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JPS5317068A - Semiconductor device and its production - Google Patents

Semiconductor device and its production

Info

Publication number
JPS5317068A
JPS5317068A JP9152776A JP9152776A JPS5317068A JP S5317068 A JPS5317068 A JP S5317068A JP 9152776 A JP9152776 A JP 9152776A JP 9152776 A JP9152776 A JP 9152776A JP S5317068 A JPS5317068 A JP S5317068A
Authority
JP
Japan
Prior art keywords
semiconductor device
production
single crystal
forming
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9152776A
Other languages
Japanese (ja)
Other versions
JPS5538043B2 (en
Inventor
Masaru Ihara
Akira Osawa
Hideki Yamawaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP9152776A priority Critical patent/JPS5317068A/en
Publication of JPS5317068A publication Critical patent/JPS5317068A/en
Publication of JPS5538043B2 publication Critical patent/JPS5538043B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: A semiconductor device of a small parasitic capacity is obtained by forming a SiO2 film on the substrate via the sapphier film formed on a Si single crystal substrate, then epitaxially forming a Si single crystal layer in lamination.
COPYRIGHT: (C)1978,JPO&Japio
JP9152776A 1976-07-30 1976-07-30 Semiconductor device and its production Granted JPS5317068A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9152776A JPS5317068A (en) 1976-07-30 1976-07-30 Semiconductor device and its production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9152776A JPS5317068A (en) 1976-07-30 1976-07-30 Semiconductor device and its production

Publications (2)

Publication Number Publication Date
JPS5317068A true JPS5317068A (en) 1978-02-16
JPS5538043B2 JPS5538043B2 (en) 1980-10-02

Family

ID=14028892

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9152776A Granted JPS5317068A (en) 1976-07-30 1976-07-30 Semiconductor device and its production

Country Status (1)

Country Link
JP (1) JPS5317068A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57167622A (en) * 1981-04-09 1982-10-15 Fujitsu Ltd Manufacture of semiconductor device
JPS586147A (en) * 1981-07-03 1983-01-13 Nec Corp Semiconductor device and its manufacture
US4574649A (en) * 1982-03-10 1986-03-11 B. D. Yim Propulsion and speed change mechanism for lever propelled bicycles
US5163886A (en) * 1990-08-01 1992-11-17 Augustine Rheem Exercising and rehabilitation apparatus

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50141283A (en) * 1974-04-22 1975-11-13

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50141283A (en) * 1974-04-22 1975-11-13

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57167622A (en) * 1981-04-09 1982-10-15 Fujitsu Ltd Manufacture of semiconductor device
JPS586147A (en) * 1981-07-03 1983-01-13 Nec Corp Semiconductor device and its manufacture
US4574649A (en) * 1982-03-10 1986-03-11 B. D. Yim Propulsion and speed change mechanism for lever propelled bicycles
US5163886A (en) * 1990-08-01 1992-11-17 Augustine Rheem Exercising and rehabilitation apparatus

Also Published As

Publication number Publication date
JPS5538043B2 (en) 1980-10-02

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