JPS50141283A - - Google Patents
Info
- Publication number
- JPS50141283A JPS50141283A JP4522874A JP4522874A JPS50141283A JP S50141283 A JPS50141283 A JP S50141283A JP 4522874 A JP4522874 A JP 4522874A JP 4522874 A JP4522874 A JP 4522874A JP S50141283 A JPS50141283 A JP S50141283A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49045228A JPS5931226B2 (en) | 1974-04-22 | 1974-04-22 | semiconductor equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49045228A JPS5931226B2 (en) | 1974-04-22 | 1974-04-22 | semiconductor equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50141283A true JPS50141283A (en) | 1975-11-13 |
| JPS5931226B2 JPS5931226B2 (en) | 1984-07-31 |
Family
ID=12713393
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49045228A Expired JPS5931226B2 (en) | 1974-04-22 | 1974-04-22 | semiconductor equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5931226B2 (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51121270A (en) * | 1975-04-17 | 1976-10-23 | Seiko Epson Corp | Semiconductor device |
| JPS52115667A (en) * | 1976-03-25 | 1977-09-28 | Agency Of Ind Science & Technol | Semiconductor device |
| JPS5317068A (en) * | 1976-07-30 | 1978-02-16 | Fujitsu Ltd | Semiconductor device and its production |
| JPS5843570A (en) * | 1981-09-09 | 1983-03-14 | Toshiba Corp | Semiconductor device and its manufacturing method |
| JPS5884422A (en) * | 1981-11-13 | 1983-05-20 | Oki Electric Ind Co Ltd | Manufacture of semiconductor device |
| JPS6169145A (en) * | 1984-09-12 | 1986-04-09 | Toshiba Corp | Method for manufacturing semiconductor substrate |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4918430A (en) * | 1972-06-09 | 1974-02-18 |
-
1974
- 1974-04-22 JP JP49045228A patent/JPS5931226B2/en not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4918430A (en) * | 1972-06-09 | 1974-02-18 |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51121270A (en) * | 1975-04-17 | 1976-10-23 | Seiko Epson Corp | Semiconductor device |
| JPS52115667A (en) * | 1976-03-25 | 1977-09-28 | Agency Of Ind Science & Technol | Semiconductor device |
| JPS5541537B2 (en) * | 1976-03-25 | 1980-10-24 | ||
| JPS5317068A (en) * | 1976-07-30 | 1978-02-16 | Fujitsu Ltd | Semiconductor device and its production |
| JPS5538043B2 (en) * | 1976-07-30 | 1980-10-02 | ||
| JPS5843570A (en) * | 1981-09-09 | 1983-03-14 | Toshiba Corp | Semiconductor device and its manufacturing method |
| JPS5884422A (en) * | 1981-11-13 | 1983-05-20 | Oki Electric Ind Co Ltd | Manufacture of semiconductor device |
| JPS6169145A (en) * | 1984-09-12 | 1986-04-09 | Toshiba Corp | Method for manufacturing semiconductor substrate |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5931226B2 (en) | 1984-07-31 |