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DE69407304D1 - Schleifmittel, verfahren zum herstellen und zur anwendung derselben. - Google Patents

Schleifmittel, verfahren zum herstellen und zur anwendung derselben.

Info

Publication number
DE69407304D1
DE69407304D1 DE69407304T DE69407304T DE69407304D1 DE 69407304 D1 DE69407304 D1 DE 69407304D1 DE 69407304 T DE69407304 T DE 69407304T DE 69407304 T DE69407304 T DE 69407304T DE 69407304 D1 DE69407304 D1 DE 69407304D1
Authority
DE
Germany
Prior art keywords
abrasives
producing
same
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69407304T
Other languages
English (en)
Other versions
DE69407304T2 (de
Inventor
Scott Culler
Gregory Berg
Jon Pieper
Richard Olson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Co
Original Assignee
Minnesota Mining and Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Minnesota Mining and Manufacturing Co filed Critical Minnesota Mining and Manufacturing Co
Publication of DE69407304D1 publication Critical patent/DE69407304D1/de
Application granted granted Critical
Publication of DE69407304T2 publication Critical patent/DE69407304T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/001—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as supporting member
    • B24D3/002—Flexible supporting members, e.g. paper, woven, plastic materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/001—Manufacture of flexible abrasive materials
    • B24D11/005—Making abrasive webs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28—Resins or natural or synthetic macromolecular compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/34—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
DE69407304T 1993-09-13 1994-08-04 Schleifmittel, verfahren zum herstellen und zur anwendung derselben. Expired - Lifetime DE69407304T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/121,110 US5378251A (en) 1991-02-06 1993-09-13 Abrasive articles and methods of making and using same
PCT/US1994/008832 WO1995007796A1 (en) 1993-09-13 1994-08-04 Abrasive articles and methods of making and using same

Publications (2)

Publication Number Publication Date
DE69407304D1 true DE69407304D1 (de) 1998-01-22
DE69407304T2 DE69407304T2 (de) 1998-06-10

Family

ID=22394620

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69407304T Expired - Lifetime DE69407304T2 (de) 1993-09-13 1994-08-04 Schleifmittel, verfahren zum herstellen und zur anwendung derselben.

Country Status (11)

Country Link
US (1) US5378251A (de)
EP (1) EP0719200B1 (de)
JP (1) JPH09502666A (de)
KR (1) KR100358480B1 (de)
CN (1) CN1066663C (de)
AU (1) AU676084B2 (de)
BR (1) BR9407537A (de)
CA (1) CA2170990C (de)
DE (1) DE69407304T2 (de)
ES (1) ES2110772T3 (de)
WO (1) WO1995007796A1 (de)

Families Citing this family (198)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5437754A (en) 1992-01-13 1995-08-01 Minnesota Mining And Manufacturing Company Abrasive article having precise lateral spacing between abrasive composite members
JPH08510693A (ja) * 1993-05-26 1996-11-12 ミネソタ マイニング アンド マニュファクチャリング カンパニー 下地に平滑表面を与える方法
US5549962A (en) 1993-06-30 1996-08-27 Minnesota Mining And Manufacturing Company Precisely shaped particles and method of making the same
CA2170989A1 (en) * 1993-09-13 1995-03-23 Timothy L. Hoopman Abrasive article, method of manufacture of same, method of using same for finishing, and a production tool
US5658184A (en) 1993-09-13 1997-08-19 Minnesota Mining And Manufacturing Company Nail tool and method of using same to file, polish and/or buff a fingernail or a toenail
US5632668A (en) * 1993-10-29 1997-05-27 Minnesota Mining And Manufacturing Company Method for the polishing and finishing of optical lenses
CA2134156A1 (en) * 1993-11-22 1995-05-23 Thomas P. Klun Coatable compositions, abrasive articles made therefrom, and methods of making and using same
AU686335B2 (en) * 1994-02-22 1998-02-05 Minnesota Mining And Manufacturing Company Abrasive article, a method of making same, and a method of using same for finishing
JPH09510403A (ja) * 1994-03-16 1997-10-21 ミネソタ・マイニング・アンド・マニュファクチュアリング・カンパニー 研磨物品およびその製造方法
US5562745A (en) * 1994-03-16 1996-10-08 Minnesota Mining And Manufacturing Company Abrasive articles, methods of making abrasive articles, and methods of using abrasive articles
US5958794A (en) * 1995-09-22 1999-09-28 Minnesota Mining And Manufacturing Company Method of modifying an exposed surface of a semiconductor wafer
US5700302A (en) * 1996-03-15 1997-12-23 Minnesota Mining And Manufacturing Company Radiation curable abrasive article with tie coat and method
US6475253B2 (en) * 1996-09-11 2002-11-05 3M Innovative Properties Company Abrasive article and method of making
US6379221B1 (en) 1996-12-31 2002-04-30 Applied Materials, Inc. Method and apparatus for automatically changing a polishing pad in a chemical mechanical polishing system
US5840088A (en) * 1997-01-08 1998-11-24 Norton Company Rotogravure process for production of patterned abrasive surfaces
US5851247A (en) * 1997-02-24 1998-12-22 Minnesota Mining & Manufacturing Company Structured abrasive article adapted to abrade a mild steel workpiece
US6524681B1 (en) 1997-04-08 2003-02-25 3M Innovative Properties Company Patterned surface friction materials, clutch plate members and methods of making and using same
US6194317B1 (en) 1998-04-30 2001-02-27 3M Innovative Properties Company Method of planarizing the upper surface of a semiconductor wafer
US8092707B2 (en) 1997-04-30 2012-01-10 3M Innovative Properties Company Compositions and methods for modifying a surface suited for semiconductor fabrication
US6224465B1 (en) 1997-06-26 2001-05-01 Stuart L. Meyer Methods and apparatus for chemical mechanical planarization using a microreplicated surface
US5942015A (en) * 1997-09-16 1999-08-24 3M Innovative Properties Company Abrasive slurries and abrasive articles comprising multiple abrasive particle grades
US5928394A (en) * 1997-10-30 1999-07-27 Minnesota Mining And Manufacturing Company Durable abrasive articles with thick abrasive coatings
US5897426A (en) 1998-04-24 1999-04-27 Applied Materials, Inc. Chemical mechanical polishing with multiple polishing pads
US6186866B1 (en) 1998-08-05 2001-02-13 3M Innovative Properties Company Abrasive article with separately formed front surface protrusions containing a grinding aid and methods of making and using
US6183346B1 (en) 1998-08-05 2001-02-06 3M Innovative Properties Company Abrasive article with embossed isolation layer and methods of making and using
US6299508B1 (en) 1998-08-05 2001-10-09 3M Innovative Properties Company Abrasive article with integrally molded front surface protrusions containing a grinding aid and methods of making and using
US6299516B1 (en) 1999-09-28 2001-10-09 Applied Materials, Inc. Substrate polishing article
US6422921B1 (en) 1999-10-22 2002-07-23 Applied Materials, Inc. Heat activated detachable polishing pad
US6203403B1 (en) * 1999-10-28 2001-03-20 Premark Rwp Holdings, Inc. Method of polishing stainless steel laminate press plates to a nondirectional finish
US6623341B2 (en) 2000-01-18 2003-09-23 Applied Materials, Inc. Substrate polishing apparatus
US6533645B2 (en) 2000-01-18 2003-03-18 Applied Materials, Inc. Substrate polishing article
US6596041B2 (en) 2000-02-02 2003-07-22 3M Innovative Properties Company Fused AL2O3-MgO-rare earth oxide eutectic abrasive particles, abrasive articles, and methods of making and using the same
US6669749B1 (en) 2000-02-02 2003-12-30 3M Innovative Properties Company Fused abrasive particles, abrasive articles, and methods of making and using the same
US6451077B1 (en) 2000-02-02 2002-09-17 3M Innovative Properties Company Fused abrasive particles, abrasive articles, and methods of making and using the same
US6607570B1 (en) 2000-02-02 2003-08-19 3M Innovative Properties Company Fused Al2O3-rare earth oxide eutectic abrasive particles, abrasive articles, and methods of making and using the same
US6592640B1 (en) 2000-02-02 2003-07-15 3M Innovative Properties Company Fused Al2O3-Y2O3 eutectic abrasive particles, abrasive articles, and methods of making and using the same
US6589305B1 (en) 2000-07-19 2003-07-08 3M Innovative Properties Company Fused aluminum oxycarbide/nitride-Al2O3 • rare earth oxide eutectic abrasive particles, abrasive articles, and methods of making and using the same
US7384438B1 (en) 2000-07-19 2008-06-10 3M Innovative Properties Company Fused Al2O3-Y2O3-ZrO2 eutectic abrasive particles, abrasive articles, and methods of making and using the same
US6454822B1 (en) 2000-07-19 2002-09-24 3M Innovative Properties Company Fused aluminum oxycarbide/nitride-Al2O3·Y2O3 eutectic abrasive particles, abrasive articles, and methods of making and using the same
US6583080B1 (en) 2000-07-19 2003-06-24 3M Innovative Properties Company Fused aluminum oxycarbide/nitride-Al2O3·rare earth oxide eutectic materials
AU2001234697A1 (en) 2000-07-19 2002-02-05 3M Innovative Properties Company Fused al2o3-rare earth oxide-zro2 eutectic materials, abrasive particles, abrasive articles, and methods of making and using the same
US6458731B1 (en) 2000-07-19 2002-10-01 3M Innovative Properties Company Fused aluminum oxycarbide/nitride-AL2O3.Y2O3 eutectic materials
US6666750B1 (en) 2000-07-19 2003-12-23 3M Innovative Properties Company Fused AL2O3-rare earth oxide-ZrO2 eutectic abrasive particles, abrasive articles, and methods of making and using the same
ATE331697T1 (de) 2000-07-19 2006-07-15 3M Innovative Properties Co Geschmolzene eutektische materialien aus aluminiumoxicarbid/-nitrid-aluminiumseltenerdox d,schleifpartikel, schleifgegenstände und verfahren zur herstellung und verwendung derselben
US6582488B1 (en) 2000-07-19 2003-06-24 3M Innovative Properties Company Fused Al2O3-rare earth oxide-ZrO2 eutectic materials
IL144688A0 (en) * 2000-09-01 2002-06-30 Premark Rwp Holdings Inc Polishing of press plates coated with titanium diboride
EP1356008B9 (de) * 2000-10-06 2012-08-15 3M Innovative Properties Company Agglomeriertes schleifmittelkorn und verfahren zu seiner herstellung
ATE462774T1 (de) 2000-10-16 2010-04-15 3M Innovative Properties Co Verfahren zur herstellung von keramischen agglomeratteilchen
US6521004B1 (en) 2000-10-16 2003-02-18 3M Innovative Properties Company Method of making an abrasive agglomerate particle
AU2002211508A1 (en) * 2000-10-16 2002-04-29 3M Innovative Properties Company Method of making an agglomerate particles
US6551366B1 (en) 2000-11-10 2003-04-22 3M Innovative Properties Company Spray drying methods of making agglomerate abrasive grains and abrasive articles
US6620027B2 (en) 2001-01-09 2003-09-16 Applied Materials Inc. Method and apparatus for hard pad polishing
US6811470B2 (en) 2001-07-16 2004-11-02 Applied Materials Inc. Methods and compositions for chemical mechanical polishing shallow trench isolation substrates
WO2003011776A1 (en) * 2001-08-02 2003-02-13 3M Innovative Properties Company Method of making articles from glass and glass ceramic articles so produced
RU2004103084A (ru) * 2001-08-02 2005-06-27 3М Инновейтив Пропертиз Компани (US) Материалы на основе al2o3, оксидов редкоземельных элементов, zro2 и (или) hfo2 и способы их получения и применения
CN100441654C (zh) * 2001-08-02 2008-12-10 3M创新有限公司 磨粒及其制造和使用方法
US7625509B2 (en) * 2001-08-02 2009-12-01 3M Innovative Properties Company Method of making ceramic articles
AU2002367931A1 (en) * 2001-08-02 2003-12-22 3M Innovative Properties Company Alumina-yttria-zirconium oxide/hafnium oxide materials, and methods of making and using the same
KR20040024605A (ko) * 2001-08-02 2004-03-20 쓰리엠 이노베이티브 프로퍼티즈 컴파니 유리-세라믹
US6677239B2 (en) 2001-08-24 2004-01-13 Applied Materials Inc. Methods and compositions for chemical mechanical polishing
US6572666B1 (en) 2001-09-28 2003-06-03 3M Innovative Properties Company Abrasive articles and methods of making the same
US6843944B2 (en) * 2001-11-01 2005-01-18 3M Innovative Properties Company Apparatus and method for capping wide web reclosable fasteners
US6841480B2 (en) * 2002-02-04 2005-01-11 Infineon Technologies Ag Polyelectrolyte dispensing polishing pad, production thereof and method of polishing a substrate
US7199056B2 (en) * 2002-02-08 2007-04-03 Applied Materials, Inc. Low cost and low dishing slurry for polysilicon CMP
US6749653B2 (en) 2002-02-21 2004-06-15 3M Innovative Properties Company Abrasive particles containing sintered, polycrystalline zirconia
US6758734B2 (en) 2002-03-18 2004-07-06 3M Innovative Properties Company Coated abrasive article
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US8056370B2 (en) * 2002-08-02 2011-11-15 3M Innovative Properties Company Method of making amorphous and ceramics via melt spinning
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US7063597B2 (en) 2002-10-25 2006-06-20 Applied Materials Polishing processes for shallow trench isolation substrates
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BR112015009886B1 (pt) 2012-10-31 2021-06-08 3M Innovative Properties Company partículas abrasivas conformadas, métodos de preparação das referidas partículas, artigos abrasivos incluindo as mesmas e método de abrasão de peça de trabalho
US10400146B2 (en) 2013-04-05 2019-09-03 3M Innovative Properties Company Sintered abrasive particles, method of making the same, and abrasive articles including the same
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JPH09502666A (ja) 1997-03-18
KR100358480B1 (ko) 2003-01-24
WO1995007796A1 (en) 1995-03-23
US5378251A (en) 1995-01-03
AU676084B2 (en) 1997-02-27
BR9407537A (pt) 1997-08-26
CA2170990C (en) 2005-03-29
ES2110772T3 (es) 1998-02-16
CA2170990A1 (en) 1995-03-23
EP0719200B1 (de) 1997-12-10
DE69407304T2 (de) 1998-06-10
EP0719200A1 (de) 1996-07-03
CN1066663C (zh) 2001-06-06
CN1130888A (zh) 1996-09-11
AU7554594A (en) 1995-04-03

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