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DE69301861D1 - Opto-mechanische automatische Fokussieranlage und Verfahren - Google Patents

Opto-mechanische automatische Fokussieranlage und Verfahren

Info

Publication number
DE69301861D1
DE69301861D1 DE69301861T DE69301861T DE69301861D1 DE 69301861 D1 DE69301861 D1 DE 69301861D1 DE 69301861 T DE69301861 T DE 69301861T DE 69301861 T DE69301861 T DE 69301861T DE 69301861 D1 DE69301861 D1 DE 69301861D1
Authority
DE
Germany
Prior art keywords
opto
automatic focusing
focusing system
mechanical automatic
mechanical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69301861T
Other languages
English (en)
Other versions
DE69301861T2 (de
Inventor
Shih-Chao Lin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Amray Inc
Original Assignee
Amray Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Amray Inc filed Critical Amray Inc
Publication of DE69301861D1 publication Critical patent/DE69301861D1/de
Application granted granted Critical
Publication of DE69301861T2 publication Critical patent/DE69301861T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/28—Systems for automatic generation of focusing signals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20221—Translation
    • H01J2237/20235—Z movement or adjustment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/21—Focus adjustment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/21—Focus adjustment
    • H01J2237/216—Automatic focusing methods
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/248—Components associated with the control of the tube
    • H01J2237/2482—Optical means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Automatic Focus Adjustment (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE69301861T 1992-04-24 1993-04-26 Opto-mechanische automatische Fokussieranlage und Verfahren Expired - Fee Related DE69301861T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/873,361 US5216235A (en) 1992-04-24 1992-04-24 Opto-mechanical automatic focusing system and method

Publications (2)

Publication Number Publication Date
DE69301861D1 true DE69301861D1 (de) 1996-04-25
DE69301861T2 DE69301861T2 (de) 1996-11-21

Family

ID=25361490

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69301861T Expired - Fee Related DE69301861T2 (de) 1992-04-24 1993-04-26 Opto-mechanische automatische Fokussieranlage und Verfahren

Country Status (4)

Country Link
US (1) US5216235A (de)
EP (1) EP0570726B1 (de)
JP (1) JP2690443B2 (de)
DE (1) DE69301861T2 (de)

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US6094268A (en) * 1989-04-21 2000-07-25 Hitachi, Ltd. Projection exposure apparatus and projection exposure method
US5266790A (en) * 1992-12-21 1993-11-30 Ultratech Stepper, Inc. Focusing technique suitable for use with an unpatterned specular substrate
IL108335A (en) * 1994-01-14 1999-04-11 Laser Ind Ltd Laser microscope adaptor apparatus with auto-focus
US5864394A (en) * 1994-06-20 1999-01-26 Kla-Tencor Corporation Surface inspection system
KR0132269B1 (ko) * 1994-08-24 1998-04-11 이대원 노광장비에서의 자동초점과 자동수평 조절장치 및 조절방법
JP3216474B2 (ja) * 1995-03-30 2001-10-09 株式会社日立製作所 走査型電子顕微鏡
US5932119A (en) * 1996-01-05 1999-08-03 Lazare Kaplan International, Inc. Laser marking system
US5734164A (en) * 1996-11-26 1998-03-31 Amray, Inc. Charged particle apparatus having a canted column
US6034780A (en) * 1997-03-28 2000-03-07 Nikon Corporation Surface position detection apparatus and method
US5831735A (en) * 1997-07-28 1998-11-03 General Electric Company Non-contact optical measurement probe
WO1999014727A1 (es) * 1997-09-16 1999-03-25 Promotec Publicidad, S.L. Lamina informativa y/o grafica, desplegable y conjunto obtenido en base a la misma
US6335532B1 (en) 1998-02-27 2002-01-01 Hitachi, Ltd. Convergent charged particle beam apparatus and inspection method using same
US6407373B1 (en) * 1999-06-15 2002-06-18 Applied Materials, Inc. Apparatus and method for reviewing defects on an object
US6522776B1 (en) * 1999-08-17 2003-02-18 Advanced Micro Devices, Inc. Method for automated determination of reticle tilt in a lithographic system
US6775567B2 (en) * 2000-02-25 2004-08-10 Xenogen Corporation Imaging apparatus
JP3951590B2 (ja) * 2000-10-27 2007-08-01 株式会社日立製作所 荷電粒子線装置
DE10134755B4 (de) * 2001-07-17 2004-08-05 Infineon Technologies Ag Verfahren zur Messung einer charakteristischen Abmessung wenigstens einer Struktur auf Halbleiterwafern
DE10135321B4 (de) * 2001-07-19 2005-11-10 Carl Zeiss Jena Gmbh Mikroskop und Verfahren zur Untersuchung einer Probe mit einem Mikroskop
US6986280B2 (en) * 2002-01-22 2006-01-17 Fei Company Integrated measuring instrument
JP3809803B2 (ja) * 2002-02-15 2006-08-16 オムロン株式会社 変位センサ
US6791095B2 (en) * 2002-03-21 2004-09-14 Hermes-Microvision (Taiwan) Inc. Method and system of using a scanning electron microscope in semiconductor wafer inspection with Z-stage focus
US6774648B1 (en) * 2002-05-23 2004-08-10 Kla-Tencor Technologies Corporation Apparatus and methods for optically detecting defects in voltage contrast test structures
US7180662B2 (en) * 2004-04-12 2007-02-20 Applied Scientific Instrumentation Inc. Stage assembly and method for optical microscope including Z-axis stage and piezoelectric actuator for rectilinear translation of Z stage
EP1777728A1 (de) * 2005-10-20 2007-04-25 Carl Zeiss SMS GmbH Lithographisches System
DE102005061687B4 (de) * 2005-12-21 2008-04-10 Carl Zeiss Nts Gmbh Verfahren und Vorrichtung zur Abstandsmessung sowie Verwendung des Verfahrens und der Vorrichtung zur Topographiebestimmung
JP2009525571A (ja) * 2006-02-03 2009-07-09 カール・ツァイス・エヌティーエス・ゲーエムベーハー 粒子光学式走査顕微鏡のための焦点合わせおよび位置決め補助装置
JP5134826B2 (ja) * 2007-02-07 2013-01-30 株式会社日立ハイテクノロジーズ 荷電粒子線装置
US8008633B2 (en) * 2007-03-30 2011-08-30 Jeol, Ltd. Specimen stage-moving device for charged-particle beam system
DE102008001812B4 (de) * 2008-05-15 2013-05-29 Carl Zeiss Microscopy Gmbh Positioniereinrichtung für ein Teilchenstrahlgerät
WO2011071579A2 (en) 2009-09-18 2011-06-16 California Institute Of Technology Photon induced near field electron microscope and biological imaging system
WO2012006558A2 (en) * 2010-07-08 2012-01-12 Fei Company Charged particle beam processing system with visual and infrared imaging
US9019510B2 (en) * 2011-06-30 2015-04-28 Mingwu Bai Control method and apparatus for positioning a stage
EP3556493B1 (de) * 2013-03-15 2022-05-18 3D Systems, Inc. Lasersinteranlagen mit rückführungspulvervorrichtung und -verfahren
CN107450287B (zh) * 2016-05-31 2019-10-25 上海微电子装备（集团）股份有限公司 调焦调平测量装置及方法
TW201830168A (zh) 2016-12-08 2018-08-16 美商精微超科技公司 用於重構晶圓之微影製程之對焦控制的掃描方法
JP6764953B2 (ja) * 2017-02-13 2020-10-07 株式会社日立ハイテク 荷電粒子線装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1477030A (en) * 1973-12-24 1977-06-22 Jeol Ltd Method and apparatus for the automatic focussing of electron beams in electron optical apparatus
US4230940A (en) * 1977-07-22 1980-10-28 Tokyo Shibaura Denki Kabushiki Kaisha Automatic focusing apparatus
US4207467A (en) * 1978-09-05 1980-06-10 Laser Precision Corp. Film measuring apparatus and method
NL186353C (nl) * 1979-06-12 1990-11-01 Philips Nv Inrichting voor het afbeelden van een maskerpatroon op een substraat voorzien van een opto-elektronisch detektiestelsel voor het bepalen van een afwijking tussen het beeldvlak van een projektielenzenstelsel en het substraatvlak.
JPS5696203A (en) * 1979-12-27 1981-08-04 Fujitsu Ltd Detection device for optical position
JPS58113706A (ja) * 1981-12-26 1983-07-06 Nippon Kogaku Kk <Nikon> 水平位置検出装置
US4468565A (en) * 1981-12-31 1984-08-28 International Business Machines Corporation Automatic focus and deflection correction in E-beam system using optical target height measurements
EP0197221B1 (de) * 1985-03-15 1989-06-28 Kabushiki Kaisha Toshiba Vorrichtung zum Messen der Lage eines Objektes
JPH0754684B2 (ja) * 1987-08-28 1995-06-07 株式会社日立製作所 電子顕微鏡
JPH01255142A (ja) * 1988-04-01 1989-10-12 Nichidenshi Tekunikusu:Kk 電子顕微鏡のオートフォーカス回路
US5124562A (en) * 1989-01-27 1992-06-23 Canon Kabushiki Kaisha Surface position detecting method at a predetermined and plurality of adjacent points
DE4039318A1 (de) * 1990-12-10 1992-06-11 Krupp Gmbh Einrichtung zur erfassung der hoehenlage einer laserbearbeitungsvorrichtung bezueglich eines werkstuecks

Also Published As

Publication number Publication date
EP0570726B1 (de) 1996-03-20
US5216235A (en) 1993-06-01
JPH0636727A (ja) 1994-02-10
JP2690443B2 (ja) 1997-12-10
EP0570726A1 (de) 1993-11-24
DE69301861T2 (de) 1996-11-21

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee