471011 A7 B7 五、發明說明（v) 1 · 發明領域 (請先閱讀背面之注意事項再填寫本頁) 本發明係關於一種薄膜形成裝置使用以製造具有可產 生E L (電致照明）之照明材料，特別是照明有機材料（ 以下稱爲有機E L材料）設置在陽極和陰極間之構造之 E L元件。 2 · 相關技藝之說明 近年來，使用EL元件當成使用有機EL材料之EL 現象之自我照明元件之顯示裝置（E L顯示裝置.）已快速 發展。由於此EL顯示裝置爲自我照明型，因此不需要如 同液晶顯示裝置之背光。再者，由於可見之角度較廣，此 種E L顯τρ:裝置被視爲使用在戶外之手提設備之顯示部份 〇 經濟部智慧財產局員工消費合作社印製 於此有兩種E L顯示裝置，亦即，被動型（簡單矩陣 型）和主動型（主動矩陣型），且兩種型式皆蓬勃的發展 。特別的，現今，主動矩陣型E L顯示裝置獲得更多的注 意。相關於變成照明層且被視爲E L元件之中央之有機 EL材料而言，雖然已對低分子有機EL材料和高分子有 機E L材料做硏究，但是，由於高分子有機E l材料比低 分子有機E L材料更輕易操控和其熱阻較高，因此更注意 高分子有機E L材料。 關於尚分子有機E L材料之膜形成方法方面，由Seiko Epson公司所提出之噴墨法是較佳的。關於此技術，一可參 考曰本專利第平1 〇 - 1 2 3 77和平1 0 - -4- 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公爱） 經濟部智慧財產局員工消費合作社印製 471011 A7 ___ B7 五、發明說明（2〉 153967 或平 11 — 54270 號案。 但是，在此噴墨法中，由於高分子EL材料會噴出且 散佈，如果介於塗覆表面和噴墨頭之噴嘴間之距離未適當 的安排時，會發生如所謂的飛行曲線，其中墨滴落至非需 要之部份。飛行曲線如日本專利第平1 一 5 4 2 7 0所述 ，且其界定爲可發生從目標位置50或更多的偏移。 發明槪要 本發明乃有鑒於上述之問題而製成，且在提供一種方 法，其中以聚合物製成之有機EL材料之膜準確的且高產 能的形成，而無位置偏1幕，和使此膜形成之一薄膜形成裝 置。 本發明之另一目的乃在提供一種具有薄膜形成裝置之 多室系統（亦稱爲叢集工具系統）之元件形成裝置。 爲了達成上述之目的，本發明之特徵在於紅，綠，和 藍色照明層使用如散佈器之薄膜形成裝置形成一條紋狀。 此條紋狀包括一長和薄矩形，具有2或更多的孔徑比，和 一長且薄之橢圓形，具有長軸對短軸2或更大之比例。 本發明之薄膜形成裝置如_ 1 A和1 B所示。圖1 A 爲從側邊觀之，本發明之薄膜形成裝置之外觀，和圖1B 爲從前面觀之，本發明之薄膜形成裝置之外觀。在圖1 A 中，參考數字1 0 0表示一支持台，1 〇 1爲固定有基底 1 0 2之傳送台。傳送台10 1可在X方向（水犀方向） 或Y方向（垂直方向）移動。 ------!!p 裝 ------—訂----I---^線 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -5 - 471011 A7 經濟部智慧財產局員工消費合作社印製 B7___五、發明說明（3 > 一支持柱1 0 3和一保持器1 0 4接附至支持台 100，和塗覆單元105位在傳送台101上。塗覆單 元1 0 5爲一裝置，其提供有一機構以塗覆含有機E L材 料之溶液在一基底上，和一裝置用以傳送壓縮氣體（壓縮 惰性氣體）至一頭部份1 0 6和用以供應含有機E L材料 之溶液。 再者，塗覆單元1 0 5包括一吸回機構（提供有吸回 閥或空氣操作閥之機構）。吸回機構爲藉由使用膜規而改 變體積以降低管中之壓力，用以將聚集在管之噴嘴埠之墨 滴吸入噴嘴之機構。 在圖1 A和1B之薄膜形成裝置中，頭部份1〇 6固 定，和放置有基底1 0 2之傳送台1 〇 1在X或Y方向移 動。亦即，採用此機構以使傳送台移動，因此，頭部份 1 0 6在基底1 0 2上相關的移動。雖然亦可使頭部份 1 0 6移動，但是，當基底側移動時，穩定性較佳。 在上述構造之薄膜形成裝置中，提供有一有機材料（ 嚴格而言，一溶劑和溶解在其中之有機E L材料之混合物 )之供應埠之噴嘴之頭部份1 0 6在基底1 0 2上移動， 因此，基底之預定部份以有機$ L材料塗覆。以下說明以 頭部份1 0 6塗覆有機E L材料之方法。 圖2 A爲包含7Γ共軛系統聚合物之有機E L材料之膜 藉由執行本發明而形成之狀態圖。在圖2 A中，參考數字: 1 1 0表示一基底，和以丁 F T製成之一圖素咅_份π 1 ，一源極側驅動電路1 1 2，和一閘極側驅動電路丨丄3 本紙張尺度適用中國國家標準（CNS)A4規格(210 X 297公釐） 7〇Ζ ^1— - (請先閱讀背面之注意事項再填寫本頁) 471011 A7 _ B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（4 ) 乃形成在基底1 1 0上。以多數連接至源極側驅動電路 1 1 2之源極接線和多數連接至閘極側驅動電路1 1 3之 閘極接線所圍繞之區域爲一圖素，和T f T和電連接至 T F T之E L元件形成在圖素中。此圖素以矩陣型式安排 在圖素部份1 1 1中。 於此’參考數字1 1 4 a表示一溶劑和當應用一電壓 會發出紅色光之有機E L材料（有機£ l材料（R))之 混合物（塗覆液體（R ) ) ; 1 1 4 b爲一溶劑和當應用 一電壓會發出綠色光之有機E L材料（有機E L材料（G ))之混合物（塗覆液體（G));和1 14c表示一溶 劑和當應用一電壓會發出藍色光之有機E L材料（有機 EL材料（B))之混合物（塗覆液體（b))。 相關於有機EL材料方面，於此有一方法，其中聚合 化聚合物直接溶解在溶劑中而後應用，和另一方法，其中 在膜以溶解在溶劑中之單體形成後，執行加熱和聚合以形 成聚合物。此兩方法皆可使用在本發明中。於此說明聚合 物之有機E L材料溶解在溶劑中而後應用之例。 在本發明之例中，一塗覆液體（R) 114a，一塗 覆液體（G) 114b，和一_覆液體（b) 分 別從薄膜形成裝置之頭部份1 〇 6應用在如圖1 A和1 B 所示之方向。亦即，條紋狀照明層（嚴格而言爲照明層之 前身）同時形成在發出紅光之圖素線上，發出綠光之圖素 線上，和發出藍光之圖素線上。 ^ 圖素線表示以觸排1 2 1分離之圖素之線，和觸排 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -7 - 471011 A7 _ B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（5 ) 1 2 1形成在源極接線上。亦即，多數圖素沿源極接線序 列安排之線稱爲圖素線。但是，雖然此處說明觸排1 2 1 形成在源極接線上，但是，觸排亦可提供在閘極接線上， 和多數圖素沿閘極接線序列安排之線稱爲圖素線。 因此，圖素部份1 1 1可視爲由提供在多數源極接線 或多數閘極線上之條紋觸排所分割之多數圖素線之聚集。 以此觀點，圖素部份1 1包含一圖素線，其中形成有發紅 色光之條紋狀照明層，發綠色光之條紋狀照明層，和發藍 色光之條紋狀照明層。 由於條紋狀觸排提供在多數源極接線或多數閘極接線 上，因此可將圖素部份實質視爲由提供在多數源極接線或 多數閘極線上之條紋觸排所分割之多數圖素線之聚集。 其次，圖2 A所示之頭部份（亦稱爲塗覆部份） 1 0 7之狀態擴大如圖2 B所示。 參考數字1 0 7表示薄膜形成裝置之頭部份，和紅色 噴嘴1 1 6 a,綠色噴嘴1 16b，和藍色噴嘴1 1 6 c 接附於此。此外，一塗覆液體（R ) 1 1 4 a，一塗覆液 體（G ) 1 1 4 b ,和一塗覆液體（B ) 1 1 4 c分別儲 存在每一噴嘴內側。塗覆液體以充塡在管117中之壓縮 氣體壓縮，且受推出至圖素部份1 1 1。頭部份1 0 7沿 垂直於紙面之方向向此側移動，因此，可執行如圖2 A所 示之塗覆步驟。 圖2 C爲由1 1 8所示之塗覆部份附近之擴大圖/。在 基底1 1 0上之圖素部份1 1 1乃爲多數TFT1 1 9 a 本^張尺度適用中國國家標準(CNS)A4規格（210 X 297公" ------------i ‘裝 ------訂------I--綠 (請先閱讀背面之注意事項再填寫本頁) 471011 A7 —_________ B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（6 ) 至1 19 C和圖素電極120a至120C所形成之圖素 之聚集。當以壓縮氣體將壓力應用至圖2 B之噴嘴 1 16a至1 1 6c時，塗覆液體1 14a至1 14c受 此壓力推出。 以樹脂材料製成之觸排1 2 1提供在圖素間，和防止 塗覆液體免於混入相鄰圖素間。在此構造中，當觸排 1 2 1之寬度（由光石印之解析度所決定）較窄時，圖素 部份之整合受到改善且可獲得高細微影像。特別的，當塗 覆液體之黏度在1至3 0 c p時，更爲有效。 但是，如果塗覆液體之黏度爲3 0 c p或更大時，或 是其爲溶膠或膠狀時，最好不要使用此觸排。亦即，如果 介於塗覆液體和塗覆表面間之接觸角在塗覆後充分大時， 塗覆液體無法極度展開，因此，變成不需要以觸排阻擋。 在此例中，照明層最後形成橢圓形（長且薄之橢圓形，其 長軸和短軸之比例爲2或更大），典型的爲從圖素部份之 一端延伸至另一端之長且薄之橢圓形。 關於可形成觸排1 2 1之樹脂材料方面，可使用丙烯 酸，聚醯胺，聚醯亞胺，或聚亞氨醯胺。如果碳，黑色染 料等先提供在樹脂材料中以使構f脂材料變黑時，可使用觸 排1 2 1當成介於圖素間之光遮蔽膜。 如果使用光反射之一感應器接附至任一噴嘴1 1 6 a ，116b， 116c之尖端附近時，亦可將介於塗覆表 面和噴嘴間之距離始終保持固定。再者，藉由提供=機構 以依照圖素節距（圖素間之距離）而調整介於噴嘴 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -9 - 471011 經濟部智慧財產局員工消費合作社印製 A7 B7_ __ 五、發明說明（7 ) 1 1 6 a至1 1 6 C間之距離，可配合任何圖素之EL顯 示裝置。 以此方式，從噴嘴1 1 6 a至1 1 6 c應用之塗覆液 體1 1 4 a至1 1 4c分別塗覆圖素電極1 20 a至 1 2 0 c。上述之頭部份1 〇 7之操作由電訊號所控制。 在塗覆液體1 14a至1 14c應用後，在真空中執 行加熱處理（烘烤處理或點火處理），因此，包含在塗覆 液體1 1 4 a至1 1 4 c中之有機溶劑揮發且形成包含有 機E L材料之照明層。因此，必須使用在低於有.機e L.材 料之玻璃臨界溫度（T g )之溫度下會揮發之有機溶劑。 最終形成之照明層之厚度由有機E L材料之黏度所決定。 在此例中，此黏度可藉由選擇有機溶劑或添加劑而調整， 且最好使黏度在1至5 0 c p間（最好爲5至2 〇 c p) 〇 再者，如果有多數會變成結晶核之雜質存在於有機 E L·材料時，當有機溶劑揮發時，有機E l材料結晶之可 能性變高。如果結晶，則照明效率降低，其是不佳的。因 此，最好使在有機E L材料中儘可能不含雜質。 爲了降低雜質，重要的是俾溶劑和有機E L材料徹底 精鍊，且製造溶劑和有機E L材料之環境儘可能乾淨。關 於溶劑之精鍊和有機E L材料之精鍊方面，最好亀複執行 如蒸餾法，昇華法，過濾法，再結晶法，再沉澱法，層析 法，或分解法等技術。最後，最好降低如金屬元·素或^驗金 屬元素之雜質至0 · 1 p pm或更低（最好爲 本紙張尺度適用中國國家標準(CNS)A4規格(2ί〇 χ’597公釐） (請先閱讀背面之注意事項再填寫本頁) Μ -------訂---------線 471011 A7 B7 五、發明說明（8 ) O.Olppm或更低）。 此外，當使用如圖1 A和1 B所示之薄膜形成裝置應 用含有機E L材料之塗覆液體時，最.好需充分注意大氣。 特別的，最好使有機E L材料之形成步驟在充塡以如氮之 惰性氣體之淸潔室或手套盒中執行。 藉由使用上述之薄膜形成裝置，可同時形成分別發出 紅色，綠色，和藍色光之三種照明層，因此，可以高產能 形成包含高分子有機E L材料之照明層。再者，和噴墨系 統不同的是，由於可塗覆成條紋狀，而在一圖素線上無間 隙，因此，產能極高。 圖式簡單說明 在圖中： 圖1 A和1 B爲薄膜形成裝置之圖； 圖2 A至2 C爲有機E L材料之塗覆步驟圖； 圖3 A和3 B爲有機E L材料之塗覆步驟圖； 圖4 A和4 B爲有機E L材料之塗覆步驟圖； 圖5爲薄膜形成裝置之圖； 圖6爲薄膜形成裝置之圖；、 圖7爲有機EL材料之塗覆步驟圖；和 圖8 A至8 C爲在薄膜形成裝置中之頭部份之構造圖 〇 - · - . * 符號說明 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐）-11 - (請先閱讀背面之注意事項再填寫本頁) -裘--------訂---------· 經濟部智慧財產局員工消費合作社印製 471011 A7 B7五、發明說明（9〉 5 2 噴嘴 5 3 單元 54,57 頭部 5 5 單元 5 6 噴嘴 100 支持台 101 傳送台 10 2 基底 103 支持柱 104 保持器 105 塗覆單元 10 6 頭部 10 7 頭部 110 基底 111 圖素部份 112 源極側驅動電路 113 閘極側驅動電路 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 1 1 4 塗 覆 液 體 1 1 6 噴 嘴 1 1 9 T F T 1 2 〇 圖 素 電 極 1 2 1 觸 排 3 0 1 觸 排 3 0 2 方 形 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -12 - 471011 A7 _B7 五、發明說明（10 ) 經濟部智慧財產局員工消費合作社印製 4 0 1 觸 排 4 0 2 E L 層 4 0 4 觸 排 4 0 5 E L 層 5 0 0 閘 5 0 1 共 同 室 5 0 2 傳 送 機 構 5 0 3 基 底 5 0 4 傳 送 室 5 0 6 預 先 處 理 室 5 0 7 點 火 處 理 室 5 0 8 傳 送 機 構 5 0 9 傳 送 室 5 1 0 溶 液 塗 覆 處 理 室 5 1 1 點 火 處 理 室 5 1 2 傳 送 機 構 5 1 3 傳 送 室 5 1 4 溶 液 塗 覆 處 理 室 5 1 5 蒸 氣 相 膜 形 成 處理室 r 5 1 6 蒸 氣 相 膜 形成 處理室 5 2 1 手 套 盒 5 2 2 路 徑 盒 5 2 3 閘 5 2 4 紫 外 線 照 射 機 構 (請先閱讀背面之注意事項再填寫本頁) -1 裝--------訂----- 氧 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -13 - 471011 A7 _____ B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（11 )5 2 5 閘 7 0 1 頭部 較佳實施例之詳細說明 以下說明本發明之實施例。如圖2 A所示，當圖素部 份1 1 1，源極側驅動電路1 1 2，閘極側驅動電路 1 1 3包含TFT在基底1 1 0上時，條紋狀觸排i 2 1 沿源極接線形成（接線連接源極側驅動電路1 1 2至圖素 部份1 1 1和傳送資訊訊號至圖素部份之開關T F 丁）。 其次，準備欲變成照明層之一塗覆液體（R ) 114a，一塗覆液體（G) ll4b，和一塗覆液體（ B) 114c。每個塗覆液體114a至114c主要藉 由溶解高分子有機E L材料在一溶劑中而形成。關於高分 子有機E L材料方面，可使用聚對位苯乙嫌撐（p p v ) 系統，聚乙烯（P V K )系統，或聚荀系統。 雖然有各種型式之有機E L材料存在當成p p v系統 ，但是已發表者如附件中之分子式〔化合物1〕和〔化合 物 2〕（ H.Shenk，O.Gelsen，E.KIuge，W.Kreuder， 和H.Spreitzer，”用於發光極體之聚合物”，Euro Display Proceedings , 1 999, p.33-37 )。 亦可使用揭示於日本專利第平1 〇 一 9 2 5 7 6號案 之聚苯乙烯。其分子式如附件中之分子式〔化合物3〕和 〔化合物4〕所不。 · ^ 關於P V K系統有機E L材料方面，其分子式如附件 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNSXA4規格（210 X 297公f ) 471011 A7 _ B7 五、發明說明（12 ) 之〔化合物5〕所示。 (請先閱讀背面之注意事項再填寫本頁) 在聚合物狀態中之材料已溶解在溶劑中後，可應用高 分子有機E L材料，或在材料溶解在溶劑中且以單底狀態 塗覆後，可聚合化。在材料以單體狀態應用之例中/先形 成單體前身，和而後藉由在真空中加熱聚合以形成聚合物 〇 特別的，可使用氰基聚苯撐乙烯撐在塗覆液體（R) 1 1 4 a中；可使用聚苯撐乙烯撐在塗覆液體（G) 1 1 4 b中；和可使用聚苯撐乙烯撐和聚烷基苯撐在塗覆 液體（B ) 1 1 4 c中。關於溶劑方面，可使用氯仿，二 氯仿，T 一丁酯內酯，丁酯溶纖劑，或NMP (N —甲基 - 2 -烷）。亦可有效的添加添加劑以提升塗覆液體之黏 性。 經濟部智慧財產局員工消費合作社印製 但是，上述之例只是有機E L材料之例，其可使用於 本發明之照明層，但是，本發明並不限於此。在本發明中 ，有機E L材料和溶劑之混合物由圖1 A和1 B之薄膜形 成裝置所應用，且溶劑藉由加熱處理而揮發和移除，因此 可形成照明層。因此，當溶劑揮發時，如果溫度不超過照 明層之玻璃臨界溫度時，可使用任何的有機E L材料。 再者，當使用圖1A和1B之薄膜形成裝置執行塗覆 步驟時，所需的是，處理氣體爲具有極少濕氣之乾燥氣體 ，且此步驟在惰性氣體中執行。由於E L層極易由存在之 濕氣和氧所破壞，當形成E L層時，需要儘可能的排除适 些因素。例如，最好使用乾燥氮氣或乾燥氬氣。因此，最 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -15- 471011 A7 __ B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（13 ) 好將圖1 A和1 B之薄膜形成裝置安裝在一充塡以惰性氣 體之淸潔廂中，且塗覆步驟在該氣體中執行。 〔第一實施例〕 在執行本發明之模式中，將針對發出紅色，綠色，和 藍色光之三種條紋狀照明層同時形成在垂直和水平方向之 例說明。在此實施例中，針對條紋狀照明層在縱向上分成 多數部份之例說明。 如圖3 A所示，當圖素部份1 1 1，源極側.驅動電路 1 1 2，閘極側驅動電路1 1 3包含T F T在基底1 1 0 上時，圖素部份1 1 1以觸排3 0 1分成矩陣型式。在此 實施例中，如圖3 B所示，在由觸排3 0 1所分離之方塊 3 0 2中，設置有多數圖素3 0 3。圖素之數目並無限制 〇 在此狀態下，作用當成照明層之有機E L材料之膜形 成步驟藉由使用本發明之薄膜形成裝置執行。在此例中， 使用頭部份1 0 7選擇性應用紅色塗覆液體1 1 4 a，綠 色塗覆液體1 1 4b，和藍色塗覆液體1 1 4 c。 本實施例之特徵在於可以塗輝液體1 1 4 a至 1 1 4 c選擇性的塗覆相關方塊3 0 2。亦即，在執行本 發明之模式中說明之系統中，可選擇性的以條紋狀塗覆紅 色，綠色，和藍色塗覆液體。另一方面，在此實施例中， 對於每一方塊，顏色之安排並無限制。因此，如獨所 示，可採用之安排爲應用在任意方塊上之塗覆液體之顏色 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公爱）-16- 471011 經濟部智慧財產局員工消費合作社印製 A7 ___ B7 _ 五、發明說明（14) 美隔一列（或一行）移位。 亦可提供一圖素在方塊302中，且在該例中，可形 成一般所謂的三角形安排之圖素構造（一種圖素構造，其 中對應於R G B之圖素始終安排成三角形）。 用以執行此實施例之頭部份1 0 7之操作如下··首先 ，頭部份1 0 7在箭頭” a ”方向移動，因此，三個方塊內部 (分別對應於紅，綠，和藍色之方塊）完全沒入塗覆液體 中。當其終止時，頭部份1 0 7在箭頭’’ b ”方向移動，因此 ，塗覆液體應用在次一個三個方塊上，而後，.以熱處理使 溶劑揮發以形成有機E L材料。 在習知噴墨法中，由於應用墨滴，有機E L材料在表 面上形成圓形。因此，難以塗覆整個長且薄之圖素。特gij 的，當整個圖素作用當成一照明區域時，需要塗覆有機 EL材料在整個圖素上。因此，本實施例具有之優點爲藉 由移動頭部份1 0 7在箭頭” a ”之方向，方塊內側可完全充 - .--· i 塡以塗覆液體。 〔第二實施例〕 當圖2 A所示之圖素線之方，向爲垂直方向時，觸排 1 2 1沿源極接線形成。因此，可結論的是在觸排沿閘極 接線形成之例中，圖素線乃形成在水平方向。亦即，在圖 素線形成在垂直方向之例中，其構造如圖4 A所示，而在 圖素線形成在水平方向之例中，其構造如圖4 B所示 在圖4A中，參考數字401表示在垂直方向形成條 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -17- (請先閱讀背面之注意事項再填寫本頁) i !丨 I I 訂--！-後 471011 A7 — B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（15) 紋狀之觸排；4 0 2 a爲發出紅色光之E L層；和 402b爲發出綠色光之EL層。當然，發出藍色光之 EL層形成鄰近發出綠色裝EL層40 2b。觸排40 1 經由一絕緣膜且沿著源極接線而形成在源極接線上。 此處之E L層意即以有助於光發射之有機E L材料製 成之層，如照明層，電荷注入層，或電荷傳送層。雖然可 能有單層之照明層之例，但是，在電洞注入層和照明層疊 層之例中，此疊層膜稱爲EL層。 在此例中，如圖1 B所示之頭部份1 0 6在垂直（.Y )方向移動。亦即，紅，綠，和藍色之三個圖素線同時在 垂直方向掃瞄，且塗覆液體應用在圖素線上。 在圖4B中，參考數字404表示在水平方向形成條 紋狀之觸排；4 0 5 a爲發出紅色光之E L層；4 0 5 b 爲發出綠色光之E L層；和4 0 5 c爲發出藍色光之E L 層。觸排4 0 4經由一絕緣膜且沿著閘極接線而形成在閘 極接線上。 在此例中，如圖1 B所示之頭部份1 0 6在水平（X )方向移動。亦即，紅，綠，和藍色之三個圖素線同時在 水平方向掃瞄，且塗覆液體應用，在圖素線上。 如上所述，即使以選擇的塗覆液體沿垂直方向或沿水 平方向塗覆在每一圖素線上時，藉由電控制頭部份1 〇 6 掃瞄之方向，即可輕易的操控。 〔第三實施例〕 (請先閱讀背面之注音？事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -18 - 471011 A7 經濟部智慧財產局員工消費合作社印製 ____B7 __五、發明說明（16 ) 在此實施例中，說明本發明之薄膜形成裝置安裝在多 室系統（亦稱爲叢集工具系統）之薄膜形成裝置中之例， 且E L元件之形成方法連續執行，而未開放至空氣中。 在圖5中，參考數字501表示一共同室，和共同室 5 0 1提供有一傳送機構（A) 5 0 2以傳送一基底 503。共同室501之氣體降低，且共同室50 1從相 關的處理室以閘隔開。當閘打開時，基底之傳送至相關處 理室乃以傳送機構（A ) 5 0 2執行。爲了降低共同室 5 0 1之壓力，雖然可使用如油壓旋轉泵，機械升壓泵， 渦流分子泵，或低溫泵，但是，低溫泵可最有效的移除濕 氣。 下述將說明相關的室。由於共同室5 0 1具有降壓之 氣體，所有直接耦合至共同室5 0 1之處理室提供有排氣 泵（未顯示）。關於排氣泵方面，可使用前述之油壓旋轉 泵，機械升壓泵，渦流分子泵，或低溫泵。 首先，參考數字5 0 4表示一傳送室（A),其中基 底載入和載出，且其亦稱爲一負載鎖室。傳送.室（A ) 5 0 4以閘5 0 0 a與共同室5 0 1隔開，且設置有基底 之載體505乃設置於此。傳每室（A) 504可分成用 以載入基底和用以載出基底者。 在此實施例中，基底503設置在載體上，而元件形 成表面面向下。此乃爲了便於當執行蒸氣相膜形成（以濺 鍍或蒸氣沉積而膜形成）時之面向下系統。此種面師下系 統爲形成膜時，基底之元件形成表面直接面向下之系統。 ---— II----IV 裝--------訂-----1---綾 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -19 - 471011 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（17) 依照此系統，可抑制灰塵等之接附。 其次，參考數字5 0 6表示一處理室（以下稱爲預先 處理室）以處理變成E L元件之圖素電極之陰極或陽極之 表面。預先處理室506以閘500b與共同室5 01隔 開。雖然預先處理室可依照E L元件之製造方法而改變， 在此實施例中，其設計成在1 〇 0至1 2 0 °C加熱，而圖 素電極之表面以紫外線照射。當E L元件之陽極表面受處 理時，此預先處理是相當有效的。 其次，參考數字5 0 7表示一點火處理室（A )和以 閘5 0 0 c與共同室5 0 1隔開。如後述，可在點火處理 室（A ) 5 0 7中進行真空排氣和洗滌，其包括用以反向 基底表面之機構。再者，提供有傳送機構（B ) 5 0 8之 傳送室（B ) 5 0 9乃經由閘5 0 0 d連接至點火處理室 (A ) 5 0 7。此外，溶液塗覆處理室（A ) 5 1 0經由 閘500e連接至傳送室（B) 509。 於此說明點火處理室（A ) 5 0 7，傳送室（B ) 5 0 9，和溶液塗覆處理室（A ) 5 1 0之操作。 當基底傳送至點火處理室（A) 5 0 7時，點火處理 室（A ) 5 0 7在降壓狀態，和閘5 0 0 d關閉。當基底 (元件形成表面向下）傳送時，閘5 0 0 c關閉，和點火 處理室（A ) 5 0 7之內側藉由充塡以惰性氣體而恢復大 氣壓力。基底以反向機構（未顯示）翻轉，且元件形成表 面向上。 ...... 在此狀態，閘5 0 0 d和5 0 0 e打開，和基底傳送 ------------^丨裝-------訂---------線 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -20 - 471011 A7 B7 五、發明說明（18 ) 至處理室（溶液塗覆處理室（A) ) 5 1 〇，其中應用含 (請先閱讀背面之注意事項再填寫本頁) 有機EL材料之溶液。溶液塗覆處理室（a) 5 10爲提 供有如同本發明之圖i A和1 B所示之薄膜形成裝置相同 功能之處理室，且於此應用變成條紋狀照明層之溶劑和有 機E L材料之混合物。所需的是，形成高純度惰性氣體， 以使氧和濕氣不會侵害有機E L材料。 應用有溶劑和有機E L材料之混合物之基底再度返回 點火處理室（A) 507，且在1〇〇至120 °C之溫度 下執行熱處理（點火處理）。所需的是，此室含有高純度 惰性氣體。當點火處理終止時，基底由反向機構（未顯示 )反向，和點火處理室（A) 5 0 7在元件形成表面再度 面向下之狀態時抽真空。此時，閘5 0 0 c和5 0 0 d關 閉。 當點火處理室（A ) 5 0 7抽真空終止時，閘 5 0 0 c打開且基底以傳送機構（a) 5 0 2返回共同室 5 0 1° 上述爲點火處理室（A ) 5 0 7，傳送室（B ) 經濟部智慧財產局員工消費合作社印製 5 0 9，和溶液塗覆處理室（A ) 5 1 0之操作。 其次，參考數字5 1 1表苹點火處理室（B ),其以 閘5 0 0 f與共同室5 0 1隔開。真空排氣和洗滌亦可在 點火處理室（B ) 5 1 1中進行，其包括一機構以反向基 底表面。再者，提供有傳送機構（C) 5 12之傳送室（ C ) 5 1 3經由閘5 0 0 g連接至點火處理室（B') 一 5 1 1。此外，溶液塗覆處理室（B )經由閘5 0 0 h連 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -21 - 471011 A7 B7_____ 五、發明說明（19) 接至傳送室（C) 513。 (請先閱讀背面之注意事項再填寫本頁) 由於點火處理室（B ) 5 1 1，傳送室（c.) 5 1 3 ，和溶液塗覆處理室（B ) 5 1 4之操作幾乎和點火處理 室（A) 507，傳送室（B) 509，和溶液塗覆處理 室（A) 5 1 〇之操作相同，因此，以下只說明其差異處 〇 傳送至溶液塗覆處理室（B ) 5 1 4之基底應用以有 機E L材料和溶劑之混合物，其以旋轉塗覆法而變成電洞 注入層或電洞傳送層。氣體爲高純度惰性氣體，.因此，.如 同在溶液塗覆處理室（A) 5 1 〇中，氧和濕氣不會侵害 有機E L材料。 當在點火處理室（B ) 5 1 1中之點火處理終止時， 執行在點火處理室（B ) 5 1 1抽真空，閘5 〇 〇 f打開 ，且基底以傳送機構（A) 502返回共同室501。上 述爲點火處理室（B) 511，傳送室（c) 512，和 溶液塗覆處理室（B ) 5 1 4之操作。 經濟部智慧財產局員工消費合作社印製 其次，參考數字5 1 5表示一處理室（蒸氣相膜形成 處理室（A ))以利用蒸氣相膜形成法形成一絕緣膜或一 導電膜（在此實施例中爲導電膜）。雖然蒸氣沉積法或濺 鍍法皆可當成蒸氣相膜形成法，由於其使用於形成一電極 在有機E L材料上，最好使用蒸氣相沉積法，因爲其不會 輕易造成破壞。在此狀態下，以閘5 0 〇 i隔開共同室 5 0 1，和在真空下形成膜。於此以向上沉積系統形-成膜 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公爱） 471011 A7 ___________B7 五、發明說明（20 ) 在蒸氣相膜形成處理室（A) 5 1 5中，當執行蒸氣 相處理時，需要提供蒸氣沉積源。可依照欲形成之膜而提 供或改變多數蒸氣沉積源。此外，亦可採用阻熱系統之蒸 氣沉積源，或EB (電子束）系統之蒸氣沉積源。 其次，參考數字5 1 6表示一處理室（蒸氣相膜形成 處理室（B ))以利用蒸氣相膜形成法形成一絕緣膜或一 導電膜。關於蒸氣相膜形成法方面，雖然可使用電漿 C V D法或濺鍍法，最好爲以最低膜形成溫度形成絕緣膜 。例如，以遠電漿C V D法形成氮化砂膜是較有效的。在 此狀態下，以閘5 0 0 j隔開共同室5 0 1，和在真空下 形成膜。 上述之處理（排氣，傳送，膜形成處理等）可使用電 腦，以一接觸板和序列器全自動控制。 上述構造之多室薄膜形成裝置之主要特徵在於提供有 需要形成E L元件之所有膜形成機構，和執行直到被動膜 形成之步驟而無曝露至大氣中。結果，藉由使用高分子有 機E L材料和簡單的機構，可形成E L元件抵抗損壞之防 護，且可製造具有高可靠度之EL顯示裝置。 即使當執行第一或第二實梅例之構造時，此實施例亦 可使用當成一薄膜形成裝置。 〔第四實施例〕 在此實施例中，參考圖6說明圖5所示之多室薄> 膜形 成裝置之一部份改變之例。特別的，係關於一手套盒 請 先 閱 讀 背 面 之 注 意 事 項 再 J裝 本 · 頁 訂 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -23 - 471011 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（21 ) 521和一路徑盒522提供在一傳送室（A) 504之 構造。對於非改變部份之處，可參考第三實施例之說明。 手套盒5 2 1經由閘5 2 3連接至傳送室（A) 504。在手套盒52 1中，執行在封閉空間中之EL裝 置之密封處理。此處理乃用以保護基底（已在圖6之薄膜 形成裝置中處理且返回傳送室（A) 5 0 4之基底），其 已受到來自外部空氣之所有處理，且使用以密封材料將其 機械密封之機構或以熱固樹脂或紫外線硬化樹脂將其密封 之機構。 關於密封材料方面，雖然可使用如玻璃，陶瓷，或金 屬，但是，在光從密封材料側射出之例中，其必須爲半透 明的。密封材料和已受到上述處理之基底使用熱固樹脂或 紫外線硬化樹脂結合，且此樹脂以熱處理或紫外線照明處 理硬化以形成封閉空間。在此封閉空間中，亦可有效的提 供如氧化鋇當成乾燥劑。 亦可在密封材料和形成有E L元件之基底間之空間充 塡以熱固樹脂或紫外線硬化樹脂。在此例中，亦可有效的 添加如氧化鋇在熱固樹脂或紫外線硬化樹脂中當成乾燥劑 〇 如圖6所示之薄膜形成裝置具有之構造爲用以照射紫 外線之機構（紫外線照射機構）5 2 4提供在手套盒 5 2 1內側，和以來自紫外線照射機構5 2 4之紫外線硬 化紫外線硬化樹脂。 ^ 雖然在手套盒5 2 1中之操作可爲手動操作，最好使 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -24- 471011 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（22) 此操作爲經由電腦控制機械的執行。當使用密封材料時， 最好安裝有用以塗覆密封劑（熱固樹脂或紫外線硬化樹脂 )之機構，使用在液晶之胞組裝步驟中，用以結合基底之 機構，和用以硬化密封劑之機構。 藉由接附排氣泵，亦可降低手套盒5 2 1之內側壓力 。當上述密封步驟以機器人操作機械的執行時，可在低壓 下有效的執行操作。 其次，路徑盒5 2 2經由閘5 2 5連接至手套盒 5 2 1。藉由接附排氣泵，亦可降低路徑盒5 2 2之壓力 。路徑盒5 2 2爲用以防止手套盒5 2 1免於曝露至外部 空間之設備，且一基底由此處取出。 如上所述，在此實施例之薄膜形成裝置中，由於基底 在E L元件已在密封空間中完全密封時才曝露至大氣中， 因此可完全防止E L元件受到濕氣等之破壞。亦即，可製 造具有高可靠度之E L顯示裝置。 〔第五實施例〕 雖然執行本發明之第一實施例之模式顯示發出紅色光 之照明層，發出綠色光之照明辱，和發出藍色光之照明層 皆使用如圖1 A和1 B所示之薄膜形成裝置形成之例，但 是，於此亦可是至少用於發出紅，綠，和藍色光之照明層 之一使用如圖1所示之薄膜形成裝置。 亦即，在圖2 B中，可省略噴嘴1 1 6 c (·用於/應用 塗覆液體（B) 11 4c之噴嘴）和以其它機構塗覆塗覆 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -25· 471011 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（23) 液體（B ) 1 1 4 c。 特別的，在圖5和6中，塗覆液體（R) 114a和 塗覆液體（G ) 1 1 4 b應用在溶液塗覆處理室（A ) 510中，且而後，塗覆液體（B) 114c亦應用在溶 液塗覆處理室（B) 5 14中。當然，顏色之結合並無限 制，而是塗覆液體（R ) 1 1 4 a和塗覆液體（B ) 114c應用在溶液塗覆處理室（A) 510中，且而後 ，塗覆液體（G) 11 4b亦應用在溶液塗覆處理室（B )5 1 4 中。 此實施例之構造亦可藉由與第二實施例之構造之結合 而執行。 〔第六實施例〕 雖然已說明三噴嘴接附至圖2 A至2 C所示之頭部份 1 0 7之例，於此亦可提供對應於多數圖素線更多的噴嘴 。此例如圖7所示。圖中之文字R，G，B分別對應於紅 色，綠色，和藍色。 圖7顯示有機E L材料（嚴格而言爲塗覆液體）應用 在同時形成在圖素部份中之所育圖素線上。亦即，接附至 頭部份7 0 1之噴嘴數目等於圖素線之數目。藉由採用此 種構造，可藉由一掃瞄而塗覆所有圖素線，因此可顯著改 善產能。 此外，圖素部份分成多數區，且可使用在每·一區-提供 有數目等於圖素線之噴嘴之頭部份。亦即，當圖素部份分 ------------'褒--------訂---------線 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） · 26 - 471011 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（24 > 成η區時，且當掃瞄執行η次時，可塗覆有機EL材料（ 塗覆液體）在所有圖素線上。 實際上，由於圖素之尺寸小至數十// m，因此圖素線 之寬度亦變成數十M m。在此例中，由於難以水平的安排 噴嘴在一線上，因此需要設計噴嘴之安排。 圖8 A至8 C爲改變噴嘴接附至頭部份之位置之例。 圖8 A爲噴嘴5 2 a至5 2 c形成而它們傾斜的移位至頭 部份5 1之例。參考數字5 2 a表示應用塗覆液體（R) 之噴嘴：參考數字5 2 b表示應用塗覆液體.（G )之噴嘴 ;和參考數字5 2 c表示應用塗覆液體（B)之噴嘴。箭 頭之每一線對應於一圖素線。 如數字5 3所表示，噴嘴5 2 a至5 2 c當成一單元 ，且一至多單元提供在頭部份。一單元53同時塗覆有機 EL材料在三個圖素線上，和η個單元53同時塗覆有機 E L材料在3 η個圖素線上。 藉由採用此構造，可提升在噴嘴安排空間上之自由度 ，且可以高細微性不受壓迫的執行本發明至圖素部份。此 外，藉由使用圖8Α之頭部份5 1，亦可同時處理在圖素 部份中之圖素線，或亦可將圖寒部份分成多數區且執行處 理多次。 其次，圖8 Β所示之頭部份5 4爲圖8 Α之修改例， 且其爲包含在一單元5 5中之噴嘴數目增加之例。亦即， 在單元5 5中，包括雨噴嘴5 6 a用以塗覆塗覆、液發’（R )，兩噴嘴5 6 b用以塗覆塗覆液體（G)，和兩噴嘴 本紙張尺度適用中國國家標準（CNS)A4 ϋ X 297公釐) (請先閱讀背面之注意事項再填寫本頁) 471011 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（25〉 56c用以塗覆塗覆液體（B)，和有機EL材料同時以 一單元5 5應用在全部六個圖素線上。 在此實施例中，提供有一至多個單元5 5，且當提供 一個單元5 5時，有機E L材料同時應用在六個圖素線上 ，和當提供η個單元時，有機EL材料同時應用在6^個 圖素線上。當然無需限制提供在單元5 5之噴嘴數目爲六 個，亦即，亦可提供更多的噴嘴。 在此構造中，和圖8 Α相似的，在圖素部份之所有圖 素線可同時處理，或亦可將圖素部份分成多數區和執行處 理多次。 此外，亦可使用如圖8 C所示之頭部份5 7。在頭部 份57中，噴嘴58a用以塗覆塗覆液體（R),噴嘴 5 8 b用以塗覆塗覆液體（G),和噴嘴5 8 c用以塗覆 塗覆液體（B )乃以三個圖素線之空間間隔提供。 當此頭部份5 7首先掃瞄一次以塗覆有機E L材料在 圖素線上時，頭部份5 7向右移位三個圖素線且再度掃瞄 。藉由執行上述之掃瞄三次，可以紅色，綠色，藍色之順 序以條紋狀塗覆有機E L材料。 在此構造中，和圖8 A相姆的，在圖素部份之所有圖 素線可同時處理，或亦可將圖素部份分成多數區和執行處 理多次。 如上所述，在圖1所示之薄膜形成裝置中，藉由設計 接附至頭部份之噴嘴位置，即使對於具有高細微牲耵窄圖 素節距（圖素間之距離）之圖素部份而言，亦可執行本發 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐）-28- 471011 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（26) 明。而後，可提升製造方法之產能。 此實施例之構造亦可藉由與第一至第五實施例之構造 之結合而執行。 〔第七實施例〕 在第一實施例中，雖然共同室5 〇 1具有降壓氣體， 於此亦可採用充塡以惰性氣體之氣壓之氣體。在此例中， 排氣泵可不提供在傳送室（A) 5 0 4， 5 0 6，點火處理室（A ) 5 0 7，和點火處理室（b ) 5 1 1 中。 但是，由於傳送機構（A ) 5 0 2 ,傳送機構（B ) 5 0 8，和傳送機構（C )分別提供在共同室5 0 1，傳 送室（B) 509，和傳送室（C) 5 13中，所充塡之 惰性氣體極有可能受到污染。因此，最好使共同室5 0 1 ，傳送室（B) 509，和傳送室（C) 513形成其壓 力低於其它處理室之壓力之狀態，且因此惰性氣體流入共 同室501，傳送室（B) 509，和傳送室（C) 5 1 3 中。 此實施例之構造亦可藉由缉第三至第六實施例之構造 之結合而執行。 〔第八實施例〕 雖然第三實施例顯示預先處理室5 0 6提供有照^明紫 外線之機構和執行熱處理之機構之例，但是，此實施例顯 ---------- 1/ 裝·----I--訂 -----I--级 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公« ) -29- 471011 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（27) 示預先處理室5 0 6提供有用以執行電漿處理之機構之例 0 當對EL元件之陰極表面執行預先處理時，需要移除 陰極表面之自然氧。此實施例包括一機構，其藉由對陰極 表面使用含氟或氯氣之氣體執行電漿處理以移除自然氧。 此實施例之構造亦可藉由與第三至第七實施例之構造 之結合而執行。 〔第九實施例〕 雖然第三實施例顯示預先處理室5 0 6提供有照明紫 外線之機構和執行熱處理之機構之例，但是，此實施例顯 示預先處理室5 0 6提供有用以執行濺鍍處理之機構之例 〇 當對EL元件之陰極表面執行預先處理時，需要移除 陰極表面之自然氧。此實施例包括一機構，其藉由對陰極 表面使用如稀有氣體或氮之惰性氣體執行濺鍍處理以移除 自然氧。 此實施例之構造亦可藉由與第三至第八實施例之構造 之結合而執行。 ： 〔第十實施例〕 第三實施例顯示變成照明層之有機E L材料經由溶液 塗覆處理室（A ) 5 Γ 0和點火處理室（A ) 5 Ό r*而形 成，且再者，變成電洞注入層或電洞傳送層之有機E L材 — — — — — — — — — — — — - -III — — — — ^ > I I I i I — II (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） _ 30 · 471011 A7 ----- B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（28) 料經由溶液塗覆處理室（B ) 5 1 4和點火處理室（B ) 5 1 1而形成。 但是，亦可形成之構造爲，首先，電洞注入層或電洞 傳送層經由溶液塗覆處理室（B ) 5 1 4和點火處理室（ β ) 5 1 1而形成，而後，變成照明層之有機e l材料經 由溶液塗覆處理室（A ) 5 1 〇和點火處理室（A ) 5 0 7而形成，再而後，變成電洞注入層或電洞傳送層之 有機E L材料經由溶液塗覆處理室（b ) 5 1 4和點火處 理室（B ) 5 1 1而形成。 亦即，在藉由使用圖1 A和1B之薄膜形成裝置選擇 性的塗覆紅色，綠色，和藍色有機E L材料（B )之例中 ，使用溶液塗覆室（A) 5 1 0，在形成有提供在基底之 整個表面上之有機EL材料之例中，可使用溶液塗覆室（ B ) 5 1 4。亦可藉由選擇性使用這些溶液塗覆處理室而 形成各種疊層構造之EL層。 ^ 此實施例之構造亦可藉由與第三至第九實施例之構造 之結合而執行。 〔第十一實施例〕 ： 雖然第三實施例顯示變成陰極或陽極之導電膜在蒸氣 相膜形成處理室（A ) 5 1 5中形成，於此，有機E L材 料亦可使用蒸氣沉積法形成。亦即，其可使用於當形成選 自電洞注入層，電洞傳送層，電子注入層，和電子貧送層 之層時。 (請先閲讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210x297公«) -31 - 471011 A7 ___ B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（29) 藉由改變蒸氣沉積源，蒸氣相膜形成處理室（A ) 5 1 5亦可形成有機E L材料之膜和導電膜兩者。亦可以 蒸氣相膜形成處理室（A ) 5 1 5形成有機E L材料，和 以蒸氣相膜形成處理室（B ) 5 1 6形成變成陰極或陽極 之導電膜。 此實施例之構造亦可藉由與第三至第十實施例之構造 之結合而執行。 如上所述，藉由使用本發明之薄膜形成裝置，可形成 有機E L材料而無如習知噴墨法之飛行曲線之問題。亦即 ，由於高分子有機EL材料之膜可準確形成，而無位置偏 移之問題，因此可改善使用高分子有機EL材料之EL顯 示裝置之產能。 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -32 -471011 A7 B7 V. Description of the invention (v) 1 · Field of invention (please read the precautions on the back before filling out this page) The present invention relates to a thin film forming device used to manufacture lighting materials with EL (electroluminescence) In particular, an EL element in which a lighting organic material (hereinafter referred to as an organic EL material) is disposed between an anode and a cathode. 2 · Description of related technologies In recent years, EL devices have been used as display devices (EL display devices) for self-illumination devices using the EL phenomenon of organic EL materials. ) Has developed rapidly. Since this EL display device is a self-illumination type, it does not require the backlight of a liquid crystal display device. Furthermore, due to the wide viewing angle, this type of EL display τρ: the device is regarded as the display part of the portable equipment used outdoors. There are two types of EL display devices printed by the employee consumer cooperative of the Intellectual Property Bureau of the Ministry of Economy That is, passive type (simple matrix type) and active type (active matrix type), and both types are booming. In particular, nowadays, active matrix type EL display devices have gained more attention. Regarding the organic EL material that becomes the lighting layer and is regarded as the center of the EL element, although low-molecular organic EL materials and high-molecular organic EL materials have been studied, since high-molecular organic EL materials are lower than low-molecular organic EL materials Organic EL materials are easier to handle and have higher thermal resistance, so more attention is paid to polymer organic EL materials. Regarding the film formation method of the organic molecular EL material, the inkjet method proposed by Seiko Epson is preferred. Regarding this technology, please refer to the Japanese Patent No. Hei 10- 1 2 3 77 and Hei 1 0--4- The paper size is applicable to China National Standard (CNS) A4 (210 X 297 public love) Intellectual Property Bureau of the Ministry of Economic Affairs Printed by employee consumer cooperatives 471011 A7 ___ B7 V. Description of the invention (2> 153967 or Ping No. 11 — 54270. However, in this inkjet method, because the polymer EL material will be sprayed and scattered, if it is between the coated surface When the distance between the nozzle and the nozzle of the inkjet head is not properly arranged, a so-called flight curve will occur, in which the ink drops fall to an unnecessary part. The flight curve is described in Japanese Patent No. Hei 1 5 4 2 7 0 And it is defined as that a deviation of 50 or more from the target position can occur. SUMMARY OF THE INVENTION The present invention is made in view of the above problems, and a method is provided in which organic EL materials made of polymers are used. The film is formed accurately and with high production capacity, without position deviation, and a thin film forming device for forming the film. Another object of the present invention is to provide a multi-chamber system (also known as a cluster) having a thin film forming device. Tool system) of Element forming device. In order to achieve the above object, the present invention is characterized in that the red, green, and blue lighting layers are formed into a stripe shape using a film forming device such as a diffuser. The stripe shape includes a long and thin rectangle having More aperture ratios, and a long and thin ellipse, with a major axis to minor axis ratio of 2 or greater. The film forming device of the present invention is shown as _ 1 A and 1 B. Figure 1 A is from the side On the side, the appearance of the thin film forming apparatus of the present invention, and FIG. 1B is the appearance of the thin film forming apparatus of the present invention as viewed from the front. In FIG. 1A, the reference numeral 1 0 represents a support stand, 1 0 1 It is a transfer table with a fixed base 102. The transfer table 101 can be moved in the X direction (water rhino direction) or Y direction (vertical direction). ------ !! p Order ---- I --- ^ line (please read the precautions on the back before filling in this page) This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) -5-471011 A7 Ministry of Economic Affairs Printed by the Intellectual Property Bureau's Consumer Cooperatives B7___ V. Description of the invention (3 > a support post 1 0 3 and a holder 1 0 4 attached To the support table 100, and the coating unit 105 is located on the transfer table 101. The coating unit 105 is a device that provides a mechanism for coating a solution containing organic EL material on a substrate, and a device for Sends compressed gas (compressed inert gas) to the head part 106 and supplies the solution containing organic EL materials. Furthermore, the coating unit 105 includes a suction mechanism (provided with a suction valve or an air operated valve). Mechanism). The suction mechanism is a mechanism for changing the volume by using a membrane gauge to reduce the pressure in the tube, and used to suck the ink droplets collected in the nozzle port of the tube into the nozzle. In the thin-film forming apparatus of FIGS. 1A and 1B, the head portion 106 is fixed, and the transfer table 101 on which the substrate 102 is placed is moved in the X or Y direction. That is, this mechanism is adopted to move the transfer table, and accordingly, the head portion 106 is moved relative to the base portion 102. Although the head portion 106 can also be moved, the stability is better when the base side is moved. In the thin-film forming apparatus configured as described above, the head portion 10 of the nozzle of a supply port of an organic material (strictly, a mixture of a solvent and an organic EL material dissolved therein) is provided to move on the substrate 102. Therefore, a predetermined portion of the substrate is coated with an organic material. A method for coating the organic EL material with the head portion 106 is described below. FIG. 2A is a state diagram of a film of an organic EL material containing a polymer of a 7Γ conjugated system formed by implementing the present invention. In FIG. 2A, reference numerals: 1 1 0 represents a substrate, and a pixel unit π 1 made of DFT, a source-side driving circuit 1 1 2, and a gate-side driving circuit 丨丄 3 This paper size is in accordance with China National Standard (CNS) A4 (210 X 297 mm) 7〇 ^ 1—-(Please read the notes on the back before filling this page) 471011 A7 _ B7 Intellectual Property Bureau, Ministry of Economic Affairs Printed by the employee consumer cooperative V. Invention Description (4) is formed on the base 1 1 0. The area surrounded by the majority of the source wirings connected to the source-side driving circuit 1 1 2 and the majority of the gate wirings connected to the gate-side driving circuit 1 1 3 is a pixel, and T f T is electrically connected to the TFT. The EL element is formed in a pixel. The pixels are arranged in a matrix form in the pixel section 1 1 1. Here, the reference number 1 1 4 a represents a mixture of a solvent and an organic EL material (organic material (R)) that emits red light when a voltage is applied (coating liquid (R)); 1 1 4 b is A mixture of a solvent and an organic EL material (organic EL material (G)) that emits green light when a voltage is applied (coating liquid (G)); and 1 14c represents a solvent and a blue light that emits blue light when a voltage is applied Mixture of organic EL materials (organic EL materials (B)) (coating liquid (b)). With regard to organic EL materials, there is a method in which a polymerized polymer is directly dissolved in a solvent and then applied, and another method in which after a film is formed with a monomer dissolved in a solvent, heating and polymerization are performed to form polymer. Both methods can be used in the present invention. Here, an example in which the organic EL material of the polymer is dissolved in a solvent and then applied will be described. In the example of the present invention, a coating liquid (R) 114a, a coating liquid (G) 114b, and a coating liquid (b) are respectively applied from the head portion 106 of the thin film forming apparatus as shown in FIG. 1 The directions shown by A and 1 B. That is, the stripe-shaped lighting layer (strictly the precursor of the lighting layer) is formed on the pixel lines emitting red light, the pixel lines emitting green light, and the pixel lines emitting blue light. ^ The pixel line indicates the line of the pixels separated by the touch line 1 2 1 and the touch line (please read the precautions on the back before filling this page) This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 (Mm) -7-471011 A7 _ B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs V. Invention Description (5) 1 2 1 is formed on the source wiring. That is, a line in which most pixels are arranged along a source wiring sequence is called a pixel line. However, although it is described here that the contact strips 1 2 1 are formed on the source wiring, the contact strips may also be provided on the gate wiring, and a line in which most pixels are arranged along the gate wiring sequence is called a pixel line. Therefore, the pixel portion 1 1 1 can be regarded as an aggregation of a plurality of pixel lines divided by stripe stripes provided on a plurality of source wiring lines or a plurality of gate lines. From this viewpoint, the pixel portion 11 includes a pixel line in which a stripe-shaped lighting layer emitting red light, a stripe-shaped lighting layer emitting green light, and a stripe-shaped lighting layer emitting blue light are formed. Since the stripe-shaped banks are provided on most of the source wiring or the majority of the gate wirings, the picture element can be regarded as the majority of the pixels divided by the stripe-shaped banks provided on the majority of the source wiring or the majority of the gate wires. Gathering of lines. Secondly, the state of the head part (also called the coating part) shown in FIG. 2A is enlarged as shown in FIG. 2B. Reference numeral 10 7 indicates a head portion of the film forming apparatus, and red nozzles 1 16 a, green nozzles 1 16b, and blue nozzles 1 16 c are attached thereto. In addition, a coating liquid (R) 1 1 4 a, a coating liquid (G) 1 1 4 b, and a coating liquid (B) 1 1 4 c are stored inside each nozzle, respectively. The coating liquid is compressed by the compressed gas filled in the tube 117 and is pushed out to the pixel portion 1 1 1. The head portion 10 7 is moved to this side in a direction perpendicular to the paper surface, so that the coating step shown in FIG. 2A can be performed. FIG. 2C is an enlarged view of the vicinity of the coating portion shown in FIG. The pixel portion 1 1 1 on the substrate 1 10 is the majority of the TFT1 1 9 a. This standard is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 male " --------- --- i 'install ------ order ------ I--green (please read the precautions on the back before filling out this page) 471011 A7 —_________ B7 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Fifth, the description of the invention (6) to 1 19 C and the aggregation of the pixels formed by the pixel electrodes 120a to 120C. When the pressure is applied to the nozzles 1 16a to 1 1 6c of FIG. 2B with a compressed gas, coating The liquids 1 14a to 1 14c are pushed out by this pressure. A contact row 1 2 1 made of a resin material is provided between the pixels, and the coating liquid is prevented from being mixed into the adjacent pixels. In this configuration, when the contact rows When the width of 1 2 1 (determined by the resolution of the light lithography) is narrow, the integration of the pixel portion is improved and a high-resolution image can be obtained. In particular, when the viscosity of the coating liquid is 1 to 30 cp , More effective. However, if the viscosity of the coating liquid is 30 cp or more, or it is sol or gel, it is best not to use this touch pad. That is, if the media When the contact angle between the coating liquid and the coating surface is sufficiently large after coating, the coating liquid cannot be extremely expanded, so it becomes unnecessary to be blocked by a touch row. In this example, the lighting layer finally forms an oval shape (long and A thin ellipse with a long axis and a short axis ratio of 2 or more) is typically a long and thin ellipse that extends from one end of the pixel portion to the other. About the formation of a touch bar 1 2 1 As for the resin material, acrylic, polyimide, polyimide, or polyimide can be used. If carbon, black dye, etc. are first provided in the resin material to make the lipid material black, you can use contact Row 1 2 1 acts as a light-shielding film between pixels. If one of the light-reflecting sensors is attached to the tip of any of the nozzles 1 1 6a, 116b, 116c, it can also be placed between the coated surfaces The distance between the nozzle and the nozzle is always fixed. Furthermore, by providing the = mechanism to adjust the distance between the nozzles according to the pixel pitch (the distance between the pixels) (Please read the precautions on the back before filling this page) This paper Standards apply to China National Standard (CNS) A4 (210 X 297 (Mm) -9-471011 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7_ __ V. Description of Invention (7) The distance between 1 1 6 a to 1 1 6 C can be used with any pixel EL display device. In this way, the coating liquids 1 1 4 a to 1 1 4 c applied from the nozzles 1 1 6 a to 1 1 6 c respectively coat the pixel electrodes 1 20 a to 1 2 0 c. The above-mentioned head portion 1 〇 The operation of 7 is controlled by the signal. After the application of the coating liquids 1 14a to 1 14c, the heat treatment (baking treatment or ignition treatment) is performed in a vacuum, and therefore, the organic solvent contained in the coating liquids 1 1 4 a to 1 1 4 c volatilizes and forms Illumination layer containing organic EL material. Therefore, it must be used below there. Machine e L. Organic solvents that evaporate at the glass critical temperature (T g) of the material. The thickness of the final lighting layer is determined by the viscosity of the organic EL material. In this example, the viscosity can be adjusted by selecting an organic solvent or an additive, and it is best to make the viscosity between 1 and 50 cp (preferably 5 to 2 0 cp) 〇 Furthermore, if there is a majority, it will become crystalline When the nuclear impurities are present in the organic EL material, when the organic solvent is volatilized, the possibility that the organic EL material crystallizes becomes high. If crystallized, the lighting efficiency is lowered, which is not good. Therefore, it is preferable to make the organic EL material as free as possible from impurities. In order to reduce impurities, it is important that the solvents and organic EL materials are thoroughly refined, and the environment in which the solvents and organic EL materials are manufactured is as clean as possible. Regarding the refining of solvents and the refining of organic EL materials, it is best to perform techniques such as distillation, sublimation, filtration, recrystallization, reprecipitation, chromatography, or decomposition. Finally, it is best to reduce impurities such as metal elements, metals, or metal elements to 0 · 1 p pm or lower (preferably to apply the Chinese National Standard (CNS) A4 specification (2ί〇χ'597 mm) for the paper size. ) (Please read the notes on the back before filling out this page) Μ ------- Order --------- Line 471011 A7 B7 V. Description of the invention (8) O. Olppm or lower). In addition, when a thin film forming apparatus as shown in FIGS. 1A and 1B is used to apply a coating liquid containing organic EL material, the most. It is necessary to pay full attention to the atmosphere. In particular, it is preferable that the forming step of the organic EL material is performed in a clean room or a glove box filled with an inert gas such as nitrogen. By using the above-mentioned thin film forming device, three types of lighting layers emitting red, green, and blue light can be simultaneously formed, and therefore, a lighting layer containing a high molecular organic EL material can be formed with high productivity. Furthermore, unlike the inkjet system, it can be coated in stripes, and there is no gap on a pixel line, so the productivity is extremely high. The drawings are briefly explained in the drawings: Figures 1 A and 1 B are diagrams of a thin film forming device; Figures 2 A to 2 C are coating steps of organic EL materials; Figures 3 A and 3 B are coatings of organic EL materials Step diagrams; Figures 4 A and 4 B are coating process diagrams of organic EL materials; Figure 5 is a diagram of a thin film forming apparatus; Figure 6 is a diagram of a thin film forming apparatus; And FIGS. 8A to 8C are structural diagrams of the head portion in the thin film forming apparatus. * Symbol description This paper size applies Chinese National Standard (CNS) A4 specification (210 X 297 mm) -11-(Please read the precautions on the back before filling this page)-Qiu -------- Order- -------- · Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 471011 A7 B7 V. Description of the invention (9> 5 2 Nozzle 5 3 Unit 54, 57 Head 5 5 Unit 5 6 Nozzle 100 Support stand 101 Conveyor 10 2 Base 103 Support post 104 Holder 105 Coating unit 10 6 Head 10 7 Head 110 Base 111 Pixel section 112 Source-side drive circuit 113 Gate-side drive circuit (Please read the precautions on the back first (Fill in this page again) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 1 1 4 Coating liquid 1 1 6 Nozzle 1 1 9 TFT 1 2 〇Pixel electrode 1 2 1 Touch strip 3 0 1 Touch strip 3 0 2 The paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) -12-471011 A7 _B7 V. Description of the invention (10) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 4 0 1 Touch row 4 0 2 EL Layer 4 0 4 Bank 4 0 5 EL Layer 5 0 0 5 0 1 common room 5 0 2 transfer mechanism 5 0 3 substrate 5 0 4 transfer chamber 5 0 6 pre-processing chamber 5 0 7 ignition processing chamber 5 0 8 transfer mechanism 5 0 9 transfer chamber 5 1 0 solution coating processing chamber 5 1 1 Ignition processing chamber 5 1 2 Transfer mechanism 5 1 3 Transfer chamber 5 1 4 Solution coating processing chamber 5 1 5 Vapor phase film formation processing chamber 5 1 6 Vapor phase film formation processing chamber 5 2 1 Glove box 5 2 2 Path box 5 2 3 Gate 5 2 4 Ultraviolet irradiation mechanism (Please read the precautions on the back before filling this page) -1 Pack -------- Order ----- Oxygen This paper size applies to Chinese national standards (CNS) A4 specifications (210 X 297 mm) -13-471011 A7 _____ B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (11) 5 2 5 Gate 7 0 1 DETAILED DESCRIPTION Examples of the present invention will be described below. As shown in FIG. 2A, when the pixel portion 1 1 1 and the source-side driving circuit 1 1 2 and the gate-side driving circuit 1 1 3 include the TFT on the substrate 1 1 0, the stripe-shaped row i 2 1 It is formed along the source wiring (the wiring connects the source-side driving circuit 1 1 2 to the pixel portion 11 1 1 and the switch TF D that transmits an information signal to the pixel portion). Next, a coating liquid (R) 114a, a coating liquid (G) ll4b, and a coating liquid (B) 114c are prepared to become one of the lighting layers. Each of the coating liquids 114a to 114c is mainly formed by dissolving a polymer organic EL material in a solvent. With regard to high molecular organic EL materials, a polyparaphenylene vinylene (p p v) system, a polyethylene (PVK) system, or a polyfluorene system can be used. Although various types of organic EL materials exist as p p v systems, the published formulas such as the molecular formulas [Compound 1] and [Compound 2] (H. Shenk, O. Gelsen, E. KIuge, W. Kreuder, and H. Spreitzer, "Polymers for Light Emitters", Euro Display Proceedings, 1 999, p. 33-37). It is also possible to use polystyrene disclosed in Japanese Patent No. Hei 10, 92,576. Its molecular formula is the same as the molecular formulas [Compound 3] and [Compound 4] in the annex. · ^ Regarding the organic EL material of PVK system, its molecular formula is as attached (please read the notes on the back before filling this page) This paper size applies to Chinese national standard (CNSXA4 specification (210 X 297 male f)) 471011 A7 _ B7 V. The description of the invention (12) is shown in [Compound 5]. (Please read the precautions on the back before filling this page.) After the materials in the polymer state have been dissolved in the solvent, polymer organic EL materials can be applied, or The material can be polymerized after being dissolved in a solvent and coated in a single-bottom state. In the case where the material is used in a monomer state / the monomer precursor is first formed, and then polymerized by heating in a vacuum to form a polymer. Can use cyanopolyphenylene vinylene in the coating liquid (R) 1 1 4 a; polyphenylene vinylene can be used in the coating liquid (G) 1 1 4 b; and polyphenylene can be used Ethylene and polyalkylphenylene are in the coating liquid (B) 1 1 4 c. As for the solvent, chloroform, dichloroform, T-butyl lactone, butyl cellosolve, or NMP (N — Methyl-2-alkane). Can also effectively add additives to improve the coating The viscosity of the coating liquid. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. However, the above examples are only examples of organic EL materials, which can be used for the lighting layer of the present invention. However, the present invention is not limited thereto. In this case, the mixture of the organic EL material and the solvent is applied by the thin film forming apparatus of FIGS. 1A and 1B, and the solvent is volatilized and removed by heat treatment, so that a lighting layer can be formed. Therefore, when the solvent is volatilized, Any organic EL material can be used when the glass critical temperature does not exceed the lighting layer. Furthermore, when the coating step is performed using the thin film forming apparatus of FIGS. 1A and 1B, it is necessary that the processing gas be a material with little moisture. Dry gas, and this step is performed in an inert gas. Since the EL layer is easily damaged by the presence of moisture and oxygen, when forming the EL layer, it is necessary to eliminate some factors as much as possible. For example, it is best to use dry nitrogen or Dry argon gas. Therefore, the most paper size applies to China National Standard (CNS) A4 (210 X 297 mm) -15- 471011 A7 __ B7 Employees ’Intellectual Property Bureau, Ministry of Economic Affairs Printed by the cooperative V. Description of the invention (13) The film forming apparatus of FIGS. 1 A and 1 B is installed in a clean box filled with an inert gas, and the coating step is performed in the gas. Example] In the mode for implementing the present invention, an example will be described in which three stripe-shaped lighting layers emitting red, green, and blue light are simultaneously formed in the vertical and horizontal directions. In this embodiment, the stripe-shaped lighting layer is vertically The upper part is divided into many parts. As shown in Figure 3A, when the pixel part 1 1 1 is on the source side. The driving circuit 1 1 2 and the gate-side driving circuit 1 1 3 include T F T on the substrate 1 1 0, and the pixel portion 1 1 1 is divided into a matrix type by a bank 3 0 1. In this embodiment, as shown in FIG. 3B, a plurality of pixels 3 03 are provided in the block 3 2 2 separated by the touch line 3 0 1. The number of pixels is not limited. In this state, the film forming step of the organic EL material acting as the lighting layer is performed by using the thin film forming apparatus of the present invention. In this example, a red coating liquid 1 1 4 a, a green coating liquid 1 1 4b, and a blue coating liquid 1 1 4 c are selectively applied using the head portion 107. The feature of this embodiment is that the relevant blocks 3 0 2 can be selectively coated with the glow liquid 1 4 a to 1 1 4 c. That is, in the system described in the mode for carrying out the present invention, the red, green, and blue coating liquids can be selectively applied in stripes. On the other hand, in this embodiment, for each square, the arrangement of colors is not limited. Therefore, as shown separately, the arrangement that can be used is the color of the coating liquid applied to any block (please read the precautions on the back before filling this page) This paper size applies to China National Standard (CNS) A4 specification (210 X 297 public love) -16- 471011 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 ___ B7 _ V. Description of the invention (14) The United States is shifted by one column (or one row). It is also possible to provide a pixel in the block 302, and in this example, it can form a pixel structure generally called a triangle arrangement (a pixel structure in which pixels corresponding to R G B are always arranged in a triangle). The operation for executing the head part 107 of this embodiment is as follows. First, the head part 107 moves in the direction of the arrow "a". Therefore, the inside of the three squares (corresponding to red, green, and blue respectively) The colored squares) are completely immersed in the coating liquid. When it terminates, the head part 10 7 moves in the direction of the arrow ’’ b ”. Therefore, the coating liquid is applied to the next three squares, and then, The solvent is volatilized by heat treatment to form an organic EL material. In the conventional inkjet method, an organic EL material is formed into a circle on the surface due to the application of ink droplets. Therefore, it is difficult to coat the entire long and thin pixels. According to Gij, when the entire pixel acts as an illuminated area, an organic EL material needs to be coated on the entire pixel. Therefore, this embodiment has the advantage that by moving the head portion 107 in the direction of the arrow "a", the inside of the block can be fully charged-. -· I 塡 to apply liquid. [Second Embodiment] When the square of the pixel line shown in FIG. 2A is perpendicular, the touch line 1 2 1 is formed along the source wiring. Therefore, it can be concluded that the pixel lines are formed in the horizontal direction in the case where the contact rows are formed along the gate lines. That is, in the example where the pixel lines are formed in the vertical direction, the structure is shown in FIG. 4A, and in the example where the pixel lines are formed in the horizontal direction, the structure is shown in FIG. 4B. The reference numeral 401 indicates that the strip is formed in the vertical direction. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) -17- (Please read the precautions on the back before filling this page) i! 丨 II Order- -! -Post 471011 A7 — B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention (15) The streaked touch bar; 4 0 2 a is the EL layer emitting red light; and 402b is the EL layer emitting green light . Of course, the EL layer emitting blue light is formed adjacent to the EL layer 40 2b emitting green. The contact bar 40 1 is formed on the source wiring through an insulating film and along the source wiring. The EL layer herein means a layer made of an organic EL material that facilitates light emission, such as a lighting layer, a charge injection layer, or a charge transport layer. Although there may be an example of a single lighting layer, in the example of the hole injection layer and the lighting laminated layer, this laminated film is called an EL layer. In this example, the head part 1 0 6 shown in FIG. 1 B is vertical (. Y) direction. That is, the three pixel lines of red, green, and blue are scanned simultaneously in the vertical direction, and the coating liquid is applied on the pixel lines. In FIG. 4B, reference numeral 404 denotes a stripe-shaped row formed in the horizontal direction; 4 5 a is an EL layer that emits red light; 4 5 b is an EL layer that emits green light; and 4 0 5 c is an emission EL layer of blue light. The contact bar 4 0 4 is formed on the gate wiring through an insulating film and along the gate wiring. In this example, the head portion 106 as shown in FIG. 1B moves in the horizontal (X) direction. That is, the three pixel lines of red, green, and blue are scanned simultaneously in the horizontal direction, and the coating liquid is applied on the pixel lines. As described above, even when the selected coating liquid is applied on each pixel line in the vertical direction or the horizontal direction, the direction of the scanning by the electric control head portion 106 can be easily controlled. [Third Embodiment] (Please read the phonetic on the back? Matters before filling out this page) This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) -18-471011 A7 Employees of Intellectual Property Bureau, Ministry of Economic Affairs Printed by a consumer cooperative ____B7 __ V. Description of the invention (16) In this embodiment, an example in which the film forming apparatus of the present invention is installed in a film forming apparatus of a multi-chamber system (also known as a cluster tool system) is described, and The formation method of the EL element is continuously performed without being opened to the air. In FIG. 5, reference numeral 501 denotes a common room, and the common room 501 is provided with a transfer mechanism (A) 502 to transfer a substrate 503. The gas in the common room 501 is lowered, and the common room 501 is separated from the relevant processing room by a gate. When the gate is opened, the transfer of the substrate to the relevant processing room is performed by the transfer mechanism (A) 502. In order to reduce the pressure in the common room 501, although a hydraulic rotary pump, a mechanical booster pump, a vortex molecular pump, or a cryopump can be used, a cryopump can most effectively remove moisture. The relevant chambers will be described below. Since the common chamber 501 has a depressurized gas, all processing chambers directly coupled to the common chamber 501 are provided with exhaust pumps (not shown). As for the exhaust pump, the aforementioned hydraulic rotary pump, mechanical booster pump, vortex molecular pump, or cryopump can be used. First, reference numeral 5 0 denotes a transfer chamber (A) in which the substrate is loaded and unloaded, and it is also referred to as a load lock chamber. Send. The chamber (A) 5 0 4 is separated from the common room 5 0 1 by a gate 5 0 a, and a carrier 505 provided with a base is provided here. Each room (A) 504 can be divided into those for loading the substrate and those for loading the substrate. In this embodiment, the substrate 503 is provided on a carrier, and the element-forming surface faces downward. This is to facilitate a downward facing system when performing vapor phase film formation (film formation by sputtering or vapor deposition). Such a face-down system is a system in which the element-forming surface of the substrate faces directly downward when a film is formed. ----- II ---- IV Pack -------- Order ----- 1 --- 绫 (Please read the precautions on the back before filling this page) This paper size applies to Chinese national standards (CNS) A4 specifications (210 X 297 mm) -19-471011 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (17) According to this system, attachment of dust and the like can be suppressed. Next, reference numeral 5 06 denotes a processing chamber (hereinafter referred to as a pre-processing chamber) for processing the surface of the cathode or anode of a pixel electrode which becomes an EL element. The pre-processing chamber 506 is separated from the common chamber 501 by a gate 500b. Although the pre-processing chamber may be changed according to the manufacturing method of the EL element, in this embodiment, it is designed to be heated at 1000 to 120 ° C, and the surface of the pixel electrode is irradiated with ultraviolet rays. This pre-treatment is quite effective when the anode surface of the EL element is treated. Secondly, reference numeral 5 07 indicates an ignition processing chamber (A) and the gate 5 0 0 c is separated from the common chamber 5 0 1. As described later, vacuum exhaust and washing can be performed in the ignition processing chamber (A) 507, which includes a mechanism for reversing the surface of the substrate. Furthermore, a transfer chamber (B) 5 0 9 provided with a transfer mechanism (B) 5 0 8 is connected to the ignition processing chamber (A) 5 0 7 via a gate 5 0 d. In addition, the solution coating processing chamber (A) 5 10 is connected to the transfer chamber (B) 509 via a gate 500e. The operations of the ignition processing chamber (A) 507, the transfer chamber (B) 509, and the solution coating processing chamber (A) 5 1 0 are described here. When the substrate is transferred to the ignition processing chamber (A) 5 07, the ignition processing chamber (A) 5 07 is in a depressurized state, and the gate 5 0 d is closed. When the substrate (element-forming surface faces downward) is transferred, the gate 500 c is closed, and the inside of the ignition processing chamber (A) 50 7 is restored to atmospheric pressure by being filled with an inert gas. The substrate is turned over with a reverse mechanism (not shown), and the component-forming surface faces up. . . . . . . In this state, the gates 5 0 0 d and 5 0 0 e are opened, and the substrate is conveyed ------------ ^ 丨 installed ------- order -------- -Line (please read the precautions on the back before filling this page) This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) -20-471011 A7 B7 V. Description of the invention (18) To the processing room (Solution coating processing chamber (A)) 5 1 〇, which contains a solution containing (please read the precautions on the back before filling out this page) organic EL materials. The solution coating processing chamber (a) 5 10 is a processing chamber that provides the same function as the thin film forming apparatus shown in FIGS. 1A and 1B of the present invention, and is used here as a solvent and organic EL material that becomes a stripe-shaped lighting layer. Of a mixture. It is desirable to form a high-purity inert gas so that oxygen and moisture do not attack the organic EL material. The substrate to which the mixture of the solvent and the organic EL material is applied is returned to the ignition treatment chamber (A) 507 again, and the heat treatment (ignition treatment) is performed at a temperature of 100 to 120 ° C. What is required is that this chamber contains a high purity inert gas. When the ignition process is terminated, the substrate is reversed by the reversing mechanism (not shown), and the ignition processing chamber (A) 507 is evacuated when the element forming surface faces downward again. At this time, the gates 5 0 c and 5 0 d are closed. When the evacuation of the ignition processing chamber (A) 5 0 7 is terminated, the gate 5 0 0 c is opened and the substrate is returned to the common room by the transfer mechanism (a) 5 0 2 The above is the ignition processing chamber (A) 5 0 7 , The transfer room (B) the Ministry of Economic Affairs, the Intellectual Property Bureau employee consumer cooperative printed 509, and the solution coating processing room (A) 5 1 0 operation. Secondly, reference numeral 5 1 1 indicates the ignition processing chamber (B), which is separated from the common chamber 5 0 1 by a gate 5 0 f. Vacuum evacuation and washing can also be performed in the ignition processing chamber (B) 5 1 1 and includes a mechanism to reverse the substrate surface. Furthermore, a transfer chamber (C) 5 1 3 provided with a transfer mechanism (C) 5 12 is connected to the ignition processing chamber (B ')-5 1 1 via a gate 5 0 g. In addition, the solution coating processing chamber (B) is connected to the paper size through the gate 500h, and the Chinese paper standard (CNS) A4 (210 X 297 mm) is applicable. -21-471011 A7 B7_____ 5. Description of the invention (19) To transfer room (C) 513. (Please read the precautions on the back before filling this page.) Since the ignition processing room (B) 5 1 1, the transfer room (c. ) 5 1 3 The operation of the solution coating processing chamber (B) 5 1 4 is almost the same as the operation of the ignition processing chamber (A) 507, the transfer chamber (B) 509, and the solution coating processing chamber (A) 5 1 〇 The same, therefore, only the differences will be described below. The substrate transferred to the solution coating processing chamber (B) 5 1 4 is applied with a mixture of an organic EL material and a solvent, which is turned into a hole injection layer or an electrical layer by a spin coating method. Hole transmission layer. The gas is a high purity inert gas. therefore,. As in the solution coating processing chamber (A) 5 10, oxygen and moisture will not attack the organic EL material. When the ignition process in the ignition processing chamber (B) 5 1 1 is terminated, the vacuum is executed in the ignition processing chamber (B) 5 1 1, the gate 5 〇f is opened, and the substrate is returned to the common by the transfer mechanism (A) 502 Room 501. The operations of the ignition processing chamber (B) 511, the transfer chamber (c) 512, and the solution coating processing chamber (B) 5 1 4 are described above. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. The reference number 5 1 5 indicates a processing chamber (vapor phase film formation processing chamber (A)) to form an insulating film or a conductive film (herein, using the vapor phase film formation method). (Conductive film in the examples). Although both the vapor deposition method and the sputtering method can be regarded as a vapor phase film formation method, since it is used to form an electrode on an organic EL material, the vapor phase deposition method is preferably used because it does not easily cause damage. In this state, the common chamber 501 is separated by a gate 500i, and a film is formed under vacuum. Here, the upward deposition system is used to form the film. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 public love) 471011 A7 ___________ B7 V. Description of the invention (20) In the vapor phase film formation processing chamber (A) 5 In 15, when a vapor phase treatment is performed, a vapor deposition source needs to be provided. Most sources of vapor deposition can be provided or changed depending on the film to be formed. Alternatively, a vapor deposition source from a thermal barrier system or a vapor deposition source from an EB (electron beam) system can be used. Next, reference numeral 5 1 denotes a processing chamber (a vapor phase film forming processing chamber (B)) for forming an insulating film or a conductive film by a vapor phase film forming method. Regarding the vapor phase film formation method, although a plasma C V D method or a sputtering method can be used, it is preferable to form an insulating film at the lowest film formation temperature. For example, it is more effective to form a nitrided sand film by the remote plasma C V D method. In this state, the common chamber 50 1 is separated by a gate 5 0 j and a film is formed under vacuum. The above processes (exhaust, transfer, film forming process, etc.) can be controlled fully automatically using a computer with a contact board and sequencer. The main features of the multi-chamber thin film forming apparatus of the above configuration are to provide all the film forming mechanisms needed to form EL elements, and to perform the steps until passive film formation without exposure to the atmosphere. As a result, by using a polymer organic EL material and a simple mechanism, the EL element can be protected against damage, and an EL display device with high reliability can be manufactured. This embodiment can be used as a thin film forming apparatus even when the configuration of the first or second example is performed. [Fourth embodiment] In this embodiment, an example in which a part of the multi-chamber thin film forming apparatus shown in Fig. 5 is changed will be described with reference to Fig. 6. In particular, for a glove box, please read the precautions on the back before installing the book. Pages printed by the Intellectual Property Bureau of the Ministry of Economic Affairs, printed by employees' cooperatives. The paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm). ) -23-471011 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs V. Invention Description (21) 521 and a path box 522 are provided in a transfer room (A) 504 structure. For the non-changing parts, refer to the description of the third embodiment. The glove box 5 2 1 is connected to a transfer room (A) 504 via a gate 5 2 3. In the glove box 521, the sealing process of the EL device in the closed space is performed. This treatment is used to protect the substrate (the substrate that has been processed in the film-forming apparatus of FIG. 6 and returned to the transfer chamber (A) 5 0 4). It has been subjected to all treatments from outside air, and is mechanically sealed with a sealing material. Sealing mechanism or mechanism using thermosetting resin or ultraviolet curing resin. As for the sealing material, although glass, ceramic, or metal can be used, in the case where light is emitted from the sealing material side, it must be semi-transparent. The sealing material and the substrate that has been subjected to the above-mentioned treatment are combined using a thermosetting resin or an ultraviolet curing resin, and the resin is cured by heat treatment or ultraviolet lighting treatment to form a closed space. In this closed space, for example, barium oxide can be effectively provided as a desiccant. The space between the sealing material and the substrate on which the EL element is formed may be filled with a thermosetting resin or an ultraviolet curing resin. In this example, it is also effective to add, for example, barium oxide as a desiccant in a thermosetting resin or an ultraviolet curing resin. The film forming apparatus shown in FIG. 6 has a mechanism (ultraviolet irradiation mechanism) configured to irradiate ultraviolet rays. 5 2 4 is provided on the inner side of the glove box 5 2 1, and a UV-curable UV-curing resin is applied with UV rays from the UV irradiation mechanism 5 2 4. ^ Although the operation in the glove box 5 2 1 can be manual operation, it is best to use (please read the precautions on the back before filling this page) This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm ) -24- 471011 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the Invention (22) This operation is performed by computer-controlled machinery. When a sealing material is used, it is best to install a mechanism for applying a sealant (thermosetting resin or ultraviolet curing resin), a mechanism for bonding the substrate in the cell assembly step of the liquid crystal, and a mechanism for curing the sealant. mechanism. By attaching an exhaust pump, the pressure inside the glove box 5 2 1 can also be reduced. When the above-mentioned sealing step is performed by a robot-operated machine, the operation can be effectively performed at a low pressure. Secondly, the path box 5 2 2 is connected to the glove box 5 2 1 via a gate 5 2 5. By attaching an exhaust pump, the pressure of the path box 5 2 2 can also be reduced. The path box 5 2 2 is a device for preventing the glove box 5 2 1 from being exposed to an external space, and a substrate is taken out there. As described above, in the thin film forming apparatus of this embodiment, since the substrate is exposed to the atmosphere only when the EL element is completely sealed in the sealed space, the EL element can be completely prevented from being damaged by moisture or the like. That is, an EL display device with high reliability can be manufactured. [Fifth Embodiment] Although the mode for carrying out the first embodiment of the present invention shows the illumination layer emitting red light, the illumination layer emitting green light, and the illumination layer emitting blue light are used as shown in FIGS. 1A and 1B. An example of forming a thin film forming device, but here, it is also possible to use at least one of the illumination layers for emitting red, green, and blue light using the thin film forming device shown in FIG. 1. That is, in FIG. 2B, the nozzles 1 1 6 c (· nozzles for / applying the coating liquid (B) 11 4c) and coating by other mechanisms (please read the precautions on the back first) (Fill in this page) This paper size is in accordance with China National Standard (CNS) A4 (210 X 297 mm) -25 · 471011 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (23) Liquid (B) 1 1 4 c. In particular, in FIGS. 5 and 6, the coating liquid (R) 114a and the coating liquid (G) 1 1 4 b are applied in the solution coating processing chamber (A) 510, and then, the coating liquid (B) 114c is also used in the solution coating process chamber (B) 5 14. Of course, the combination of colors is not limited, but the coating liquid (R) 1 1 4 a and the coating liquid (B) 114c are applied in the solution coating processing chamber (A) 510, and then, the coating liquid (G ) 11 4b is also used in the solution coating processing chamber (B) 5 1 4. The configuration of this embodiment can also be performed by combining with the configuration of the second embodiment. [Sixth Embodiment] Although the example where three nozzles are attached to the head portion 107 shown in Figs. 2A to 2C has been described, more nozzles corresponding to most pixel lines can be provided here. This example is shown in FIG. 7. The characters R, G, and B in the figure correspond to red, green, and blue, respectively. Fig. 7 shows that an organic EL material (strictly a coating liquid) is applied on a cultivated pixel line formed simultaneously in the pixel portion. That is, the number of nozzles attached to the head portion 7 0 1 is equal to the number of pixel lines. By adopting such a structure, all the pixel lines can be coated by one scan, so the productivity can be significantly improved. In addition, the pixel portion is divided into a plurality of regions, and can be used in each region-a head portion provided with a number of nozzles equal to the pixel line. That is, when the pixel part is divided into ------------ '褒 -------- order --------- line (please read the precautions on the back first) (Fill in this page again) This paper size applies Chinese National Standard (CNS) A4 (210 X 297 mm) · 26-471011 A7 B7 Printed by the Consumers' Cooperative of Intellectual Property Bureau of the Ministry of Economy Area, and when scanning is performed n times, organic EL materials (coating liquid) can be applied to all pixel lines. In fact, because the size of pixels is as small as several tens of meters, The width also becomes tens of M m. In this example, because it is difficult to arrange the nozzles horizontally on a line, the arrangement of the nozzles needs to be designed. Fig. 8A is an example in which nozzles 5 2 a to 5 2 c are formed and they are shifted obliquely to the head portion 51. Reference numeral 5 2 a indicates a nozzle to which a coating liquid (R) is applied: reference numeral 5 2 b indicates Apply coating liquid. (G) nozzle; and reference numeral 5 2 c denotes a nozzle to which the coating liquid (B) is applied. Each line of the arrow corresponds to a pixel line. As indicated by the number 5 3, the nozzles 5 2 a to 5 2 c are regarded as one unit, and one or more units are provided in the head portion. One cell 53 is simultaneously coated with organic EL material on three pixel lines, and n cells 53 are simultaneously coated with organic EL material on 3 n pixel lines. By adopting this structure, the degree of freedom in the arrangement space of the nozzle can be improved, and the present invention can be executed to the pixel portion without being oppressed with high fineness. In addition, by using the head portion 51 of FIG. 8A, the pixel lines in the pixel portion can be processed at the same time, or the graph cold portion can be divided into a plurality of regions and processing can be performed multiple times. Next, the head portion 54 shown in FIG. 8B is a modified example of FIG. 8A, and it is an example in which the number of nozzles included in a unit 55 is increased. That is, in the unit 55, the rain nozzle 5 6a is used to coat the coating and liquid hair (R), the two nozzles 5 6 b are used to coat the coating liquid (G), and the two nozzles are the paper Standards are applicable to Chinese National Standards (CNS) A4 ϋ X 297 mm) (Please read the notes on the back before filling out this page) 471011 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs The coating liquid (B) is applied with the coating, and the organic EL material is simultaneously applied to all six pixel lines in one unit 5 5. In this embodiment, one or more units 5 5 are provided, and when one unit 5 5 is provided At the same time, the organic EL material is applied on six pixel lines at the same time, and when n cells are provided, the organic EL material is applied on 6 ^ pixel lines at the same time. Of course, there is no need to limit the number of nozzles provided in the cell 5 to six. That is, more nozzles can be provided. In this configuration, similar to FIG. 8A, all pixel lines in the pixel portion can be processed simultaneously, or the pixel portion can be divided into a plurality of regions and executed. Processing multiple times. Alternatively, the head part 5 7 shown in Fig. 8C may be used. In the head portion 57, the nozzle 58a is used to coat the coating liquid (R), the nozzle 5 8b is used to coat the coating liquid (G), and the nozzle 5 8c is used to coat the coating liquid (B). Provided at the space interval of three pixel lines. When this head part 5 7 is first scanned once to coat the organic EL material on the pixel line, the head part 57 is shifted to the right by three pixel lines and again Scanning. By performing the above-mentioned scanning three times, the organic EL material can be coated in stripes in the order of red, green, and blue. In this structure, all the pixels in the pixel section are similar to those in FIG. 8A. The pixel lines can be processed simultaneously, or the pixel portion can be divided into a plurality of regions and the processing can be performed multiple times. As described above, in the thin film forming apparatus shown in FIG. 1, the nozzle attached to the head portion is designed Position, even for the pixel part with high pixel pitch and narrow pixel pitch (distance between pixels), you can execute this post (please read the precautions on the back before filling this page) Applicable to China National Standard (CNS) A4 (210 X 297 mm) -28- 471011 A7 B7 The cooperative prints 5. Description of the invention (26). Then, the productivity of the manufacturing method can be improved. The structure of this embodiment can also be implemented by combining with the structures of the first to fifth embodiments. [Seventh embodiment ] In the first embodiment, although the common room 501 has a depressurizing gas, a gas filled with an inert gas pressure may be used here. In this example, the exhaust pump may not be provided in the transfer room (A) 5 0 4, 5 0 6, the ignition processing chamber (A) 5 0 7, and the ignition processing chamber (b) 5 1 1. However, due to the transfer mechanism (A) 5 0 2, the transfer mechanism (B) 5 0 8 , And the transfer mechanism (C) are provided in the common room 501, the transfer room (B) 509, and the transfer room (C) 51, respectively, and the inert gas filled there is highly likely to be contaminated. Therefore, it is better to make the common chamber 50 1, the transfer chamber (B) 509, and the transfer chamber (C) 513 into a state where the pressure is lower than that of other processing chambers, and therefore the inert gas flows into the common chamber 501, B) 509, and transfer room (C) 5 1 3. The structure of this embodiment can also be implemented by a combination of the structures of the third to sixth embodiments. [Eighth Embodiment] Although the third embodiment shows an example in which the pre-processing chamber 506 is provided with a mechanism for illuminating ultraviolet rays and a mechanism for performing heat treatment, this embodiment shows ---------- 1 / Loading · ---- I--Order ----- I--Class (Please read the notes on the back before filling this page) This paper size is applicable to China National Standard (CNS) A4 (210 X 297) «) -29- 471011 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (27) Shows the pre-processing room 5 0 6 Example of a mechanism that is useful for performing plasma processing 0 When the cathode surface is pre-treated, the natural oxygen on the cathode surface needs to be removed. This embodiment includes a mechanism for removing natural oxygen by performing plasma treatment on a cathode surface using a gas containing fluorine or chlorine gas. The configuration of this embodiment can also be performed by combining with the configurations of the third to seventh embodiments. [Ninth Embodiment] Although the third embodiment shows an example in which the pre-processing chamber 506 is provided with a mechanism for illuminating ultraviolet rays and a mechanism for performing heat treatment, this embodiment shows that the pre-processing chamber 506 is provided to perform sputtering Example of processing mechanism 〇 When the cathode surface of the EL element is pre-treated, the natural oxygen on the cathode surface needs to be removed. This embodiment includes a mechanism for removing natural oxygen by performing a sputtering process on the cathode surface using an inert gas such as a rare gas or nitrogen. The configuration of this embodiment can also be performed by combining with the configurations of the third to eighth embodiments. : [Tenth embodiment] The third embodiment shows that the organic EL material that becomes the lighting layer is formed by solution coating the processing chamber (A) 5 Γ 0 and the ignition processing chamber (A) 5 Ό r *, and further, it becomes Organic EL material for hole injection layer or hole transmission layer — — — — — — — — — — — — — —-III — — — — ^ > III i I — II (Please read the precautions on the back before filling (This page) This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) _ 30 · 471011 A7 ----- B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of Inventions (28) The material is formed by solution coating the processing chamber (B) 5 1 4 and the ignition processing chamber (B) 5 1 1. However, a structure may also be formed in which a hole injection layer or a hole transfer layer is first formed by coating the processing chamber (B) 5 1 4 and the ignition processing chamber (β) 5 1 1 with a solution, and then becomes a lighting layer The organic EL material is formed by solution coating the processing chamber (A) 5 10 and the ignition processing chamber (A) 5 07. Then, the organic EL material that becomes the hole injection layer or the hole transport layer is solution coated. The processing chamber (b) 5 1 4 and the ignition processing chamber (B) 5 1 1 are formed. That is, in the example of selectively coating red, green, and blue organic EL materials (B) by using the thin film forming apparatus of FIGS. 1A and 1B, a solution coating chamber (A) 5 1 0 is used, In the case where the organic EL material provided on the entire surface of the substrate is formed, a solution coating chamber (B) 5 1 4 may be used. It is also possible to form EL layers of various laminated structures by selectively coating the processing chamber with these solutions. ^ The structure of this embodiment can also be implemented by combining with the structures of the third to ninth embodiments. [Eleventh Embodiment]: Although the third embodiment shows that a conductive film that becomes a cathode or an anode is formed in a vapor phase film formation processing chamber (A) 5 1 5, here, an organic EL material can also be formed using a vapor deposition method. . That is, it can be used when forming a layer selected from a hole injection layer, a hole transport layer, an electron injection layer, and an electron depletion layer. (Please read the precautions on the back before filling this page) This paper size applies Chinese National Standard (CNS) A4 (210x297) «-31-471011 A7 ___ B7 Printed by the Consumers’ Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs Explanation (29) By changing the vapor deposition source, the vapor phase film formation processing chamber (A) 5 1 5 can also form both a film of an organic EL material and a conductive film. It is also possible to form an organic EL material in the vapor phase film formation processing chamber (A) 5 1 5 and to form a conductive film that becomes a cathode or an anode in the vapor phase film formation processing chamber (B) 5 1 6. The configuration of this embodiment can also be performed by combining with the configurations of the third to tenth embodiments. As described above, by using the thin film forming apparatus of the present invention, an organic EL material can be formed without the problem of the flight curve of the conventional inkjet method. That is, since the film of the polymer organic EL material can be accurately formed without the problem of positional displacement, the productivity of the EL display device using the polymer organic EL material can be improved. (Please read the precautions on the back before filling out this page) This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) -32-