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GB2482479B - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
GB2482479B
GB2482479B GB1012951.8A GB201012951A GB2482479B GB 2482479 B GB2482479 B GB 2482479B GB 201012951 A GB201012951 A GB 201012951A GB 2482479 B GB2482479 B GB 2482479B
Authority
GB
United Kingdom
Prior art keywords
semiconductor device
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB1012951.8A
Other versions
GB2482479A (en
GB201012951D0 (en
Inventor
Peter Ward
Philip Mawby
Martin Westmoreland
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Warwick
Original Assignee
University of Warwick
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Warwick filed Critical University of Warwick
Priority to GB1012951.8A priority Critical patent/GB2482479B/en
Publication of GB201012951D0 publication Critical patent/GB201012951D0/en
Priority to GBGB1107979.5A priority patent/GB201107979D0/en
Priority to PCT/GB2011/051413 priority patent/WO2012017227A1/en
Publication of GB2482479A publication Critical patent/GB2482479A/en
Application granted granted Critical
Publication of GB2482479B publication Critical patent/GB2482479B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D12/00Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
    • H10D12/411Insulated-gate bipolar transistors [IGBT]
    • H10D12/441Vertical IGBTs
    • H10D12/491Vertical IGBTs having both emitter contacts and collector contacts in the same substrate side
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/64Double-diffused metal-oxide semiconductor [DMOS] FETs
    • H10D30/66Vertical DMOS [VDMOS] FETs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D12/00Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
    • H10D12/01Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D12/00Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
    • H10D12/411Insulated-gate bipolar transistors [IGBT]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/102Constructional design considerations for preventing surface leakage or controlling electric field concentration
    • H10D62/103Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices
    • H10D62/105Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE] 
    • H10D62/109Reduced surface field [RESURF] PN junction structures
    • H10D62/111Multiple RESURF structures, e.g. double RESURF or 3D-RESURF structures
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/101Integrated devices comprising main components and built-in components, e.g. IGBT having built-in freewheel diode
    • H10D84/141VDMOS having built-in components
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/101Integrated devices comprising main components and built-in components, e.g. IGBT having built-in freewheel diode
    • H10D84/141VDMOS having built-in components
    • H10D84/146VDMOS having built-in components the built-in components being Schottky barrier diodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D12/00Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
    • H10D12/411Insulated-gate bipolar transistors [IGBT]
    • H10D12/441Vertical IGBTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/01Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/83Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge
    • H10D62/832Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge being Group IV materials comprising two or more elements, e.g. SiGe
    • H10D62/8325Silicon carbide
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/60Electrodes characterised by their materials
    • H10D64/64Electrodes comprising a Schottky barrier to a semiconductor
GB1012951.8A 2010-08-02 2010-08-02 Semiconductor device Expired - Fee Related GB2482479B (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GB1012951.8A GB2482479B (en) 2010-08-02 2010-08-02 Semiconductor device
GBGB1107979.5A GB201107979D0 (en) 2010-08-02 2011-05-13 Semiconductor device
PCT/GB2011/051413 WO2012017227A1 (en) 2010-08-02 2011-07-25 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1012951.8A GB2482479B (en) 2010-08-02 2010-08-02 Semiconductor device

Publications (3)

Publication Number Publication Date
GB201012951D0 GB201012951D0 (en) 2010-09-15
GB2482479A GB2482479A (en) 2012-02-08
GB2482479B true GB2482479B (en) 2015-02-18

Family

ID=42799452

Family Applications (2)

Application Number Title Priority Date Filing Date
GB1012951.8A Expired - Fee Related GB2482479B (en) 2010-08-02 2010-08-02 Semiconductor device
GBGB1107979.5A Ceased GB201107979D0 (en) 2010-08-02 2011-05-13 Semiconductor device

Family Applications After (1)

Application Number Title Priority Date Filing Date
GBGB1107979.5A Ceased GB201107979D0 (en) 2010-08-02 2011-05-13 Semiconductor device

Country Status (2)

Country Link
GB (2) GB2482479B (en)
WO (1) WO2012017227A1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6362925B2 (en) * 2014-05-30 2018-07-25 三菱電機株式会社 Silicon carbide semiconductor device and method for manufacturing silicon carbide semiconductor device
JP6406021B2 (en) * 2015-01-09 2018-10-17 株式会社デンソー Semiconductor device
CN104810283B (en) * 2015-05-13 2019-03-12 国网智能电网研究院 An IGBT chip manufacturing method suitable for press-fit packaging
CN111403385B (en) * 2020-03-02 2022-10-14 电子科技大学 RC-LIGBT device with embedded Schottky diode
TW202137333A (en) * 2020-03-24 2021-10-01 立錡科技股份有限公司 Power device having lateral insulated gate bipolar transistor (ligbt) and manufacturing method thereof
GB202019454D0 (en) 2020-12-10 2021-01-27 Chancellor Masters And Scholars Of The Univ Of Oxford Method for purifying virus
CN113270476A (en) * 2021-04-08 2021-08-17 西安电子科技大学 Lateral insulated gate bipolar transistor with electronic control gate region and Schottky anode and manufacturing method thereof
CN117556761B (en) * 2022-08-03 2025-01-21 无锡华润上华科技有限公司 Anode short-circuited lateral insulated gate bipolar transistor simulation circuit and simulation method thereof

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4901127A (en) * 1988-10-07 1990-02-13 General Electric Company Circuit including a combined insulated gate bipolar transistor/MOSFET
EP0372391A2 (en) * 1988-12-02 1990-06-13 Hitachi, Ltd. Lateral insulated gate bipolar transistor
US4989058A (en) * 1985-11-27 1991-01-29 North American Philips Corp. Fast switching lateral insulated gate transistors
JPH042169A (en) * 1990-04-19 1992-01-07 Fuji Electric Co Ltd Horizontal type conductivity modulation semiconductor device
JPH06104443A (en) * 1992-09-22 1994-04-15 Fuji Electric Co Ltd Semiconductor device
US5796126A (en) * 1995-06-14 1998-08-18 Samsung Electronics Co., Ltd. Hybrid schottky injection field effect transistor

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10132136C1 (en) * 2001-07-03 2003-02-13 Infineon Technologies Ag Semiconductor component with charge compensation structure and associated manufacturing process
US6979863B2 (en) * 2003-04-24 2005-12-27 Cree, Inc. Silicon carbide MOSFETs with integrated antiparallel junction barrier Schottky free wheeling diodes and methods of fabricating the same
DE102005009020B4 (en) * 2005-02-28 2012-04-26 Infineon Technologies Austria Ag Method for generating a power transistor and thus generated integrated circuit arrangement
US7462909B2 (en) * 2005-06-20 2008-12-09 Kabushiki Kaisha Toshiba Semiconductor device and method of fabricating the same
CN101512738B (en) * 2006-09-22 2013-03-27 飞思卡尔半导体公司 Semiconductor device and method of forming the same

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4989058A (en) * 1985-11-27 1991-01-29 North American Philips Corp. Fast switching lateral insulated gate transistors
US4901127A (en) * 1988-10-07 1990-02-13 General Electric Company Circuit including a combined insulated gate bipolar transistor/MOSFET
EP0372391A2 (en) * 1988-12-02 1990-06-13 Hitachi, Ltd. Lateral insulated gate bipolar transistor
JPH042169A (en) * 1990-04-19 1992-01-07 Fuji Electric Co Ltd Horizontal type conductivity modulation semiconductor device
JPH06104443A (en) * 1992-09-22 1994-04-15 Fuji Electric Co Ltd Semiconductor device
US5796126A (en) * 1995-06-14 1998-08-18 Samsung Electronics Co., Ltd. Hybrid schottky injection field effect transistor

Also Published As

Publication number Publication date
GB2482479A (en) 2012-02-08
GB201107979D0 (en) 2011-06-29
GB201012951D0 (en) 2010-09-15
WO2012017227A1 (en) 2012-02-09

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20190802