JPS5799777A - Metal oxide semiconductor type semiconductor device - Google Patents
Metal oxide semiconductor type semiconductor deviceInfo
- Publication number
- JPS5799777A JPS5799777A JP55175304A JP17530480A JPS5799777A JP S5799777 A JPS5799777 A JP S5799777A JP 55175304 A JP55175304 A JP 55175304A JP 17530480 A JP17530480 A JP 17530480A JP S5799777 A JPS5799777 A JP S5799777A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- layer
- shaped
- terminal
- wiring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title 2
- 229910044991 metal oxide Inorganic materials 0.000 title 1
- 150000004706 metal oxides Chemical class 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 1
- 230000003416 augmentation Effects 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 229910052594 sapphire Inorganic materials 0.000 abstract 1
- 239000010980 sapphire Substances 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
- 238000009279 wet oxidation reaction Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6704—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device
- H10D30/6708—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device for preventing the kink effect or the snapback effect, e.g. discharging the minority carriers of the channel region for preventing bipolar effect
- H10D30/6711—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device for preventing the kink effect or the snapback effect, e.g. discharging the minority carriers of the channel region for preventing bipolar effect by using electrodes contacting the supplementary regions or layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D86/01—Manufacture or treatment
- H10D86/03—Manufacture or treatment wherein the substrate comprises sapphire, e.g. silicon-on-sapphire [SOS]
Landscapes
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Thin Film Transistor (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55175304A JPS5799777A (en) | 1980-12-12 | 1980-12-12 | Metal oxide semiconductor type semiconductor device |
US06/313,338 US4484209A (en) | 1980-12-12 | 1981-10-20 | SOS Mosfet with thinned channel contact region |
DE3142448A DE3142448C2 (de) | 1980-12-12 | 1981-10-26 | MOS-Transistor und Verfahren zu seiner Herstellung |
FR8120526A FR2496342A1 (fr) | 1980-12-12 | 1981-11-02 | Dispositif semi-conducteur du type metal-oxyde-semi-conducteur et son procede de fabrication |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55175304A JPS5799777A (en) | 1980-12-12 | 1980-12-12 | Metal oxide semiconductor type semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5799777A true JPS5799777A (en) | 1982-06-21 |
Family
ID=15993751
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP55175304A Pending JPS5799777A (en) | 1980-12-12 | 1980-12-12 | Metal oxide semiconductor type semiconductor device |
Country Status (4)
Country | Link |
---|---|
US (1) | US4484209A (ja) |
JP (1) | JPS5799777A (ja) |
DE (1) | DE3142448C2 (ja) |
FR (1) | FR2496342A1 (ja) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4883986A (en) * | 1981-05-19 | 1989-11-28 | Tokyo Shibaura Denki Kabushiki Kaisha | High density semiconductor circuit using CMOS transistors |
FR2535530B1 (fr) * | 1982-10-29 | 1986-01-17 | Efcis | Structure planaire de transistors a effet de champ sur substrat isolant |
JPS6042855A (ja) * | 1983-08-19 | 1985-03-07 | Hitachi Ltd | 半導体装置 |
JPS62104173A (ja) * | 1985-10-31 | 1987-05-14 | Fujitsu Ltd | 半導体装置 |
US4906587A (en) * | 1988-07-29 | 1990-03-06 | Texas Instruments Incorporated | Making a silicon-on-insulator transistor with selectable body node to source node connection |
JPH0244753A (ja) * | 1988-08-05 | 1990-02-14 | Toshiba Corp | 半導体装置の製造方法 |
US5001528A (en) * | 1989-01-31 | 1991-03-19 | The United States Of America As Represented By The Secretary Of The Air Force | Radiation hardened CMOS on SOI or SOS devices |
JP2789931B2 (ja) * | 1991-05-27 | 1998-08-27 | 日本電気株式会社 | 半導体装置 |
US5293052A (en) * | 1992-03-23 | 1994-03-08 | Harris Corporation | SOT CMOS device having differentially doped body extension for providing improved backside leakage channel stop |
GB9311129D0 (en) * | 1993-05-28 | 1993-07-14 | Philips Electronics Uk Ltd | Electronic devices with-film circuit elements forming a sampling circuit |
US6368903B1 (en) * | 2000-03-17 | 2002-04-09 | International Business Machines Corporation | SOI low capacitance body contact |
JP3504212B2 (ja) * | 2000-04-04 | 2004-03-08 | シャープ株式会社 | Soi構造の半導体装置 |
US9978849B2 (en) * | 2015-12-29 | 2018-05-22 | Globalfoundries Inc. | SOI-MOSFET gate insulation layer with different thickness |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5248475A (en) * | 1975-10-16 | 1977-04-18 | Agency Of Ind Science & Technol | Semiconductor device |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1224335A (en) * | 1967-11-28 | 1971-03-10 | North American Rockwell | N-channel field effect transistor |
JPS51135373A (en) * | 1975-05-20 | 1976-11-24 | Agency Of Ind Science & Technol | Semiconductor device |
JPS51147186A (en) * | 1975-06-12 | 1976-12-17 | Fujitsu Ltd | Semiconductor device |
US4053916A (en) * | 1975-09-04 | 1977-10-11 | Westinghouse Electric Corporation | Silicon on sapphire MOS transistor |
JPS5518052A (en) * | 1978-07-25 | 1980-02-07 | Mitsubishi Electric Corp | Semiconductor laser modulator |
JPS5571068A (en) * | 1978-11-22 | 1980-05-28 | Nec Corp | Mos transistor and its manufacturing method |
JPS55160457A (en) * | 1979-03-30 | 1980-12-13 | Toshiba Corp | Semiconductor device |
-
1980
- 1980-12-12 JP JP55175304A patent/JPS5799777A/ja active Pending
-
1981
- 1981-10-20 US US06/313,338 patent/US4484209A/en not_active Expired - Lifetime
- 1981-10-26 DE DE3142448A patent/DE3142448C2/de not_active Expired
- 1981-11-02 FR FR8120526A patent/FR2496342A1/fr active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5248475A (en) * | 1975-10-16 | 1977-04-18 | Agency Of Ind Science & Technol | Semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
DE3142448C2 (de) | 1986-06-19 |
DE3142448A1 (de) | 1982-06-24 |
US4484209A (en) | 1984-11-20 |
FR2496342B1 (ja) | 1984-01-13 |
FR2496342A1 (fr) | 1982-06-18 |
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