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DE69518964D1 - Verschiebungsmesseinrichtung - Google Patents

Verschiebungsmesseinrichtung

Info

Publication number
DE69518964D1
DE69518964D1 DE69518964T DE69518964T DE69518964D1 DE 69518964 D1 DE69518964 D1 DE 69518964D1 DE 69518964 T DE69518964 T DE 69518964T DE 69518964 T DE69518964 T DE 69518964T DE 69518964 D1 DE69518964 D1 DE 69518964D1
Authority
DE
Germany
Prior art keywords
measuring device
displacement measuring
displacement
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69518964T
Other languages
English (en)
Other versions
DE69518964T2 (de
Inventor
Takashi Tanaka
Masaaki Kusumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Magnescale Co Ltd
Original Assignee
Sony Precision Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Precision Technology Inc filed Critical Sony Precision Technology Inc
Application granted granted Critical
Publication of DE69518964D1 publication Critical patent/DE69518964D1/de
Publication of DE69518964T2 publication Critical patent/DE69518964T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D18/00—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00
    • G01D18/001—Calibrating encoders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24404—Interpolation using high frequency signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24471—Error correction
    • G01D5/2448—Correction of gain, threshold, offset or phase control
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24471—Error correction
    • G01D5/2449—Error correction using hard-stored calibration data

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
DE69518964T 1994-10-20 1995-10-20 Verschiebungsmesseinrichtung Expired - Lifetime DE69518964T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25549694A JP3367226B2 (ja) 1994-10-20 1994-10-20 変位量検出装置

Publications (2)

Publication Number Publication Date
DE69518964D1 true DE69518964D1 (de) 2000-11-02
DE69518964T2 DE69518964T2 (de) 2001-02-01

Family

ID=17279565

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69518964T Expired - Lifetime DE69518964T2 (de) 1994-10-20 1995-10-20 Verschiebungsmesseinrichtung

Country Status (4)

Country Link
US (1) US5943639A (de)
EP (1) EP0708311B1 (de)
JP (1) JP3367226B2 (de)
DE (1) DE69518964T2 (de)

Families Citing this family (33)

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US6188341B1 (en) 1996-11-11 2001-02-13 Fanuc Ltd. Encoder interpolation circuit which corrects an interpolation angle between a received sine-wave encoder signal and a cosine-wave encoder signal
JP3026949B2 (ja) * 1997-05-12 2000-03-27 ファナック株式会社 エンコーダのオフセット補正回路
JP4239042B2 (ja) * 1998-06-19 2009-03-18 株式会社安川電機 ２次元アブソリュート位置センサおよびロボット
DE10066149B4 (de) * 1999-03-30 2005-02-17 Dr. Johannes Heidenhain Gmbh Verfahren und Schaltungsanordnung zur Korrektur von periodischen Signalen eines inkrementalen Positionsmesssystems
US6973399B1 (en) 1999-03-30 2005-12-06 Dr. Johannes Heidenhain Gmbh Method and circuit for correcting periodic signals of an incremental position measuring system
JP4660719B2 (ja) * 2001-04-19 2011-03-30 マッスル株式会社 位置検出方法および位置検出装置
JP4748559B2 (ja) * 2001-09-14 2011-08-17 株式会社森精機製作所 アブソリュートエンコーダ
JP4748557B2 (ja) * 2001-09-14 2011-08-17 株式会社森精機製作所 アブソリュートエンコーダ
JP4748558B2 (ja) * 2001-09-14 2011-08-17 株式会社森精機製作所 アブソリュートエンコーダ
DE10154153A1 (de) 2001-11-03 2003-05-15 Bosch Gmbh Robert Achsenschnittverfahren und N-Punkte-Methode zum Offsetabgleich von Winkelsensoren
DE10157112A1 (de) * 2001-11-21 2003-06-05 Heidenhain Gmbh Dr Johannes Kontrollvorrichtung einer Positionsmesseinrichtung
DE10163528B4 (de) * 2001-12-21 2005-07-07 Siemens Ag Verfahren zur Fehlerkompensation von sin/cos-Lagemesssystemen nach Offset-, Amplituden- und Phasenfehler
DE50206049D1 (de) * 2002-01-11 2006-05-04 Heidenhain Gmbh Dr Johannes Verfahren zur interpolation mindestens zweier positionsabhängiger, periodischer, zueinander phasenverschobener analogsignale
US6879405B2 (en) 2002-11-18 2005-04-12 Sony Precision Technology, Inc. Displacement pickup
DE10301848B4 (de) 2003-01-09 2014-10-09 Anton Rodi Messeinrichtung zur Erfassung von Größen, insbesondere von Winkeln oder Wegstrecken
DE10303495B4 (de) 2003-01-30 2018-12-27 Robert Bosch Gmbh Verfahren zur Offset-Bestimmung von Winkelsensorsignalen
US6940275B2 (en) * 2003-12-15 2005-09-06 Texas Instruments Incorporated Magnetic position sensor apparatus and method
US7023201B2 (en) * 2003-12-15 2006-04-04 Texas Instruments Incorporated Magnetic position sensor apparatus and method
JP2005227073A (ja) * 2004-02-12 2005-08-25 Ebara Densan Ltd 欠相検知装置およびポンプシステム
JP2006017615A (ja) * 2004-07-02 2006-01-19 Ricoh Co Ltd マーク検出装置、回転体駆動装置及び画像形成装置
JP4768248B2 (ja) * 2004-10-13 2011-09-07 株式会社ミツトヨ エンコーダ出力信号補正装置及び方法
US8081948B2 (en) * 2006-10-25 2011-12-20 Georgia Tech Research Corporation Analog signal processor in a multi-gigabit receiver system
JP5149820B2 (ja) * 2009-01-19 2013-02-20 キヤノン株式会社 コントローラおよび加工装置
US9791487B2 (en) * 2012-03-29 2017-10-17 Egalax_Empia Technology Inc. Method and device for measuring signals
US9733317B2 (en) 2014-03-10 2017-08-15 Dmg Mori Seiki Co., Ltd. Position detecting device
DE102014015747B4 (de) * 2014-10-24 2024-01-25 Infineon Technologies Ag Sensorsystem und Warneinheit zum Sensieren und Verifizieren von Daten in Bezug auf eine Bewegung eines Objekts
DE102015209016B4 (de) * 2015-05-18 2021-12-30 Robert Bosch Gmbh Vorrichtung zur Bestimmung einer Winkelposition eines Motors
CN108204830B (zh) * 2017-11-28 2019-08-06 珠海格力电器股份有限公司 相位偏差的补偿方法和装置
DE102020102064B3 (de) * 2020-01-29 2021-05-27 Schaeffler Technologies AG & Co. KG Kupplungsaktor, Erfassungssystem und Verfahren zur Erfassung einer Winkelposition eines Drehbauteils
US12078516B2 (en) 2020-12-11 2024-09-03 Dmg Mori Co., Ltd. Automatic correction method
CN113670357B (zh) * 2021-08-03 2024-06-21 深圳市汇川技术股份有限公司 信号处理方法及电路
US20240401986A1 (en) 2023-05-31 2024-12-05 Magnescale Co., Ltd. Displacement calculation device and displacement calculation method
WO2025069871A1 (ja) * 2023-09-27 2025-04-03 株式会社デンソー 演算装置、及びプログラム

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2953577C2 (de) * 1978-04-10 1987-04-23 Asahi Seimitsu K.K., Tokio/Tokyo Zeichenmaschine mit Parallelführungsgestänge
DE3024716C2 (de) * 1980-06-30 1986-10-23 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Digitales Längen- oder Winkelmeßsystem
JPS5875074A (ja) * 1981-10-30 1983-05-06 Yokogawa Hewlett Packard Ltd 容量あるいは他のパラメ−タの測定装置
JPH0726858B2 (ja) * 1988-07-08 1995-03-29 ヤマハ株式会社 エンコーダ用信号処理回路
JPH02251720A (ja) * 1989-03-27 1990-10-09 Fanuc Ltd エンコーダの内挿方式
US5184062A (en) * 1990-05-11 1993-02-02 Nicolet Instrument Corporation Dynamically calibrated trigger for oscilloscopes
EP0489936B1 (de) * 1990-12-03 1995-08-02 Siemens Aktiengesellschaft Verfahren zum Detektieren einer Amplituden- und Offset-Abweichung zweier etwa 90 elektrisch versetzter siusförmiger Signale sowie Schaltung zur Durchführung dieses Verfahrens und Verwendung dieses Verfahrens für einen Regler
ATE106550T1 (de) * 1991-01-21 1994-06-15 Siemens Ag Verfahren zum überwachen der ausgangssignale einer gebereinrichtung.
JPH05122075A (ja) * 1991-10-24 1993-05-18 Sharp Corp アナログ／デイジタル変換装置
US5432443A (en) * 1992-06-23 1995-07-11 Sony Magnescale Inc. Linear position detector including a phase shifter and a sample-and-hold circuit for synchronizing a sample pulse period with the reference period of the equilibrium modulated signal
DE4224225C2 (de) * 1992-07-22 1996-03-14 Walter Dr Mehnert Schaltungsanordnung für einen induktiven Stellungsgeber
JP3173531B2 (ja) * 1992-09-18 2001-06-04 ソニー株式会社 位置検出方法
JPH06167354A (ja) * 1992-11-27 1994-06-14 Sony Magnescale Inc スケールの内挿処理装置
JP3208933B2 (ja) * 1993-06-01 2001-09-17 株式会社ニコン 位置測定装置
JPH07229757A (ja) * 1994-02-18 1995-08-29 Canon Inc 信号処理装置、位置検出装置及び駆動装置

Also Published As

Publication number Publication date
EP0708311A2 (de) 1996-04-24
JP3367226B2 (ja) 2003-01-14
US5943639A (en) 1999-08-24
EP0708311A3 (de) 1996-08-07
EP0708311B1 (de) 2000-09-27
DE69518964T2 (de) 2001-02-01
JPH08122097A (ja) 1996-05-17

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: MAGNESCALE CO., LTD., TOKYO, JP