[go: up one dir, main page]

DE69027163D1 - Spatiallichtmodulator und Verfahren - Google Patents

Spatiallichtmodulator und Verfahren

Info

Publication number
DE69027163D1
DE69027163D1 DE69027163T DE69027163T DE69027163D1 DE 69027163 D1 DE69027163 D1 DE 69027163D1 DE 69027163 T DE69027163 T DE 69027163T DE 69027163 T DE69027163 T DE 69027163T DE 69027163 D1 DE69027163 D1 DE 69027163D1
Authority
DE
Germany
Prior art keywords
light modulator
spatial light
spatial
modulator
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69027163T
Other languages
English (en)
Other versions
DE69027163T2 (de
Inventor
Larry J Van Hornbeck
William E Nelson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of DE69027163D1 publication Critical patent/DE69027163D1/de
Application granted granted Critical
Publication of DE69027163T2 publication Critical patent/DE69027163T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
    • G09G3/3433—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices
    • G09G3/346—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices based on modulation of the reflection angle, e.g. micromirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2310/00—Command of the display device
    • G09G2310/06—Details of flat display driving waveforms
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2310/00—Command of the display device
    • G09G2310/06—Details of flat display driving waveforms
    • G09G2310/061—Details of flat display driving waveforms for resetting or blanking

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Theoretical Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Transforming Electric Information Into Light Information (AREA)
DE69027163T 1989-09-15 1990-08-23 Spatiallichtmodulator und Verfahren Expired - Fee Related DE69027163T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US40835589A 1989-09-15 1989-09-15

Publications (2)

Publication Number Publication Date
DE69027163D1 true DE69027163D1 (de) 1996-07-04
DE69027163T2 DE69027163T2 (de) 1996-11-14

Family

ID=23615943

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69027163T Expired - Fee Related DE69027163T2 (de) 1989-09-15 1990-08-23 Spatiallichtmodulator und Verfahren

Country Status (4)

Country Link
EP (1) EP0417523B1 (de)
JP (1) JP2978224B2 (de)
KR (1) KR0170393B1 (de)
DE (1) DE69027163T2 (de)

Families Citing this family (54)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69113150T2 (de) * 1990-06-29 1996-04-04 Texas Instruments Inc Deformierbare Spiegelvorrichtung mit aktualisiertem Raster.
JP2579111B2 (ja) * 1992-12-15 1997-02-05 松下電器産業株式会社 静電力駆動小型光スキャナ
JP3547160B2 (ja) * 1993-01-11 2004-07-28 テキサス インスツルメンツ インコーポレイテツド 空間光変調器
JP3318904B2 (ja) * 1993-07-14 2002-08-26 テキサス インスツルメンツ インコーポレイテツド プロジエクタ装置
US5658698A (en) * 1994-01-31 1997-08-19 Canon Kabushiki Kaisha Microstructure, process for manufacturing thereof and devices incorporating the same
JP3182301B2 (ja) * 1994-11-07 2001-07-03 キヤノン株式会社 マイクロ構造体及びその形成法
US5764208A (en) * 1995-11-02 1998-06-09 Texas Instruments Incorporated Reset scheme for spatial light modulators
US5646772A (en) * 1996-05-10 1997-07-08 Lucent Technologies Inc. Methods and apparatus for a multi-electrode micromechanical optical modulator
US7471444B2 (en) 1996-12-19 2008-12-30 Idc, Llc Interferometric modulation of radiation
US5786927A (en) * 1997-03-12 1998-07-28 Lucent Technologies Inc. Gas-damped micromechanical structure
WO1999052006A2 (en) 1998-04-08 1999-10-14 Etalon, Inc. Interferometric modulation of radiation
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
WO2003007049A1 (en) 1999-10-05 2003-01-23 Iridigm Display Corporation Photonic mems and structures
US6608711B2 (en) * 2000-03-03 2003-08-19 Axsun Technologies, Inc. Silicon on insulator optical membrane structure for fabry-perot MOEMS filter
JP3740444B2 (ja) 2001-07-11 2006-02-01 キヤノン株式会社 光偏向器、それを用いた光学機器、ねじれ揺動体
FR2835516B1 (fr) * 2002-02-01 2005-04-01 Opsitech Optical System Chip Structure integree a partie mobile, en particulier structure optique integree
US6666561B1 (en) * 2002-10-28 2003-12-23 Hewlett-Packard Development Company, L.P. Continuously variable analog micro-mirror device
US7142346B2 (en) 2003-12-09 2006-11-28 Idc, Llc System and method for addressing a MEMS display
US7161728B2 (en) 2003-12-09 2007-01-09 Idc, Llc Area array modulation and lead reduction in interferometric modulators
US7072090B2 (en) * 2004-04-22 2006-07-04 Micronic Laser Systems Ab Addressing of an SLM
KR100826490B1 (ko) 2004-04-22 2008-05-02 마이크로닉 레이저 시스템즈 에이비 Ｓｌｍ의 개선된 어드레싱
US7499208B2 (en) 2004-08-27 2009-03-03 Udc, Llc Current mode display driver circuit realization feature
US7551159B2 (en) 2004-08-27 2009-06-23 Idc, Llc System and method of sensing actuation and release voltages of an interferometric modulator
US7515147B2 (en) 2004-08-27 2009-04-07 Idc, Llc Staggered column drive circuit systems and methods
US7560299B2 (en) 2004-08-27 2009-07-14 Idc, Llc Systems and methods of actuating MEMS display elements
US7889163B2 (en) 2004-08-27 2011-02-15 Qualcomm Mems Technologies, Inc. Drive method for MEMS devices
US7843410B2 (en) 2004-09-27 2010-11-30 Qualcomm Mems Technologies, Inc. Method and device for electrically programmable display
US7724993B2 (en) 2004-09-27 2010-05-25 Qualcomm Mems Technologies, Inc. MEMS switches with deforming membranes
US8310441B2 (en) 2004-09-27 2012-11-13 Qualcomm Mems Technologies, Inc. Method and system for writing data to MEMS display elements
US7675669B2 (en) 2004-09-27 2010-03-09 Qualcomm Mems Technologies, Inc. Method and system for driving interferometric modulators
US7486429B2 (en) 2004-09-27 2009-02-03 Idc, Llc Method and device for multistate interferometric light modulation
US7310179B2 (en) 2004-09-27 2007-12-18 Idc, Llc Method and device for selective adjustment of hysteresis window
US7679627B2 (en) 2004-09-27 2010-03-16 Qualcomm Mems Technologies, Inc. Controller and driver features for bi-stable display
US7532195B2 (en) 2004-09-27 2009-05-12 Idc, Llc Method and system for reducing power consumption in a display
US7345805B2 (en) 2004-09-27 2008-03-18 Idc, Llc Interferometric modulator array with integrated MEMS electrical switches
US7545550B2 (en) 2004-09-27 2009-06-09 Idc, Llc Systems and methods of actuating MEMS display elements
US7626581B2 (en) 2004-09-27 2009-12-01 Idc, Llc Device and method for display memory using manipulation of mechanical response
US7136213B2 (en) 2004-09-27 2006-11-14 Idc, Llc Interferometric modulators having charge persistence
US7446927B2 (en) 2004-09-27 2008-11-04 Idc, Llc MEMS switch with set and latch electrodes
US8878825B2 (en) 2004-09-27 2014-11-04 Qualcomm Mems Technologies, Inc. System and method for providing a variable refresh rate of an interferometric modulator display
US7920136B2 (en) 2005-05-05 2011-04-05 Qualcomm Mems Technologies, Inc. System and method of driving a MEMS display device
EP1878001A1 (de) 2005-05-05 2008-01-16 QUALCOMM Incorporated, Inc. Dynamische treiber-ic und anzeigetafelkonfiguration
US7948457B2 (en) 2005-05-05 2011-05-24 Qualcomm Mems Technologies, Inc. Systems and methods of actuating MEMS display elements
US7355779B2 (en) 2005-09-02 2008-04-08 Idc, Llc Method and system for driving MEMS display elements
US8391630B2 (en) 2005-12-22 2013-03-05 Qualcomm Mems Technologies, Inc. System and method for power reduction when decompressing video streams for interferometric modulator displays
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US8194056B2 (en) 2006-02-09 2012-06-05 Qualcomm Mems Technologies Inc. Method and system for writing data to MEMS display elements
US8049713B2 (en) 2006-04-24 2011-11-01 Qualcomm Mems Technologies, Inc. Power consumption optimized display update
US7702192B2 (en) 2006-06-21 2010-04-20 Qualcomm Mems Technologies, Inc. Systems and methods for driving MEMS display
US7593094B2 (en) * 2006-06-26 2009-09-22 Asml Netherlands B.V. Patterning device
US7777715B2 (en) 2006-06-29 2010-08-17 Qualcomm Mems Technologies, Inc. Passive circuits for de-multiplexing display inputs
US8736590B2 (en) 2009-03-27 2014-05-27 Qualcomm Mems Technologies, Inc. Low voltage driver scheme for interferometric modulators
US8723277B2 (en) * 2012-02-29 2014-05-13 Infineon Technologies Ag Tunable MEMS device and method of making a tunable MEMS device
EP3689918A4 (de) 2017-09-29 2021-09-15 Toho Titanium CO., LTD. Katalysator für olefinpolymerisation, verfahren zur herstellung eines katalysators für die olefinpolymerisation, verfahren zur herstellung eines olefinpolymers und propylen-olefin-copolymer

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4317611A (en) * 1980-05-19 1982-03-02 International Business Machines Corporation Optical ray deflection apparatus
EP0332953B1 (de) * 1988-03-16 1993-09-15 Texas Instruments Incorporated Spatialer Lichtmodulator mit Anwendungsverfahren

Also Published As

Publication number Publication date
EP0417523B1 (de) 1996-05-29
DE69027163T2 (de) 1996-11-14
EP0417523A2 (de) 1991-03-20
JPH03174112A (ja) 1991-07-29
KR0170393B1 (ko) 1999-03-20
JP2978224B2 (ja) 1999-11-15
KR910006750A (ko) 1991-04-30
EP0417523A3 (en) 1992-01-22

Similar Documents

Publication Publication Date Title
DE69027163D1 (de) Spatiallichtmodulator und Verfahren
KR890015058A (ko) 공간 광 변조기 및 변조 방법
DE69125711D1 (de) Hochreflektive biogitter und verfahren
KR910006751A (ko) 공간 광 변조기
DE69419423D1 (de) Verfahren zur verkapselung und daraus hergestellte mikrokapseln
DE68928033D1 (de) Stereosynthesizer und entsprechendes verfahren
EP0433982A3 (en) Spatial light modulator exposure unit and method of operation
DE69133152D1 (de) Programmierbare Warnleuchteneinrichtung und Verfahren
DE68925529D1 (de) Abschätzung-positionierungssystem und verfahren
DE69033579D1 (de) Bildverkleinerungsgerät und Verfahren
DE69125888D1 (de) Verfahren zur Lichtmodulation und optischer Modulator
DE69031155D1 (de) Taktverteilsystem und Verfahren
DE69119787D1 (de) Apherese verfahren und vorrichtung dafuer
DE69327454D1 (de) Analytisches verfahren
DE69033696D1 (de) Optischer Modulator
DE69326299D1 (de) Räumlicher Lichtmodulator und seine Herstellungsverfahren
DE69317567D1 (de) Verfahren und gerät zur kennzeichnung von farbausgabeeinrichtungen
ATA132989A (de) Verfahren zur reduktion von farbstoffen
DE69431453D1 (de) Räumlicher Lichtmodulator und Ansteuerungsverfahren
DE69224468D1 (de) Räumlicher Lichtmodulator und Herstellungsverfahren
DE69321908D1 (de) Athermalisiertes optisches System und Verfahren
DE69411159D1 (de) Strömungsleitende drehkupplung und verfahren
DE69311670D1 (de) Gefärbte Gläser und Verfahren
KR910700140A (ko) 타이어 구성 재료 첩부방법 및 이에 사용하는 장치
DE69326663D1 (de) Unterschneidungsverfahren

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee