JPH09230129A - Method for manufacturing color filter and liquid crystal display device using the same - Google Patents
Method for manufacturing color filter and liquid crystal display device using the sameInfo
- Publication number
- JPH09230129A JPH09230129A JP3840596A JP3840596A JPH09230129A JP H09230129 A JPH09230129 A JP H09230129A JP 3840596 A JP3840596 A JP 3840596A JP 3840596 A JP3840596 A JP 3840596A JP H09230129 A JPH09230129 A JP H09230129A
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- Japan
- Prior art keywords
- ink
- color filter
- convex portion
- pixel
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
(57)【要約】
【課題】インクジェット法でカラーフィルタを形成する
場合に、画素部分で均一な厚みの着色層が得られ、画素
内でのインクの広がりを良くし、画素内での色抜けが生
じないようにする。
【解決手段】水系インクを用い、紫外線照射を行うこと
により、画素を区切る凸部2の上面4の撥インク性を水
の接触角で90°以上とし、凹部の親インク性を水の接
触角で20°以下とすることにより、画素周辺での色抜
けのないカラーフィルタを得る。
(57) Abstract: When a color filter is formed by an inkjet method, a colored layer having a uniform thickness is obtained in a pixel portion, ink spread in the pixel is improved, and color loss in the pixel occurs. So that it does not occur. SOLUTION: By using a water-based ink and irradiating with ultraviolet rays, the ink repellency of the upper surface 4 of the convex portion 2 partitioning the pixels is made 90 ° or more in terms of the contact angle of water, and the ink affinity of the concave portion is made into the contact angle of water. By setting the angle to 20 ° or less, a color filter having no color drop around the pixel is obtained.
Description
【0001】[0001]
【発明の属する技術分野】本発明は、基板上に凸部を形
成し、その凸部に囲まれた凹部をインクジェット方式で
着色することによるカラーフィルタの製造方法及びそれ
を用いた液晶表示素子に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a color filter by forming a convex portion on a substrate and coloring a concave portion surrounded by the convex portion by an ink jet method, and a liquid crystal display device using the same. .
【0002】[0002]
【従来の技術】液晶表示素子用のカラーフィルタは各種
の製造方法が提案されている。特に、基板のセル内壁側
に着色層を形成してカラーフィルタを製造する方法には
いくつかの方法が知られている。2. Description of the Related Art Various manufacturing methods have been proposed for color filters for liquid crystal display devices. In particular, several methods are known for producing a color filter by forming a colored layer on the inner wall side of a cell of a substrate.
【0003】例えば、着色インクをオフセット印刷法等
によりパターン印刷し、着色層を形成する方法がある
が、印刷パターンの精細化には限界があり、生産歩留ま
りの低下等の問題がある。For example, there is a method of forming a colored layer by pattern printing of a colored ink by an offset printing method or the like. However, there is a limit to fineness of a printed pattern, and there is a problem such as a decrease in production yield.
【0004】また、着色された紫外線硬化性インクを基
板上に全面塗布し、フォトリソ法によりカラーフィルタ
パターンを作成する方法として顔料分散法がよく使用さ
れている。しかし、顔料分散法では、赤、緑、青の三原
色のカラーフィルタを作成するためには、塗布、紫外線
照射、現像工程を3回行うことを要し、製造工程上きわ
めて煩雑である。[0004] A pigment dispersion method is often used as a method of applying a colored ultraviolet curable ink on the entire surface of a substrate and forming a color filter pattern by a photolithographic method. However, in the pigment dispersion method, it is necessary to perform coating, ultraviolet irradiation, and development steps three times in order to produce three primary color filters of red, green, and blue, which is extremely complicated in the manufacturing process.
【0005】その他、電着塗装法を利用したカラーフィ
ルタの製造方法では、電着塗装される部分にあらかじめ
パターン状の透明電極を作成しておき、3色のカラーフ
ィルタを製造する。このために、順次夫々に対応する電
極に通電し、透明電極上にカラーフィルタ膜を形成す
る。この方法では3回の電着操作を必要とするうえ、色
の重なりによる混色を防ぐ操作を要し、また、3色に対
応する透明電極を要するため、最終的な液晶表示セルが
電極の形状の制限をうけることもある。[0005] In addition, in a method of manufacturing a color filter using an electrodeposition coating method, a transparent electrode having a pattern is formed in advance on a portion to be electrodeposited, and three color filters are manufactured. To this end, the respective electrodes are sequentially energized to form a color filter film on the transparent electrodes. This method requires three electrodeposition operations, an operation to prevent color mixing due to overlapping colors, and a transparent electrode corresponding to the three colors. May be subject to restrictions.
【0006】これらの問題を解決した合理的なカラーフ
ィルタの製造方法として、特開昭59−75205に
は、インクジェット方式で着色インクを吹きつけして着
色層を形成することが提案されている。インクジェット
方式で着色を行う場合、その液滴径が数十μmであり、
一方、カラーフィルタの画素はおおむね短辺数十μm、
長辺数百μm程度である。このことから、ガラス基板に
あらかじめ画素を規定する区画を設け、この中へインク
ジェット方式でインクを吹き付け区画内にインクを拡げ
ることで均一な画素を得ることができる。As a rational method for manufacturing a color filter that solves these problems, Japanese Patent Application Laid-Open No. 59-75205 proposes to form a colored layer by spraying a colored ink by an ink jet method. When coloring with an inkjet method, the droplet diameter is several tens of μm,
On the other hand, the pixels of the color filter are generally several tens of μm on the short side,
The long side is about several hundred μm. For this reason, it is possible to obtain uniform pixels by providing the glass substrate with sections for defining pixels in advance and spraying the ink into the sections by the ink jet method to spread the ink in the sections.
【0007】前記提案には、ガラス基板に対し濡れ性の
良いインクを用いる場合には、インクに対して濡れ性の
悪い物質であらかじめ境界となる凸部を印刷しておく方
法が記載されている。また、ガラスに対して濡れ性の悪
いインクを使う場合には、インクとの濡れ性の良い材料
であらかじめガラスにパターンを形成しておきインクが
定着するのを助ける方法が提案されている。さらに特開
平6−347637ではインクに対して画素部は濡れや
すく、ブラックマスクは濡れにくい組み合わせを用いる
ことが提案されている。The above-mentioned proposal describes a method in which, when an ink having good wettability to a glass substrate is used, a convex portion serving as a boundary is printed in advance with a substance having poor wettability to the ink. . Further, in the case of using an ink having poor wettability with respect to glass, there has been proposed a method of forming a pattern on the glass in advance with a material having good wettability with the ink and helping the ink to be fixed. Further, Japanese Patent Laid-Open No. 6-347637 proposes to use a combination in which the pixel portion is easily wetted with ink and the black mask is hard to be wetted.
【0008】[0008]
【発明が解決しようとする課題】しかし、ブラックマス
クを形成する際の種々の汚染によって、画素部分の充分
な親水性が得られない場合が多い。通常、ブラックマス
クはレジスト保護膜を用いたエッチングで形成したり、
ブラックマスクを形成する材料に感光性を持たせてフォ
トリソによってパターニングする方法が用いられる。し
かし、エッチング液又は現像液によって、不要部分が完
全に剥離せず、ガラス面の親水性を損なうことがある。However, in many cases, sufficient hydrophilicity of the pixel portion cannot be obtained due to various contaminations when forming the black mask. Usually, the black mask is formed by etching using a resist protective film,
A method is used in which the material for forming the black mask has photosensitivity and is patterned by photolithography. However, the etching solution or the developing solution may not completely peel off the unnecessary portion, which may impair the hydrophilicity of the glass surface.
【0009】特に、ブラックマスクに撥インク性を付与
する場合には、撥インク物質を用いるために、かすかな
汚染でもインクと基材の親和性を大きく損ないやすい。
このように画素部が充分に親インク性になっていない
と、インクが凹部で充分拡がらず、画素周辺部で色抜け
しやすいという問題を生じる。このカラーフィルタを液
晶表示素子等に用いた場合、色ムラが生じたり、着色不
良による光の漏れによるコントラストの低下を生じたり
するという問題がおきやすかった。In particular, when imparting ink repellency to the black mask, since an ink repellent substance is used, even a slight contamination tends to greatly impair the affinity between the ink and the substrate.
If the pixel portion is not sufficiently ink-philic as described above, there is a problem in that the ink does not spread sufficiently in the concave portion and color loss easily occurs in the peripheral portion of the pixel. When this color filter is used in a liquid crystal display element or the like, problems such as color unevenness and deterioration of contrast due to leakage of light due to defective coloring are likely to occur.
【0010】[0010]
【課題を解決するための手段】本発明は、前述の問題を
解決すべくなされたものであり、基材上に凸部を形成
し、その凸部により区切られた凹部にインクジェット方
式によってインクを吹きつけて凹部にインクを堆積させ
て着色層を形成するカラーフィルタの製造方法におい
て、凸部を形成後、エネルギー線を照射することより凹
部の親インク性を制御し、その後インクジェット方式に
よってインクを吹きつけることを特徴とするカラーフィ
ルタの製造方法を提供する。SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, in which a convex portion is formed on a base material, and ink is applied to a concave portion separated by the convex portion by an inkjet method. In a method of manufacturing a color filter in which ink is sprayed to deposit ink in a concave portion to form a colored layer, after forming the convex portion, the ink affinity of the concave portion is controlled by irradiating an energy ray, and then the ink is formed by an inkjet method. Provided is a method for manufacturing a color filter characterized by spraying.
【0011】また、そのエネルギー線を照射する処理に
より、凹部の水の接触角が20°以下となるようにされ
るカラーフィルタの製造方法、及び、それらの凸部が、
ブラックマスクと兼用されているカラーフィルタの製造
方法、及び、それらのエネルギー線を基板の凸部が形成
されているのと反対側の面から照射するカラーフィルタ
の製造方法、及びそれらのエネルギー線を基板の両面か
ら照射し、その夫々の照射量を凸部の撥インク性と凹部
の親インク性とが所望の値になるように制御するカラー
フィルタの製造方法を提供する。Further, the method of manufacturing a color filter in which the contact angle of water in the concave portion is 20 ° or less by the treatment of irradiating the energy rays, and the convex portions thereof are
A method for producing a color filter that is also used as a black mask, a method for producing a color filter that irradiates those energy rays from the surface of the substrate opposite to the side where the convex portion is formed, and those energy rays Provided is a method for manufacturing a color filter, which comprises irradiating from both sides of a substrate and controlling the respective irradiation amounts so that the ink repellency of the convex portions and the ink affinity of the concave portions have desired values.
【0012】さらに、それらの凸部の表面が、RSiX
YZ(Rはフッ素原子を含む炭化水素基を表し、X、
Y、Zはそれぞれ独立して水酸基、メチル基、炭素数が
1〜3のアルコキシ基、塩素原子、又はイソシアネート
基を表す)で表される化合物を含む処理剤によって撥イ
ンク処理を施されているカラーフィルタの製造方法を提
供する。Further, the surface of the convex portions is RSiX.
YZ (R represents a hydrocarbon group containing a fluorine atom, X,
Y and Z are independently subjected to ink repellent treatment with a treatment agent containing a compound represented by a hydroxyl group, a methyl group, an alkoxy group having 1 to 3 carbon atoms, a chlorine atom, or an isocyanate group). A method for manufacturing a color filter is provided.
【0013】さらには、それらの製造方法により形成さ
れたカラーフィルタを用いた液晶表示素子を提供する。Further, there is provided a liquid crystal display device using a color filter formed by those manufacturing methods.
【0014】[0014]
【発明の実施の形態】本発明のカラーフィルタの製造方
法では、先ず基板上に凸部、好ましくはブラックマスク
による凸部をあらかじめ形成する。その凸部により区切
られた凹部をエネルギー線の照射により親インク性に
し、その後、インクジェット方式にて着色インクを吹き
つけして着色層を形成してカラーフィルタを形成する。DESCRIPTION OF THE PREFERRED EMBODIMENTS In the method of manufacturing a color filter according to the present invention, first, a convex portion, preferably a convex portion formed by a black mask, is formed on a substrate in advance. The concave portions separated by the convex portions are made ink-philic by irradiation with energy rays, and then a colored ink is sprayed by an inkjet method to form a colored layer to form a color filter.
【0015】図1は、本発明のカラーフィルタを模式的
に示す断面図である。図1において、1は基板、2は凸
部、3は凸部と凸部により区切られた凹部、4は凸部の
上面、5は凸部の側面、6は凹部に吹きつけ堆積されて
形成された着色層を示す。一番右端の凹部3のみは説明
をわかりやすくするために、着色層が形成されていない
状態で示してある。FIG. 1 is a sectional view schematically showing a color filter of the present invention. In FIG. 1, 1 is a substrate, 2 is a convex portion, 3 is a concave portion divided by the convex portion and the convex portion, 4 is an upper surface of the convex portion, 5 is a side surface of the convex portion, and 6 is formed by spraying and depositing on the concave portion. 2 shows a colored layer obtained. Only the rightmost concave portion 3 is shown in a state in which the colored layer is not formed for the sake of easy understanding of the description.
【0016】この図では、わかりやすくするために凸部
を4個、凹部を3個のみ示しているが、これは必要な数
設けられる。例えば、ストライプ状のカラーフィルタの
場合であって、640画素分必要な場合には、1画素当
りRGBの3個のカラーフィルタが必要なので、凸部は
1921個、凹部は1920個必要になる。液晶表示素
子では基板間隙の精密性から表示を行わない表示画素の
周辺までカラーフィルタパターンを形成することもあ
り、その場合にはもっと増えることになる。Although only four convex portions and three concave portions are shown in this drawing for the sake of clarity, the necessary numbers are provided. For example, in the case of a striped color filter and 640 pixels are required, three color filters of RGB are required for each pixel, so that 1921 convex portions and 1920 concave portions are required. In a liquid crystal display device, a color filter pattern may be formed up to the periphery of a display pixel where no display is performed due to the precision of the gap between the substrates.
【0017】ストライプ状のパターンの場合には、長手
方向には凸部が形成されなくてもよいが、画素の周囲を
完全に凸部で囲むこともある。特に、モザイク状のカラ
ーフィルタの場合には、画素の周囲は凸部で囲まれる。In the case of the striped pattern, the convex portion may not be formed in the longitudinal direction, but the periphery of the pixel may be completely surrounded by the convex portion. In particular, in the case of a mosaic color filter, the periphery of a pixel is surrounded by a convex portion.
【0018】本発明における基板には、一般的には耐熱
性の面からガラス基板が用いられる。また、この基板に
は通常は透明基板を用いるが、反射性の基板や白色に着
色したような基板でも本発明は適用できる。この基板
は、必要に応じてアルカリ溶出防止用やガスバリア性付
与その他の目的の表面処理を施したものも用いうる。As the substrate in the present invention, a glass substrate is generally used in terms of heat resistance. Although a transparent substrate is usually used as the substrate, the present invention can be applied to a reflective substrate or a substrate colored white. As the substrate, a substrate which has been subjected to surface treatment for preventing alkali elution, imparting gas barrier properties, or for other purposes may be used as necessary.
【0019】本発明で着色層を区切るための凸部は、基
板上に線状や格子状に形成される。この凸部の形状は、
それにより区切られた凹部が画素に対応するようにされ
ればよい。例えば、ストライプ状のカラーフィルタを形
成する場合には線状に形成され、四角の画素に対応させ
るためには格子状に形成される。これは、画素の形状に
より適宜定められるので、放射状、円周状等種々の形状
も考えられる。In the present invention, the projections for partitioning the colored layer are formed on the substrate in a linear shape or a grid shape. The shape of this convex part is
Thus, the depressed concave portions may correspond to the pixels. For example, when a stripe-shaped color filter is formed, it is formed in a linear shape, and in order to correspond to a square pixel, it is formed in a lattice shape. Since this is appropriately determined by the shape of the pixel, various shapes such as a radial shape and a circumferential shape are also conceivable.
【0020】この凸部は、液晶表示素子等ではブラック
マスクを兼用させることが有利である。このため、以下
の説明では、凸部がブラックマスクと兼用される例に基
づいて説明するが、ブラックマスクとしない場合には、
それから黒色の材料や金属遮光層を使用しないようにす
ればよい。It is advantageous that the convex portion also serves as a black mask in a liquid crystal display device or the like. For this reason, in the following description, a description will be given based on an example in which the convex portion is also used as a black mask.
Then, a black material or a metal light-shielding layer may not be used.
【0021】ブラックマスクによる凸部の形成方法とし
ては、例えば、金属クロム膜や、金属クロムと酸化クロ
ムを積層したもの、又はカーボンブラック等の黒色顔料
と樹脂からなる黒色層を形成し、これらにフォトレジス
トを塗布、画素部のレジストをフォトリソ法で取り除
き、エッチングによって金属クロム等の層を取り除く方
法がある。また、よりコスト的に有利な方法としてカー
ボンブラックなどの黒色顔料と光硬化性樹脂を含む材料
による黒色膜を形成し、これをフォトリソ法によって所
望のパターンにパターン化する方法がある。As a method of forming the convex portion by the black mask, for example, a metallic chromium film, a laminated layer of metallic chromium and chromium oxide, or a black layer composed of a black pigment such as carbon black and a resin is formed, and these are formed. There is a method of applying a photoresist, removing the resist in the pixel portion by a photolithography method, and removing a layer of metal chromium or the like by etching. Further, as a more cost-effective method, there is a method in which a black film made of a material containing a black pigment such as carbon black and a photocurable resin is formed, and the black film is patterned into a desired pattern by a photolithography method.
【0022】本発明では、ある程度の高さの凸部を所望
のパターンに形成できる公知の種々のブラックマスクの
形成法が使用できる。薄膜のブラックマスクと厚膜の樹
脂層とを積層して凸部を形成してもよい。In the present invention, various known black mask forming methods capable of forming a projection having a certain height in a desired pattern can be used. The projection may be formed by laminating a thin black mask and a thick resin layer.
【0023】本発明における凸部は、インクジェット法
によって着色する際に、吹きつけたインクが他の画素に
流れ込んだり滲んだりすることを防止する役割を果た
す。したがって、この凸部の高さはある程度高いことが
好ましいが、カラーフィルタとした場合の全体の平坦性
が高いことも要求されるので、着色層の厚さに近い高さ
が選択される。The convex portion in the present invention plays a role of preventing the sprayed ink from flowing into or bleeding into other pixels when colored by the ink jet method. Therefore, it is preferable that the height of the convex portion is high to some extent, but it is also required that the overall flatness of the color filter is high, so that a height close to the thickness of the coloring layer is selected.
【0024】具体的には、所望の着色を得るのに必要な
吹きつけするインクの堆積量によっても異なるが、通常
は0.1〜2μm程度とされる。この凸部の上面にイン
クが残存すると、平坦性や画素間の着色均一性が損なわ
れるため、凸部を撥インク性にし、凹部はインクの拡が
りを良くするために親インク性にすることが好ましい。
すなわち、凸部はインクをはじき、凹部の基板は親イン
ク性を高めている。Specifically, the amount is usually about 0.1 to 2 μm, though it varies depending on the amount of the deposited ink to be sprayed to obtain a desired color. If ink remains on the upper surface of the convex portion, flatness and uniformity of coloring between pixels are impaired. Therefore, the convex portion should be made ink-repellent, and the concave portion should be made ink-philic to improve ink spreading. preferable.
That is, the protrusion repels ink, and the substrate in the recess enhances ink affinity.
【0025】その親インク性の程度は、水系インクを用
いた場合、凹部の基板の親インク性が水によって測定し
た接触角が20°以下であることが好ましい。これが2
0°より大きいと、凹部でのインクの拡がりが悪くなり
やすくなり、画素周辺部で色抜けが生じやすくなる。特
に10°以下にすることが好ましい。Regarding the degree of the affinity for ink, when a water-based ink is used, it is preferable that the contact angle of the substrate of the recess is 20 ° or less as measured by water. This is 2
If it is larger than 0 °, the spread of ink in the concave portions tends to be poor, and color loss tends to occur in the peripheral portions of the pixels. In particular, it is preferably set to 10 ° or less.
【0026】また、凸部の撥インク性は、その水の接触
角が90°以上とすることが好ましく、隣接画素へのイ
ンクの流出や凸部上へのインクの残存を防止しやすくな
り、好ましい。通常は、90〜120°程度にすればよ
い。Further, the ink repellency of the convex portion is preferably such that the contact angle of water is 90 ° or more, and it becomes easy to prevent the ink from flowing out to an adjacent pixel or remaining on the convex portion. preferable. Usually, it may be set to about 90 to 120 °.
【0027】凸部に撥インク性を付与する方法として
は、凸部形成材料に感光性材料を用いて、ガラス上にこ
れを塗布した上に、撥インク処理することが好ましい。
特に、撥インク処理剤として、RSiXYZで表される
化合物を含む処理剤を用いることが好ましい。As a method of imparting ink repellency to the protrusions, it is preferable to use a photosensitive material as the material for forming the protrusions, apply this to glass, and then apply the ink repellent treatment.
In particular, it is preferable to use a treatment agent containing a compound represented by RSiXYZ as the ink repellent treatment agent.
【0028】ただし、Rはフッ素原子を含む炭化水素基
を表し、X、Y、Zは夫々独立して水酸基、メチル基、
炭素数が1〜3のアルコキシ基、塩素原子、又はイソシ
アネート基を表す。However, R represents a hydrocarbon group containing a fluorine atom, and X, Y and Z each independently represent a hydroxyl group, a methyl group,
It represents an alkoxy group having 1 to 3 carbon atoms, a chlorine atom, or an isocyanate group.
【0029】これはケイ素の4本の結合手にR、X、
Y、Zの4種類の基がついているものである。より好ま
しくは、R−がRf −R1 −である。ここでRf −はパ
ーフルオロアルキル基、−R1 −はアルキレン基を表
す。特に、−R1 −が−CH2 CH2 −の化合物が好ま
しい。このような一般的に含フッ素シランカップリング
剤又は含フッ素イソシアネートシランと呼ばれる化合物
が、充分な撥インク性と被処理面への密着性を有するこ
とから好ましい。This is due to the four bonds of silicon being R, X,
It has four types of groups Y and Z. More preferably, R- is R f -R 1 - is. Wherein R f - is a perfluoroalkyl group, -R 1 - represents an alkylene group. In particular, -R 1 - is -CH 2 CH 2 - of compounds are preferred. Such a compound generally called a fluorine-containing silane coupling agent or a fluorine-containing isocyanate silane is preferable because it has sufficient ink repellency and adhesiveness to the surface to be treated.
【0030】含フッ素イソシアネートシランについて
は、被処理面との密着性が高く特に好適である。また、
含フッ素シランカップリング剤においては、基材への反
応、定着性を高めるため、事前に加水分解を行い、末端
のアルコキシ基を水酸基に置換したり、さらに一部縮合
反応を起こさせて縮合体とした形でも用いうる。Fluorine-containing isocyanate silanes are particularly suitable because of their high adhesion to the surface to be treated. Also,
In the case of a fluorine-containing silane coupling agent, in order to enhance the reaction and fixing property to the base material, hydrolysis is performed in advance to substitute the terminal alkoxy group with a hydroxyl group or to cause a partial condensation reaction to generate a condensate. It can also be used in the form.
【0031】上記のRf −は、水素原子が完全にフッ素
原子で置換されたパーフルオロアルキル基を示し、代表
的なものとしてCF3 −、C6 F13−、C8 F17−、C
10F21−等があげられる。また、側鎖構造を有するもの
も使用できる。なかでも高い撥水性が得られるという観
点から、C8 F17−が特に好ましい。The above R f- represents a perfluoroalkyl group in which a hydrogen atom is completely replaced by a fluorine atom, and typical ones are CF 3- , C 6 F 13- , C 8 F 17- , C.
10 F 21 -etc. Further, those having a side chain structure can also be used. From the viewpoint of inter alia high water repellency is obtained, C 8 F 17 - are particularly preferred.
【0032】これらの化合物で撥インク処理を施す場
合、溶媒によって希釈してスピンコート、スプレーコー
ト、ロールコート、ダイコート、ディップコート等の方
法で塗布し、乾燥する方法がとられる。When the ink repellent treatment is performed with these compounds, a method of diluting with a solvent and applying by a method such as spin coating, spray coating, roll coating, die coating, dip coating, and drying is used.
【0033】凸部を形成する樹脂が未硬化の状態で撥イ
ンク処理を施す場合、即ち凸部のパターニング前に撥イ
ンク処理を施す場合には、凸部を形成する樹脂に悪影響
を与えないようにする必要がある。このため、この凸部
を形成する樹脂に悪影響を与えないパーフルオロオクタ
ン、パーフルオロ(2−ブチルテトラヒドロフラン)、
パーフルオロ(トリブチルアミン)等の完全フッ素化化
合物の溶媒を用いることが好ましい。When the ink-repellent treatment is performed in a state where the resin forming the convex portions is uncured, that is, when the ink-repellent treatment is performed before patterning the convex portions, the resin forming the convex portions is not adversely affected. Need to Therefore, perfluorooctane, perfluoro (2-butyltetrahydrofuran), which does not adversely affect the resin forming this convex portion,
It is preferable to use a solvent of a perfluorinated compound such as perfluoro (tributylamine).
【0034】また、この処理剤の処理層の厚さは処理剤
1分子から数分子にあたる厚みがあれば充分である。It is sufficient that the thickness of the treatment layer of this treatment agent is one molecule to several molecules of the treatment agent.
【0035】本発明では、この凹部を親インク性にする
方法として、エネルギー線の照射を行う。エネルギー線
の具体的なものとして、低圧水銀灯によって発生する2
54nmの波長の光を主として含む紫外光を例示でき
る。この波長の紫外光では、凸部、凹部ともに親水化が
でき、凸部では撥インクの程度のコントロールができ、
他方凹部では高い親水性を得ることができる。なお、こ
の波長の照射ではオゾンが発生するが、これも親水化に
寄与している。In the present invention, energy rays are irradiated as a method of making the recesses ink-philic. As a concrete type of energy ray, it is generated by a low-pressure mercury lamp 2
Examples of the ultraviolet light mainly include light having a wavelength of 54 nm. With ultraviolet light of this wavelength, both the convex portion and the concave portion can be made hydrophilic, and the degree of ink repellency can be controlled at the convex portion,
On the other hand, in the concave portion, high hydrophilicity can be obtained. It should be noted that ozone is generated by irradiation with this wavelength, which also contributes to hydrophilization.
【0036】これらエネルギー線の照射は、基板の凸部
を設けた面側、又はその逆側のいずれから照射してもよ
く、表側から照射した場合は凸部、凹部同時に、裏面側
から照射した場合は主に凹部を選択的に親水化できる。
したがって、表面側、裏面側からの照射を組み合わすこ
とにより、必要な凸部、凹部の親水性のバランスを得る
ことができる。凹部のみ親水化したい場合には、基板の
凸部を設けた面と反対側の面からのみエネルギー線を照
射すればよい。これは、凸部がブラックマスクと兼用か
ブラックマスクと積層されている場合に、特に適する。Irradiation of these energy rays may be carried out from either the surface side provided with the convex portion of the substrate or the opposite side. When the irradiation is performed from the front side, the convex portion and the concave portion are simultaneously irradiated from the back surface side. In this case, mainly the recesses can be selectively made hydrophilic.
Therefore, by combining the irradiation from the front surface side and the back surface side, it is possible to obtain the necessary hydrophilicity balance between the convex portions and the concave portions. When it is desired to make only the recesses hydrophilic, it is sufficient to irradiate the energy rays only from the surface of the substrate opposite to the surface provided with the projections. This is particularly suitable when the convex portion also serves as the black mask or is laminated with the black mask.
【0037】これらエネルギー線の照射の照射量は、お
およそ1000〜10000mJ程度でよく、使用する
材料によって所望の凸部の撥水性及び凹部の親水性が得
られるように適宜実験的に定められればよい。The irradiation dose of these energy rays may be approximately 1000 to 10000 mJ, and may be appropriately experimentally determined so that desired water repellency of the convex portion and hydrophilicity of the concave portion can be obtained depending on the material used. .
【0038】凸部を形成する高分子材料としては、アク
リル系、ポリイミド系の樹脂が好ましい。また、これを
ブラックマスクとするため黒色の樹脂を添加したり、樹
脂に感光性を持たせるために、種々の感光性ポリマーや
硬化剤を添加できる。Acrylic and polyimide resins are preferred as the polymeric material for forming the protrusions. Further, a black resin may be added to use this as a black mask, and various photosensitive polymers and curing agents may be added to make the resin photosensitive.
【0039】本発明では、インクジェット方式を着色方
法として用いる。インクジェット方式としては、帯電し
たインクを連続的に噴射し電場によって制御する方法、
圧電素子を用いて間欠的にインクを噴射する方法、イン
クを加熱しその発泡を利用して間欠的に噴射する方法
等、各種の方法を採用できる。In the present invention, the ink jet method is used as a coloring method. As an inkjet method, a method of continuously ejecting charged ink and controlling by an electric field,
Various methods, such as a method of intermittently ejecting ink using a piezoelectric element and a method of intermittently ejecting ink by heating ink and utilizing its foaming, can be adopted.
【0040】上記の説明では、親水性インクを用いる例
について説明してきたが、用いるインクは油性、水性と
もに使用できる。もっとも、表面張力の関係から水をベ
ースにした水系インクの使用がより好ましい。また、そ
のインクに含まれる着色材は染料、顔料ともに使用で
き、耐久性の面からは顔料の使用がより好ましい。In the above description, an example in which a hydrophilic ink is used has been described, but the ink used may be oil-based or water-based. However, it is more preferable to use a water-based ink based on water because of the surface tension. The coloring material contained in the ink can use both a dye and a pigment. From the viewpoint of durability, the use of a pigment is more preferable.
【0041】本発明のインクには、着色後の工程を考慮
し、加熱によって硬化する、又は紫外線等のエネルギー
線によって硬化する成分も添加できる。加熱によって硬
化する成分としては、各種の熱硬化性樹脂が広く用いら
れる。また、エネルギー線によって硬化する成分として
は、例えば、アクリレート誘導体又はメタクリレート誘
導体に光反応開始剤を添加したものを例示できる。In the ink of the present invention, a component which is hardened by heating or hardened by an energy ray such as ultraviolet ray can be added in consideration of the step after coloring. Various thermosetting resins are widely used as components that are cured by heating. In addition, examples of the component that is cured by energy rays include those obtained by adding a photoreaction initiator to an acrylate derivative or a methacrylate derivative.
【0042】特に、耐熱性を考慮してアクリロイル基、
メタクリロイル基を分子内に複数有するものがより好ま
しい。これらのアクリレート誘導体、メタクリレート誘
導体は水溶性のものが好ましく使用でき、水に難溶性の
ものでもエマルジョン化する等して使用できる。Particularly, in consideration of heat resistance, an acryloyl group,
Those having a plurality of methacryloyl groups in the molecule are more preferable. As these acrylate derivatives and methacrylate derivatives, water-soluble ones can be preferably used, and even those which are hardly soluble in water can be used after emulsification.
【0043】本発明では、このようにすることにより、
図2に示すようなインクのはじきによる不良を低減でき
る。図2は、基板11上の2つの凸部12に囲まれた1
つの凹部に吹きつけられたインクが基板の親インク性不
足によりはじかれたところを示す。即ち、はじきを生じ
ると、中央部に比して周辺部の着色層16の厚みが薄く
なりやすく、画素周辺部で着色層が無い部分を生じるこ
ともある。In the present invention, by doing so,
Defects due to ink repelling as shown in FIG. 2 can be reduced. FIG. 2 is a sectional view of a portion surrounded by two convex portions 12 on a substrate 11.
It shows that the ink sprayed on the two recesses was repelled due to the lack of ink affinity of the substrate. That is, when the cissing occurs, the thickness of the colored layer 16 in the peripheral portion tends to be smaller than that in the central portion, and a portion without the colored layer may occur in the peripheral portion of the pixel.
【0044】このような着色層のムラは、画素の色抜け
を生じ、表示素子にした際に、コントラストの良いカラ
ー表示が得られにくくなる。これに対して、本発明によ
れば、凹部に均一な厚みの着色層が得られやすく、画素
の色抜けやコントラスト低下を生じにくい。Such unevenness of the colored layer causes color loss of pixels and makes it difficult to obtain a color display with good contrast when used as a display element. On the other hand, according to the present invention, it is easy to obtain a colored layer having a uniform thickness in the concave portions, and it is difficult to cause color loss of pixels and deterioration of contrast.
【0045】本発明では、インクジェット方式で通常は
RGB3色のインクを吹きつけて3色のカラーフィルタ
を形成する。このカラーフィルタは、液晶表示素子、電
気泳動表示素子、エレクトロクロミック表示素子、PL
ZT等と組合せて表示素子として用いられる。カラーカ
メラやその他のカラーフィルタを用いる用途にも使用で
きる。In the present invention, inks of three colors, RGB, are usually sprayed by the ink jet method to form color filters of three colors. This color filter includes a liquid crystal display element, an electrophoretic display element, an electrochromic display element,
Used as a display element in combination with ZT or the like. It can also be used for applications that use color cameras and other color filters.
【0046】図3は、液晶表示素子に使用した場合の例
を示す模式的な断面図である。図3において、21は基
板、22は凸部、23は着色層、24はその表面を覆う
樹脂等による平坦化層、25はIn2 O3 −SnO2
(ITO)、SnO2 等の電極、26はポリイミド、ポ
リアミド、SiO等の配向膜、27は他方の基板、28
は他方の電極、29は配向膜、30はその電極間に挟ま
れる液晶層である。FIG. 3 is a schematic cross-sectional view showing an example of use in a liquid crystal display element. In FIG. 3, 21 is a substrate, 22 is a convex portion, 23 is a colored layer, 24 is a flattening layer made of resin or the like covering the surface, 25 is In 2 O 3 —SnO 2.
(ITO), electrodes of SnO 2 or the like, 26 is an alignment film of polyimide, polyamide, SiO or the like, 27 is the other substrate, 28
Is the other electrode, 29 is an alignment film, and 30 is a liquid crystal layer sandwiched between the electrodes.
【0047】本発明では、この他、必要に応じて、この
液晶セルの外側に偏光膜、反射板、位相差板、光源等を
配置して液晶表示素子として用いうる。In addition to the above, in the present invention, if necessary, a polarizing film, a reflecting plate, a retardation plate, a light source, etc. may be arranged outside the liquid crystal cell to be used as a liquid crystal display element.
【0048】[0048]
実施例1、2 ガラス基板に、黒色に着色されたフォトレジスト(新日
鉄化学社製「V−259BK」)をスピンコート法によ
り目標膜厚1.5μmとなるように塗布し、80℃で5
分間加熱処理した。C8 F17−C2 H4 −Si(−OC
H3 )3 (東芝シリコーン社製「TSL−8233」)
をメタノールで希釈し、若干量の水分を加えた。Examples 1 and 2 A black colored photoresist (“V-259BK” manufactured by Nippon Steel Chemical Co., Ltd.) was applied to a glass substrate by a spin coating method so as to have a target film thickness of 1.5 μm, and the photoresist was applied at 80 ° C. for 5 minutes.
Heated for minutes. C 8 F 17 -C 2 H 4 -Si (-OC
H 3) 3 (Toshiba Silicone Co., Ltd. "TSL-8233")
Was diluted with methanol and some water was added.
【0049】これを一晩放置した後、パーフルオロ(2
−ブチルテトラヒドロフラン)で有効成分を抽出し、
0.25重量%に希釈し、フォトレジスト膜上にスピン
コート法により塗布し、100℃で5分間加熱した。こ
の基板にフォトマスクを介して100mJ露光し、指定
現像液に30秒浸漬し、冷水で洗浄後、230℃で1時
間ポストキュアを行い、ブラックマスク兼用の、高さが
約1.5μm、幅が約30μmの凸部を有する基板を得
た。After allowing this to stand overnight, perfluoro (2
-Butyltetrahydrofuran) to extract the active ingredient,
It was diluted to 0.25% by weight, applied on the photoresist film by spin coating, and heated at 100 ° C. for 5 minutes. This substrate is exposed to 100 mJ through a photomask, dipped in a designated developer for 30 seconds, washed with cold water, and post-cured at 230 ° C. for 1 hour. It also serves as a black mask and has a height of about 1.5 μm and a width. A substrate having a convex portion of about 30 μm was obtained.
【0050】この基板を、実施例1では低圧水銀灯によ
り凸部を設けた面側から1500mJ、その反対面側か
ら2500mJの紫外線を照射した。実施例2では低圧
水銀灯により凸部を設けた面の反対面側から4000m
Jの紫外線を照射した。In Example 1, the substrate was irradiated with ultraviolet rays of 1500 mJ from the surface on which the convex portion was provided and 2500 mJ from the surface on the opposite side by the low pressure mercury lamp. In Example 2, 4000 m from the surface opposite to the surface provided with the convex portion by the low pressure mercury lamp.
The ultraviolet ray of J was irradiated.
【0051】これらの基板の凸部に囲まれた凹部に対
し、インクジェット法で水系顔料インクを用いて吹きつ
けを行い、ストライプ状のRGBのカラーフィルタを得
た。この結果を表1に示す。The concave portions surrounded by the convex portions of these substrates were sprayed with a water-based pigment ink by an ink jet method to obtain striped RGB color filters. Table 1 shows the results.
【0052】比較例1 エネルギー線の照射をしない以外は、実施例1と同様の
方法でカラーフィルタを形成した。この結果を表1に示
す。Comparative Example 1 A color filter was formed in the same manner as in Example 1 except that the energy rays were not irradiated. Table 1 shows the results.
【0053】[0053]
【表1】 [Table 1]
【0054】なお、表1の結果において、「○」はいず
れもそれらの欠点のないもの(良品)を、「×」はその
ような欠点を生じたもの(不良品)を表す。なお、
「◎」は「○」よりもより着色層の平坦度が高いことを
示す。In the results shown in Table 1, "○" means that there were no such defects (good products), and "X" means that those defects occurred (defective products). In addition,
“⊚” indicates that the flatness of the colored layer is higher than that of “∘”.
【0055】実施例1、2ともに、隣接凹部へのインク
流出、画素周辺部での色抜け、画素内での色ムラという
欠陥は生じなかった。特に、実施例1のものは、画素内
での着色層の平坦度が高かった。一方、比較例のもの
は、画素内でインクが充分拡がらないため画素周辺部に
色抜けが生ずるところがあり、着色層の厚みが画素の中
央で厚くなっていて画素内の色ムラがかなり生じた。In both Examples 1 and 2, defects such as ink outflow to the adjacent concave portion, color loss in the peripheral portion of the pixel, and color unevenness in the pixel did not occur. Particularly, in Example 1, the flatness of the colored layer in the pixel was high. On the other hand, in the case of the comparative example, since the ink does not spread sufficiently in the pixel, there is a place where color loss occurs in the peripheral portion of the pixel, and the thickness of the coloring layer is thick in the center of the pixel, and color unevenness in the pixel considerably occurs. It was
【0056】実施例3、比較例2 実施例1の画素をドット状にして、RGB画素がモザイ
ク配置になるように凸部を設ける他は実施例1と同様に
して、この凸部に囲まれた凹部にインクジェット法で水
系顔料インクを用いて吹きつけを行い、モザイク配置の
RGBのカラーフィルタを得た。同様に、比較例とし
て、エネルギー線の照射をしない以外は、実施例2と同
様の方法でカラーフィルタを形成した。Example 3, Comparative Example 2 Pixels of Example 1 were dot-shaped and surrounded by the convex portions in the same manner as in Example 1 except that convex portions were provided so that the RGB pixels were in a mosaic arrangement. The recesses were sprayed with an aqueous pigment ink by an inkjet method to obtain an RGB color filter having a mosaic arrangement. Similarly, as a comparative example, a color filter was formed in the same manner as in Example 2 except that the energy ray irradiation was not performed.
【0057】この実施例3のカラーフィルタは、実施例
1のカラーフィルタと同様に、隣接凹部へのインク流
出、画素周辺部での色抜け、画素内での色ムラという欠
陥は生じなかった。一方、比較例2のものは、比較例1
よりもさらに性能が悪化し、画素内でインクが充分拡が
らないため画素周辺部に色抜けが生ずるところがあり、
画素内の色ムラもかなり生じた。Similar to the color filter of the first embodiment, the color filter of the third embodiment did not cause defects such as ink outflow to the adjacent concave portion, color loss in the peripheral portion of the pixel, and color unevenness in the pixel. On the other hand, in Comparative Example 2, Comparative Example 1
Performance is worse than that, and there is a place where color loss occurs in the pixel peripheral part because ink does not spread sufficiently in the pixel,
The color unevenness in the pixel was considerably generated.
【0058】実施例4 撥インク処理剤のC8 F17−C2 H4 −Si(−NC
O)3 をパーフルオロ(トリブチルアミン)で0.05
重量%に希釈して用いた他は実施例1と同様にしてカラ
ーフィルタを形成した。このカラーフィルタは、実施例
1と同様に、隣接凹部への流出、画素周辺部での色抜
け、画素内での色ムラという欠陥を生じなかった。Example 4 C 8 F 17 -C 2 H 4 -Si (-NC) of the ink repellent treatment agent
O) 3 with perfluoro (tributylamine) 0.05
A color filter was formed in the same manner as in Example 1 except that the color filter was used after diluting to a weight percentage. Similar to Example 1, this color filter did not cause defects such as outflow to the adjacent concave portion, color loss in the peripheral portion of the pixel, and color unevenness in the pixel.
【0059】実施例1のカラーフィルタ上に樹脂の平坦
化層を形成し、ITOを形成し、それをパターニング
し、さらに樹脂の配向膜を形成し、ラビングして第1の
基板を形成した。次いで、ガラス基板上にITOを形成
し、それをパターニングし、さらに樹脂の配向膜を形成
し、ラビングして第2の基板を形成した。この第1の基
板と第2の基板とを電極面が相対向するように配置し
て、周辺をシールして空セルを形成した。A flattening layer of resin was formed on the color filter of Example 1, ITO was formed, and the ITO was patterned, and further, an alignment film of resin was formed and rubbed to form a first substrate. Next, ITO was formed on a glass substrate, which was patterned, a resin alignment film was formed, and rubbing was performed to form a second substrate. The first substrate and the second substrate were arranged so that the electrode surfaces face each other, and the periphery was sealed to form an empty cell.
【0060】この空セル内にネマチック液晶を注入し、
注入口を封止して液晶セルを形成した。この液晶セルの
両側に位相差板と偏光板を配置してFSTN型の液晶表
示素子を製造した。この液晶表示素子は美しいカラー表
示が可能であった。Injecting nematic liquid crystal into this empty cell,
The inlet was sealed to form a liquid crystal cell. A phase difference plate and a polarizing plate were arranged on both sides of the liquid crystal cell to manufacture an FSTN type liquid crystal display device. This liquid crystal display device was capable of displaying beautiful colors.
【0061】[0061]
【発明の効果】本発明は、生産性の良いインクジェット
方式でインクを吹きつけてカラーフィルタを製造する際
に、凸部の上にインクが付着しにくく、かつ凹部でのイ
ンクの拡がりに優れるため画素内での色抜けを生じにく
いという効果を有する。これは、液晶表示素子としての
表示性能を向上させうる。According to the present invention, when a color filter is manufactured by spraying ink by an ink-jet method having good productivity, the ink hardly adheres to the convex portion and the ink spreads well in the concave portion. This has the effect that color omission is less likely to occur in the pixel. This can improve display performance as a liquid crystal display element.
【0062】さらに、この親インク処理を凸部を設けた
のと反対側の面からエネルギー線の照射で行うことによ
り、凸部の撥インク性をあまり損なうことなく、凹部の
親インク化が容易にできるので、生産性が良い。Furthermore, by performing the ink-affinity treatment by irradiating energy rays from the surface opposite to the side on which the protrusions are provided, the ink-repellency of the protrusions is not significantly impaired, and the ink-reduction of the recesses is easy. Therefore, productivity is good.
【0063】また、凸部の撥インク性が高すぎると、用
いるインクや凹部の親インク性の程度によって、画素周
辺部で着色層の厚みの低下が生じる傾向がある。本発明
では、エネルギー線の照射を基板の両面から行い、凸部
の撥インク性も少し低下させ、凹部の親インク性とバラ
ンスを取るようにすることにより、より画素内での平坦
性を向上させることもできる。本発明は、本発明の効果
を損しない範囲内で、種々の応用ができる。If the ink repellency of the convex portion is too high, the thickness of the colored layer tends to decrease in the peripheral portion of the pixel depending on the ink used and the degree of ink affinity of the concave portion. In the present invention, the energy rays are irradiated from both sides of the substrate, the ink repellency of the convex portions is slightly lowered, and the ink repellency of the concave portions is balanced to further improve the flatness in the pixel. You can also let it. The present invention can be applied to various applications within a range that does not impair the effects of the present invention.
【図1】本発明のカラーフィルタの模式的な断面図。FIG. 1 is a schematic cross-sectional view of a color filter of the present invention.
【図2】従来例のインク吹きつけ時の状況を示す模式的
な断面図。FIG. 2 is a schematic cross-sectional view showing a state when ink is sprayed in a conventional example.
【図3】本発明のカラーフィルタを用いた液晶表示素子
の模式的な断面図。FIG. 3 is a schematic cross-sectional view of a liquid crystal display device using the color filter of the present invention.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 田沼 敏弘 神奈川県横浜市神奈川区羽沢町1150番地 旭硝子株式会社中央研究所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Toshihiro Tanuma 1150 Hazawa-machi, Kanagawa-ku, Yokohama-shi, Kanagawa Asahi Glass Co., Ltd. Central Research Laboratory
Claims (7)
切られた凹部にインクジェット方式によってインクを吹
きつけて凹部にインクを堆積させて着色層を形成するカ
ラーフィルタの製造方法において、凸部を形成後、エネ
ルギー線を照射することより凹部の親インク性を制御
し、その後インクジェット方式によってインクを吹きつ
けることを特徴とするカラーフィルタの製造方法。1. A method of manufacturing a color filter, comprising forming a convex portion on a base material, spraying ink by an ink jet method on the concave portion divided by the convex portion, and depositing the ink in the concave portion to form a colored layer. A method for producing a color filter, characterized in that, after forming a convex portion, the ink affinity of the concave portion is controlled by irradiating an energy ray, and then the ink is sprayed by an inkjet method.
の水の接触角が20°以下となるようにされる請求項1
記載のカラーフィルタの製造方法。2. The contact angle of water in the recesses is set to 20 ° or less by the process of irradiating with energy rays.
A method for producing the color filter according to the above.
ことを特徴とする請求項1又は2記載のカラーフィルタ
の製造方法。3. The method of manufacturing a color filter according to claim 1, wherein the convex portion also serves as a black mask.
るのと反対側の面から照射する請求項1、2又は3記載
のカラーフィルタの製造方法。4. The method for producing a color filter according to claim 1, 2 or 3, wherein the energy rays are irradiated from the surface of the substrate opposite to the surface on which the convex portions are formed.
の夫々の照射量を凸部の撥インク性と凹部の親インク性
とが所望の値になるように制御する請求項1、2又は3
記載のカラーフィルタの製造方法。5. An energy ray is irradiated from both sides of the substrate, and the respective irradiation amounts are controlled so that the ink repellency of the convex portion and the ink affinity of the concave portion have desired values. Three
A method for producing the color filter according to the above.
原子を含む炭化水素基を表し、X、Y、Zはそれぞれ独
立して水酸基、メチル基、炭素数が1〜3のアルコキシ
基、塩素原子、又はイソシアネート基を表す)で表され
る化合物を含む処理剤によって撥インク処理を施されて
いる請求項1〜5のいずれか記載のカラーフィルタの製
造方法。6. The surface of the convex portion is RSiXYZ (R represents a hydrocarbon group containing a fluorine atom, X, Y and Z are each independently a hydroxyl group, a methyl group, an alkoxy group having 1 to 3 carbon atoms, The method for producing a color filter according to claim 1, wherein the ink repellent treatment is performed with a treatment agent containing a compound represented by a chlorine atom or an isocyanate group.
より形成されたカラーフィルタを用いた液晶表示素子。7. A liquid crystal display device using a color filter formed by the manufacturing method according to claim 1.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3840596A JPH09230129A (en) | 1996-02-26 | 1996-02-26 | Method for manufacturing color filter and liquid crystal display device using the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3840596A JPH09230129A (en) | 1996-02-26 | 1996-02-26 | Method for manufacturing color filter and liquid crystal display device using the same |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH09230129A true JPH09230129A (en) | 1997-09-05 |
Family
ID=12524398
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3840596A Pending JPH09230129A (en) | 1996-02-26 | 1996-02-26 | Method for manufacturing color filter and liquid crystal display device using the same |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH09230129A (en) |
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