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DE69328323D1 - Energieauflösendes Emissions-Mikroskop-System und Verfahren - Google Patents

Energieauflösendes Emissions-Mikroskop-System und Verfahren

Info

Publication number
DE69328323D1
DE69328323D1 DE69328323T DE69328323T DE69328323D1 DE 69328323 D1 DE69328323 D1 DE 69328323D1 DE 69328323 T DE69328323 T DE 69328323T DE 69328323 T DE69328323 T DE 69328323T DE 69328323 D1 DE69328323 D1 DE 69328323D1
Authority
DE
Germany
Prior art keywords
microscope system
emission microscope
energy resolving
resolving
energy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69328323T
Other languages
English (en)
Inventor
Victoria J Bruce
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Micro Devices Inc
Original Assignee
Advanced Micro Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Micro Devices Inc filed Critical Advanced Micro Devices Inc
Application granted granted Critical
Publication of DE69328323D1 publication Critical patent/DE69328323D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G01R31/311—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of integrated circuits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Tests Of Electronic Circuits (AREA)
DE69328323T 1992-01-29 1993-01-18 Energieauflösendes Emissions-Mikroskop-System und Verfahren Expired - Lifetime DE69328323D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US82773292A 1992-01-29 1992-01-29

Publications (1)

Publication Number Publication Date
DE69328323D1 true DE69328323D1 (de) 2000-05-18

Family

ID=25250004

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69328323T Expired - Lifetime DE69328323D1 (de) 1992-01-29 1993-01-18 Energieauflösendes Emissions-Mikroskop-System und Verfahren

Country Status (4)

Country Link
US (1) US5661520A (de)
EP (1) EP0558177B1 (de)
JP (1) JPH05315424A (de)
DE (1) DE69328323D1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5940545A (en) * 1996-07-18 1999-08-17 International Business Machines Corporation Noninvasive optical method for measuring internal switching and other dynamic parameters of CMOS circuits
JPH1062502A (ja) * 1996-08-21 1998-03-06 Mitsubishi Electric Corp 被測定デバイスの故障解析方法、故障解析装置及び故障解析システム
US6107107A (en) * 1998-03-31 2000-08-22 Advanced Micro Devices, Inc. Analyzing an electronic circuit formed upon a frontside surface of a semiconductor substrate by detecting radiation exiting a backside surface coated with an antireflective material
US6078390A (en) * 1998-05-04 2000-06-20 General Scanning, Inc. Scanning system and method of operation for automatically setting detection sensitivity
US6146014A (en) * 1998-11-04 2000-11-14 Advanced Micro Devices, Inc. Method for laser scanning flip-chip integrated circuits
JP3389914B2 (ja) 2000-03-03 2003-03-24 日本電気株式会社 集積回路の電源電流値のサンプリング方法及び装置、及びその制御プログラムを記録した記憶媒体
US6716683B1 (en) * 2001-06-22 2004-04-06 Advanced Mircor Devices, Inc. Optical analysis for SOI integrated circuits
US6943572B2 (en) * 2002-09-03 2005-09-13 Credence Systems Corporation Apparatus and method for detecting photon emissions from transistors
US6891363B2 (en) * 2002-09-03 2005-05-10 Credence Systems Corporation Apparatus and method for detecting photon emissions from transistors
EP1833379B1 (de) * 2005-01-07 2016-08-24 Stryker European Holdings I, LLC Dreihaken-retraktor mit elastomerschleuse
US9052356B2 (en) 2012-02-15 2015-06-09 International Business Machines Corporation Embedded photon emission calibration (EPEC)
CN113075532A (zh) * 2021-03-25 2021-07-06 长鑫存储技术有限公司 芯片检测方法及芯片检测装置

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4207554A (en) * 1972-08-04 1980-06-10 Med-El Inc. Method and apparatus for automated classification and analysis of cells
US4125828A (en) * 1972-08-04 1978-11-14 Med-El Inc. Method and apparatus for automated classification and analysis of cells
US3795452A (en) * 1973-02-28 1974-03-05 Us Air Force Instrument for automatically inspecting integrated circuit masks for pinholes and spots
US3913128A (en) * 1973-07-13 1975-10-14 Den Bosch Francois J G Van High resolution color tv microscope apparatus
US3975762A (en) * 1975-04-09 1976-08-17 Den Bosch Francois J G Van Spectroscopical method and apparatus using TV scanning techniques
DE3037983C2 (de) * 1980-10-08 1983-03-31 Fa. Carl Zeiss, 7920 Heidenheim Verfahren und Vorrichtung zur lichtinduzierten rastermikroskopischen Darstellung von Probenparametern in ihrer räumlichen Verteilung
US4618938A (en) * 1984-02-22 1986-10-21 Kla Instruments Corporation Method and apparatus for automatic wafer inspection
US4650333A (en) * 1984-04-12 1987-03-17 International Business Machines Corporation System for measuring and detecting printed circuit wiring defects
US4689491A (en) * 1985-04-19 1987-08-25 Datasonics Corp. Semiconductor wafer scanning system
US4688939A (en) * 1985-12-27 1987-08-25 At&T Technologies, Inc. Method and apparatus for inspecting articles
US4680635A (en) * 1986-04-01 1987-07-14 Intel Corporation Emission microscope
US4755874A (en) * 1987-08-31 1988-07-05 Kla Instruments Corporation Emission microscopy system
JP2604607B2 (ja) * 1987-12-09 1997-04-30 三井金属鉱業株式会社 欠陥分布測定法および装置
US4811090A (en) * 1988-01-04 1989-03-07 Hypervision Image emission microscope with improved image processing capability
US5127726A (en) * 1989-05-19 1992-07-07 Eastman Kodak Company Method and apparatus for low angle, high resolution surface inspection
ATE151557T1 (de) * 1990-09-14 1997-04-15 Canon Kk Nachführungsmethode für speichergerät
US5391885A (en) * 1991-04-26 1995-02-21 Sharp Kabushiki Kaisha Method of detecting and analyzing defective portion of semiconductor element and apparatus for detecting and analyzing the same
US5301006A (en) * 1992-01-28 1994-04-05 Advanced Micro Devices, Inc. Emission microscope

Also Published As

Publication number Publication date
JPH05315424A (ja) 1993-11-26
US5661520A (en) 1997-08-26
EP0558177B1 (de) 2000-04-12
EP0558177A1 (de) 1993-09-01

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Legal Events

Date Code Title Description
8332 No legal effect for de