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FR2943177B1 - Procede de fabrication d'une structure multicouche avec report de couche circuit - Google Patents

Procede de fabrication d'une structure multicouche avec report de couche circuit

Info

Publication number
FR2943177B1
FR2943177B1 FR0951543A FR0951543A FR2943177B1 FR 2943177 B1 FR2943177 B1 FR 2943177B1 FR 0951543 A FR0951543 A FR 0951543A FR 0951543 A FR0951543 A FR 0951543A FR 2943177 B1 FR2943177 B1 FR 2943177B1
Authority
FR
France
Prior art keywords
manufacturing
multilayer structure
circuit layer
layer report
report
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0951543A
Other languages
English (en)
Other versions
FR2943177A1 (fr
Inventor
Arnaud Castex
Marcel Broekaart
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Soitec SA
Original Assignee
Soitec SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR0951543A priority Critical patent/FR2943177B1/fr
Application filed by Soitec SA filed Critical Soitec SA
Priority to CN201080011159.3A priority patent/CN102349149B/zh
Priority to PCT/EP2010/052765 priority patent/WO2010102943A1/fr
Priority to JP2011553398A priority patent/JP5640272B2/ja
Priority to EP10706264A priority patent/EP2406820A1/fr
Priority to US13/255,670 priority patent/US8932938B2/en
Priority to SG2011060613A priority patent/SG173813A1/en
Priority to KR1020117021845A priority patent/KR101379887B1/ko
Priority to TW099107357A priority patent/TWI475640B/zh
Publication of FR2943177A1 publication Critical patent/FR2943177A1/fr
Application granted granted Critical
Publication of FR2943177B1 publication Critical patent/FR2943177B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
    • H01L21/2003—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy characterised by the substrate
    • H01L21/2007—Bonding of semiconductor wafers to insulating substrates or to semiconducting substrates using an intermediate insulating layer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Pressure Welding/Diffusion-Bonding (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Micromachines (AREA)
  • Laminated Bodies (AREA)
FR0951543A 2009-03-12 2009-03-12 Procede de fabrication d'une structure multicouche avec report de couche circuit Expired - Fee Related FR2943177B1 (fr)

Priority Applications (9)

Application Number Priority Date Filing Date Title
FR0951543A FR2943177B1 (fr) 2009-03-12 2009-03-12 Procede de fabrication d'une structure multicouche avec report de couche circuit
PCT/EP2010/052765 WO2010102943A1 (fr) 2009-03-12 2010-03-04 Procédé de fabrication d'une structure multicouche avec un transfert de couche de circuit
JP2011553398A JP5640272B2 (ja) 2009-03-12 2010-03-04 回路層転写により多層構造体を製作する方法
EP10706264A EP2406820A1 (fr) 2009-03-12 2010-03-04 Procédé de fabrication d'une structure multicouche avec un transfert de couche de circuit
CN201080011159.3A CN102349149B (zh) 2009-03-12 2010-03-04 利用电路层转移制造多层结构的方法
US13/255,670 US8932938B2 (en) 2009-03-12 2010-03-04 Method of fabricating a multilayer structure with circuit layer transfer
SG2011060613A SG173813A1 (en) 2009-03-12 2010-03-04 A method of fabricating a multilayer structure with circuit layer transfer
KR1020117021845A KR101379887B1 (ko) 2009-03-12 2010-03-04 회로층 전사를 갖는 다층 구조를 제조하는 방법
TW099107357A TWI475640B (zh) 2009-03-12 2010-03-12 製造具有電路層轉移的多層結構之方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0951543A FR2943177B1 (fr) 2009-03-12 2009-03-12 Procede de fabrication d'une structure multicouche avec report de couche circuit

Publications (2)

Publication Number Publication Date
FR2943177A1 FR2943177A1 (fr) 2010-09-17
FR2943177B1 true FR2943177B1 (fr) 2011-05-06

Family

ID=41110979

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0951543A Expired - Fee Related FR2943177B1 (fr) 2009-03-12 2009-03-12 Procede de fabrication d'une structure multicouche avec report de couche circuit

Country Status (9)

Country Link
US (1) US8932938B2 (fr)
EP (1) EP2406820A1 (fr)
JP (1) JP5640272B2 (fr)
KR (1) KR101379887B1 (fr)
CN (1) CN102349149B (fr)
FR (1) FR2943177B1 (fr)
SG (1) SG173813A1 (fr)
TW (1) TWI475640B (fr)
WO (1) WO2010102943A1 (fr)

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FR2965398B1 (fr) * 2010-09-23 2012-10-12 Soitec Silicon On Insulator Procédé de collage par adhésion moléculaire avec réduction de desalignement de type overlay
FR2978864B1 (fr) * 2011-08-02 2014-02-07 Soitec Silicon On Insulator Procede de correction de desalignement de positions sur une premiere plaque collee sur une deuxieme plaque
TWI541928B (zh) * 2011-10-14 2016-07-11 晶元光電股份有限公司 晶圓載具
US8735219B2 (en) 2012-08-30 2014-05-27 Ziptronix, Inc. Heterogeneous annealing method and device
KR102097486B1 (ko) * 2013-08-02 2020-04-07 삼성디스플레이 주식회사 표시 장치의 제조 방법
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US12170212B2 (en) 2021-03-16 2024-12-17 Vuereal Inc. Gimbal bonding tool and a method to correct surface non-uniformities using a bonding tool

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Also Published As

Publication number Publication date
JP2012520556A (ja) 2012-09-06
CN102349149A (zh) 2012-02-08
KR20110120328A (ko) 2011-11-03
US20120028440A1 (en) 2012-02-02
SG173813A1 (en) 2011-09-29
US8932938B2 (en) 2015-01-13
CN102349149B (zh) 2014-12-17
EP2406820A1 (fr) 2012-01-18
TWI475640B (zh) 2015-03-01
FR2943177A1 (fr) 2010-09-17
WO2010102943A1 (fr) 2010-09-16
JP5640272B2 (ja) 2014-12-17
KR101379887B1 (ko) 2014-04-01
TW201041085A (en) 2010-11-16

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Legal Events

Date Code Title Description
CD Change of name or company name

Owner name: SOITEC, FR

Effective date: 20120907

PLFP Fee payment

Year of fee payment: 7

PLFP Fee payment

Year of fee payment: 8

ST Notification of lapse

Effective date: 20171130