JPH0281041U - - Google Patents
Info
- Publication number
- JPH0281041U JPH0281041U JP16161488U JP16161488U JPH0281041U JP H0281041 U JPH0281041 U JP H0281041U JP 16161488 U JP16161488 U JP 16161488U JP 16161488 U JP16161488 U JP 16161488U JP H0281041 U JPH0281041 U JP H0281041U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- suction
- suction nozzle
- back surface
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 description 1
Description
第１図は本考案に係るハンドリング治具の実施
例を示す断面図、第２図は吸着ノズルの動作状態
を示す断面図である。第３図乃至第５図は従来の
治具を示す図面で、第３図は金属製ピンセツトの
側面図、第４図はベルヌーイチヤツクの断面図、
第５図は吸着ピンの部分断面側面図である。
３……ウエーハ、３ｂ……裏面、４……周縁部
、６……ベルヌーイチヤツク、１１……先端開口
部、２２……開口端、２３……吸着ノズル。
FIG. 1 is a sectional view showing an embodiment of a handling jig according to the present invention, and FIG. 2 is a sectional view showing an operating state of a suction nozzle. 3 to 5 are drawings showing conventional jigs; FIG. 3 is a side view of a metal tweezers; FIG. 4 is a sectional view of a Bernoulli chuck;
FIG. 5 is a partially sectional side view of the suction pin. 3...Wafer, 3b...Back surface, 4...Periphery, 6...Berneuil chuck, 11...Tip opening, 22...Opening end, 23...Suction nozzle.
Claims (1)
ーハを非接触状態で保持可能なベルヌーイチヤツ
クと、 ベルヌーイチヤツクの開口端に回動退避可能に
、かつ、ウエーハの周縁部裏面を吸着可能にする
ために枢着した吸着ノズルとを具備することを特
徴とするウエーハのハンドリング治具。[Scope of Claim for Utility Model Registration] A Bernoulli chuck that is movably installed and capable of holding a wafer in a non-contact state at an opening at its end; 1. A wafer handling jig, comprising a suction nozzle pivotally attached to the wafer so as to be able to suction the back surface of the wafer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16161488U JPH0281041U (en) | 1988-12-12 | 1988-12-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16161488U JPH0281041U (en) | 1988-12-12 | 1988-12-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0281041U true JPH0281041U (en) | 1990-06-22 |
Family
ID=31444712
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16161488U Pending JPH0281041U (en) | 1988-12-12 | 1988-12-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0281041U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017062490A (en) * | 2011-12-29 | 2017-03-30 | 株式会社ニコン | Exposure apparatus, exposure method, and device manufacturing method |
-
1988
- 1988-12-12 JP JP16161488U patent/JPH0281041U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017062490A (en) * | 2011-12-29 | 2017-03-30 | 株式会社ニコン | Exposure apparatus, exposure method, and device manufacturing method |