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FR3053834B1 - Structure de transistor - Google Patents

Structure de transistor Download PDF

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Publication number
FR3053834B1
FR3053834B1 FR1657587A FR1657587A FR3053834B1 FR 3053834 B1 FR3053834 B1 FR 3053834B1 FR 1657587 A FR1657587 A FR 1657587A FR 1657587 A FR1657587 A FR 1657587A FR 3053834 B1 FR3053834 B1 FR 3053834B1
Authority
FR
France
Prior art keywords
regions
region
conductivity
type
quasi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1657587A
Other languages
English (en)
Other versions
FR3053834A1 (fr
Inventor
Sotirios Athanasiou
Philippe Galy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics SA
Original Assignee
STMicroelectronics SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STMicroelectronics SA filed Critical STMicroelectronics SA
Priority to US15/427,656 priority Critical patent/US10367068B2/en
Publication of FR3053834A1 publication Critical patent/FR3053834A1/fr
Priority to US16/434,920 priority patent/US11380766B2/en
Application granted granted Critical
Publication of FR3053834B1 publication Critical patent/FR3053834B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/60—Impurity distributions or concentrations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D10/00—Bipolar junction transistors [BJT]
    • H10D10/60—Lateral BJTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/6704—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device
    • H10D30/6708—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device for preventing the kink effect or the snapback effect, e.g. discharging the minority carriers of the channel region for preventing bipolar effect
    • H10D30/6711—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device for preventing the kink effect or the snapback effect, e.g. discharging the minority carriers of the channel region for preventing bipolar effect by using electrodes contacting the supplementary regions or layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/6729—Thin-film transistors [TFT] characterised by the electrodes
    • H10D30/673—Thin-film transistors [TFT] characterised by the electrodes characterised by the shapes, relative sizes or dispositions of the gate electrodes
    • H10D30/6733—Multi-gate TFTs
    • H10D30/6734—Multi-gate TFTs having gate electrodes arranged on both top and bottom sides of the channel, e.g. dual-gate TFTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/6758—Thin-film transistors [TFT] characterised by the insulating substrates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/30—Devices controlled by electric currents or voltages
    • H10D48/32—Devices controlled by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H10D48/34—Bipolar devices
    • H10D48/345—Bipolar transistors having ohmic electrodes on emitter-like, base-like, and collector-like regions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/17—Semiconductor regions connected to electrodes not carrying current to be rectified, amplified or switched, e.g. channel regions
    • H10D62/177—Base regions of bipolar transistors, e.g. BJTs or IGBTs
    • H10D62/184—Base regions of bipolar transistors, e.g. BJTs or IGBTs of lateral BJTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/27—Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
    • H10D64/311—Gate electrodes for field-effect devices
    • H10D64/411—Gate electrodes for field-effect devices for FETs
    • H10D64/511—Gate electrodes for field-effect devices for FETs for IGFETs
    • H10D64/512—Disposition of the gate electrodes, e.g. buried gates

Landscapes

  • Thin Film Transistor (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)

Abstract

L'invention concerne un transistor comprenant : une région quasi-intrinsèque (7) d'un premier type de conductivité recouverte par une grille (9) isolée et s'étendant entre deux premières régions (18, 19) dopées d'un deuxième type de conductivité, une électrode principale (23, 25) étant disposée sur chacune des premières régions ; et une deuxième région (29) dopée du deuxième type de conductivité en contact avec la région quasi-intrinsèque et à distance des deux premières régions, une électrode de commande (37) étant disposée sur la deuxième région.
FR1657587A 2016-07-05 2016-08-05 Structure de transistor Expired - Fee Related FR3053834B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US15/427,656 US10367068B2 (en) 2016-07-05 2017-02-08 Transistor structure
US16/434,920 US11380766B2 (en) 2016-07-05 2019-06-07 Transistor structure

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GR20160100358 2016-07-05
GR20160100358 2016-07-05

Publications (2)

Publication Number Publication Date
FR3053834A1 FR3053834A1 (fr) 2018-01-12
FR3053834B1 true FR3053834B1 (fr) 2020-06-12

Family

ID=60917623

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1657587A Expired - Fee Related FR3053834B1 (fr) 2016-07-05 2016-08-05 Structure de transistor

Country Status (3)

Country Link
US (2) US10367068B2 (fr)
CN (2) CN107579117B (fr)
FR (1) FR3053834B1 (fr)

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FR3053834B1 (fr) * 2016-07-05 2020-06-12 Stmicroelectronics Sa Structure de transistor
US9941301B1 (en) * 2016-12-22 2018-04-10 Globalfoundries Inc. Fully depleted silicon-on-insulator (FDSOI) transistor device and self-aligned active area in FDSOI bulk exposed regions
US11295988B2 (en) 2020-06-11 2022-04-05 International Business Machines Corporation Semiconductor FET device with bottom isolation and high-κ first
US11949004B2 (en) * 2021-08-27 2024-04-02 Globalfoundries U.S. Inc. Lateral bipolar transistors with gate structure aligned to extrinsic base
US20230387208A1 (en) * 2022-05-31 2023-11-30 Stmicroelectronics (Crolles 2) Sas Lateral bipolar transistor

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Also Published As

Publication number Publication date
US11380766B2 (en) 2022-07-05
US20180012965A1 (en) 2018-01-11
CN107579117B (zh) 2021-03-12
CN206878003U (zh) 2018-01-12
US20190288079A1 (en) 2019-09-19
FR3053834A1 (fr) 2018-01-12
CN107579117A (zh) 2018-01-12
US10367068B2 (en) 2019-07-30

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