JPS5788094A - Vapor phase epitaxial manufacture of crystal - Google Patents
Vapor phase epitaxial manufacture of crystalInfo
- Publication number
- JPS5788094A JPS5788094A JP16235680A JP16235680A JPS5788094A JP S5788094 A JPS5788094 A JP S5788094A JP 16235680 A JP16235680 A JP 16235680A JP 16235680 A JP16235680 A JP 16235680A JP S5788094 A JPS5788094 A JP S5788094A
- Authority
- JP
- Japan
- Prior art keywords
- stream side
- substrate
- tube
- furnace
- down stream
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 title abstract 3
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 239000012808 vapor phase Substances 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract 6
- 150000001875 compounds Chemical class 0.000 abstract 2
- 239000010453 quartz Substances 0.000 abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 229910017009 AsCl3 Inorganic materials 0.000 abstract 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 abstract 1
- OEYOHULQRFXULB-UHFFFAOYSA-N arsenic trichloride Chemical compound Cl[As](Cl)Cl OEYOHULQRFXULB-UHFFFAOYSA-N 0.000 abstract 1
- 230000002401 inhibitory effect Effects 0.000 abstract 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16235680A JPS5788094A (en) | 1980-11-18 | 1980-11-18 | Vapor phase epitaxial manufacture of crystal |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16235680A JPS5788094A (en) | 1980-11-18 | 1980-11-18 | Vapor phase epitaxial manufacture of crystal |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5788094A true JPS5788094A (en) | 1982-06-01 |
Family
ID=15753001
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16235680A Pending JPS5788094A (en) | 1980-11-18 | 1980-11-18 | Vapor phase epitaxial manufacture of crystal |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5788094A (ja) |
-
1980
- 1980-11-18 JP JP16235680A patent/JPS5788094A/ja active Pending
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