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DE69608027D1 - Verfahren zur Herstellung eines mehrlagigen Überzugs aus einer nitridhaltigen Verbindung - Google Patents

Verfahren zur Herstellung eines mehrlagigen Überzugs aus einer nitridhaltigen Verbindung

Info

Publication number
DE69608027D1
DE69608027D1 DE69608027T DE69608027T DE69608027D1 DE 69608027 D1 DE69608027 D1 DE 69608027D1 DE 69608027 T DE69608027 T DE 69608027T DE 69608027 T DE69608027 T DE 69608027T DE 69608027 D1 DE69608027 D1 DE 69608027D1
Authority
DE
Germany
Prior art keywords
production
compound containing
multilayer coating
containing nitride
nitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69608027T
Other languages
English (en)
Other versions
DE69608027T2 (de
Inventor
Albert Sue Jiinjen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Praxair ST Technology Inc
Praxair Technology Inc
Original Assignee
Praxair ST Technology Inc
Praxair Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Praxair ST Technology Inc, Praxair Technology Inc filed Critical Praxair ST Technology Inc
Application granted granted Critical
Publication of DE69608027D1 publication Critical patent/DE69608027D1/de
Publication of DE69608027T2 publication Critical patent/DE69608027T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/048—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material with layers graded in composition or physical properties

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
DE69608027T 1995-05-30 1996-05-29 Verfahren zur Herstellung eines mehrlagigen Überzugs aus einer nitridhaltigen Verbindung Expired - Lifetime DE69608027T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US45340595A 1995-05-30 1995-05-30

Publications (2)

Publication Number Publication Date
DE69608027D1 true DE69608027D1 (de) 2000-06-08
DE69608027T2 DE69608027T2 (de) 2000-09-28

Family

ID=23800448

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69608027T Expired - Lifetime DE69608027T2 (de) 1995-05-30 1996-05-29 Verfahren zur Herstellung eines mehrlagigen Überzugs aus einer nitridhaltigen Verbindung

Country Status (6)

Country Link
US (1) US6025021A (de)
EP (1) EP0745699B1 (de)
JP (1) JP3391981B2 (de)
CA (1) CA2177725C (de)
DE (1) DE69608027T2 (de)
TW (1) TW517098B (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030186087A1 (en) * 2002-03-26 2003-10-02 Fu-Tai Liou Gradient barrier layer for copper back-end-of-line technology
US7650710B1 (en) 2004-06-03 2010-01-26 The United States Of America As Represented By The Secretary Of The Army Article with enhanced resistance to thermochemical erosion, and method for its manufacture
US7901799B2 (en) * 2006-10-02 2011-03-08 Praxair S.T. Technology, Inc. Multilayer nitride-containing coatings
CA2831780C (en) 2011-06-17 2016-07-12 Kabushiki Kaisha Kobe Seiko Sho(Kobe Steel, Ltd.) Member covered with hard coating
CN112174156B (zh) * 2020-09-28 2022-05-17 中科南京绿色制造产业创新研究院 一种TiN/C包覆正硅酸锂氚增殖剂及其制备方法与制备装置系统
CN112708857B (zh) * 2020-12-16 2022-10-11 中国航发北京航空材料研究院 具有应变容限和耐磨性的涂层结构及其制备方法
CN116463586A (zh) * 2023-06-14 2023-07-21 北京辰融科技有限责任公司 用于钛合金表面的抗冲蚀抗疲劳一体化涂层及其制备方法
CN118814112A (zh) * 2024-07-31 2024-10-22 湖南唐力新材料科技有限公司 复合构件及其制备方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2705225C2 (de) * 1976-06-07 1983-03-24 Nobuo Tokyo Nishida Ornamentteil für Uhren usw.
JPS5625960A (en) * 1979-08-09 1981-03-12 Mitsubishi Metal Corp Surface-coated high speed steel material for cutting tool
JPS56163338A (en) * 1980-05-21 1981-12-15 Nippon Kokan Kk Apparatus for preventing upper framework of steel frame
FR2483848A1 (fr) * 1980-06-06 1981-12-11 Stephanois Rech Mec Procede pour la fabrication d'une couche composite resistant a la fois au grippage, a l'abrasion, a la corrosion et a la fatigue par contraintes alternees, et couche composite ainsi obtenue
SE8300910L (sv) * 1983-02-18 1984-08-19 Santrade Ltd Sammansatt kropp bestaende av ett substrat belagt med hart, slitstarkt ytskikt
CA2024987C (en) * 1989-09-11 1994-04-12 Jiinjen Albert Sue Multilayer coating of a nitride-containing compound and method for producing it
US5185211A (en) * 1991-07-11 1993-02-09 Praxair S.T. Technology, Inc. Non-stoichiometric titanium nitride coating
JPH0864380A (ja) * 1994-08-24 1996-03-08 Nikon Corp スレーブ発光機能を有する電子閃光装置

Also Published As

Publication number Publication date
JPH09169508A (ja) 1997-06-30
EP0745699B1 (de) 2000-05-03
DE69608027T2 (de) 2000-09-28
CA2177725C (en) 2002-07-30
TW517098B (en) 2003-01-11
EP0745699A1 (de) 1996-12-04
CA2177725A1 (en) 1996-12-01
JP3391981B2 (ja) 2003-03-31
US6025021A (en) 2000-02-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition