GB1135290A - Improvements in or relating to electron beam apparatus - Google Patents
Improvements in or relating to electron beam apparatusInfo
- Publication number
- GB1135290A GB1135290A GB23277/66A GB2327766A GB1135290A GB 1135290 A GB1135290 A GB 1135290A GB 23277/66 A GB23277/66 A GB 23277/66A GB 2327766 A GB2327766 A GB 2327766A GB 1135290 A GB1135290 A GB 1135290A
- Authority
- GB
- United Kingdom
- Prior art keywords
- polepieces
- field
- strength
- constant
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 title abstract 3
- 230000005291 magnetic effect Effects 0.000 abstract 3
- 230000005294 ferromagnetic effect Effects 0.000 abstract 2
- 230000007423 decrease Effects 0.000 abstract 1
- 230000004907 flux Effects 0.000 abstract 1
- 239000012768 molten material Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Physical Vapour Deposition (AREA)
Abstract
1,135,290. Electron beam furnaces. AIR REDUCTION CO. Inc. 25 May, 1966 [18 June, 1965], No. 23277/66. Heading H1D. In an electron beam furnace the beam from an electron source 13 situated below the crucible 47, Fig. 1, or to one side below a lateral shelf 29, Fig. 7, is passed through a focusing and deflecting magnetic field which first increases in strength and is then constant either over the remaining portion of the path or over an intermediate region which is followed by a region in which the field decreases in strength or is of constant strength but lower magnitude. The flux lines of the field of increasing in strength increase in curvature in the direction of the electron source. As shown in Fig. 1, the magnetic system comprises two pairs of polepieces 23, 23a and 63, 63a, energizing coils 51, 53, 55 and a ferromagnetic base plate 49. The source 13 is situated in the fringe field of polepieces 23, 23a and the field increases to a region of constant intensity between parts 70, 70a of the polepieces 23, 23a. A weaker but constant field is provided between polepieces 63, 63a. In Fig. 7 the polepieces 77 shaped as shown are spaced from the side limbs of a U-shaped ferromagnetic support 89 by a plurality of coils shown in dotted lines. The ampere-turns of these coils may be individually varied. In another embodiment with a rotating crucible 101, Fig. 8, in which due to centrifugal force the molten material is urged into a slot in the inside wall of the crucible, a plurality of electron sources 13 are provided, each source being associated with an electromagnet comprising angularly disposed polepieces 109, 109a and parallel pole faces at the ends of the polepieces. In a further embodiment, Fig. 11 (not shown), the beam passes between parallel polepieces of a U-shaped electromagnet. Guidance is given in the Specification as to the extents of the various magnetic field regions along the beam path.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US46496865A | 1965-06-18 | 1965-06-18 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1135290A true GB1135290A (en) | 1968-12-04 |
Family
ID=23846005
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB23277/66A Expired GB1135290A (en) | 1965-06-18 | 1966-05-25 | Improvements in or relating to electron beam apparatus |
Country Status (10)
Country | Link |
---|---|
US (1) | US3420977A (en) |
AT (1) | AT285193B (en) |
BE (1) | BE682211A (en) |
CH (1) | CH452732A (en) |
DE (1) | DE1565880A1 (en) |
DK (1) | DK121914B (en) |
GB (1) | GB1135290A (en) |
LU (1) | LU51327A1 (en) |
NL (1) | NL6608483A (en) |
SE (1) | SE336728B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2194384A (en) * | 1986-07-16 | 1988-03-02 | Boc Group Inc | Vapor source assembly with adjustable magnetic pole |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3710072A (en) * | 1971-05-10 | 1973-01-09 | Airco Inc | Vapor source assembly |
US4048462A (en) * | 1975-01-17 | 1977-09-13 | Airco, Inc. | Compact rotary evaporation source |
IT1037702B (en) * | 1975-04-29 | 1979-11-20 | Varian Associates | ELECTRONIC BEAM HEATING AND EVAPORATION EQUIPMENT |
US4064352A (en) * | 1976-02-17 | 1977-12-20 | Varian Associates, Inc. | Electron beam evaporator having beam spot control |
US4153005A (en) * | 1977-07-06 | 1979-05-08 | United Technologies Corporation | Multiple electron beam vacuum vapor deposition apparatus |
DE3050343C2 (en) * | 1980-04-25 | 1985-06-27 | Stanislav Petrovič Dmitriev | Device for electron irradiation of objects |
DE3916787C2 (en) * | 1989-05-23 | 1994-01-20 | Balzers Hochvakuum | Method and arrangement for controlling the focusing of a beam of monopolar charged particles and application |
DE3921040C2 (en) * | 1989-06-27 | 1994-03-10 | Balzers Hochvakuum | Method and arrangement for controlling the evaporation of material from a target object by a beam of charged particles and use, and method and measuring arrangement for selectively measuring an amount of vaporized particles to carry out the method |
US5111022A (en) * | 1989-08-23 | 1992-05-05 | Tfi Telemark | Cooling system for electron beam gun and method |
DE3929475A1 (en) * | 1989-09-05 | 1991-03-14 | Balzers Hochvakuum | METHOD AND DEVICE FOR DEFLECTING A RAY |
US4983806A (en) * | 1990-03-01 | 1991-01-08 | Harper James L | Method and device for cooling electron beam gun |
TW490714B (en) * | 1999-12-27 | 2002-06-11 | Semiconductor Energy Lab | Film formation apparatus and method for forming a film |
US20020011205A1 (en) | 2000-05-02 | 2002-01-31 | Shunpei Yamazaki | Film-forming apparatus, method of cleaning the same, and method of manufacturing a light-emitting device |
US6496529B1 (en) * | 2000-11-15 | 2002-12-17 | Ati Properties, Inc. | Refining and casting apparatus and method |
US8891583B2 (en) | 2000-11-15 | 2014-11-18 | Ati Properties, Inc. | Refining and casting apparatus and method |
US7803212B2 (en) * | 2005-09-22 | 2010-09-28 | Ati Properties, Inc. | Apparatus and method for clean, rapidly solidified alloys |
US7803211B2 (en) * | 2005-09-22 | 2010-09-28 | Ati Properties, Inc. | Method and apparatus for producing large diameter superalloy ingots |
US7578960B2 (en) | 2005-09-22 | 2009-08-25 | Ati Properties, Inc. | Apparatus and method for clean, rapidly solidified alloys |
US8381047B2 (en) * | 2005-11-30 | 2013-02-19 | Microsoft Corporation | Predicting degradation of a communication channel below a threshold based on data transmission errors |
KR101433415B1 (en) * | 2007-03-30 | 2014-08-26 | 에이티아이 프로퍼티즈, 인코퍼레이티드 | A fused furnace comprising a wire discharge ion plasma electron emitter |
US8748773B2 (en) | 2007-03-30 | 2014-06-10 | Ati Properties, Inc. | Ion plasma electron emitters for a melting furnace |
US7798199B2 (en) | 2007-12-04 | 2010-09-21 | Ati Properties, Inc. | Casting apparatus and method |
US8747956B2 (en) | 2011-08-11 | 2014-06-10 | Ati Properties, Inc. | Processes, systems, and apparatus for forming products from atomized metals and alloys |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3177535A (en) * | 1960-06-21 | 1965-04-13 | Stauffer Chemical Co | Electron beam furnace with low beam source |
US3068309A (en) * | 1960-06-22 | 1962-12-11 | Stauffer Chemical Co | Electron beam furnace with multiple field guidance of electrons |
BE627166A (en) * | 1962-01-15 | |||
BE634652A (en) * | 1962-07-09 | |||
US3202794A (en) * | 1963-02-18 | 1965-08-24 | Thermionics Lab Inc | Permanent magnet transverse electron beam evaporation source |
-
1965
- 1965-06-18 US US464968A patent/US3420977A/en not_active Expired - Lifetime
-
1966
- 1966-05-25 GB GB23277/66A patent/GB1135290A/en not_active Expired
- 1966-06-06 DE DE19661565880 patent/DE1565880A1/en active Pending
- 1966-06-07 BE BE682211D patent/BE682211A/xx unknown
- 1966-06-14 LU LU51327A patent/LU51327A1/xx unknown
- 1966-06-16 CH CH868566A patent/CH452732A/en unknown
- 1966-06-17 AT AT583366A patent/AT285193B/en not_active IP Right Cessation
- 1966-06-17 DK DK312866AA patent/DK121914B/en unknown
- 1966-06-17 SE SE08313/66A patent/SE336728B/xx unknown
- 1966-06-17 NL NL6608483A patent/NL6608483A/xx unknown
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2194384A (en) * | 1986-07-16 | 1988-03-02 | Boc Group Inc | Vapor source assembly with adjustable magnetic pole |
GB2194384B (en) * | 1986-07-16 | 1991-02-13 | Boc Group Inc | Vapor source assembly with adjustable magnetic pole pieces |
Also Published As
Publication number | Publication date |
---|---|
SE336728B (en) | 1971-07-12 |
CH452732A (en) | 1968-03-15 |
AT285193B (en) | 1970-10-12 |
DE1565880A1 (en) | 1970-02-26 |
LU51327A1 (en) | 1966-08-16 |
DK121914B (en) | 1971-12-20 |
BE682211A (en) | 1966-11-14 |
US3420977A (en) | 1969-01-07 |
NL6608483A (en) | 1966-12-19 |
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