JP2014021029A - 漏れ検出装置およびこれを有する流体制御器 - Google Patents
漏れ検出装置およびこれを有する流体制御器 Download PDFInfo
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- JP2014021029A JP2014021029A JP2012162244A JP2012162244A JP2014021029A JP 2014021029 A JP2014021029 A JP 2014021029A JP 2012162244 A JP2012162244 A JP 2012162244A JP 2012162244 A JP2012162244 A JP 2012162244A JP 2014021029 A JP2014021029 A JP 2014021029A
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- Prior art keywords
- leak
- fluid controller
- fluid
- leak detection
- detection device
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/24—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using infrasonic, sonic, or ultrasonic vibrations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/24—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using infrasonic, sonic, or ultrasonic vibrations
- G01M3/243—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using infrasonic, sonic, or ultrasonic vibrations for pipes
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
Abstract
【解決手段】 流体制御器1は、流体制御器本体2と、流体制御器本体2に取り付けられた漏れ検出装置3とからなる。流体制御器本体2に、漏れを検知するためのリークポート16が設けられている。漏れ検出装置3は、流体制御器本体2に取り付けられたセンサ保持体21と、リークポート16に対向するようにセンサ保持体21に保持された超音波センサ22と、超音波センサ22のセンサ面とリークポート16との間に設けられた超音波通路23と、超音波センサ22で得られた超音波を処理する処理回路24とを備えている。
【選択図】 図1
Description
Claims (2)
- 流体の漏れを検出する漏れ検出装置であって、センサ保持体と、漏れ検出対象部材に設けられて漏れ検出対象部材内の密封部分と外部とを連通するリークポートに対向するようにセンサ保持体に保持された超音波センサと、超音波センサのセンサ面とリークポートとの間に設けられた超音波通路と、超音波センサで得られた超音波を処理する処理回路とを備えていることを特徴とする漏れ検出装置。
- 流体の流れを制御する流体制御器本体と、流体制御器本体内の流体の漏れを検出する漏れ検出装置とからなり、流体制御器本体に、流体制御器本体内の密封部分と外部とを連通するリークポートが設けられており、漏れ検出装置が請求項1に記載のものとされていることを特徴とする流体制御器。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012162244A JP5978038B2 (ja) | 2012-07-23 | 2012-07-23 | 漏れ検出装置およびこれを有する流体制御器 |
US14/409,121 US9702781B2 (en) | 2012-07-23 | 2013-07-11 | Leakage detection device and fluid controller including same |
KR1020147035956A KR101710772B1 (ko) | 2012-07-23 | 2013-07-11 | 누설 검출 장치 및 이를 구비하는 유체 제어기 |
PCT/JP2013/068941 WO2014017305A1 (ja) | 2012-07-23 | 2013-07-11 | 漏れ検出装置およびこれを有する流体制御器 |
CN201380033899.0A CN104685333B (zh) | 2012-07-23 | 2013-07-11 | 泄漏检测装置以及具有该泄漏检测装置的流体控制器 |
TW102125859A TWI583935B (zh) | 2012-07-23 | 2013-07-19 | A leak detection device and a fluid controller provided with the device |
IL236100A IL236100A0 (en) | 2012-07-23 | 2014-12-07 | A leak detection and monitoring device that includes the aforementioned device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012162244A JP5978038B2 (ja) | 2012-07-23 | 2012-07-23 | 漏れ検出装置およびこれを有する流体制御器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014021029A true JP2014021029A (ja) | 2014-02-03 |
JP5978038B2 JP5978038B2 (ja) | 2016-08-24 |
Family
ID=49997121
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012162244A Expired - Fee Related JP5978038B2 (ja) | 2012-07-23 | 2012-07-23 | 漏れ検出装置およびこれを有する流体制御器 |
Country Status (7)
Country | Link |
---|---|
US (1) | US9702781B2 (ja) |
JP (1) | JP5978038B2 (ja) |
KR (1) | KR101710772B1 (ja) |
CN (1) | CN104685333B (ja) |
IL (1) | IL236100A0 (ja) |
TW (1) | TWI583935B (ja) |
WO (1) | WO2014017305A1 (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2018150949A1 (ja) * | 2017-02-20 | 2018-08-23 | 株式会社フジキン | 流体制御器の異常検知装置、異常検知システム、異常検知方法、及び流体制御器 |
KR20190118615A (ko) | 2017-03-17 | 2019-10-18 | 가부시키가이샤 후지킨 | 유체 제어 기기의 동작 분석 시스템, 방법, 및 컴퓨터 프로그램 |
KR20190120252A (ko) | 2017-03-17 | 2019-10-23 | 가부시키가이샤 후지킨 | 유체 제어 기기 |
KR20200140342A (ko) | 2018-08-30 | 2020-12-15 | 가부시키가이샤 후지킨 | 유체 제어 기기 |
KR20200140341A (ko) | 2018-08-10 | 2020-12-15 | 가부시키가이샤 후지킨 | 유체 제어 기기, 유체 제어 기기의 이상 검지 방법, 이상 검지 장치, 및 이상 검지 시스템 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11879813B2 (en) * | 2020-09-24 | 2024-01-23 | Transportation Ip Holdings, Llc | Leak detection device |
KR20240066527A (ko) * | 2022-11-07 | 2024-05-16 | 한국자동차연구원 | 고압밸브용 가스누출 감지장치 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH02291937A (ja) * | 1989-05-01 | 1990-12-03 | Kubota Corp | バルブの漏れ検出方法 |
JPH03130637A (ja) * | 1989-10-16 | 1991-06-04 | Tomoe Gijutsu Kenkyusho:Kk | バタフライ弁の漏洩検知方法及び装置 |
JP3142304B2 (ja) * | 1991-04-26 | 2001-03-07 | 清原 まさ子 | シール部破損検知機構付制御器 |
Family Cites Families (9)
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JPS618850U (ja) | 1984-06-21 | 1986-01-20 | 石川島播磨重工業株式会社 | 弁の漏洩検出装置 |
US4823600A (en) * | 1987-11-05 | 1989-04-25 | Ue Systems, Inc. | Ultrasonic transducer and current loop transmitter |
JP3443807B2 (ja) | 2000-02-15 | 2003-09-08 | 株式会社テイエルブイ | 超音波漏洩検出装置 |
CN2557927Y (zh) * | 2002-07-18 | 2003-06-25 | 房继祥 | 一种介质隔离插入式超声波传感器 |
JP2004108809A (ja) * | 2002-09-13 | 2004-04-08 | Nissan Motor Co Ltd | 漏れ検出機能付き超音波流量計 |
JP3868894B2 (ja) * | 2002-11-19 | 2007-01-17 | キリンビバレッジ株式会社 | ボトルキャップの密封性検査方法およびその装置 |
US20070068225A1 (en) * | 2005-09-29 | 2007-03-29 | Brown Gregory C | Leak detector for process valve |
EP1975573B1 (fr) | 2007-03-06 | 2017-10-04 | Itron Global SARL | Compteur à cellule de mesure à ultra sons de type capsule, standardisée |
DE102010040396A1 (de) * | 2010-09-08 | 2012-03-08 | Robert Bosch Gmbh | Durchflussmesser zur Erfassung einer Eigenschaft eines fluiden Mediums |
-
2012
- 2012-07-23 JP JP2012162244A patent/JP5978038B2/ja not_active Expired - Fee Related
-
2013
- 2013-07-11 WO PCT/JP2013/068941 patent/WO2014017305A1/ja active Application Filing
- 2013-07-11 CN CN201380033899.0A patent/CN104685333B/zh not_active Expired - Fee Related
- 2013-07-11 US US14/409,121 patent/US9702781B2/en not_active Expired - Fee Related
- 2013-07-11 KR KR1020147035956A patent/KR101710772B1/ko not_active Expired - Fee Related
- 2013-07-19 TW TW102125859A patent/TWI583935B/zh not_active IP Right Cessation
-
2014
- 2014-12-07 IL IL236100A patent/IL236100A0/en unknown
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02291937A (ja) * | 1989-05-01 | 1990-12-03 | Kubota Corp | バルブの漏れ検出方法 |
JPH03130637A (ja) * | 1989-10-16 | 1991-06-04 | Tomoe Gijutsu Kenkyusho:Kk | バタフライ弁の漏洩検知方法及び装置 |
JP3142304B2 (ja) * | 1991-04-26 | 2001-03-07 | 清原 まさ子 | シール部破損検知機構付制御器 |
Cited By (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102230283B1 (ko) * | 2017-02-20 | 2021-03-19 | 가부시키가이샤 후지킨 | 유체 제어기의 이상 검지 장치, 이상 검지 시스템, 이상 검지 방법 및 유체 제어기 유닛 |
KR20190077496A (ko) | 2017-02-20 | 2019-07-03 | 가부시키가이샤 후지킨 | 유체 제어기의 이상 검지 장치, 이상 검지 시스템, 이상 검지 방법 및 유체 제어기 |
CN109983318A (zh) * | 2017-02-20 | 2019-07-05 | 株式会社富士金 | 流体控制器的异常检测装置、异常检测系统、异常检测方法及流体控制器 |
JP7100364B2 (ja) | 2017-02-20 | 2022-07-13 | 株式会社フジキン | 流体制御器の異常検知装置、異常検知システム、異常検知方法、及び流体制御器 |
WO2018150949A1 (ja) * | 2017-02-20 | 2018-08-23 | 株式会社フジキン | 流体制御器の異常検知装置、異常検知システム、異常検知方法、及び流体制御器 |
JPWO2018150949A1 (ja) * | 2017-02-20 | 2020-01-23 | 株式会社フジキン | 流体制御器の異常検知装置、異常検知システム、異常検知方法、及び流体制御器 |
TWI687658B (zh) * | 2017-02-20 | 2020-03-11 | 日商富士金股份有限公司 | 流體控制器的異常檢測裝置、異常檢測系統、異常檢測方法及流體控制器 |
US11226257B2 (en) | 2017-02-20 | 2022-01-18 | Fujikin Inc. | Anomaly detection device for fluid controller, anomaly detection system, anamoly detection method, and fluid controller |
CN109983318B (zh) * | 2017-02-20 | 2021-07-06 | 株式会社富士金 | 流体控制器的异常检测装置、异常检测系统、异常检测方法及流体控制器 |
KR20190120252A (ko) | 2017-03-17 | 2019-10-23 | 가부시키가이샤 후지킨 | 유체 제어 기기 |
US11162606B2 (en) | 2017-03-17 | 2021-11-02 | Fujikin Irc. | Fluid control device |
US11371627B2 (en) | 2017-03-17 | 2022-06-28 | Fujikin Incorporated | System, method, and computer program for analyzing operation of fluid control device |
KR20190118615A (ko) | 2017-03-17 | 2019-10-18 | 가부시키가이샤 후지킨 | 유체 제어 기기의 동작 분석 시스템, 방법, 및 컴퓨터 프로그램 |
KR20200140341A (ko) | 2018-08-10 | 2020-12-15 | 가부시키가이샤 후지킨 | 유체 제어 기기, 유체 제어 기기의 이상 검지 방법, 이상 검지 장치, 및 이상 검지 시스템 |
US11988302B2 (en) | 2018-08-10 | 2024-05-21 | Fujikin Incorporated | Fluid control device, abnormality detection method of fluid control device, abnormality detection device, and abnormality detection system |
KR20200140342A (ko) | 2018-08-30 | 2020-12-15 | 가부시키가이샤 후지킨 | 유체 제어 기기 |
US11536386B2 (en) | 2018-08-30 | 2022-12-27 | Fujikin Incorporated | Fluid control device |
Also Published As
Publication number | Publication date |
---|---|
US9702781B2 (en) | 2017-07-11 |
IL236100A0 (en) | 2015-01-29 |
KR101710772B1 (ko) | 2017-02-27 |
JP5978038B2 (ja) | 2016-08-24 |
TW201411110A (zh) | 2014-03-16 |
US20150143876A1 (en) | 2015-05-28 |
CN104685333B (zh) | 2017-08-04 |
TWI583935B (zh) | 2017-05-21 |
KR20150013878A (ko) | 2015-02-05 |
CN104685333A (zh) | 2015-06-03 |
WO2014017305A1 (ja) | 2014-01-30 |
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