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JPS52135675A - Anisotropic ethcing of semiconductor single crystal - Google Patents

Anisotropic ethcing of semiconductor single crystal

Info

Publication number
JPS52135675A
JPS52135675A JP5223176A JP5223176A JPS52135675A JP S52135675 A JPS52135675 A JP S52135675A JP 5223176 A JP5223176 A JP 5223176A JP 5223176 A JP5223176 A JP 5223176A JP S52135675 A JPS52135675 A JP S52135675A
Authority
JP
Japan
Prior art keywords
single crystal
anisotropic
ethcing
semiconductor single
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5223176A
Other languages
Japanese (ja)
Inventor
Akio Mimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5223176A priority Critical patent/JPS52135675A/en
Publication of JPS52135675A publication Critical patent/JPS52135675A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To form highly accurate grooves on single crystal Si (100) planes by forming an O2-added amorphous or polycrystalline Si film on the top surface of single crystal Si and further laminating a SiO2 film thereon and using this film in anisotropic etching mask.
COPYRIGHT: (C)1977,JPO&Japio
JP5223176A 1976-05-10 1976-05-10 Anisotropic ethcing of semiconductor single crystal Pending JPS52135675A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5223176A JPS52135675A (en) 1976-05-10 1976-05-10 Anisotropic ethcing of semiconductor single crystal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5223176A JPS52135675A (en) 1976-05-10 1976-05-10 Anisotropic ethcing of semiconductor single crystal

Publications (1)

Publication Number Publication Date
JPS52135675A true JPS52135675A (en) 1977-11-12

Family

ID=12908952

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5223176A Pending JPS52135675A (en) 1976-05-10 1976-05-10 Anisotropic ethcing of semiconductor single crystal

Country Status (1)

Country Link
JP (1) JPS52135675A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58206228A (en) * 1982-05-27 1983-12-01 Nippon Denso Co Ltd Analog-digital converter

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58206228A (en) * 1982-05-27 1983-12-01 Nippon Denso Co Ltd Analog-digital converter

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