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FR2650122B1 - Dispositif semi-conducteur a haute tension et son procede de fabrication - Google Patents

Dispositif semi-conducteur a haute tension et son procede de fabrication

Info

Publication number
FR2650122B1
FR2650122B1 FR8909897A FR8909897A FR2650122B1 FR 2650122 B1 FR2650122 B1 FR 2650122B1 FR 8909897 A FR8909897 A FR 8909897A FR 8909897 A FR8909897 A FR 8909897A FR 2650122 B1 FR2650122 B1 FR 2650122B1
Authority
FR
France
Prior art keywords
manufacturing
semiconductor device
high voltage
voltage semiconductor
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR8909897A
Other languages
English (en)
Other versions
FR2650122A1 (fr
Inventor
Denis Jaume
Andre Peyre Lavigne
Georges Charitat
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Freescale Semiconducteurs France SAS
Original Assignee
Motorola Semiconducteurs SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Semiconducteurs SA filed Critical Motorola Semiconducteurs SA
Priority to FR8909897A priority Critical patent/FR2650122B1/fr
Priority to ES90109951T priority patent/ES2064524T3/es
Priority to DE69014454T priority patent/DE69014454T2/de
Priority to EP90109951A priority patent/EP0408868B1/fr
Priority to KR1019900010798A priority patent/KR940002768B1/ko
Priority to JP2190907A priority patent/JP2580850B2/ja
Priority to CA002021671A priority patent/CA2021671C/fr
Priority to MYPI90001220A priority patent/MY105940A/en
Priority to US07/630,804 priority patent/US5060047A/en
Publication of FR2650122A1 publication Critical patent/FR2650122A1/fr
Application granted granted Critical
Publication of FR2650122B1 publication Critical patent/FR2650122B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/13Semiconductor regions connected to electrodes carrying current to be rectified, amplified or switched, e.g. source or drain regions
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/111Field plates
    • H10D64/115Resistive field plates, e.g. semi-insulating field plates
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/118Electrodes comprising insulating layers having particular dielectric or electrostatic properties, e.g. having static charges
FR8909897A 1989-07-21 1989-07-21 Dispositif semi-conducteur a haute tension et son procede de fabrication Expired - Lifetime FR2650122B1 (fr)

Priority Applications (9)

Application Number Priority Date Filing Date Title
FR8909897A FR2650122B1 (fr) 1989-07-21 1989-07-21 Dispositif semi-conducteur a haute tension et son procede de fabrication
DE69014454T DE69014454T2 (de) 1989-07-21 1990-05-25 Hochspannungs-Halbleiteranordnung und Verfahren zur Herstellung.
EP90109951A EP0408868B1 (fr) 1989-07-21 1990-05-25 Dispositif semi-conducteur haute tension et procédé de fabrication
ES90109951T ES2064524T3 (es) 1989-07-21 1990-05-25 Dispositivo semiconductor de alto voltaje y proceso de fabricacion.
KR1019900010798A KR940002768B1 (ko) 1989-07-21 1990-07-16 고전압 반도체 장치 및 그의 제조 공정
JP2190907A JP2580850B2 (ja) 1989-07-21 1990-07-20 高電圧半導体デバイスとその製造方法
CA002021671A CA2021671C (fr) 1989-07-21 1990-07-20 Semiconducteur haute tension et procede de fabrication
MYPI90001220A MY105940A (en) 1989-07-21 1990-07-20 High voltage semiconductor device and fabrication process.
US07/630,804 US5060047A (en) 1989-07-21 1990-12-24 High voltage semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8909897A FR2650122B1 (fr) 1989-07-21 1989-07-21 Dispositif semi-conducteur a haute tension et son procede de fabrication

Publications (2)

Publication Number Publication Date
FR2650122A1 FR2650122A1 (fr) 1991-01-25
FR2650122B1 true FR2650122B1 (fr) 1991-11-08

Family

ID=9384046

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8909897A Expired - Lifetime FR2650122B1 (fr) 1989-07-21 1989-07-21 Dispositif semi-conducteur a haute tension et son procede de fabrication

Country Status (9)

Country Link
US (1) US5060047A (fr)
EP (1) EP0408868B1 (fr)
JP (1) JP2580850B2 (fr)
KR (1) KR940002768B1 (fr)
CA (1) CA2021671C (fr)
DE (1) DE69014454T2 (fr)
ES (1) ES2064524T3 (fr)
FR (1) FR2650122B1 (fr)
MY (1) MY105940A (fr)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2666174B1 (fr) * 1990-08-21 1997-03-21 Sgs Thomson Microelectronics Composant semiconducteur haute tension a faible courant de fuite.
US5374843A (en) * 1991-05-06 1994-12-20 Silinconix, Inc. Lightly-doped drain MOSFET with improved breakdown characteristics
JPH0799307A (ja) * 1993-09-29 1995-04-11 Fuji Electric Co Ltd 半導体装置およびその製造方法
US6489213B1 (en) * 1996-01-05 2002-12-03 Integrated Device Technology, Inc. Method for manufacturing semiconductor device containing a silicon-rich layer
US5677562A (en) * 1996-05-14 1997-10-14 General Instrument Corporation Of Delaware Planar P-N junction semiconductor structure with multilayer passivation
KR19990024988A (ko) * 1997-09-09 1999-04-06 윤종용 반절연 폴리실리콘막을 이용한 전력 반도체장치의 제조방법
KR100297703B1 (ko) * 1998-02-24 2001-08-07 김덕중 반절연폴리실리콘(sipos)을이용한전력반도체장치및그제조방법
EP0977264B1 (fr) * 1998-07-31 2006-04-26 Freescale Semiconductor, Inc. Structure semiconductrice pour circuit d'attaque avec décalage de niveau
KR100343151B1 (ko) 1999-10-28 2002-07-05 김덕중 Sipos를 이용한 고전압 반도체소자 및 그 제조방법
JP2007507877A (ja) * 2003-09-30 2007-03-29 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 絶縁された金属領域を備えたフィールドプレートを有する横方向薄膜soiデバイス
US7279390B2 (en) * 2005-03-21 2007-10-09 Semiconductor Components Industries, L.L.C. Schottky diode and method of manufacture
US7820473B2 (en) * 2005-03-21 2010-10-26 Semiconductor Components Industries, Llc Schottky diode and method of manufacture
US7821095B2 (en) * 2006-07-14 2010-10-26 Semiconductor Components Industries, Llc Method of forming a Schottky diode and structure therefor
US8884378B2 (en) * 2010-11-03 2014-11-11 Infineon Technologies Ag Semiconductor device and a method for manufacturing a semiconductor device
CN103021801B (zh) * 2011-09-22 2015-07-15 北大方正集团有限公司 掺氧半绝缘多晶硅膜及其制作方法
CN106783608B (zh) * 2016-12-22 2019-10-25 株洲中车时代电气股份有限公司 一种终端结构及其制作方法和功率半导体器件

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4979782A (fr) * 1972-12-08 1974-08-01
NL186665C (nl) * 1980-03-10 1992-01-16 Philips Nv Halfgeleiderinrichting.
JPS56131954A (en) * 1980-03-19 1981-10-15 Nippon Telegr & Teleph Corp <Ntt> Semiconductor device
JPS577959A (en) * 1980-06-19 1982-01-16 Toshiba Corp Semiconductor device
JPS5853860A (ja) * 1981-09-26 1983-03-30 Toshiba Corp 高耐圧プレ−ナ型半導体装置
JPS5934638A (ja) * 1982-08-20 1984-02-25 Matsushita Electronics Corp 半導体装置
US4583106A (en) * 1983-08-04 1986-04-15 International Business Machines Corporation Fabrication methods for high performance lateral bipolar transistors
US4647958A (en) * 1984-04-16 1987-03-03 Trw Inc. Bipolar transistor construction
JPS6276673A (ja) * 1985-09-30 1987-04-08 Toshiba Corp 高耐圧半導体装置
IT1202311B (it) * 1985-12-11 1989-02-02 Sgs Microelettronica Spa Dispositivo a semiconduttore con una giunzione piana a terminazione auto passivante
JPS63184364A (ja) * 1987-01-27 1988-07-29 Toshiba Corp 半導体装置の製造方法
USH665H (en) * 1987-10-19 1989-08-01 Bell Telephone Laboratories, Incorporated Resistive field shields for high voltage devices

Also Published As

Publication number Publication date
US5060047A (en) 1991-10-22
ES2064524T3 (es) 1995-02-01
EP0408868B1 (fr) 1994-11-30
DE69014454D1 (de) 1995-01-12
MY105940A (en) 1995-02-28
CA2021671A1 (fr) 1991-01-22
JPH0358429A (ja) 1991-03-13
FR2650122A1 (fr) 1991-01-25
JP2580850B2 (ja) 1997-02-12
CA2021671C (fr) 1993-11-02
EP0408868A3 (en) 1991-03-20
KR910003829A (ko) 1991-02-28
KR940002768B1 (ko) 1994-04-02
EP0408868A2 (fr) 1991-01-23
DE69014454T2 (de) 1995-06-22

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Legal Events

Date Code Title Description
TP Transmission of property
ST Notification of lapse