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EP1793650A3 - Method for manufacturing a flat panel display - Google Patents

Method for manufacturing a flat panel display Download PDF

Info

Publication number
EP1793650A3
EP1793650A3 EP07075008A EP07075008A EP1793650A3 EP 1793650 A3 EP1793650 A3 EP 1793650A3 EP 07075008 A EP07075008 A EP 07075008A EP 07075008 A EP07075008 A EP 07075008A EP 1793650 A3 EP1793650 A3 EP 1793650A3
Authority
EP
European Patent Office
Prior art keywords
thin film
banks
manufacturing
flat panel
panel display
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP07075008A
Other languages
German (de)
French (fr)
Other versions
EP1793650B1 (en
EP1793650A2 (en
Inventor
Syunichi Seki
Hiroshi Kiguchi
Ichio Yudasaka
Hiroo Miyajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of EP1793650A2 publication Critical patent/EP1793650A2/en
Publication of EP1793650A3 publication Critical patent/EP1793650A3/en
Application granted granted Critical
Publication of EP1793650B1 publication Critical patent/EP1793650B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/12—Light sources with substantially two-dimensional radiating surfaces
    • H05B33/22—Light sources with substantially two-dimensional radiating surfaces characterised by the chemical or physical composition or the arrangement of auxiliary dielectric or reflective layers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/201—Filters in the form of arrays
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/122—Pixel-defining structures or layers, e.g. banks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/30—Devices specially adapted for multicolour light emission
    • H10K59/38—Devices specially adapted for multicolour light emission comprising colour filters or colour changing media [CCM]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
    • H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
    • H10K71/135—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K2102/00—Constructional details relating to the organic devices covered by this subclass
    • H10K2102/301—Details of OLEDs
    • H10K2102/351—Thickness
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/80—Constructional details
    • H10K50/86—Arrangements for improving contrast, e.g. preventing reflection of ambient light
    • H10K50/865—Arrangements for improving contrast, e.g. preventing reflection of ambient light comprising light absorbing layers, e.g. light-blocking layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80—Constructional details
    • H10K59/8791—Arrangements for improving contrast, e.g. preventing reflection of ambient light
    • H10K59/8792—Arrangements for improving contrast, e.g. preventing reflection of ambient light comprising light absorbing layers, e.g. black layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/20—Changing the shape of the active layer in the devices, e.g. patterning
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electroluminescent Light Sources (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Optical Filters (AREA)
  • Led Devices (AREA)
  • Thin Film Transistor (AREA)

Abstract

A method for manufacturing a flat panel display device includes a step of selectively forming, on a bank formation surface having an inorganic material portion, banks containing at least an organic material, and filling areas enclosed by the banks with a liquid thin film material for display to form a thin film layer, whereby the method further comprises: a first step of performing an oxygen gas plasma treatment for the banks and the bank formation surface; a second step of performing fluorine-based gas plasma treatment subsequent to the first process; and a thin film formation step of filling the areas enclosed by the banks with the liquid thin film material to form the thin film layer.
Figure imgaf001
Figure imgaf002
Figure imgaf003
EP07075008.8A 1998-03-17 1999-03-17 Method for manufacturing a flat panel display Expired - Lifetime EP1793650B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP6750898 1998-03-17
JP3212399 1999-02-10
EP99909206A EP0989778B1 (en) 1998-03-17 1999-03-17 Method for manufacturing a patterned thin film device

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
EP99909206A Division EP0989778B1 (en) 1998-03-17 1999-03-17 Method for manufacturing a patterned thin film device

Publications (3)

Publication Number Publication Date
EP1793650A2 EP1793650A2 (en) 2007-06-06
EP1793650A3 true EP1793650A3 (en) 2008-10-29
EP1793650B1 EP1793650B1 (en) 2014-03-05

Family

ID=26370648

Family Applications (2)

Application Number Title Priority Date Filing Date
EP07075008.8A Expired - Lifetime EP1793650B1 (en) 1998-03-17 1999-03-17 Method for manufacturing a flat panel display
EP99909206A Expired - Lifetime EP0989778B1 (en) 1998-03-17 1999-03-17 Method for manufacturing a patterned thin film device

Family Applications After (1)

Application Number Title Priority Date Filing Date
EP99909206A Expired - Lifetime EP0989778B1 (en) 1998-03-17 1999-03-17 Method for manufacturing a patterned thin film device

Country Status (8)

Country Link
US (5) US7015503B2 (en)
EP (2) EP1793650B1 (en)
JP (3) JP3328297B2 (en)
KR (4) KR100608543B1 (en)
CN (5) CN1293784C (en)
DE (1) DE69939514D1 (en)
TW (1) TW439389B (en)
WO (1) WO1999048339A1 (en)

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