[go: up one dir, main page]

DE69418416D1 - Verschiebungsmesseinrichtung - Google Patents

Verschiebungsmesseinrichtung

Info

Publication number
DE69418416D1
DE69418416D1 DE69418416T DE69418416T DE69418416D1 DE 69418416 D1 DE69418416 D1 DE 69418416D1 DE 69418416 T DE69418416 T DE 69418416T DE 69418416 T DE69418416 T DE 69418416T DE 69418416 D1 DE69418416 D1 DE 69418416D1
Authority
DE
Germany
Prior art keywords
measuring device
displacement measuring
displacement
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69418416T
Other languages
English (en)
Other versions
DE69418416T2 (de
Inventor
Yoshio Shoda
Narimasa Takeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Magnescale Co Ltd
Original Assignee
Sony Precision Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Precision Technology Inc filed Critical Sony Precision Technology Inc
Publication of DE69418416D1 publication Critical patent/DE69418416D1/de
Application granted granted Critical
Publication of DE69418416T2 publication Critical patent/DE69418416T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
DE69418416T 1993-10-08 1994-10-07 Verschiebungsmesseinrichtung Expired - Lifetime DE69418416T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25317493A JP3318795B2 (ja) 1993-10-08 1993-10-08 変位検出装置

Publications (2)

Publication Number Publication Date
DE69418416D1 true DE69418416D1 (de) 1999-06-17
DE69418416T2 DE69418416T2 (de) 1999-09-23

Family

ID=17247572

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69418416T Expired - Lifetime DE69418416T2 (de) 1993-10-08 1994-10-07 Verschiebungsmesseinrichtung

Country Status (4)

Country Link
US (1) US5477333A (de)
EP (1) EP0647834B1 (de)
JP (1) JP3318795B2 (de)
DE (1) DE69418416T2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050058031A1 (en) * 2003-09-12 2005-03-17 Hanks Darwin Mitchel Optical disk drive focusing apparatus
KR20070002567A (ko) * 2005-06-30 2007-01-05 삼성전자주식회사 바코드 스캐너를 구비한 조리장치 및 그 제어방법
AR070418A1 (es) * 2009-02-12 2010-04-07 Consejo Nac Invest Cient Tec Metodo y aparato para determinar la dilatacion de un material mediante un dispositivo sensor de error de foco
JP5834121B1 (ja) * 2014-08-25 2015-12-16 株式会社ソディック 加工装置
CN108296308B (zh) * 2018-02-02 2024-03-22 西安麦特沃金液控技术有限公司 对中检测设备

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1427552A (fr) * 1965-03-31 1966-02-04 Zeiss Jena Veb Carl Appareil vertical de mesure de longueurs
US4148587A (en) * 1977-10-03 1979-04-10 The Boeing Company Laser gauge for measuring changes in the surface contour of a moving part
US4507868A (en) * 1982-08-30 1985-04-02 The Warner & Swasey Company Coordinate measuring machine with a self aligning pneumatic counterbalance
US5220550A (en) * 1990-08-10 1993-06-15 Alps Electric Co., Ltd. Optical beam system for optical disk drives
DE4219311C2 (de) * 1991-06-13 1996-03-07 Sony Magnescale Inc Verschiebungsdetektor
JP3221786B2 (ja) * 1993-10-08 2001-10-22 ソニー株式会社 変位検出装置

Also Published As

Publication number Publication date
EP0647834A3 (de) 1996-11-06
US5477333A (en) 1995-12-19
EP0647834B1 (de) 1999-05-12
JP3318795B2 (ja) 2002-08-26
DE69418416T2 (de) 1999-09-23
JPH07110211A (ja) 1995-04-25
EP0647834A2 (de) 1995-04-12

Similar Documents

Publication Publication Date Title
NO178909C (no) Måleanordning
DE69419243D1 (de) Positionsmessgeräte
DE59408232D1 (de) Füllstandsmessgerät
DE69518964D1 (de) Verschiebungsmesseinrichtung
DE69212847D1 (de) Kraftmesseinrichtung
DE69516896D1 (de) Messgerät
DE69521830D1 (de) Distanzmessvorrichtung
DE59606841D1 (de) Positionsmesseinrichtung
DE59406355D1 (de) Positionsmesseinrichtung
DE69410061D1 (de) Flüssigkeitsmessvorrichtung
DE69409558D1 (de) Längenmessapparat
DE59400388D1 (de) Kapazitive Messeinrichtung
DE59405919D1 (de) Phasenmessvorrichtung
DE59304076D1 (de) Kraftmessvorrichtung
DK0658754T3 (da) Trykmåleindretning
BR9400185A (pt) Dispositivo sensor
NO941247L (no) Sondeanordning
DE69411970D1 (de) Abweichungsmessgerät
DE69428287D1 (de) Messgerät
DE59508231D1 (de) Positionsmesseinrichtung
DE69417673D1 (de) Verschiebungsmesseinrichtung
DE69418416D1 (de) Verschiebungsmesseinrichtung
ATA39392A (de) Wegmesseinrichtung
NO931427L (no) Anordning for dimensjonsmåling
DE69405037D1 (de) Schwingungsmessgerät

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: MAGNESCALE CO., LTD., TOKYO, JP