[go: up one dir, main page]

GB1154237A - Electron Beam Vapourisation Furnace - Google Patents

Electron Beam Vapourisation Furnace

Info

Publication number
GB1154237A
GB1154237A GB40860/66A GB4086066A GB1154237A GB 1154237 A GB1154237 A GB 1154237A GB 40860/66 A GB40860/66 A GB 40860/66A GB 4086066 A GB4086066 A GB 4086066A GB 1154237 A GB1154237 A GB 1154237A
Authority
GB
United Kingdom
Prior art keywords
electron beam
crucible
furnace
vapourisation
polepieces
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB40860/66A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Libbey Owens Ford Glass Co
Original Assignee
Libbey Owens Ford Glass Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Libbey Owens Ford Glass Co filed Critical Libbey Owens Ford Glass Co
Publication of GB1154237A publication Critical patent/GB1154237A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/544—Controlling the film thickness or evaporation rate using measurement in the gas phase

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

1,154,237. Electron beam furnaces. LIBBEYOWENS-FORD GLASS CO. 13 Sept., 1966 [20 Sept., 1965], No. 40860/66. Heading HID. [Also in Division C7] In an electron beam furnace in which material evaporated from the crucible 13 is deposited on a substrate, the electron beam being generated by a gun 35, 36 and directed into the crucible by the transverse magnetic field of an electromagnet 47, one or more electron collecting electrodes 21 are provided on either side of the crucible adjacent the polepieces for monitoring the vapour density of the evaporated material. The monitoring electrodes 21 may be constituted by the polepieces 43 in which case the magnet core 41 is insulated from the surrounding apparatus.
GB40860/66A 1965-09-20 1966-09-13 Electron Beam Vapourisation Furnace Expired GB1154237A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US488671A US3390249A (en) 1965-09-20 1965-09-20 Vaporization monitoring apparatus

Publications (1)

Publication Number Publication Date
GB1154237A true GB1154237A (en) 1969-06-04

Family

ID=23940651

Family Applications (1)

Application Number Title Priority Date Filing Date
GB40860/66A Expired GB1154237A (en) 1965-09-20 1966-09-13 Electron Beam Vapourisation Furnace

Country Status (4)

Country Link
US (1) US3390249A (en)
BE (1) BE687030A (en)
DE (1) DE1521363B2 (en)
GB (1) GB1154237A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2223032A (en) * 1988-09-27 1990-03-28 Leybold Ag Apparatus for applying dielectric or metallic materials to a substrate
GB2261226A (en) * 1991-11-08 1993-05-12 Univ Hull Deposition of non-conductive material using D.C. biased, thermionically enhanced, plasma assisted PVD

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3432335A (en) * 1966-03-15 1969-03-11 Lokomotivbau Elektrotech Cyclically moving electron beam for uniform vapor deposited coating
US3446934A (en) * 1968-01-30 1969-05-27 Air Reduction Electron beam heating apparatus
US3607222A (en) * 1968-11-26 1971-09-21 Air Reduction Method for evaporating alloy
US3592955A (en) * 1969-09-24 1971-07-13 Air Reduction Electron beam furnace
US3622679A (en) * 1970-09-29 1971-11-23 Air Reduction Heating system for electron beam furnace
CH566399A5 (en) * 1973-05-26 1975-09-15 Balzers Patent Beteilig Ag
US4024399A (en) * 1975-01-06 1977-05-17 Jersey Nuclear-Avco Isotopes, Inc. Method and apparatus for measuring vapor flow in isotope separation
DE3050343C2 (en) * 1980-04-25 1985-06-27 Stanislav Petrovič Dmitriev Device for electron irradiation of objects
DE3639683A1 (en) * 1986-11-20 1988-05-26 Leybold Ag EVAPORATOR ARRANGEMENT WITH A RECTANGULAR EVAPORATOR AND MULTIPLE ELECTRON CANNON
FR2634061B1 (en) * 1988-07-06 1991-04-05 Commissariat Energie Atomique ELECTRONIC BOMBARDING EVAPORATOR PROVIDED WITH MEANS FOR RECOVERING BACK-BROADCAST ELECTRONS
US5858456A (en) * 1991-02-06 1999-01-12 Applied Vacuum Technologies 1 Ab Method for metal coating discrete objects by vapor deposition
US8373427B2 (en) 2010-02-10 2013-02-12 Skyworks Solutions, Inc. Electron radiation monitoring system to prevent gold spitting and resist cross-linking during evaporation

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3177535A (en) * 1960-06-21 1965-04-13 Stauffer Chemical Co Electron beam furnace with low beam source
US3196246A (en) * 1962-11-29 1965-07-20 Rca Corp Means for observing a workpiece in electron beam machining apparatus
US3297944A (en) * 1963-01-02 1967-01-10 Hughes Aircraft Co Evaporation rate monitor using two integrated ion gauges
US3202794A (en) * 1963-02-18 1965-08-24 Thermionics Lab Inc Permanent magnet transverse electron beam evaporation source

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2223032A (en) * 1988-09-27 1990-03-28 Leybold Ag Apparatus for applying dielectric or metallic materials to a substrate
US5070811A (en) * 1988-09-27 1991-12-10 Albert Feuerstein Apparatus for applying dielectric or metallic materials
GB2261226A (en) * 1991-11-08 1993-05-12 Univ Hull Deposition of non-conductive material using D.C. biased, thermionically enhanced, plasma assisted PVD
GB2261226B (en) * 1991-11-08 1994-10-26 Univ Hull Deposition of non-conductive material

Also Published As

Publication number Publication date
DE1521363A1 (en) 1969-07-24
BE687030A (en) 1967-03-16
DE1521363B2 (en) 1975-09-25
US3390249A (en) 1968-06-25

Similar Documents

Publication Publication Date Title
GB1154237A (en) Electron Beam Vapourisation Furnace
US4166018A (en) Sputtering process and apparatus
GB1430180A (en) Method and apparatus for depositing film on a substrate and products produced thereby
GB585992A (en) Improvements in and relating to magnetic induction accelerators
ATE137887T1 (en) DEVICE FOR COATING SUBSTRATES BY CATHODE SPUTTING
GB1464039A (en) Electron bearm gun system
GB982669A (en) Improvements in or relating to electron beam generators
GB1280012A (en) Improvements in or relating to ion beam sources
GB976678A (en) Improvements in or relating to electron beam furnaces
GB915657A (en) Improvements relating to electron beam furnaces
GB1270496A (en) Ion source for slow-ion sputtering
GB1358411A (en) Sputtering
GB1344432A (en) Apparatus for vaporizing metal
GB1259505A (en)
GB1061469A (en) Improvements relating to electron beam furnaces
GB1494398A (en) Ion beam apparatus
GB1012040A (en) Apparatus for producing a narrow high-intensity beam of charged particles
GB1183751A (en) Charged Particle Generator with Electromagnetic Current Control.
JPS5254897A (en) Plasma ion source for solid materials
GB1214949A (en) Apparatus for heating a target in an electron beam furnace
GB542389A (en) Improvements in or relating to electron discharge apparatus
GB1096349A (en) Improvements in electron beam tubes
GB1013403A (en) Improvements in or relating to electron beam generating and deflecting systems
GB1155656A (en) Vaporisation of High Melting Point Materials in Electron Beam Apparatus
GB919298A (en) Improvements relating to electronic beam furnaces