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DE69928584D1 - Verfahren zur Herstellung eines Beugungsgitters - Google Patents

Verfahren zur Herstellung eines Beugungsgitters

Info

Publication number
DE69928584D1
DE69928584D1 DE69928584T DE69928584T DE69928584D1 DE 69928584 D1 DE69928584 D1 DE 69928584D1 DE 69928584 T DE69928584 T DE 69928584T DE 69928584 T DE69928584 T DE 69928584T DE 69928584 D1 DE69928584 D1 DE 69928584D1
Authority
DE
Germany
Prior art keywords
producing
diffraction grating
grating
diffraction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69928584T
Other languages
English (en)
Other versions
DE69928584T2 (de
Inventor
Kenji Kintaka
Junji Nishii
Noboru Tohge
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Application granted granted Critical
Publication of DE69928584D1 publication Critical patent/DE69928584D1/de
Publication of DE69928584T2 publication Critical patent/DE69928584T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Paints Or Removers (AREA)
DE69928584T 1999-03-11 1999-12-28 Verfahren zur Herstellung eines Beugungsgitters Expired - Lifetime DE69928584T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP6444699 1999-03-11
JP6444699 1999-03-11

Publications (2)

Publication Number Publication Date
DE69928584D1 true DE69928584D1 (de) 2005-12-29
DE69928584T2 DE69928584T2 (de) 2006-08-10

Family

ID=13258508

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69928584T Expired - Lifetime DE69928584T2 (de) 1999-03-11 1999-12-28 Verfahren zur Herstellung eines Beugungsgitters
DE69921445T Expired - Lifetime DE69921445T2 (de) 1999-03-11 1999-12-28 Verfahren zur Herstellung eines Beugungsgitters

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE69921445T Expired - Lifetime DE69921445T2 (de) 1999-03-11 1999-12-28 Verfahren zur Herstellung eines Beugungsgitters

Country Status (3)

Country Link
US (1) US6514576B1 (de)
EP (2) EP1035424B1 (de)
DE (2) DE69928584T2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030031958A1 (en) * 2001-04-27 2003-02-13 Noboru Tohge Photosensitive composition and process for producing articles covered with a patterned film
US7085057B2 (en) * 2003-10-15 2006-08-01 Invenios Direct-write system and method for roll-to-roll manufacturing of reflective gratings
TWI247963B (en) * 2004-12-10 2006-01-21 Hon Hai Prec Ind Co Ltd A micro-mirror projector
US20080062522A1 (en) * 2006-09-08 2008-03-13 The Regents Of The University Of California Apparatus and process for aqueous cleaning of diffraction gratings with minimization of cleaning chemicals
US20090242019A1 (en) * 2007-12-19 2009-10-01 Silexos, Inc Method to create high efficiency, low cost polysilicon or microcrystalline solar cell on flexible substrates using multilayer high speed inkjet printing and, rapid annealing and light trapping
US10052848B2 (en) 2012-03-06 2018-08-21 Apple Inc. Sapphire laminates
US9154678B2 (en) 2013-12-11 2015-10-06 Apple Inc. Cover glass arrangement for an electronic device
US10406634B2 (en) 2015-07-01 2019-09-10 Apple Inc. Enhancing strength in laser cutting of ceramic components
CN105929475B (zh) * 2016-06-30 2018-08-03 宁波大学 一种凹面光栅的制作方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5643620A (en) * 1979-09-17 1981-04-22 Mitsubishi Electric Corp Production of blazed grating
US4402571A (en) * 1981-02-17 1983-09-06 Polaroid Corporation Method for producing a surface relief pattern
US4799993A (en) * 1988-05-10 1989-01-24 E. I. Du Pont De Nemours And Company Rotary developer and method for its use
JPH01306886A (ja) * 1988-06-03 1989-12-11 Canon Inc 体積位相型回折格子
US5189952A (en) * 1990-03-09 1993-03-02 Asahi Glass Company, Ltd. Process for producing window glass with thin film thereon
JPH0830764B2 (ja) * 1991-04-25 1996-03-27 株式会社島津製作所 回折格子の製造方法
DE4130550A1 (de) * 1991-09-13 1993-03-18 Inst Neue Mat Gemein Gmbh Optische elemente und verfahren zu deren herstellung
JP2888741B2 (ja) * 1993-09-27 1999-05-10 日本ペイント株式会社 薄膜パターン形成法
KR100294581B1 (ko) * 1994-12-09 2001-09-17 후지무라 마사지카, 아키모토 유미 금속산화물박막패턴형성용조성물및그제조방법,금속산화물박막패턴의형성방법,전자부품및광학부품의제조방법,및박막의형성방법
JP2832337B2 (ja) * 1995-11-17 1998-12-09 工業技術院長 回折格子の製造方法

Also Published As

Publication number Publication date
DE69928584T2 (de) 2006-08-10
EP1035424B1 (de) 2004-10-27
EP1420274B1 (de) 2005-11-23
EP1035424A3 (de) 2002-06-12
EP1035424A2 (de) 2000-09-13
EP1420274A1 (de) 2004-05-19
DE69921445D1 (de) 2004-12-02
DE69921445T2 (de) 2005-10-20
US6514576B1 (en) 2003-02-04

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition