the central recess for forming a confluence chamber, an at least air admission hole is for importing gas, the bus-bar Hole corresponds to the air admission hole, and the gas of the air admission hole is guided to converge into the confluence chamber that the central recess formed and should Confluence chamber corresponds to the hollow bore of the resonance plate.

5. micro pressure power set as described in claim 1, which is characterized in that the piezoelectric actuator includes：

One suspension board, can be by a central part to a peripheral part bending vibration；

One outline border, around the outside for being arranged at the suspension board；

An at least stent is connected between the suspension board and the outline border, to provide resilient support；

One piezoelectric ceramic plate has the length of side no more than the suspension board length of side, is attached on a first surface of the suspension board, uses The suspension board bending vibration is driven to apply voltage.

6. the micro pressure power set described in claim 5, which is characterized in that the suspension board is square kenel.

7. micro pressure power set as described in claim 1, which is characterized in that the gas collection plate be equipped with one first through hole, One second through hole, one first release chamber and a first outlet chamber and with a reference surface, the first outlet chamber With a protrusion structure, the height of the protrusion structure is higher than the reference surface of the gas collection plate, first through hole with this first Release chamber is connected, which is connected with the first outlet chamber.

8. micro pressure power set as described in claim 1, which is characterized in that the valve sheet has between 0.1mm extremely Thickness between 0.3mm.

9. micro pressure power set as claimed in claim 7, which is characterized in that the exit plate is equipped with a release through hole, one Outlet through hole, one second release chamber and a second outlet chamber and with a reference surface, reference surface recessed 1 the Two release chambers and a second outlet chamber, the release through hole are located at the second release chamber centre, the release through hole end Portion has a protrusion structure, and the height of the protrusion structure is higher than the reference surface of the exit plate, the outlet through hole with this second Outlet chamber be connected and the second release chamber and the second outlet chamber between there is a connection runner, and the valve Piece and exit plate sequentially stack setting and are positioned on the gas collection plate of the minisize fluid control device, the release through hole of the exit plate Corresponding to first through hole of the gas collection plate, the second release chamber of the exit plate corresponds to the first pressure-releasing cavity of the gas collection plate Room, the second outlet chamber of the exit plate corresponds to the first outlet chamber of the gas collection plate, and the valve sheet is arranged at the gas collection The first release chamber and the second release chamber are obstructed between plate and the exit plate, and the valve opening of the valve sheet is correspondingly arranged Between second through hole and the outlet through hole.

10. micro pressure power set as claimed in claim 9, which is characterized in that gas is from the minisize fluid control device When being transmitted to downwards in the micro valve device, first unloaded into this by the first through hole of the gas collection plate and second through hole It presses in chamber and the first outlet chamber, and the protrusion structure that the valve sheet of the micro valve device quickly contradicts the exit plate has Profit forms prestressing effect, completely encloses the release through hole, while imports gas by the valve opening of the valve sheet to flow into this miniature Collection pressure operation is carried out in the outlet through hole of valving.

11. micro pressure power set as claimed in claim 10, which is characterized in that be more than importing gas when collecting body of calming the anger When, collect body of calming the anger from the outlet through hole towards the second outlet chamber, so that the valve sheet displacement, and make being somebody's turn to do for the valve sheet Valve opening is resisted against the gas collection plate and closes, at the same collect calm the anger body in the second outlet chamber can along connection runner flow to this second In pressure-releasing cavity room, at this time in the valve sheet displacement in the second pressure-releasing cavity room, collecting body of calming the anger can be flowed out by the release through hole, to carry out Release operation.

12. micro pressure power set as claimed in claim 11, which is characterized in that the exit plate sets an at least /V knot Structure is in the second pressure-releasing cavity room, Auxiliary support valve sheet, to prevent the valve sheet from collapsing.

13. micro pressure power set as claimed in claim 12, which is characterized in that the height of the position limiting structure is 0.2mm.

14. micro pressure power set as claimed in claim 5, which is characterized in that this of the minisize fluid control device is outstanding Kickboard have between 2mm between 4.5mm length, between 2mm to the width between 4.5mm and between 0.1mm to 0.3mm Between thickness.

15. micro pressure power set as claimed in claim 14, which is characterized in that this of the minisize fluid control device is outstanding The length of kickboard is 2.5mm to 3.5mm, width is 2.5mm to 3.5mm, thickness 0.2mm.

16. micro pressure power set as claimed in claim 5, which is characterized in that the piezoelectric ceramic plate, which has to be not more than, to be somebody's turn to do The length of side of the suspension board length of side, have between 2mm between 4.5mm length, between 2mm to the width between 4.5mm and Jie In 0.05mm to the thickness between 0.3mm, and the length and the width ratio is between 0.44 times to 2.25 times.

17. micro pressure power set as claimed in claim 16, which is characterized in that the length of the piezoelectric ceramic plate is 2.5mm to 3.5mm, width are 2.5mm to 3.5mm, thickness 0.10mm.

18. micro pressure power set as claimed in claim 5, which is characterized in that this of the minisize fluid control device is outstanding Kickboard further includes a protrusion and is arranged on a second surface of the suspension board, and height is between 0.02mm between 0.08mm.

19. micro pressure power set as described in claim 1, which is characterized in that the minisize fluid control device should be into Gas plate is made of a stainless steel, and thickness is between 0.3mm between 0.5mm.

20. micro pressure power set as described in claim 1, which is characterized in that this of the minisize fluid control device is common The piece that shakes is made of a copper material, and thickness is between 0.02mm between 0.07mm.

21. micro pressure power set as described in claim 1, which is characterized in that the minisize fluid control device further includes An at least insulating trip and a conductive sheet, and an at least insulating trip and the conductive sheet are sequentially arranged under the piezoelectric actuator.

22. micro pressure power set as claimed in claim 5, which is characterized in that the pressure of the minisize fluid control device The outline border of electric actuator is made of a stainless steel, and thickness is between 0.1mm between 0.4mm.

23. micro pressure power set as claimed in claim 7, which is characterized in that the collection of the minisize fluid control device The protrusion structure of the first outlet chamber of gas plate has between 0.1mm to the height between 0.55mm.

24. micro pressure power set as claimed in claim 23, which is characterized in that the protrusion knot of the first outlet chamber The height of structure is 0.2mm.

25. micro pressure power set as claimed in claim 9, which is characterized in that the exit plate of the micro valve device The release through hole the protrusion structure have between 0.1mm to the height between 0.55mm.

26. micro pressure power set as claimed in claim 7, which is characterized in that the collection of the minisize fluid control device Gas plate has more a gas collection chamber in a surface, and the gas collection chamber is connected with first through hole and second through hole.

27. micro pressure power set as claimed in claim 26, which is characterized in that the gas collection of minisize fluid control device The first release chamber and the first outlet chamber of plate are arranged on the reference surface of the opposite gas collection chamber.

28. micro pressure power set as described in claim 1, which is characterized in that minisize fluid control device assembling is micro- The overall thickness of type valving maintains the height to 1.5mm to 4mm.