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GB1135290A - Improvements in or relating to electron beam apparatus - Google Patents

Improvements in or relating to electron beam apparatus

Info

Publication number
GB1135290A
GB1135290A GB23277/66A GB2327766A GB1135290A GB 1135290 A GB1135290 A GB 1135290A GB 23277/66 A GB23277/66 A GB 23277/66A GB 2327766 A GB2327766 A GB 2327766A GB 1135290 A GB1135290 A GB 1135290A
Authority
GB
United Kingdom
Prior art keywords
polepieces
field
strength
constant
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB23277/66A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Airco Inc
Original Assignee
Air Reduction Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Reduction Co Inc filed Critical Air Reduction Co Inc
Publication of GB1135290A publication Critical patent/GB1135290A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

1,135,290. Electron beam furnaces. AIR REDUCTION CO. Inc. 25 May, 1966 [18 June, 1965], No. 23277/66. Heading H1D. In an electron beam furnace the beam from an electron source 13 situated below the crucible 47, Fig. 1, or to one side below a lateral shelf 29, Fig. 7, is passed through a focusing and deflecting magnetic field which first increases in strength and is then constant either over the remaining portion of the path or over an intermediate region which is followed by a region in which the field decreases in strength or is of constant strength but lower magnitude. The flux lines of the field of increasing in strength increase in curvature in the direction of the electron source. As shown in Fig. 1, the magnetic system comprises two pairs of polepieces 23, 23a and 63, 63a, energizing coils 51, 53, 55 and a ferromagnetic base plate 49. The source 13 is situated in the fringe field of polepieces 23, 23a and the field increases to a region of constant intensity between parts 70, 70a of the polepieces 23, 23a. A weaker but constant field is provided between polepieces 63, 63a. In Fig. 7 the polepieces 77 shaped as shown are spaced from the side limbs of a U-shaped ferromagnetic support 89 by a plurality of coils shown in dotted lines. The ampere-turns of these coils may be individually varied. In another embodiment with a rotating crucible 101, Fig. 8, in which due to centrifugal force the molten material is urged into a slot in the inside wall of the crucible, a plurality of electron sources 13 are provided, each source being associated with an electromagnet comprising angularly disposed polepieces 109, 109a and parallel pole faces at the ends of the polepieces. In a further embodiment, Fig. 11 (not shown), the beam passes between parallel polepieces of a U-shaped electromagnet. Guidance is given in the Specification as to the extents of the various magnetic field regions along the beam path.
GB23277/66A 1965-06-18 1966-05-25 Improvements in or relating to electron beam apparatus Expired GB1135290A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US46496865A 1965-06-18 1965-06-18

Publications (1)

Publication Number Publication Date
GB1135290A true GB1135290A (en) 1968-12-04

Family

ID=23846005

Family Applications (1)

Application Number Title Priority Date Filing Date
GB23277/66A Expired GB1135290A (en) 1965-06-18 1966-05-25 Improvements in or relating to electron beam apparatus

Country Status (10)

Country Link
US (1) US3420977A (en)
AT (1) AT285193B (en)
BE (1) BE682211A (en)
CH (1) CH452732A (en)
DE (1) DE1565880A1 (en)
DK (1) DK121914B (en)
GB (1) GB1135290A (en)
LU (1) LU51327A1 (en)
NL (1) NL6608483A (en)
SE (1) SE336728B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2194384A (en) * 1986-07-16 1988-03-02 Boc Group Inc Vapor source assembly with adjustable magnetic pole

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3710072A (en) * 1971-05-10 1973-01-09 Airco Inc Vapor source assembly
US4048462A (en) * 1975-01-17 1977-09-13 Airco, Inc. Compact rotary evaporation source
IT1037702B (en) * 1975-04-29 1979-11-20 Varian Associates ELECTRONIC BEAM HEATING AND EVAPORATION EQUIPMENT
US4064352A (en) * 1976-02-17 1977-12-20 Varian Associates, Inc. Electron beam evaporator having beam spot control
US4153005A (en) * 1977-07-06 1979-05-08 United Technologies Corporation Multiple electron beam vacuum vapor deposition apparatus
DE3050343C2 (en) * 1980-04-25 1985-06-27 Stanislav Petrovič Dmitriev Device for electron irradiation of objects
DE3916787C2 (en) * 1989-05-23 1994-01-20 Balzers Hochvakuum Method and arrangement for controlling the focusing of a beam of monopolar charged particles and application
DE3921040C2 (en) * 1989-06-27 1994-03-10 Balzers Hochvakuum Method and arrangement for controlling the evaporation of material from a target object by a beam of charged particles and use, and method and measuring arrangement for selectively measuring an amount of vaporized particles to carry out the method
US5111022A (en) * 1989-08-23 1992-05-05 Tfi Telemark Cooling system for electron beam gun and method
DE3929475A1 (en) * 1989-09-05 1991-03-14 Balzers Hochvakuum METHOD AND DEVICE FOR DEFLECTING A RAY
US4983806A (en) * 1990-03-01 1991-01-08 Harper James L Method and device for cooling electron beam gun
TW490714B (en) * 1999-12-27 2002-06-11 Semiconductor Energy Lab Film formation apparatus and method for forming a film
US20020011205A1 (en) 2000-05-02 2002-01-31 Shunpei Yamazaki Film-forming apparatus, method of cleaning the same, and method of manufacturing a light-emitting device
US6496529B1 (en) * 2000-11-15 2002-12-17 Ati Properties, Inc. Refining and casting apparatus and method
US8891583B2 (en) 2000-11-15 2014-11-18 Ati Properties, Inc. Refining and casting apparatus and method
US7803212B2 (en) * 2005-09-22 2010-09-28 Ati Properties, Inc. Apparatus and method for clean, rapidly solidified alloys
US7803211B2 (en) * 2005-09-22 2010-09-28 Ati Properties, Inc. Method and apparatus for producing large diameter superalloy ingots
US7578960B2 (en) 2005-09-22 2009-08-25 Ati Properties, Inc. Apparatus and method for clean, rapidly solidified alloys
US8381047B2 (en) * 2005-11-30 2013-02-19 Microsoft Corporation Predicting degradation of a communication channel below a threshold based on data transmission errors
KR101433415B1 (en) * 2007-03-30 2014-08-26 에이티아이 프로퍼티즈, 인코퍼레이티드 A fused furnace comprising a wire discharge ion plasma electron emitter
US8748773B2 (en) 2007-03-30 2014-06-10 Ati Properties, Inc. Ion plasma electron emitters for a melting furnace
US7798199B2 (en) 2007-12-04 2010-09-21 Ati Properties, Inc. Casting apparatus and method
US8747956B2 (en) 2011-08-11 2014-06-10 Ati Properties, Inc. Processes, systems, and apparatus for forming products from atomized metals and alloys

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3177535A (en) * 1960-06-21 1965-04-13 Stauffer Chemical Co Electron beam furnace with low beam source
US3068309A (en) * 1960-06-22 1962-12-11 Stauffer Chemical Co Electron beam furnace with multiple field guidance of electrons
BE627166A (en) * 1962-01-15
BE634652A (en) * 1962-07-09
US3202794A (en) * 1963-02-18 1965-08-24 Thermionics Lab Inc Permanent magnet transverse electron beam evaporation source

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2194384A (en) * 1986-07-16 1988-03-02 Boc Group Inc Vapor source assembly with adjustable magnetic pole
GB2194384B (en) * 1986-07-16 1991-02-13 Boc Group Inc Vapor source assembly with adjustable magnetic pole pieces

Also Published As

Publication number Publication date
SE336728B (en) 1971-07-12
CH452732A (en) 1968-03-15
AT285193B (en) 1970-10-12
DE1565880A1 (en) 1970-02-26
LU51327A1 (en) 1966-08-16
DK121914B (en) 1971-12-20
BE682211A (en) 1966-11-14
US3420977A (en) 1969-01-07
NL6608483A (en) 1966-12-19

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