CN108071578A - Miniature pneumatic power device - Google Patents

Abstract

A micro pneumatic power plant comprising: the micro fluid control device comprises an air inlet plate, a resonance sheet, a piezoelectric actuator and an air collecting plate which are arranged in a stacked mode, wherein a first cavity formed by a gap is formed between the resonance sheet and the piezoelectric actuator, when the piezoelectric actuator is driven, gas is led in from the air inlet plate, enters the first cavity through the resonance sheet and is transmitted again, and a pressure gradient flow channel is formed to continuously push out the gas; the microvalve device includes a stacked valve plate and an outlet plate; when the gas is transmitted from the micro fluid control device to the micro valve device, the valve hole of the valve plate is opened or closed in response to the unidirectional flow of the gas, so as to collect or release the pressure.

Description

Micro Pneumatic Power Device

【Technical field】

This case is about a miniature pneumatic power device, especially a miniature ultra-thin and silent micro pneumatic power device.

【Background technique】

At present, in various fields, whether it is medicine, computer technology, printing, energy and other industries, products are developing towards refinement and miniaturization. Among them, the fluid delivery structures included in products such as micropumps, sprayers, inkjet heads, and industrial printing devices As its key technology, how to break through its technical bottleneck through innovative structure is an important content of development.

For example, in the pharmaceutical industry, many instruments or equipment that need to be driven by pneumatic power usually use traditional motors and pneumatic valves to achieve the purpose of gas delivery. However, limited by the structure of these traditional motors and gas valves, it is difficult to reduce the volume of such instruments and equipment, so that the volume of the overall device cannot be reduced, that is, it is difficult to achieve the goal of thinning, so it cannot be installed It is not convenient enough to be used on or in conjunction with a portable device. In addition, these traditional motors and gas valves also generate noise during operation, making users anxious, resulting in inconvenient and uncomfortable use.

Therefore, how to develop a kind of miniature pneumatic power device that can improve the above-mentioned known technology deficiency, can make the instrument or equipment that traditionally adopts the fluid control device achieve small volume, miniaturization and silence, and then achieve the purpose of light and comfortable portable, realize problems that urgently need to be solved at present.

【Content of invention】

The main purpose of this case is to provide a micro-pneumatic power device suitable for portable or wearable instruments or equipment, by integrating a micro-fluid control device and a micro-valve device, so as to solve the problem of using pneumatic power-driven instruments in the known technology Or the device has a large volume, is difficult to thin, cannot achieve the purpose of portability, and lacks such as loud noise.

In order to achieve the above purpose, a more general implementation of this case is to provide a micro pneumatic power device, including a micro fluid control device and a micro valve device; the micro fluid control device includes an air inlet plate, a resonance plate, a Piezoelectric actuator and a gas collecting plate, the air inlet plate has at least one air inlet, at least one confluence row hole and a central recess forming the confluence chamber, at least one inlet hole is used to introduce gas, and the confluence row hole corresponds to the inlet air holes, and guide the gas in the air intake holes to flow into the confluence chamber formed by the central concave part. The resonant plate has a hollow hole corresponding to the confluence chamber of the air intake plate. The piezoelectric actuator has a suspension plate and an outer frame and a piezoelectric ceramic plate, the suspension plate has a length between 2mm to 4.5mm, a width between 2mm to 4.5mm, and a thickness between 0.1mm to 0.3mm, and the outer frame has at least A bracket, connected and arranged between the suspension board and the outer frame, the piezoelectric ceramic board is attached to the first surface of the suspension board, has a side length not greater than the side length of the suspension board, and has a distance between 2mm and 4.5mm The length between, the width between 2mm and 4.5mm and the thickness between 0.05mm and 0.3mm, and the ratio of length and width between 0.44 times and 2.25 times, the gas collecting plate has a first through hole , the second through hole, the first pressure relief chamber, the first outlet chamber and the reference surface, the first outlet chamber has a convex structure, the height of the convex structure is higher than the reference surface of the gas collecting plate, the first through hole It communicates with the first pressure relief chamber, and the second through hole communicates with the first outlet chamber, in which the gas collecting plate, piezoelectric actuator, resonant plate and air inlet plate are arranged in sequence corresponding to each other, and the resonance There is a gap between the sheet and the piezoelectric actuator to form a first chamber, so that when the piezoelectric actuator is driven, the gas is introduced from at least one inlet hole of the inlet plate and collected to the center through at least one bus row hole The concave portion flows through the hollow hole of the resonant plate to enter the first chamber, and then is transmitted downward through the gap between at least one bracket of the piezoelectric actuator to continuously push out the gas; and the micro valve device includes a valve plate and an outlet plate are sequentially stacked and positioned on the gas collecting plate of the microfluidic control device, the valve plate has a valve hole, the valve plate has a thickness between 0.1mm and 0.3mm, and the convexity of the gas collecting plate The internal structure is set corresponding to the valve hole of the valve plate, which is beneficial to resist the valve hole to form a pre-force effect and completely close the valve hole. The outlet plate has a pressure relief through hole, an outlet through hole, a second pressure relief chamber, and a second outlet cavity. chamber, at least one position-limiting structure, and a reference surface, the reference surface is recessed with a second pressure relief chamber and a second outlet chamber, the pressure relief through hole is located at the center of the second pressure relief chamber, the pressure relief The end of the through hole has a convex structure, the height of the convex structure is higher than the reference surface of the outlet plate, the outlet through hole communicates with the second outlet chamber, and at least one limiting structure is arranged in the second pressure relief chamber Indoors, the height of the limiting structure is between 0.1mm and 0.5mm, and there is a communication channel between the second pressure relief chamber and the second outlet chamber, wherein the pressure relief through hole of the outlet plate corresponds to the gas collection plate The first through hole of the outlet plate, the second pressure relief chamber of the outlet plate corresponds to the first pressure relief chamber of the gas collecting plate, the second outlet chamber of the outlet plate corresponds to the first outlet chamber of the gas collecting plate, The valve plate is arranged between the gas collecting plate and the outlet plate to block the communication between the first pressure relief chamber and the second pressure relief chamber, and the valve hole of the valve plate is correspondingly arranged between the second through hole and the outlet through hole. When the micro fluid control device is transported downwards into the micro valve device, it enters the first pressure relief chamber and the first outlet chamber through the first through hole and the second through hole of the gas collecting plate, and the valve plate of the micro valve device The structure of the convex part that quickly collides with the outlet plate is beneficial to form a pre-force effect, completely close the pressure relief through hole, and at the same time, the introduced gas flows from the valve hole of the valve plate into the outlet through hole of the micro valve device for pressure collection. When the pressure collection gas is greater than the introduction When there is gas, the pressure-gathering gas flows from the outlet through hole to the second outlet chamber to displace the valve plate, and make the valve hole of the valve plate close against the gas collecting plate, and at least one limit structure assists in supporting the valve plate , to prevent the valve plate from collapsing, and at the same time, the pressure-gathering gas in the second outlet chamber can flow into the second pressure-relieving chamber along the communication channel. At this time, the valve plate in the second pressure-relieving chamber is displaced, and the pressure-gathering gas can be released Outflow through the hole for pressure relief work.

In order to achieve the above purpose, another broad implementation of this case is to provide a micro pneumatic power device, including a micro fluid control device and a micro valve device; the micro fluid control device includes an air inlet plate, a resonance plate, A piezoelectric actuator and a gas collecting plate, the gas collecting plate has at least two through holes and at least two chambers, wherein the gas collecting plate, the piezoelectric actuator, the resonant plate and the gas inlet plate are stacked and positioned in sequence , and there is a gap between the resonant plate and the piezoelectric actuator to form the first chamber. When the piezoelectric actuator is driven, the gas enters from the gas inlet plate and flows through the resonant plate to enter the first chamber and then downward Transmission; and the micro-valve device includes a valve plate and an outlet plate which are sequentially and correspondingly stacked and positioned on the gas collecting plate of the micro-fluid control device, the valve plate has a valve hole, and the outlet plate has at least two through holes and at least two chambers ; Wherein the gas collection chamber is formed between the micro fluid control device and the micro valve device, when the gas is transmitted downward from the micro fluid control device to the gas collection chamber, and then delivered to the micro valve device, through the gas collection plate, the outlet The plates respectively have at least two through holes and at least two chambers, so that the valve holes of the valve plate can be opened or closed correspondingly in response to the unidirectional flow of gas, so as to carry out pressure collection or pressure relief operations.

In order to achieve the above purpose, another broad implementation aspect of this case is to provide a micro pneumatic power device, including a micro fluid control device and a micro valve device; the micro fluid control device includes sequentially stacked intake plates, resonance sheet, piezoelectric actuator and gas collection plate, wherein there is a gap between the resonant sheet and the piezoelectric actuator to form the first chamber, when the piezoelectric actuator is driven, the gas enters from the intake plate and flows through the resonance sheet, to enter the first chamber for retransmission; and the micro valve device includes valve sheets stacked in sequence and the outlet plate is positioned on the gas collecting plate of the micro fluid control device, the valve sheet has a valve hole, wherein, when the gas flows from the micro The fluid control device is transferred to the micro-valve device for pressure collection or pressure relief.

【Description of drawings】

FIG. 1A is a schematic diagram of the front exploded structure of the miniature pneumatic power device of the preferred embodiment in this case.

FIG. 1B is a schematic diagram of the front assembled structure of the micro pneumatic power device shown in FIG. 1A .

FIG. 2A is a schematic diagram of the rear exploded structure of the micro pneumatic power device shown in FIG. 1A .

FIG. 2B is a schematic diagram of the rear assembled structure of the micro pneumatic power device shown in FIG. 1A .

FIG. 3A is a schematic diagram of the front assembled structure of the piezoelectric actuator of the micro pneumatic power device shown in FIG. 1A .

FIG. 3B is a schematic diagram of the rear assembly structure of the piezoelectric actuator of the micro-pneumatic power device shown in FIG. 1A .

FIG. 3C is a schematic cross-sectional structure diagram of the piezoelectric actuator of the micro pneumatic power device shown in FIG. 1A . 4A to 4C are schematic diagrams of various implementations of piezoelectric actuators.

FIGS. 5A to 5E are partial schematic views of the micro-fluid control device of the micro-pneumatic power device shown in FIG. 1A .

FIG. 6A is a schematic diagram of the pressure collecting action of the gas collecting plate and the micro valve device of the micro pneumatic power device shown in FIG. 1A .

FIG. 6B is a schematic diagram of the pressure relief action of the gas collecting plate and the micro valve device of the micro pneumatic power device shown in FIG. 1A .

FIG. 7A to FIG. 7E are schematic diagrams of the pressure collecting action of the micro pneumatic power device shown in FIG. 1A .

FIG. 8 is a schematic diagram of the decompression or decompression action of the micro-pneumatic power device shown in FIG. 1A .

【Detailed ways】

Some typical embodiments embodying the features and advantages of the present application will be described in detail in the description in the following paragraphs. It should be understood that this case can have various changes in different aspects, all of which do not depart from the scope of this case, and the descriptions and diagrams therein are used as illustrations in nature, rather than construed to limit this case.

The micro-pneumatic power device 1 of this case can be applied to industries such as medical biotechnology, energy, computer technology or printing, so as to transmit gas, but not limited thereto. Please refer to Fig. 1A, Fig. 1B, Fig. 2A, Fig. 2B and Fig. 7A to Fig. 7E, Fig. 1A is a schematic diagram of the front exploded structure of the micro-pneumatic power device of the preferred embodiment of this case, and Fig. 1B is the micro-pneumatic power device shown in Fig. 1A The schematic diagram of the front combined structure of the device, Fig. 2A is a schematic diagram of the back exploded structure of the micro-pneumatic power device shown in Fig. 1A, Fig. 2B is a schematic diagram of the back combined structure of the micro-pneumatic power device shown in Fig. Schematic diagram of the pressure-gathering action of the micro-pneumatic power device shown in 1A. As shown in Figure 1A and Figure 2A, the micro-pneumatic power device 1 of this case is composed of a micro-fluid control device 1A and a micro-valve device 1B, wherein the micro-fluid control device 1A has a housing 1a, a piezoelectric actuator 13 , insulating sheets 141, 142 and conductive sheet 15, wherein the casing 1a includes the gas collecting plate 16 and the base 10, and the base 10 includes the air inlet plate 11 and the resonant sheet 12, but not limited thereto. The piezoelectric actuator 13 is arranged corresponding to the resonant sheet 12, and makes the intake plate 11, the resonant sheet 12, the piezoelectric actuator 13, the insulating sheet 141, the conductive sheet 15, another insulating sheet 142, the gas collecting plate 16, etc. are stacked in sequence, and the piezoelectric actuator 13 is assembled by a suspension plate 130, an outer frame 131, at least one bracket 132 and a piezoelectric ceramic plate 133; and the micro valve device 1B includes A valve plate 17 and an outlet plate 18 are not limited thereto. And in this embodiment, as shown in FIG. 1A, the gas collecting plate 16 is not only a single plate structure, but also a frame structure with side walls 168 on the periphery, and the gas collecting plate 16 has a thickness between 4mm and 10mm. The length between, the width between 4mm and 10mm, and the ratio between the length and the width is between 0.4 times and 2.5 times, and the side wall 168 formed by the periphery and the plate at the bottom jointly define a The accommodating space 16a is used for the piezoelectric actuator 13 to be arranged in the accommodating space 16a, so when the micro pneumatic power device 1 of this case is assembled, its front schematic diagram will be as shown in Figure 1B, and 7A to 7E, it can be seen that the micro-fluid control device 1A is assembled correspondingly to the micro-valve device 1B, that is, the valve plate 17 and the outlet plate 18 of the micro-valve device 1B are sequentially stacked and positioned on the micro-fluid control device. It is formed on the gas collecting plate 16 of the control device 1A. And the rear schematic view of its assembly then shows the pressure relief through hole 181 and the outlet 19 on the outlet plate 18, the outlet 19 is used to connect with a device (not shown), and the pressure relief through hole 181 is then used to make the micro valve device The gas in 1B is discharged to achieve the effect of pressure relief. By virtue of the assembly arrangement of the microfluidic control device 1A and the microvalve device 1B, the gas is inhaled from at least one gas inlet hole 110 on the gas inlet plate 11 of the microfluidic control device 1A, and passes through the piezoelectric actuator 13, and flow through a plurality of pressure chambers (not shown) to continue transmission, so that the gas can flow in one direction in the micro-valve device 1B, and the pressure can be accumulated in the outlet port connected to the outlet port of the micro-valve device 1B. In a device (not shown), and when pressure relief is required, the output of the microfluid control device 1A is regulated so that the gas is discharged through the pressure relief through hole 181 on the outlet plate 18 of the micro valve device 1B, so as to Perform depressurization.

Please continue to refer to FIG. 1A and FIG. 2A. As shown in FIG. 1A, the air inlet plate 11 of the microfluidic control device 1A has a first surface 11b, a second surface 11a and at least one air inlet 110. In this embodiment, The number of air intake holes 110 is 4, but not limited thereto. It runs through the first surface 11b and the second surface 11a of the air intake plate 11, and is mainly used for supplying gas from outside the device to conform to the effect of atmospheric pressure. It flows into the microfluidic control device 1A from the at least one air inlet 110 . And as shown in FIG. 2A, it can be seen from the first surface 11b of the air inlet plate 11 that there is at least one bus hole 112 corresponding to the at least one air inlet hole 110 on the second surface 11a of the air inlet plate 11. set up. In this embodiment, the number of busbar holes 112 corresponds to the number of air inlet holes 110, and the number is four, but not limited thereto, wherein the central communication points of these busbar holes 112 have a central recess 111, Moreover, the central concave portion 111 communicates with the busbar hole 112 , so that the gas entering the busbar hole 112 from the air inlet 110 can be guided and concentrated to the central concave portion 111 for delivery. Therefore, in this embodiment, the air inlet plate 11 has an integrally formed air inlet hole 110, a confluence row hole 112, and a central concave portion 111, and a confluence chamber for confluent gas is correspondingly formed at the central concave portion 111 for supplying Gas storage. In some embodiments, the material of the air inlet plate 11 can be but not limited to be made of a stainless steel material, and its thickness is between 0.3mm and 0.5mm, and its preferred value is 0.4mm, but This is not the limit. In some other embodiments, the depth of the confluence chamber formed by the central recess 111 is the same as the depth of the confluence row holes 112, and the preferred value of the depth of the confluence chamber and the confluence row holes 112 is between Between 0.15mm and 0.25mm, but not limited thereto. The resonant plate 12 is made of a flexible material, but not limited thereto, and has a hollow hole 120 on the resonant plate 12, which is set corresponding to the central recess 111 of the first surface 11b of the air intake plate 11 to allow the gas to circulate. In some other embodiments, the resonant plate 12 can be made of a copper material, but not limited thereto, and its thickness is between 0.02mm and 0.07mm, and its preferred value is 0.04mm, but it is also This is not the limit.

Please refer to Fig. 3A, Fig. 3B and Fig. 3C at the same time, which are respectively the front structural diagram, the rear structural diagram and the cross-sectional structural diagram of the piezoelectric actuator of the micro-pneumatic power device shown in Fig. 1A, the piezoelectric actuator 13 It is assembled by a suspension board 130, an outer frame 131, at least one bracket 132 and a piezoelectric ceramic board 133, wherein the piezoelectric ceramic board 133 is attached to the first surface 130b of the suspension board 130 for Apply voltage to generate deformation to drive the suspension plate 130 to bend and vibrate. The suspension plate 130 has a central portion 130d and an outer peripheral portion 130e, so that when the piezoelectric ceramic plate 133 is driven by voltage, the suspension plate 130 can move from the central portion 130d to the outer peripheral portion 130e bending vibration, and the at least one bracket 132 is connected between the suspension board 130 and the outer frame 131. In this embodiment, the bracket 132 is connected and arranged between the suspension board 130 and the outer frame 131, and its two ends are Respectively connected to the outer frame 131 and the suspension board 130 to provide elastic support, and there is at least one gap 135 between the bracket 132, the suspension board 130 and the outer frame 131 for gas circulation, and the suspension board 130, the outer The type and quantity of the frame 131 and the bracket 132 have many variations. In addition, the outer frame 131 is disposed around the outer side of the suspension board 130 and has a conductive pin 134 protruding outward for power supply connection, but not limited thereto. In this embodiment, the suspension board 130 has a stepped surface structure, which means that the second surface 130a of the suspension board 130 further has a convex portion 130c, and the convex portion 130c can be but not limited to a circular protrusion structure, and the height of the convex part 130c is between 0.02 mm to 0.08 mm, and the preferred value is 0.03 mm, and its diameter is 0.55 times the minimum side length of the suspension board 130 . 3A and 3C at the same time, it can be seen that the surface of the convex portion 130c of the suspension board 130 is coplanar with the second surface 131a of the outer frame 131, and the second surface 130a of the suspension board 130 and the second surface 132a of the bracket 132 They are also coplanar, and there is a certain depth between the protrusion 130 c of the suspension board 130 and the second surface 131 a of the outer frame 131 , and the second surface 130 a of the suspension board 130 and the second surface 132 a of the bracket 132 . As for the first surface 130b of the suspension plate 130, as shown in Figure 3B and Figure 3C, it is a flat coplanar structure with the first surface 131b of the outer frame 131 and the first surface 132b of the bracket 132, and the piezoelectric ceramic plate 133 is attached to the first surface 130b of the flat suspension board 130 . In some other embodiments, the shape of the suspension board 130 can also be a double-sided flat plate-like square structure, which is not limited thereto, and can be changed arbitrarily according to the actual implementation situation. In some embodiments, the suspension board 130 , the bracket 132 and the outer frame 131 can be integrally formed, and can be made of a metal plate, such as stainless steel, but not limited thereto. And in some embodiments, the thickness of the suspension board 130 is between 0.1mm and 0.3mm, and its preferred value is 0.2mm, and the length of the suspension board 130 is between 2mm and 4.5mm, and its A preferable value is 2.5mm to 3.5mm, and the width is between 2mm to 4.5mm, and the preferable value is 2.5mm to 3.5mm but not limited thereto. As for the thickness of the outer frame 131 is between 0.1 mm to 0.4 mm, preferably 0.3 mm, but not limited thereto.

In some other embodiments, the thickness of the piezoelectric ceramic plate 133 is between 0.05mm and 0.3mm, and its preferred value is 0.10mm, and the thickness of the piezoelectric ceramic plate 133 is not larger than that of the suspension plate 130 The side length of the side length has a length between 2mm and 4.5mm, and its preferred value can be between 2.5mm and 3.5mm, and a width between 2mm and 4.5mm, and its preferred value can be between 2.5mm and 4.5mm. 3.5mm, and the preferred value of the ratio of length and width is between 0.44 times and 2.25 times, but it is not limited thereto. In some other embodiments, the side length of the piezoelectric ceramic plate 133 may be smaller than the side length of the suspension plate 130 , and it is also designed as a square plate structure corresponding to the suspension plate 130 , but it is not limited thereto.

In the relevant embodiment of the miniature pneumatic power device 1 of this case, the piezoelectric actuator 13 adopts a square floating plate 130, and its reason is that compared with a circular floating plate (as shown in Fig. 4A (j) ~ (l ) design of the circular suspension board j0) of the form, the structure of the square suspension board 130 obviously has the advantage of saving power, because the capacitive load operated at the resonant frequency, its power consumption will increase with the rise of the frequency, and Because the resonant frequency of the square suspension board 130 is significantly lower than that of the circular suspension board j0, its relative power consumption is also significantly lower, that is, the square design of the piezoelectric actuator 13 used in this case makes it energy-saving. Advantages, especially for wearable devices, saving power is a very important design focus.

Please continue to refer to FIGS. 4A, 4B, and 4C, which are schematic diagrams of various implementations of the piezoelectric actuator. As shown in the figure, it can be seen that the suspension plate 130, the outer frame 131 and the support 132 of the piezoelectric actuator 13 can have various types, and at least can have as many as (a) to (l) shown in Figure 4A. One aspect, for example, (a) the outer frame a1 and the floating board a0 are square structures, and the two are connected by a plurality of brackets a2, for example: 8, but not in the form of This is the limit, and there is a gap a3 between the bracket a2, the suspension board a0, and the outer frame a1 for gas circulation. In another (i) form, the outer frame i1 and the suspension board i0 are also square structures, but only two brackets i2 are used to connect them; in addition, there are further related technologies, such as 4B, As shown in Figure 4C, the suspension plate of the piezoelectric actuator 13 can also have various forms such as (m)~(r) shown in Figure 4B and (s)~(x) shown in Figure 4C, but this In some aspects, both the suspension board 130 and the outer frame 131 are square structures. For example, both the outer frame m1 and the suspension board m0 of the aspect (m) are square structures, and the two are connected by a plurality of brackets m2, for example: 4, but not limited thereto, Moreover, there is a gap m3 between the support m2, the suspension board m0, and the outer frame m1 for fluid circulation. And in this embodiment, the bracket m2 connected between the outer frame m1 and the suspension board m0 can be but not limited to a board connection part m2, and the board connection part m2 has two ends m2' and m2", One end m2' is connected to the outer frame m1, and the other end m2" is connected to the suspension board m0, and the two ends m2' and m2" are corresponding to each other and arranged on the same axis. In (n ) aspect, it also has an outer frame n1, a suspension board n0, a bracket n2 connected between the outer frame n1 and the suspension board n0, and a gap n3 for fluid circulation, and the bracket n2 can also be but not limited to a The board connecting portion n2, the board connecting portion n2 also has two ends n2' and n2", and the end n2' is connected to the outer frame n1, and the other end n2" is connected to the suspension board n0, but in this embodiment Among them, the board connection part n2 is connected to the outer frame n1 and the suspension board n0 at an oblique angle ranging from 0 to 45 degrees. In other words, the two ends n2' and n2" are not arranged on the same horizontal axis. It is a setting relationship for mutual misalignment. In the aspect (o), the structure of the outer frame o1, the suspension board o0, the support o2 connected between the outer frame o1 and the suspension board o0, and the gap o3 for fluid circulation are similar to those of the previous embodiment, except that The design form of the plate connection part o2 as a bracket is slightly different from that of (m), but in this form, the two ends o2' and o2" of the plate connection part o2 are still corresponding to each other and set on the same axis.

Also in the aspect (p), it also has structures such as the outer frame p1, the floating plate p0, the bracket p2 connected between the outer frame p1 and the floating plate p0, and the gap p3 for fluid circulation, and the aspect is implemented here Among them, the board connection part p2 as a bracket further has structures such as a suspension board connection part p20, a beam part p21 and an outer frame connection part p22, wherein the beam part p21 is arranged in the gap p3 between the suspension board p0 and the outer frame p1, and The direction of its arrangement is parallel to the outer frame p1 and the suspension board p0, and the suspension board connection part p20 is connected between the beam part p21 and the suspension board p0, and the outer frame connection part p22 is connected to the beam part p21 and the outer frame p1 Between, and the suspension board connecting portion p20 and the outer frame connecting portion p22 also correspond to each other and are arranged on the same axis.

In the aspect (q), the structure of the outer frame q1, the suspension plate q0, the bracket q2 connected between the outer frame q1 and the suspension plate q0, and the gap q3 for fluid flow are all the same as those of the aforementioned (m), (o ) are similar in style, except that the design form of the plate connecting part q2 used as a support is slightly different from that of (m) and (o). In this form, the suspension plate q0 is in the form of a square, and Each of its sides has two plate connecting parts q2 connected to the outer frame q1, and the two ends q2' and q2" of each plate connecting part q2 are also corresponding to each other and arranged on the same axis. However, in (r ) form, it also has components such as the outer frame r1, the suspension board r0, the bracket r2, and the gap r3, and the bracket r2 can also be but not limited to a board connection part r2. In this embodiment, the board connection part r2 It is a V-shaped structure. In other words, the board connection part r2 is also connected to the outer frame r1 and the suspension board r0 at an oblique angle ranging from 0 to 45 degrees. Therefore, each board connection part r2 has an end part r2" and The suspension board r0 is connected, and has two ends r2 ′ connected to the outer frame r1 , which means that the two ends b2 ′ and the end b2 ″ are not arranged on the same horizontal axis.

Continued as shown in Figure 4C, the appearance patterns of these (s)～(x) patterns roughly correspond to the patterns of (m)～(r) shown in Figure 4B, but in these (s)～( x) In the aspect, the suspension plate 130 of each piezoelectric actuator 13 is provided with a convex portion 130c, that is, the structures such as s4, t4, u4, v4, w4, x4 as shown in the figure, and whether it is (m)-(r) or (s)-(x), the hoverboard 130 is designed in a square shape to achieve the aforementioned low power consumption; and it can be seen from these implementations , whether the suspension board 130 is a double-sided flat plate structure, or a stepped structure with a convex portion on the surface, it is within the protection scope of this case, and the support 132 connected between the suspension board 130 and the outer frame 131 The type and quantity can also be changed arbitrarily according to the actual implementation situation, and are not limited to the form shown in this case. As mentioned above, these suspension boards 130, outer frame 131 and bracket 132 are structures that can be integrally formed, but not limited thereto, as for their manufacturing methods, they can be processed by traditional processing, or yellow photolithography, or laser processing, Or electroforming, or electric discharge machining, etc., are not limited to this.

In addition, please continue to refer to FIG. 1A and FIG. 2A. In the microfluidic control device 1A, an insulating sheet 141, a conductive sheet 15 and another insulating sheet 142 are sequentially and correspondingly arranged under the piezoelectric actuator 13, and their The form roughly corresponds to the form of the outer frame of the piezoelectric actuator 13 . In some embodiments, the insulating sheets 141 and 142 are made of insulating materials, such as plastic, but not limited thereto, for insulation purposes; in other embodiments, the conductive sheet 15 is made of Constructed of conductive materials, such as, but not limited to, metal, for the purpose of conducting electricity. And, in this embodiment, a conductive pin 151 may also be provided on the conductive sheet 15 for electrical conduction.

Please refer to FIG. 1A and FIG. 5A to FIG. 5E at the same time, wherein FIG. 5A to FIG. 5E are partial action diagrams of the micro fluid control device 1A of the micro pneumatic power device shown in FIG. 1A . First, as shown in FIG. 5A, it can be seen that the microfluidic control device 1A is formed by stacking the gas inlet plate 11, the resonant plate 12, the piezoelectric actuator 13, the insulating plate 141, the conductive plate 15 and another insulating plate 142 in sequence. In this embodiment, a material is filled in the gap g0 between the resonant plate 12 and the periphery of the outer frame 131 of the piezoelectric actuator 13, such as conductive glue, but not limited thereto, so that The depth of the gap g0 can be maintained between the resonant plate 12 and the convex portion 130c of the suspension plate 130 of the piezoelectric actuator 13, thereby guiding the airflow to flow more rapidly, and because the convex portion 130c of the suspension plate 130 and the resonance plate 12 Keep a proper distance to reduce contact and interference with each other, so that noise generation can be reduced.

Please continue to refer to FIGS. 5A to 5E. As shown in the figure, when the air intake plate 11, the resonant plate 12 and the piezoelectric actuator 13 are assembled in sequence, the hollow hole 120 of the resonant plate 12 can be connected with the The gas inlet plate 11 together forms a chamber for converging gas, and a first chamber 121 is further formed between the resonant plate 12 and the piezoelectric actuator 13 for temporarily storing gas, and the first chamber 121 is transparent. Through the hollow hole 120 of the resonant plate 12, it communicates with the cavity at the central recess 111 of the first surface 11b of the intake plate 11, and the two sides of the first cavity 121 are connected by the bracket 132 of the piezoelectric actuator 13. The gap 135 between them communicates with the micro valve device 1B arranged thereunder.

When the micro-fluid control device 1A of the micro-pneumatic power device 1 is actuated, the piezoelectric actuator 13 is mainly actuated by voltage to vibrate vertically reciprocatingly with the support 132 as a fulcrum. As shown in Figure 5B, when the piezoelectric actuator 13 is actuated by the voltage to vibrate downward, since the resonant plate 12 is a light and thin sheet structure, when the piezoelectric actuator 13 vibrates, the resonance The sheet 12 will also carry out vertical reciprocating vibration with the resonance, that is, the part of the resonant sheet 12 corresponding to the central recess 111 of the air inlet plate 11 will also be deformed with the bending vibration, that is, the resonant sheet 12 corresponds to the intake plate 11. The central concave portion 111 of the gas plate 11 is the movable part 12a of the resonant piece 12, so when the piezoelectric actuator 13 bends and vibrates downward, the movable part 12a of the resonant piece 12 will be brought by the fluid. Injection and pushing and driven by the vibration of the piezoelectric actuator 13, and as the piezoelectric actuator 13 bends and vibrates downward, the gas enters through at least one air inlet 110 on the air inlet plate 11, and passes through At least one bus hole 112 on the first surface 11b is collected at the central central recess 111, and then flows downwards into the first chamber 121 through the central hole 120 corresponding to the central recess 111 on the resonant plate 12, which Finally, driven by the vibration of the piezoelectric actuator 13, the resonant plate 12 will resonate vertically and vibrate vertically, as shown in FIG. Vibrate downward, and stick to the convex portion 130c of the suspension plate 130 of the piezoelectric actuator 13, so that the area other than the convex portion 130c of the suspension plate 130 and the fixed portion 12b on both sides of the resonant piece 12 The distance between the chambers will not become smaller, and the volume of the first chamber 121 will be compressed by the deformation of the resonant plate 12, and the circulation space in the middle of the first chamber 121 will be closed, so that the gas in it is pushed to flow to both sides , and then pass through the gap 135 between the brackets 132 of the piezoelectric actuator 13 to flow downward. As for FIG. 5D, the movable part 12a of the resonant plate 12 is deformed by bending vibration, and then returns to the initial position, and the subsequent piezoelectric actuator 13 is driven by voltage to vibrate upwards, which also squeezes the first chamber 121. At this time, since the piezoelectric actuator 13 is lifted upwards, the displacement of the lift can be d, so that the gas in the first chamber 121 will flow toward both sides, and then drive the gas to continuously flow from the gas inlet plate At least one air inlet 110 on 11 enters, and then flows into the cavity formed by the central concave portion 111, and as shown in FIG. The movable part 12a of the sheet 12 also moves to the upward position, so that the gas in the central recess 111 flows into the first chamber 121 through the central hole 120 of the resonant sheet 12, and passes through the bracket 132 of the piezoelectric actuator 13. The microfluidic control device 1A flows downward through the gap 135 between them. From this embodiment, it can be seen that when the resonant piece 12 vibrates vertically, the maximum distance of its vertical displacement can be increased by the gap g0 between it and the piezoelectric actuator 13, in other words, between the two A gap g0 is set between the structures so that the resonant plate 12 can produce a larger up-and-down displacement during resonance, and the vibration displacement of the piezoelectric actuator is d, and the difference between the gap g0 and the gap g0 is x, that is, x= g0-d, after testing, when x≦0um, it is in a noisy state; when x=1 to 5um, the maximum output pressure of the micro pneumatic power device 1 can reach 350mmHg; when x=5 to 10um, the maximum output pressure of the micro pneumatic power device 1 It can reach 250mmHg; when x=10 to 15um, the maximum output air pressure of the micro-pneumatic power device 1 can reach 150mmHg, and the corresponding relationship between the values is shown in Table 1 below. The above values are for operating voltages between ±10V and ±20V. In this way, a pressure gradient is generated in the flow channel design of the microfluid control device 1A, so that the gas flows at a high speed, and the gas is transmitted from the suction end to the discharge end through the impedance difference in the flow channel in and out direction, and there is a pressure gradient at the discharge end. Under the state of air pressure, it still has the ability to continuously push out the gas, and can achieve the effect of silence.

(Table I) Test item x (displacement and gap difference) Maximum output air pressure 1 x=1 to 5um 350mmHg 2 x=5 to 10um 250mmHg 3 x=10 to 15um 150mmHg

In addition, in some embodiments, the vertical reciprocating vibration frequency of the resonant plate 12 can be the same as the vibration frequency of the piezoelectric actuator 13, that is, both can go up or down at the same time, which can be based on the actual implementation situation. Any changes are not limited to the action shown in this embodiment.

Please refer to Fig. 1A, Fig. 2A and Fig. 6A, Fig. 6B at the same time, wherein Fig. 6A is a schematic diagram of the pressure collecting action of the gas collecting plate 16 and the micro valve device 1B of the micro pneumatic power device shown in Fig. 1A, and Fig. 6B is FIG. 1A is a schematic diagram of the pressure relief action of the gas collecting plate 16 and the micro valve device 1B of the micro pneumatic power device. As shown in Figure 1A and Figure 6A, the micro-valve device 1B of the micro-pneumatic power device 1 of this case is formed by stacking the valve plate 17 and the outlet plate 18 in sequence, and works with the gas collecting plate 16 of the micro-fluid control device 1A .

In this embodiment, the gas collecting plate 16 has a surface 160 and a reference surface 161, and the surface 160 is recessed to form a gas collecting chamber 162 for the piezoelectric actuator 13 to be disposed therein, controlled by microfluidics. The gas transported downward by the device 1A is temporarily accumulated in the gas-collecting chamber 162, and there are a plurality of through holes in the gas-collecting plate 16, which include a first through-hole 163 and a second through-hole 164, the first through-hole 163 and the second through-hole 164. One end of the through hole 163 and the second through hole 164 communicate with the gas collection chamber 162, and the other end is respectively connected with the first pressure relief chamber 165 and the first outlet chamber 166 on the reference surface 161 of the gas collection plate 16. connected. And, a convex structure 167 is further added at the first outlet chamber 166, such as but not limited to a cylindrical structure, the height of the convex structure 167 is higher than the reference surface 161 of the gas collecting plate 16, Moreover, the height of the protrusion structure 167 is between 0.1 mm and 0.55 mm, and a preferred value is 0.2 mm.

The outlet plate 18 includes a pressure relief through hole 181, an outlet through hole 182, a reference surface 180 and a second surface 187, wherein the pressure relief through hole 181 and the outlet through hole 182 are through the reference surface 180 and the outlet plate 18. The second surface 187, a second pressure relief chamber 183 and a second outlet chamber 184 are recessed on the reference surface 180, the pressure relief through hole 181 is located at the center part of the second pressure relief chamber 183, and in the second There is a communication channel 185 between the pressure relief chamber 183 and the second outlet chamber 184 for gas circulation, and one end of the outlet through hole 182 is connected with the second outlet chamber 184, and the other end is connected with the outlet. 19 is connected. In this embodiment, the outlet 19 can be connected with a device (not shown), such as a press, but not limited thereto.

The valve plate 17 has a valve hole 170 and a plurality of positioning holes 171. The thickness of the valve plate 17 is between 0.1mm and 0.3mm, and the preferred value is 0.2mm.

When the valve plate 17 is positioned and assembled between the gas collecting plate 16 and the outlet plate 18, the pressure relief through hole 181 of the outlet plate 18 corresponds to the first through hole 163 of the gas collecting plate 16, and the second pressure relief chamber The chamber 183 corresponds to the first pressure relief chamber 165 of the gas collecting plate 16, the second outlet chamber 184 corresponds to the first outlet chamber 166 of the gas collecting plate 16, and the valve plate 17 is arranged on the gas collecting plate 16. Between the plate 16 and the outlet plate 18, the communication between the first pressure relief chamber 165 and the second pressure relief chamber 183 is blocked, and the valve hole 170 of the valve plate 17 is arranged in the second through hole 164 and the outlet through hole. 182, and the valve hole 170 is located at the protrusion structure 167 of the first outlet chamber 166 of the gas collecting plate 16 and is set correspondingly. With the design of this single valve hole 170, the gas can reach the Purpose of one-way flow.

In addition, one end of the pressure relief through hole 181 of the outlet plate 18 can be further provided with a protrusion structure 181a formed by protruding, such as but not limited to a cylindrical structure, and the height of the protrusion structure 181a is between 0.1mm to 0.55mm, and its preferred value is 0.2mm, and the convex structure 181a is improved to increase its height, the height of the convex structure 181a is higher than the reference surface 180 of the outlet plate 18, to strengthen Make the valve plate 17 quickly contact and close the pressure relief through hole 181, and achieve a pre-forced conflicting effect of complete sealing; and, the outlet plate 18 has at least one stop structure 188, and the height of the stop structure 188 can be 0.2mm, taking the present embodiment as an example, the limit structure 188 is arranged in the second pressure relief chamber 183, and is an annular block structure, and is not limited to this, it is mainly used when the micro valve device 1B During the pressure-gathering operation, it is used to support the valve plate 17 to prevent the valve plate 17 from collapsing, and to enable the valve plate 17 to be opened or closed more quickly.

When the micro-valve device 1B is pressure-collecting and actuated, as shown in Figure 6A, it can respond to the pressure provided by the gas transmitted downward from the micro-fluid control device 1A, or when the external atmospheric pressure is greater than that of the outlet. 19 connected to the internal pressure of the device (not shown), the gas will flow from the gas collection chamber 162 in the gas collection plate 16 of the microfluidic control device 1A through the first through hole 163 and the second through hole 164 to the Flow down into the first pressure relief chamber 165 and the first outlet chamber 166, at this moment, the downward gas pressure is to make the flexible valve plate 17 bend downward and make the volume of the first pressure relief chamber 165 enlarged, and corresponding to the first through hole 163, it is flatly attached downwards and abuts against the end of the pressure relief through hole 181, thereby closing the pressure relief through hole 181 of the outlet plate 18, so the second pressure relief chamber 183 The gas inside will not flow out from the pressure relief through hole 181. Of course, in this embodiment, the design of adding a convex structure 181a to the end of the pressure relief through hole 181 can be used to strengthen the valve plate 17 to quickly contact and close the pressure relief through hole 181, and achieve a pre-forced resistance to complete sealing. At the same time, through the limiting structure 188 arranged around the pressure relief through hole 181, it assists in supporting the valve plate 17 so that it will not collapse. On the other hand, since the gas flows downward from the second through hole 164 into the first outlet chamber 166, and the valve plate 17 corresponding to the first outlet chamber 166 is also bent downward, so that its corresponding The valve hole 170 is opened downwards, and the gas can flow from the first outlet chamber 166 through the valve hole 170 into the second outlet chamber 184, and flow to the outlet 19 and the device connected to the outlet 19 by the outlet through hole 182. (not shown), the device is used to collect pressure.

Please continue to refer to FIG. 6B. When the micro-valve device 1B is depressurized, the gas can no longer be input into the gas-collecting chamber 162 by regulating the gas transmission volume of the micro-fluid control device 1A, or when it is connected with the outlet 19 When the internal pressure of the connected device (not shown) is greater than the external atmospheric pressure, the micro valve device 1B can be released. At this time, the gas will be input into the second outlet chamber 184 from the outlet through hole 182 connected with the outlet 19, so that the volume of the second outlet chamber 184 will expand, and then the flexible valve plate 17 will be bent upwards and deformed, and Flatly stick upwards and against the gas collecting plate 16 , so the valve hole 170 of the valve plate 17 will be closed due to being against the gas collecting plate 16 . Of course, in this embodiment, the design of adding a convex structure 167 to the first outlet chamber 166 can be used, so that the flexible valve plate 17 can be bent upwards and quickly resisted, so that the valve hole 170 is more favorable to achieve a predetermined value. The force resistance effect is completely attached to the closed state of the seal. Therefore, when it is in the initial state, the valve hole 170 of the valve plate 17 will be closed due to being close to the convex structure 167, and the inside of the second outlet chamber 184 will be closed. The gas will not flow back into the first outlet chamber 166, so as to achieve a better effect of preventing gas leakage. And, the gas in the second outlet chamber 184 can flow into the second pressure relief chamber 183 through the communication channel 185, thereby expanding the volume of the second pressure relief chamber 183 and making the gas corresponding to the second pressure relief chamber 183 The valve plate 17 of the pressure chamber 183 is also bent and deformed upwards. At this time, because the valve plate 17 is not closed against the end of the pressure relief through hole 181, the pressure relief through hole 181 is in an open state, that is, the second pressure relief chamber The gas in the chamber 183 can flow out through the pressure relief through hole 181 for pressure relief operation. Of course, in this embodiment, the flexible valve plate 17 can be made upward by using the convex structure 181a added at the end of the pressure relief through hole 181 or through the limiting structure 188 provided in the second pressure relief chamber 183. The bending shape changes quickly, which is more favorable for breaking away from the state of closing the pressure relief through hole 181 . In this way, the gas in the device (not shown) connected to the outlet 19 can be discharged to lower the pressure through the one-way pressure relief operation, or the gas in the device (not shown) connected to the outlet 19 can be discharged completely to complete the pressure relief operation.

Please refer to FIG. 1A , FIG. 2A and FIG. 7A to FIG. 7E at the same time, wherein FIG. 7A to FIG. 7E are schematic views of the pressure collection action of the micro pneumatic power device shown in FIG. 1A . As shown in Figure 7A, the micro-pneumatic power device 1 is composed of a micro-fluid control device 1A and a micro-valve device 1B, wherein the micro-fluid control device 1A is composed of an air inlet plate 11, a resonance plate 12, The piezoelectric actuator 13, the insulating sheet 141, the conductive sheet 15, another insulating sheet 142 and the gas collecting plate 16 are stacked and assembled for positioning, and between the resonant sheet 12 and the piezoelectric actuator 13 is a G0, and there is a first chamber 121 between the resonant plate 12 and the piezoelectric actuator 13, and the micro-valve device 1B is also sequentially stacked and assembled by the valve plate 17 and the outlet plate 18, etc. Formed on the gas collecting plate 16 of the control device 1A, and between the gas collecting plate 16 and the piezoelectric actuator 13 of the microfluidic control device 1A, there is a gas collecting chamber 162 and a reference surface 161 on the gas collecting plate 16 Further recess a first pressure relief chamber 165 and a first outlet chamber 166, and further recess a second pressure relief chamber 183 and a second outlet chamber 184 on the reference surface 180 of the outlet plate 18, in this embodiment , the operating voltage of the micro-pneumatic power device is ±10V to ±16V, and these multiple different pressure chambers are matched with the drive of the piezoelectric actuator 13 and the vibration of the resonant plate 12 and the valve plate 17, so as to The gas is transported downward under pressure.

As shown in Figure 7B, when the piezoelectric actuator 13 of the micro-fluid control device 1A is actuated by voltage to vibrate downward, the gas will enter the micro-fluid control device 1A from the air inlet 110 on the gas inlet plate 11 , and through at least one busbar hole 112 to gather at its central recess 111 , and then flow down into the first chamber 121 through the hollow hole 120 on the resonant plate 12 . Thereafter, as shown in FIG. 7C, due to the resonance effect of the vibration of the piezoelectric actuator 13, the resonant plate 12 will also vibrate reciprocatingly, that is, it vibrates downward and is close to the piezoelectric actuator 13. On the convex portion 130c of the floating plate 130, the volume of the cavity at the central concave portion 111 of the intake plate 11 is increased by the deformation of the resonant plate 12, and the volume of the first cavity 121 is compressed at the same time, thereby promoting The gas in the first chamber 121 pushes to flow to both sides, and then passes through the gap 135 between the brackets 132 of the piezoelectric actuator 13 to flow downwards, so as to flow to the micro fluid control device 1A and the micro valve device 1B In the air-collecting chamber 162 between them, the first through-hole 163 and the second through-hole 164 communicated with the air-collecting chamber 162 flow down to the first depressurization chamber 165 and the first outlet chamber correspondingly. In the chamber 166, it can be seen from this embodiment that when the resonant plate 12 performs vertical reciprocating vibration, the maximum distance of its vertical displacement can be increased by the gap g0 between it and the piezoelectric actuator 13, in other words A gap g0 is provided between the two structures so that the resonant plate 12 can have a greater vertical displacement during resonance.

Then, as shown in FIG. 7D, since the resonant plate 12 of the microfluidic control device 1A returns to the initial position, the piezoelectric actuator 13 is driven by voltage to vibrate upward, and the vibration displacement of the piezoelectric actuator is d, the difference from the gap g0 is x, that is, x=g0-d. After testing, when x=1 to 5um and the operating voltage is ±10V to ±16V, its maximum output air pressure can reach at least 300mmHg, but not This is the limit. In this way, the volume of the first chamber 121 is also squeezed, so that the gas in the first chamber 121 flows toward both sides, and is continuously input into the gas collection chamber through the gap 135 between the brackets 132 of the piezoelectric actuator 13 162, in the first pressure relief chamber 165 and the first outlet chamber 166, so that the air pressure in the first pressure relief chamber 165 and the first outlet chamber 166 is greater, and then pushes the flexible valve plate 17 When bending deformation occurs downward, in the second pressure relief chamber 183, the valve plate 17 is flatly pressed downwards and abuts against the convex structure 181a at the end of the pressure relief through hole 181, thereby closing the pressure relief through hole 181, And in the second outlet chamber 184, the valve hole 170 corresponding to the outlet through hole 182 on the valve plate 17 is opened downwards, so that the gas in the second outlet chamber 184 can be passed down to the outlet 19 by the outlet through hole 182. And any device (not shown) connected with the outlet 19, and then to achieve the purpose of pressure-gathering operation. Finally, as shown in FIG. 7E , when the resonant plate 12 of the microfluidic control device 1A resonates and moves upward, the gas in the central recess 111 of the first surface 11 b of the gas inlet plate 11 can flow in through the hollow hole 120 of the resonant plate 12 In the first chamber 121, through the gap 135 between the brackets 132 of the piezoelectric actuator 13, it is continuously transported downwards to the gas collecting plate 16, because the gas pressure continues to increase downwards, so the gas is still Will continue to flow to the outlet 19 and any device connected to the outlet 19 through the gas collection chamber 162, the second through hole 164, the first outlet chamber 166, the second outlet chamber 184 and the outlet through hole 182, The pressure-gathering operation can be driven by the pressure difference between the external atmospheric pressure and the device, but it is not limited thereto.

When the internal pressure of the device (not shown) connected to the outlet 19 was greater than the external pressure, then the miniature pneumatic power device 1 could perform decompression or decompression operations as shown in Figure 8, and its decompression or decompression The action mode of pressure is mainly as mentioned above, the gas can no longer be input into the gas collection chamber 162 by regulating the gas transmission volume of the micro-fluid control device 1A, at this time, the gas will flow from the outlet connected to the outlet 19 The through hole 182 is input into the second outlet chamber 184, so that the volume of the second outlet chamber 184 expands, and then the flexible valve plate 17 is bent and deformed upwards, and flattened upwards and abutted against the first outlet chamber 166 on the protrusion structure 167, so that the valve hole 170 of the valve plate 17 is closed, that is, the gas in the second outlet chamber 184 will not flow back into the first outlet chamber 166; and, in the second outlet chamber 184 The gas can flow into the second pressure relief chamber 183 through the communication channel 185, and then perform the pressure relief operation through the pressure relief through hole 181; in this way, the one-way gas transmission operation of the micro valve structure 1B will The gas in the device connected to the outlet 19 is discharged to reduce the pressure, or completely discharged to complete the pressure relief operation.

The suspension board 130 used in this case is a square shape. When the side length of the suspension board 130 is reduced, and the area of the suspension board 130 is also gradually reduced, it will be found that the reduction in size can improve the rigidity of the suspension board 130 on the one hand, and Due to the reduction of the volume of the internal gas flow channel, it is beneficial to push or compress the air, so that the output air pressure value can be increased; The electric actuator 13 can be maintained in the same vertical direction during operation and is not easy to tilt, thereby reducing the collision interference between the piezoelectric actuator 13 and the resonant plate 12 or other assembly components, so as to reduce the generation of noise, and then Reduce the defective rate of quality. To sum up, when the size of the suspension plate 130 of the piezoelectric actuator 13 is reduced, the piezoelectric actuator 13 can also be made smaller, thereby not only improving the performance of output air pressure, but also reducing noise, and can Reduce the defect rate of the product; on the contrary, it is found that the output air pressure value of the large-sized suspension plate 130 is lower and the defect rate is higher.

Furthermore, the levitation plate 130 and the piezoelectric ceramic plate 133 are the cores of the micro-pneumatic power device 1. As the area of the two decreases, the area of the micro-pneumatic power device 1 can be reduced synchronously and its weight can be reduced, so that the micro-pneumatic power device 1 can be reduced. The micro-pneumatic power device 1 can be easily installed on a portable device without being limited by its large size. Certainly, in order to achieve the thinning trend of the miniature pneumatic power device 1 in this case, the total thickness of the micro fluid control device 1A assembled with the micro valve device 1B is between 1.5 mm and 4 mm, so that the micro gas power device 1 can be light and comfortable. Portable purpose, and can be widely used in medical equipment and related equipment.

To sum up, the micro-pneumatic power device provided in this case mainly uses the mutual assembly of the micro-fluid control device and the micro-valve device to allow gas to enter from the air inlet on the micro-fluid control device, and uses piezoelectric actuation The action of the device causes the gas to generate a pressure gradient in the designed flow channel and pressure chamber, and then makes the gas flow at a high speed and is transmitted to the micro valve device, and then through the one-way valve design of the micro valve device, the gas is passed to the micro valve device. Unidirectional flow, which can accumulate pressure in any device connected to the outlet; and when depressurization or pressure relief is desired, the transmission volume of the microfluidic control device is regulated, and the gas can be transmitted from the device connected to the outlet To the second outlet chamber of the micro-valve device, the gas is transmitted to the second pressure relief chamber through the communication flow channel, and then flows out through the pressure relief through hole, so as to achieve the rapid transmission of gas and at the same time achieve silence The effect can also reduce the overall volume and thinness of the micro gas power device, and then make the micro gas power device achieve the purpose of light and comfortable portability, and can be widely used in medical equipment and related equipment. Therefore, the miniature gas power device in this case is of great industrial value, so please file an application in accordance with the law.

Even though the present invention has been described in detail by the above-mentioned embodiments, it can be modified in various ways by those skilled in the art, all of which are within the scope of the attached patent application.

【Symbol Description】

1: Miniature Pneumatic Power Device

1A: Microfluidic Control Device

1B: Micro-valving device

1a: Housing

10: base

11: Air intake plate

11a: The second surface of the intake plate

11b: The first surface of the intake plate

110: air intake hole

111: Central concave part

112: busbar hole

12: Resonant plate

12a: Movable part

12b: fixed part

120: hollow hole

121: First chamber

13: Piezoelectric Actuator

130: Hoverboard

130a: second surface of the hoverboard

130b: first surface of the hoverboard

130c: convex part

130d: center part

130e: Peripheral part

131: Outer frame

131a: the second surface of the outer frame

131b: the first surface of the outer frame

132: bracket

132a: Second surface of bracket

132b: first surface of bracket

133: Piezoelectric ceramic plate

134, 151: Conductive pins

135: Void

141, 142: insulating sheet

15: Conductive sheet

16: Gas collecting plate

16a: Accommodating space

160: surface

161: datum surface

162: Gathering chamber

163: First through hole

164: second through hole

165: the first pressure relief chamber

166: First exit chamber

167, 181a: Convex structure

168: side wall

17: Valve sheet

170: valve hole

171: Locating holes

18: Export plate

180: datum surface

181: Pressure relief through hole

182: Outlet through hole

183: Second decompression chamber

184: Second exit chamber

185: connected flow channel

187: Second Surface

188: Limiting structure

19: Export

g0: Gap

(a)～(x): Different implementations of piezoelectric actuators

a0, i0, j0, m0, n0, o0, p0, q0, r0: hoverboard

a1, i1, m1, n1, o1, p1, q1, r1: outer frame

a2, i2, m2, n2, o2, p2, q2, r2: bracket, board connection part

a3, m3, n3, o3, p3, q3, r3: gaps

d: Vibration displacement of piezoelectric actuator

s4, t4, u4, v4, w4, x4: convex part

m2', n2', o2', q2', r2': the bracket is connected to the end of the outer frame

m2”, n2”, o2”, q2”, r2”: The bracket is connected to the end of the suspension board.

Claims (33)

1. A miniature pneumatic power plant, characterized in that it comprises: A microfluidic control device, comprising: An air intake plate has at least one air intake hole, at least one confluence row hole and a central recess forming a confluence chamber, the at least one air intake hole is used to introduce gas, the confluence row hole corresponds to the air intake hole, and guides the gas in the inlet hole is confluent to the confluence chamber formed by the central recess; a resonant plate having a hollow hole corresponding to the confluence chamber of the inlet plate; A piezoelectric actuator having: a hoverboard having a length between 2mm and 4.5mm, a width between 2mm and 4.5mm and a thickness between 0.1mm and 0.3mm; an outer frame with at least one bracket connected between the suspension board and the outer frame; and A piezoelectric ceramic plate, attached to a first surface of the suspension plate, and the piezoelectric ceramic plate has a side length not greater than the side length of the suspension plate, has a length between 2mm and 4.5mm, and is between The width between 2mm and 4.5mm and the thickness between 0.05mm and 0.3mm, the ratio of the length to the width of the piezoelectric ceramic plate is between 0.44 times and 2.25 times; A gas collecting plate has a first through hole, a second through hole, a first pressure relief chamber and a first outlet chamber, and has a reference surface, and the first outlet chamber has a convex structure , the height of the protrusion structure is higher than the reference surface of the gas collecting plate, the first through hole communicates with the first pressure relief chamber, and the second through hole communicates with the first outlet chamber; Wherein, the above-mentioned air intake plate, the resonant plate, the piezoelectric actuator and the gas collecting plate are sequentially arranged and positioned in a corresponding stack, and there is a gap between the resonant plate and the piezoelectric actuator to form A first chamber, when the piezoelectric actuator is driven, the gas is introduced from the at least one gas inlet hole of the gas inlet plate, collected to the central concave part through the at least one bus discharge hole, and then flows through the resonance the hollow hole of the sheet to enter the first chamber, and then be transmitted down to the gas collecting plate through a gap between the at least one bracket of the piezoelectric actuator to continuously push out the gas; and A micro valve device, comprising: A valve plate with a valve hole, the valve plate has a thickness between 0.1 mm and 0.3 mm, wherein the protrusion structure of the gas collecting plate is set corresponding to the valve hole of the valve plate, which is beneficial to resist the valve hole creates a pre-force that completely closes the valve hole; and An outlet plate has a pressure relief through hole, an outlet through hole, a second pressure relief chamber, a second outlet chamber and at least one position-limiting structure, and has a reference surface, and the reference surface is recessed with a first Two pressure relief chambers and a second outlet chamber, the pressure relief through hole is located at the center of the second pressure relief chamber, the end of the pressure relief through hole has a convex structure, the height of the convex structure is high On the reference surface of the outlet plate, the outlet through hole communicates with the second outlet chamber, and the at least one limiting structure is arranged in the second pressure relief chamber, and the height of the limiting structure is between 0.1mm to 0.5mm, and there is a communication channel between the second pressure relief chamber and the second outlet chamber; Wherein, the above-mentioned valve plate and the outlet plate are sequentially and correspondingly stacked and positioned on the gas collecting plate of the microfluidic control device, and the pressure relief through hole of the outlet plate corresponds to the first through hole of the gas collecting plate. perforated, the second pressure relief chamber of the outlet plate corresponds to the first pressure relief chamber of the gas collecting plate, and the second outlet chamber of the outlet plate corresponds to the first outlet cavity of the gas collecting plate chamber, and the valve plate is arranged between the gas collecting plate and the outlet plate to block the communication between the first pressure relief chamber and the second pressure relief chamber, and the valve hole of the valve plate is correspondingly arranged in the second pressure relief chamber. Between the through hole and the outlet through hole, when the gas is transported downward from the micro fluid control device to the micro valve device, it enters the first discharge port through the first through hole and the second through hole of the gas collecting plate. The pressure chamber and the first outlet chamber, and the valve plate of the micro valve device quickly collides with the convex structure of the outlet plate to form the pre-force effect, completely close the pressure relief through hole, and at the same time introduce gas from the The valve hole of the valve plate flows into the outlet through hole of the micro valve device for pressure collecting operation. When the pressure collecting gas is greater than the introduced gas, the pressure collecting gas flows from the outlet through hole toward the second outlet chamber, so that The valve plate is displaced, and the valve hole of the valve plate is closed against the gas collecting plate, and the at least one position-limiting structure assists the valve plate to prevent the valve plate from collapsing, and at the same time, the pressure gas is collected in the The second outlet chamber can flow into the second pressure relief chamber along the communication channel, and at this time, the valve plate in the second pressure relief chamber is displaced, and the pressure-collecting gas can flow out through the pressure relief through hole for relief. pressure work. 2. The micro-pneumatic power device as claimed in claim 1, wherein an operating voltage of the micro-pneumatic power device is ±15V, and its maximum output air pressure reaches at least 300 mmHg. 3. The micro pneumatic power device as claimed in claim 1, wherein the piezoelectric ceramic plate of the micro fluid control device has a length of 2.5mm to 3.5mm, a width of 2.5mm to 3.5mm and a thickness of 0.10mm . 4 . The micro pneumatic power device as claimed in claim 1 , wherein the suspension plate of the micro fluid control device has a length of 2.5 mm to 3.5 mm, a width of 2.5 mm to 3.5 mm, and a thickness of 0.2 mm. 5. The micro-pneumatic power device as claimed in claim 1, wherein the suspension plate of the micro-fluid control device further comprises a convex portion disposed on a second surface of the suspension plate, the height of which is between 0.02mm to 0.08mm. 6. The micro-pneumatic power device as claimed in claim 5, wherein the height of the protrusion of the suspension plate is 0.03 mm. 7. The micro-pneumatic power device as claimed in claim 5, wherein the protrusion of the suspension plate is a circular convex structure with a diameter of 0.55 times the minimum side length of the suspension plate. 8 . The micro pneumatic power device as claimed in claim 1 , wherein the inlet plate of the micro fluid control device is made of stainless steel with a thickness between 0.3 mm and 0.5 mm. 9. The micro pneumatic power device according to claim 8, characterized in that the thickness of the inlet plate is 0.4mm. 10 . The micro pneumatic power device as claimed in claim 1 , wherein the resonant plate of the micro fluid control device is made of a copper material with a thickness between 0.02 mm and 0.07 mm. 11 . 11. The micro pneumatic power device according to claim 10, characterized in that the thickness of the resonant plate is 0.04mm. 12. The micro-pneumatic power device according to claim 1, wherein the micro-fluid control device further comprises at least one insulating sheet and a conductive sheet, and the at least one insulating sheet and the conductive sheet are sequentially arranged on the press under the electric actuator. 13. The micro-pneumatic power device according to claim 1, wherein the outer frame of the piezoelectric actuator of the micro-fluid control device is made of a stainless steel material with a thickness between 0.1 mm and 0.4 mm. between. 14. The micro pneumatic power device as claimed in claim 13, wherein the thickness of the outer frame of the piezoelectric actuator is 0.3 mm. 15. The micro-pneumatic power device according to claim 1, wherein two ends of the bracket of the piezoelectric actuator of the micro-fluid control device are connected to the outer frame, and one end is connected to the suspension plate. 16. The micro pneumatic power device as claimed in claim 1, wherein the thickness of the valve plate of the micro valve device is 0.2 mm. 17. The micro pneumatic power device according to claim 1, wherein the height of the limiting structure of the micro valve device is 0.2 mm. 18. The micro-pneumatic power device according to claim 1, wherein the protrusion structure of the first outlet chamber of the gas collecting plate of the micro-fluid control device has a thickness between 0.1 mm and 0.55 mm. the height of. 19. The micro pneumatic power device as claimed in claim 18, wherein the height of the protrusion structure of the first outlet chamber is 0.2 mm. 20 . The micro pneumatic power device of claim 1 , wherein the protrusion structure of the pressure relief through hole of the outlet plate of the micro valve device has a height between 0.1 mm and 0.55 mm. 21. The micro pneumatic power device as claimed in claim 20, wherein the height of the protrusion structure of the pressure relief through hole is 0.2 mm. 22. The micro-pneumatic power device according to claim 1, wherein the gas-collecting plate of the micro-fluid control device further has a gas-collecting chamber on one surface, and the gas-collecting chamber is connected to the first channel The through hole communicates with the second through hole. 23. The micro-pneumatic power device as claimed in claim 22, wherein the first pressure relief chamber and the first outlet chamber of the gas-collecting plate of the micro-fluid control device are arranged on the opposing gas-collecting on this reference surface of the chamber. 24. A micro pneumatic power device, characterized in that it comprises: A microfluidic control device, comprising: an air intake plate; a resonator; A piezoelectric actuator having a levitation plate, wherein the levitation plate has a length of 2 mm to 4.5 mm, a width of 2 mm to 4.5 mm and a thickness of 0.1 mm to 0.3 mm; A gas collecting plate with at least two through holes and at least two chambers; Wherein, the above-mentioned air intake plate, the resonant plate, the piezoelectric actuator and the gas collecting plate are stacked and positioned in sequence, and there is a gap between the resonant plate and the piezoelectric actuator to form a first A chamber, the piezoelectric actuator and the gas collecting plate form a gas collecting chamber, when the piezoelectric actuator is driven, the gas enters from the gas inlet plate, flows through the resonant sheet, and enters the second within a chamber and down to the plenum chamber; and A micro valve device, comprising: a valve plate having a valve hole; and an outlet plate having at least two through holes and at least two chambers; Wherein, the above-mentioned valve plate and the outlet plate are sequentially stacked and positioned on the gas collecting plate of the microfluidic control device. The gas collecting plate and the outlet plate respectively have at least two through holes and at least two chambers, so that the valve hole of the valve plate can be opened or closed correspondingly in response to the unidirectional flow of gas, so as to collect or release pressure Operation. 25. The micro-pneumatic power device as claimed in claim 24, wherein the air inlet plate of the micro-fluid control device has at least one air inlet, at least one confluence drain hole and a central recess, and the at least one air inlet The hole is used to introduce gas, the confluence row hole corresponds to the air inlet hole, and guides the gas in the air inlet hole to flow into the central concave part; the resonant plate has a hollow hole, corresponding to the central concave part of the air inlet plate; and the pressure The electric actuator further has an outer frame, the outer frame and the suspension board are connected by at least one bracket, and a piezoelectric ceramic plate is attached to a first surface of the suspension board. 26. The micro pneumatic power device according to claim 24, wherein the gas collecting plate has a first through hole, a second through hole, a first pressure relief chamber and a first outlet chamber, The first through hole communicates with the first pressure relief chamber, and the second through hole communicates with the first outlet chamber. 27. The micro pneumatic power device as claimed in claim 26, wherein the outlet plate of the micro valve device has a pressure relief through hole, an outlet through hole, a second pressure relief chamber and a second outlet There is a communication channel between the second pressure relief chamber and the second outlet chamber in the cavity chamber. 28. The micro pneumatic power device according to claim 27, wherein the valve plate is arranged between the gas collecting plate and the outlet plate to block the communication between the first pressure relief chamber and the second pressure relief chamber , and the valve hole of the valve plate is correspondingly arranged between the second through hole and the outlet through hole. The second through hole enters the first pressure relief chamber and the first outlet chamber, and the introduced gas flows into the outlet through hole from the valve hole of the valve plate for pressure collecting operation. At the same time, the pressure-gathering gas flows from the outlet through hole toward the second outlet chamber, so that the valve plate is displaced, and the valve hole of the valve plate is closed against the gas-collecting plate, and the pressure-gathering gas is at the same time The second outlet chamber can flow into the second pressure relief chamber along the communication channel, at this time, the valve plate in the second pressure relief chamber is displaced, and the pressure-collecting gas can flow out through the pressure relief through hole for relief. pressure work. 29. The micro-pneumatic power device as claimed in claim 25, wherein the piezoelectric ceramic plate has a side length not greater than the side length of the suspension plate, has a length between 2mm and 4.5mm, and is between 2mm The width is between 4.5 mm and the thickness is between 0.05 mm and 0.3 mm, and the ratio of the length to the width of the piezoelectric ceramic plate is between 0.44 times and 2.25 times. 30. The micro-pneumatic power device as claimed in claim 24, wherein the suspension plate has a length of 2.5 mm to 3.5 mm, a width of 2.5 mm to 3.5 mm, and a thickness of 0.2 mm. 31. A miniature pneumatic power device, characterized in that it comprises: A microfluidic control device, including an air inlet plate, a resonant plate, a piezoelectric actuator and a gas collector stacked in sequence, wherein there is a gap between the resonant plate and the piezoelectric actuator to form a In the first chamber, when the piezoelectric actuator is driven, the gas enters from the gas inlet plate, flows through the resonant plate, and then enters the first chamber for transmission, wherein the piezoelectric actuator has a suspension a board, wherein the hoverboard has a length of 2mm to 4.5mm and a width of 2mm to 4.5mm; and A micro-valve device, including stacked in sequence, a valve plate and an outlet plate positioned on the gas collecting plate of the micro-fluid control device, the valve plate has a valve hole; Wherein, when the gas is transferred from the micro fluid control device to the micro valve device, it is used for pressure gathering or pressure relief operation. 32. The micro-pneumatic power device as claimed in claim 31, wherein the piezoelectric actuator and the gas-collecting plate form a gas-collecting chamber, so that the gas is transmitted from the micro-fluid control device to the gas-collecting chamber chamber, and then passed into the micro valve device. 33. The micro-pneumatic power device according to claim 31, wherein the gas collecting plate and the outlet plate respectively have at least two through holes and at least two chambers, so that the valve plate can be opened in response to the unidirectional flow of gas. The valve hole corresponding to open or close.