JP2008180179A - Diaphragm pump - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To improve assemblability of a diaphragm and a case by laser welding, and to improve strength of the diaphragm. <P>SOLUTION: A case body 3 is molded with a laser beam absorbing material, and a cover member 2, respective intermediate passage members 11 and 12, and a resin diaphragm 16 are molded with a laser beam-permeable material. A metal diaphragm 18 is fitted to a recessed part 17 of the resin diaphragm 16 and jointed thereto by an adhesive to form a diaphragm 15 having a two-layer structure. A piezoelectric element 19 is fixed to the upper surface 18a of the metal diaphragm 18. A surplus part 16b projecting from the metal diaphragm 18 is formed in an outer peripheral part of the resin diaphragm 16, and the resin diaphragm 16 is laser-welded to the case body 3 by making a laser beam permeate the surplus part 16b. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a diaphragm pump that draws fluid into a pump chamber and drives it by driving a diaphragm, and more particularly to a diaphragm pump suitable as a micro pump.

  In technical fields such as medical administration in the medical field, fuel supply for fuel cells, or ink supply for printing equipment, micropumps that pump a fixed amount of fluid or gas with high accuracy are used. A pump that exhibits a pumping action by driving and vibrating a flexible thin film such as a diaphragm is preferably used.

  One of such pumps includes a diaphragm, a case having a flow path for sucking fluid and a flow path for discharging fluid, and supporting the diaphragm, and a piezoelectric element that vibrates when a voltage is applied. is there. In this pump, a pump chamber is formed between the diaphragm and the case, a piezoelectric element is fixed to the diaphragm, and a voltage is applied to the piezoelectric element to alternately expand / contract the pump chamber, thereby supplying the pump chamber to the pump chamber. The suction of fluid and the discharge of fluid from the pump chamber to the outside of the pump are repeated.

  In addition, such a pump has a one-way valve in each of the suction-side and discharge-side flow paths so that the fluid sucked into the pump chamber or the fluid discharged from the pump chamber does not flow backward. Patent Document 1 describes a pump in which these valves are fixed by being sandwiched between two parts constituting a case.

Japanese Patent No. 3707380

  In the diaphragm pump disclosed in Patent Document 1, each component constituting the diaphragm pump is joined by laser welding or an adhesive. In the case of laser welding, each component is bonded by irradiating a laser beam to a material that absorbs the laser beam and melting the material. However, in Patent Document 1, the transmittance and absorption of the laser beam of each component are combined. Characteristics are not described. For this reason, depending on the combination of materials of each component, it may take time for laser welding, which may lead to a decrease in production efficiency. Further, since the diaphragm is composed only of the piezoelectric element and the electrode, there is a possibility that the strength of the diaphragm and the sealing performance between the diaphragm and the case are not sufficient.

  Therefore, the present invention can improve the strength of the diaphragm of the diaphragm pump, ensure the sealing property between the diaphragm and the case, and can easily join the parts forming the diaphragm pump by laser welding. It aims to provide a diaphragm pump.

  The diaphragm pump of the present invention is formed of a laser light absorbing material, and has a plate-like case body in which one surface and the other surface opposite to the one surface are substantially parallel, and an annular laser welded portion on one surface of the case body Formed in the case main body, a diaphragm that forms a pump chamber for fluid inside the laser welded portion between the case main body, a diaphragm driving means that drives the diaphragm to change the volume of the pump chamber, and the case main body And a fluid suction passage and a discharge passage communicating with the pump chamber, and the diaphragm has a two-layer structure of a resin diaphragm formed of a laser light transmitting material and a metal diaphragm joined to one surface of the resin diaphragm. The resin diaphragm has an annular surplus portion that protrudes to the outer peripheral side from the periphery of the metal diaphragm, and the laser welded portion is present in the surplus portion. It is characterized by being kicked.

  According to the diaphragm pump of the present invention, the diaphragm has a two-layer structure including a metal diaphragm and a resin diaphragm, but the resin diaphragm has an excess portion that protrudes beyond the peripheral edge of the metal diaphragm. For this reason, a diaphragm and a case main body can be joined by laser welding by making a laser beam permeate | transmit the excess part and irradiating a case main body. As the laser light absorbing material that is a material of the case body, a black resin is preferably used. In addition, a transparent resin is preferably used as the laser beam transmitting material that is a material of the resin diaphragm.

  In the present invention, a recess into which the metal diaphragm is fitted is formed inside the surplus portion of the resin diaphragm, and the metal diaphragm is fitted into this recess and adhered to the bottom surface of the recess with an adhesive. Are preferred. By providing this recess, the metal diaphragm can be easily positioned, and the adhesive can be prevented from spreading to the outer peripheral side of the resin diaphragm. Furthermore, since the surplus part of the resin diaphragm becomes a rib shape thicker than the recess, the strength can be improved. Further, the height of the side wall forming the recess is preferably set higher than the thickness of the metal diaphragm, whereby the above effect can be further improved.

  The following form is mentioned as a specific structural example of this invention. The suction channel is provided with a suction valve that allows only fluid to flow into the pump chamber. The case body supports the suction valve and communicates with the suction channel when the suction valve is open. A suction side middle flow path member in which a suction communication flow path is formed is fitted. The discharge flow path is provided with a discharge valve that allows only discharge of fluid from the pump chamber. The case body supports the discharge valve and communicates with the discharge flow path when the discharge valve is open. A discharge-side middle flow path member in which a discharge communication flow path is formed is fitted. The suction-side middle flow path member and the discharge-side middle flow path member are made of a laser light transmitting material and are laser-welded to the case body.

  Next, according to the present invention, a cover member made of a laser light transmitting material is joined to the other surface of the case body by laser welding, and the outside communicates with the suction passage from the outside between the case body and the cover member. It is preferable that the side suction flow channel and the external discharge flow channel communicating from the discharge flow channel to the outside are formed so as to extend substantially parallel to the other surface. According to this form, since each flow path is formed in a state extending substantially parallel to the other surface, the thickness can be reduced, and a thinner diaphragm pump can be formed. Moreover, since the surface on the opposite side to the joint surface to the case main body of a cover member can be formed flat, this diaphragm pump can be easily installed in a board | substrate etc.

  Moreover, in this invention, it is set as the preferable form that the surface of the surplus part of a resin diaphragm is parallel and flat with the said one surface of a case main body. When the resin diaphragm is laser welded to the case body, in this case, a flat pressing jig such as glass is pressed against the surplus portion and pressed to bring the bonding surfaces into close contact with each other. By making the surplus portion flat, it is possible to apply a uniform pressure to the bonding surface during pressurization, and as a result, it is possible to prevent the occurrence of defects in the laser welded portion.

  According to the present invention, it is possible to improve the strength of the diaphragm of the diaphragm pump and to secure the sealing performance between the diaphragm and the case, and furthermore, it is possible to easily join the respective parts forming the diaphragm pump by laser welding. There is an effect that can be done.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
[1] Configuration of Diaphragm Pump FIG. 1 is a perspective view of a diaphragm pump (hereinafter abbreviated as a pump) 1 according to an embodiment, FIG. 2 is a sectional view of the entire pump 1, and FIG. 3 is an exploded perspective view of the pump 1. 4 is a cross-sectional view of each component constituting the pump 1. As shown in these drawings, the pump 1 has a configuration in which a diaphragm 15 and a piezoelectric element 19 are laminated on the upper side of the rectangular thin plate-like case body 3 in the drawing, and a cover member 2 is laminated on the lower side.

  This pump 1 has a cylindrical suction port 20 for sucking fluid into the pump 1 on one side, and a cylindrical shape for discharging the sucked fluid to the outside of the pump 1 on the side opposite to the one side. A discharge port 22 is provided. The suction port 20 is configured by joining pipe divided bodies 20 a and 20 b formed on the case body 3 and the cover member 2, respectively. The pipe division bodies 20a and 20b have a shape in which a cylindrical body is divided in half. The discharge port 22 is also the same, and is configured by joining semi-cylindrical pipe divided bodies 22a and 22b formed on the case body 3 and the cover member 2, respectively. The case body 3 is formed of a laser light absorbing material, and the cover member 2 is formed of a laser light transmitting material. As the laser light absorbing material, a black resin is suitable, and as the laser light transmitting material, a transparent resin is suitable.

  A circular recess 4 is formed at the center of the upper surface 3 a of the case body 3. This recess 4 is closed by a diaphragm 15 and is configured as a pump chamber. As shown in FIG. 2, on the suction side of the cover member 2 and the case body 3, a fluid suction passage 21 communicating with the pump chamber 4 from the suction port 20 c which is the tip of the suction port 20 is formed. The suction channel 21 is formed in the case body 3 and the cover member 2 and is formed by grooves 21a and 21b that are aligned with each other. On the other hand, on the discharge side of the cover member 2 and the case main body 3, a fluid discharge passage 23 communicating with the pump chamber 4 from the discharge port 22 c which is the tip of the discharge port 22 is formed. The discharge flow path 23 is formed in the case main body 3 and the cover member 2 and is formed by grooves 23a and 23b that are aligned with each other. If the groove that forms the suction flow path 21 or the discharge flow path 23 is provided in either the cover member 2 or the case main body 3, the flow path can be formed. What is necessary is just to have a groove | channel in at least one of them. The cover member 2 is joined to the case main body 3 by laser welding the joint surfaces around the suction flow path 21 and the discharge flow path 23.

  As shown in FIGS. 2 to 4, a rectangular recess 5 is formed on the bottom surface of the recess 4 of the case body 3. The recess 5 is formed at a position deviated from the center of the recess 4 toward the suction port 20. On the other hand, a rectangular recess 8 is formed in the lower surface 3 b of the case body 3. The recess 8 is formed at a position slightly offset from the center of the recess 4 toward the discharge port 22 side. On the bottom surfaces of the recesses 5 and 8, valve accommodating recesses 6 and 9 are formed deeper than the recesses 5 and 8, respectively. The case body 3 is formed with an opening 7 that leads from the suction passage 21 to the valve housing recess 6, and an opening 10 that leads from the pump chamber 4 to the valve housing recess 9.

  As shown in FIG. 5, the suction side opening 7 is opened and closed by a suction side check valve 13, and as shown in FIG. 6, the discharge side opening 10 is opened and closed by a discharge side check valve 14. It has become. The suction-side check valve 13 is housed in the valve housing recess 6, and the state thereof is sandwiched and held between the rectangular plate-like suction-side middle flow path member 11 fitted in the recess 5 and the case body 3. . The discharge-side check valve 14 is housed in the valve housing recess 9, and the state thereof is sandwiched and held between the rectangular plate-shaped discharge-side middle flow path member 12 fitted in the recess 8 and the case body 3. .

  A valve relief recess 11 a is formed on the lower surface of the suction side middle flow path member 11. The suction-side middle flow path member 11 is formed with a communication hole 11b that allows the valve relief recess 11a and the pump chamber 4 to communicate with each other. A similar valve relief recess 12a is also formed on the upper surface of the discharge-side middle flow path member 12, and the discharge-side middle flow path member 12 has a communication hole 12b that allows the valve relief recess 12a and the discharge flow path 23 to communicate with each other. Is formed. The middle flow path members 11 and 12 on the suction side and the discharge side are joined to the case main body 3 by laser welding the joint surfaces around the valve housing recesses 6 and 9, respectively. Each of these middle flow path members 11 and 12 is formed of a laser beam transmitting material, like the cover member.

  Each valve 13 (14) on the suction side and the discharge side is made of elastic thin plate-like rubber or the like. As shown in FIG. 7, a tongue 13b (14b) is formed on a rectangular base portion 13a (14a). ) Is integrally molded. The suction side check valve 13 is housed in the valve housing recess 6 as described above, and the base portion 13 a is sandwiched between the suction side middle flow path member 11 and the case body 3. The tongue piece 13 b of the suction side check valve 13 normally closes the opening 7 that leads from the suction flow path 21 to the valve housing recess 6. The tongue piece 13b is elastically deformed into the valve escape recess 11a when receiving pressure on the suction side middle flow path member 11 side. At this time, the suction flow path 21 includes the opening 7, the valve accommodating recess 6, and the valve escape recess. It communicates with the pump chamber 4 through 11a and the communication hole 11b.

  On the other hand, the discharge-side check valve 14 is housed in the valve housing recess 9 as described above, and the base portion 14 a is sandwiched between the discharge-side middle flow path member 12 and the case body 3. The tongue piece 14 b of the discharge side check valve 14 normally closes the opening 10 that leads from the pump chamber 4 to the valve housing recess 9. When the tongue piece 14b receives pressure toward the cover member 2, the tongue piece 14b is elastically deformed into the valve escape recess 12a. At this time, the pump chamber 4 has the opening 10, the valve accommodating recess 9, the valve escape recess 12a, the communication hole. It communicates with the discharge flow path 23 via 12b.

  The diaphragm 15 has a two-layer structure in which a thin disk-shaped metal diaphragm 18 is bonded to the center of the upper surface of a rectangular thin plate-shaped resin diaphragm 16. The resin diaphragm 16 is formed of a laser light transmitting material, like the cover member 2. The outer shape of the resin diaphragm 16 is the same size and shape as the rectangular outer shape portion of the case body 3, and the resin diaphragm 16 is joined to the upper surface of the case body 3 by laser welding together with the outer shape. The recess 4 of the case body 3 is closed with a resin diaphragm 16, thereby forming a pump chamber 4.

  A recess 17 into which the metal diaphragm 18 is fitted is formed on the upper surface 16 a of the resin diaphragm 16. Thereby, an annular and rib-like surplus portion 16 b is formed on the outer peripheral portion of the resin diaphragm 16. The recess 17 has a dimension sufficiently deeper than the thickness of the metal diaphragm 18. A metal diaphragm 18 is fitted into the recess 17, and an adhesive is applied and bonded to the entire bonding surface (lower surface). The side wall forming the recess 17 has a dimension sufficiently higher than the thickness of the metal diaphragm 18. For this reason, when the metal diaphragm 18 is fitted into the recess 17 and joined by the adhesive, the excess of the adhesive is prevented from leaking to the surface of the surplus portion 16b. In place of the recess 17, a metal diaphragm 18 can be fitted, and an annular protrusion that is sufficiently higher than the thickness of the metal diaphragm 18 is provided on the upper surface 16 a of the resin diaphragm 16. A recess may be formed in the metal diaphragm 18 and the metal diaphragm 18 may be fitted to the bottom surface. The surface of the surplus portion 16b of the resin diaphragm 16 is parallel to the upper surface 3a of the case body 3 and is formed flat. A disk-shaped piezoelectric element (diaphragm driving means) 19 is fixed concentrically on the upper surface 18 a of the metal diaphragm 18. The piezoelectric element 19 is fixed to the metal diaphragm 18 by means such as adhesion.

[2] Assembling the pump Next, a method for assembling the pump 1 having the above-described configuration will be described. In this embodiment, since each member is joined by laser welding, as described above, the case main body 3 is formed of a laser light absorbing material, and the cover member 2 for laser welding to the case main body 3 is provided. The members 11 and 12 and the resin diaphragm 16 are formed of a laser beam transmitting material.

  First, the metal diaphragm 18 is fitted and joined to the recess 17 of the resin diaphragm 16 to assemble the diaphragm 15. Specifically, an adhesive is applied to the entire back surface of the metal diaphragm 18, and the surface is pressed and bonded to the bottom surface of the recess 17 of the resin diaphragm 16. At this time, an excess of the adhesive leaks from the periphery of the metal diaphragm 18. With this leakage phenomenon, it can be confirmed that the entire adhesion surface is in a normal adhesion state filled with the adhesive. In addition, the leaked excess adhesive remains inside the excessive portion 16b of the resin diaphragm 16, and does not reach the surface of the excessive portion 16b. After the metal diaphragm 18 is bonded to the resin diaphragm 16, the piezoelectric element 19 is then fixed to the upper surface 18a of the metal diaphragm 18 using an adhesive or the like.

  Next, the suction side check valve 13 is housed in the valve housing recess 6 of the case body 3, and then the suction side middle flow path member 11 is fitted into the recess 5. Then, this state is maintained, and laser light is irradiated around the suction side check valve 13 of the recess 5 in the case body 3 from the surface (upper surface in FIG. 5) side of the suction side middle flow path member 11, 3, the suction side middle flow path member 11 is laser welded. Further, the discharge side check valve 14 is accommodated in the valve accommodating recess 9 of the case body 3, and then the discharge side middle flow path member 12 is fitted in the recess 8. Then, this state is maintained, and the case main body is irradiated with laser light around the discharge side check valve 14 in the recess 8 in the case main body 3 from the surface (lower surface in FIG. 6) side of the discharge side middle flow path member 12. 3, the discharge side middle flow path member 12 is laser welded. In addition, when the suction side middle flow path member 11 and the discharge side middle flow path member 12 are joined to the case main body 3, either may be joined first.

  Next, the lower surface of the diaphragm 15 (the lower surface 16c of the resin diaphragm 16) 15a to which the piezoelectric element 19 is fixed is positioned and superimposed on the upper surface 3a of the case body 3. In this state, laser light is irradiated from the surface side of the surplus portion 16 b of the resin diaphragm 16 toward the case body 3, and the resin diaphragm 16 is laser welded to the case body 3. Next, the upper surface 2 a of the cover member 2 is positioned and overlapped with the lower surface 3 b of the case body 3. Then, this state is maintained, and the cover member 2 is laser-welded to the case body 3 by irradiating laser light around the suction flow path 21 and the discharge flow path 23 in the case body 3 from the cover member 2 side.

  Thus, the pump 1 is assembled. Laser welding by irradiation with laser light is performed by heating and melting the case body 3, which is a laser light absorbing material, as the laser light transmitted through the laser light transmitting material (each of the middle flow path members 11, 12, the cover member 2 and the resin diaphragm 16). The molten component is welded to the mating member, whereby the members are joined together. When laser welding is performed, each member is pressed using a flat pressing jig such as a glass plate as appropriate so that the bonding surfaces of the members to be bonded are in close contact with each other.

  Finally, when laser welding the resin diaphragm 16 to the case body 3, a pressing jig such as a glass plate is pressed against the surface of the surplus portion 16b. A metal diaphragm 18 is bonded to the resin diaphragm 16 on this surface. The excess adhesive at the time is not attached. This is because the adhesive remains inside the surplus portion 16b of the resin diaphragm 16 and cannot reach the surface of the surplus portion 16b as described above. Therefore, the pressing jig can be brought into contact with the surface of the surplus portion 16b exactly without any gap.

[3] Operation of the pump Next, the operation of the pump having the above configuration will be described.
When an AC voltage is applied to the piezoelectric element 19, the diaphragm 15 vibrates, and the volume of the pump chamber 4 continuously increases or decreases. As shown in FIG. 8A, when the diaphragm 15 bends away from the case body 3 and the volume of the pump chamber 4 increases, the pump chamber 4 becomes negative pressure. Then, the tongue piece 13b of the suction side check valve 13 is separated from the bottom surface of the valve accommodating recess 6, and the opening 7 is opened. On the other hand, the tongue piece 14b of the discharge side check valve 14 is in close contact with the bottom surface of the valve housing recess 9, and the opening 10 is kept closed. The fluid is sucked into the pump chamber 4 from the suction flow path 21 of the suction port 20 through the opening 7, the valve accommodating recess 6, the valve escape recess 11 a and the communication hole 11 b.

Further, as shown in FIG. 8B, when the diaphragm 15 is bent in the direction approaching the case body 3 and the volume of the pump chamber 4 is reduced, the pump chamber 4 becomes positive pressure. Then, the tongue piece 14b of the discharge side check valve 14 is separated from the bottom surface of the valve accommodating recess 9, and the opening 10 is opened. On the other hand, the tongue piece 13b of the suction side check valve 13 is in close contact with the bottom surface of the valve housing recess 6 and the opening 7 is kept closed. The fluid in the pump chamber 4 is discharged to the outside from the discharge passage 23 through the opening 10, the valve accommodating recess 9, the valve escape recess 12a, and the communication hole 12b.
By repeating the above suction / discharge operation, the pump action is continuously generated, and the fluid is pumped.

[4] Effects of this Embodiment According to this embodiment, the diaphragm 15 for exhibiting the pumping action has a two-layer structure in which the metal diaphragm 18 is joined to the resin diaphragm 16. For this reason, the strength of the diaphragm 15 is improved. Further, the diaphragm 15 is hardly deformed by the pressure of the fluid, and is driven by the piezoelectric element 19 appropriately. Even in the two-layer structure, since the surplus portion 16b is formed by protruding the peripheral edge of the resin diaphragm 16 from the metal diaphragm 18, the resin of the laser light transmitting material is transmitted by transmitting the laser light to the surplus portion 16b. The diaphragm 16 can be laser-welded to the case body 3 made of a laser light absorbing material.

  The diaphragm 15 having a two-layer structure is configured by fitting a metal diaphragm 18 into a recess 17 formed in the resin diaphragm 16 and bonding them together. By fitting the metal diaphragm 18 into the recess 17, the metal diaphragm 18 can be easily positioned with respect to the resin diaphragm 16. Further, the surplus adhesive leaking from the metal diaphragm 18 remains in the recess 17 and does not reach the surface of the surplus portion 16 b of the resin diaphragm 16. Moreover, the surface of the surplus portion 16b is formed in parallel with the upper surface 3a of the case body 3 and is flat. For this reason, a pressing jig such as glass is pressed against the surface of the surplus portion 16b, and a uniform pressure can be applied to the joining surface when performing laser welding while applying pressure. As a result, a defect occurs in the laser welding portion. Can be prevented. In addition, since each of the ports 20 and 22 on the suction side and the discharge side has a horizontal structure parallel to the surface direction of the case body 3, it can be reduced in thickness and the degree of freedom of installation on a substrate or the like is improved.

It is a perspective view of the diaphragm pump which concerns on one Embodiment of this invention. It is sectional drawing of the diaphragm pump shown in FIG. It is a disassembled perspective view of the diaphragm pump shown in FIG. It is sectional drawing of each component which comprises the diaphragm pump shown in FIG. It is the fragmentary sectional view which showed the valve | bulb peripheral part of the suction side of the diaphragm pump of one Embodiment. It is the fragmentary sectional view which showed the valve peripheral part of the discharge side of the diaphragm pump of one Embodiment. It is a top view of the valve integrated in the diaphragm pump of one embodiment. It is sectional drawing of the diaphragm pump of one Embodiment at the time of (a) inhalation and (b) discharge.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Diaphragm pump 3 ... Case main body 4 ... Pump chamber 15 ... Diaphragm 16 ... Resin diaphragm 16b ... Surplus part 18 ... Metal diaphragm 19 ... Piezoelectric element (diaphragm drive means)
21 ... Suction channel 23 ... Discharge channel

Claims (6)

A plate-like case body formed of a laser light absorbing material, with one surface and the other surface opposite to the one surface being substantially parallel;
A diaphragm that is joined to the one surface of the case main body via an annular laser welding portion and forms a fluid pump chamber inside the laser welding portion between the case main body, and
Diaphragm driving means for driving the diaphragm to change the volume of the pump chamber;
Formed in the case body, and includes a fluid suction channel and a fluid flow channel communicating with the pump chamber;
The diaphragm has a two-layer structure of a resin diaphragm formed of a laser light transmitting material and a metal diaphragm joined to one side of the resin diaphragm, and the resin diaphragm protrudes on the outer peripheral side from the peripheral edge of the metal diaphragm. A diaphragm pump having an annular surplus portion, wherein the laser welding portion is provided in the surplus portion.   A recess into which the metal diaphragm is fitted is formed inside the surplus portion of the resin diaphragm, and the metal diaphragm is fitted into the recess and adhered to the bottom surface of the recess with an adhesive. The diaphragm pump according to claim 1. The suction flow path is provided with a suction valve that allows only fluid to flow into the pump chamber. The case body supports the suction valve and communicates with the suction flow path when the suction valve is open. A suction side middle flow path member formed with a suction communication flow path is fitted,
The discharge flow path is provided with a discharge valve that allows only discharge of fluid from the pump chamber, and the case body supports the discharge valve and communicates with the discharge flow path when the discharge valve is open. The discharge side middle flow path member formed with the discharge communication flow path is fitted,
The diaphragm pump according to claim 1 or 2, wherein the suction-side middle flow path member and the discharge-side middle flow path member are formed of a laser light transmitting material and are laser-welded to the case body. A cover member formed of a laser light transmitting material is joined to the other surface of the case body by laser welding, and between the case body and the cover member,
An external suction passage communicating with the suction passage from the outside;
An external discharge flow path communicating with the outside from the discharge flow path,
The diaphragm pump according to any one of claims 1 to 3, wherein the diaphragm pump is formed so as to extend substantially parallel to the other surface.   The diaphragm pump according to any one of claims 1 to 4, wherein a surface of the surplus portion of the resin diaphragm is formed to be parallel and flat with the one surface of the case body.   The diaphragm pump according to any one of claims 2 to 5, wherein a height of a side wall forming the recess in the resin diaphragm is set higher than a thickness of the metal diaphragm.

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