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KR910006750A - 공간 광 변조기 및 변조 방법 - Google Patents

공간 광 변조기 및 변조 방법

Info

Publication number
KR910006750A
KR910006750A KR1019900014535A KR900014535A KR910006750A KR 910006750 A KR910006750 A KR 910006750A KR 1019900014535 A KR1019900014535 A KR 1019900014535A KR 900014535 A KR900014535 A KR 900014535A KR 910006750 A KR910006750 A KR 910006750A
Authority
KR
South Korea
Prior art keywords
light modulator
spatial light
modulation method
modulation
spatial
Prior art date
Application number
KR1019900014535A
Other languages
English (en)
Other versions
KR0170393B1 (ko
Inventor
제이. 혼벡 래리
이. 넬슨 윌리암
Original Assignee
텍사스 인스트루먼츠 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 텍사스 인스트루먼츠 인코포레이티드 filed Critical 텍사스 인스트루먼츠 인코포레이티드
Publication of KR910006750A publication Critical patent/KR910006750A/ko
Application granted granted Critical
Publication of KR0170393B1 publication Critical patent/KR0170393B1/ko

Links

Classifications

    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09GARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/34Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
    • G09G3/3433Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices
    • G09G3/346Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices based on modulation of the reflection angle, e.g. micromirrors
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09GARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2310/00Command of the display device
    • G09G2310/06Details of flat display driving waveforms
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09GARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2310/00Command of the display device
    • G09G2310/06Details of flat display driving waveforms
    • G09G2310/061Details of flat display driving waveforms for resetting or blanking

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Theoretical Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Transforming Electric Information Into Light Information (AREA)
KR1019900014535A 1989-09-15 1990-09-14 공간 광 변조기 및 변조 방법 KR0170393B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US40835589A 1989-09-15 1989-09-15
US408355 1989-09-15

Publications (2)

Publication Number Publication Date
KR910006750A true KR910006750A (ko) 1991-04-30
KR0170393B1 KR0170393B1 (ko) 1999-03-20

Family

ID=23615943

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019900014535A KR0170393B1 (ko) 1989-09-15 1990-09-14 공간 광 변조기 및 변조 방법

Country Status (4)

Country Link
EP (1) EP0417523B1 (ko)
JP (1) JP2978224B2 (ko)
KR (1) KR0170393B1 (ko)
DE (1) DE69027163T2 (ko)

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DE69113150T2 (de) * 1990-06-29 1996-04-04 Texas Instruments Inc Deformierbare Spiegelvorrichtung mit aktualisiertem Raster.
JP2579111B2 (ja) * 1992-12-15 1997-02-05 松下電器産業株式会社 静電力駆動小型光スキャナ
JP3547160B2 (ja) * 1993-01-11 2004-07-28 テキサス インスツルメンツ インコーポレイテツド 空間光変調器
JP3318904B2 (ja) * 1993-07-14 2002-08-26 テキサス インスツルメンツ インコーポレイテツド プロジエクタ装置
US5658698A (en) * 1994-01-31 1997-08-19 Canon Kabushiki Kaisha Microstructure, process for manufacturing thereof and devices incorporating the same
JP3182301B2 (ja) * 1994-11-07 2001-07-03 キヤノン株式会社 マイクロ構造体及びその形成法
US5764208A (en) * 1995-11-02 1998-06-09 Texas Instruments Incorporated Reset scheme for spatial light modulators
US5646772A (en) * 1996-05-10 1997-07-08 Lucent Technologies Inc. Methods and apparatus for a multi-electrode micromechanical optical modulator
US7471444B2 (en) 1996-12-19 2008-12-30 Idc, Llc Interferometric modulation of radiation
US5786927A (en) * 1997-03-12 1998-07-28 Lucent Technologies Inc. Gas-damped micromechanical structure
WO1999052006A2 (en) 1998-04-08 1999-10-14 Etalon, Inc. Interferometric modulation of radiation
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
WO2003007049A1 (en) 1999-10-05 2003-01-23 Iridigm Display Corporation Photonic mems and structures
US6608711B2 (en) * 2000-03-03 2003-08-19 Axsun Technologies, Inc. Silicon on insulator optical membrane structure for fabry-perot MOEMS filter
JP3740444B2 (ja) 2001-07-11 2006-02-01 キヤノン株式会社 光偏向器、それを用いた光学機器、ねじれ揺動体
FR2835516B1 (fr) * 2002-02-01 2005-04-01 Opsitech Optical System Chip Structure integree a partie mobile, en particulier structure optique integree
US6666561B1 (en) * 2002-10-28 2003-12-23 Hewlett-Packard Development Company, L.P. Continuously variable analog micro-mirror device
US7142346B2 (en) 2003-12-09 2006-11-28 Idc, Llc System and method for addressing a MEMS display
US7161728B2 (en) 2003-12-09 2007-01-09 Idc, Llc Area array modulation and lead reduction in interferometric modulators
US7072090B2 (en) * 2004-04-22 2006-07-04 Micronic Laser Systems Ab Addressing of an SLM
KR100826490B1 (ko) 2004-04-22 2008-05-02 마이크로닉 레이저 시스템즈 에이비 Slm의 개선된 어드레싱
US7499208B2 (en) 2004-08-27 2009-03-03 Udc, Llc Current mode display driver circuit realization feature
US7551159B2 (en) 2004-08-27 2009-06-23 Idc, Llc System and method of sensing actuation and release voltages of an interferometric modulator
US7515147B2 (en) 2004-08-27 2009-04-07 Idc, Llc Staggered column drive circuit systems and methods
US7560299B2 (en) 2004-08-27 2009-07-14 Idc, Llc Systems and methods of actuating MEMS display elements
US7889163B2 (en) 2004-08-27 2011-02-15 Qualcomm Mems Technologies, Inc. Drive method for MEMS devices
US7843410B2 (en) 2004-09-27 2010-11-30 Qualcomm Mems Technologies, Inc. Method and device for electrically programmable display
US7724993B2 (en) 2004-09-27 2010-05-25 Qualcomm Mems Technologies, Inc. MEMS switches with deforming membranes
US8310441B2 (en) 2004-09-27 2012-11-13 Qualcomm Mems Technologies, Inc. Method and system for writing data to MEMS display elements
US7675669B2 (en) 2004-09-27 2010-03-09 Qualcomm Mems Technologies, Inc. Method and system for driving interferometric modulators
US7486429B2 (en) 2004-09-27 2009-02-03 Idc, Llc Method and device for multistate interferometric light modulation
US7310179B2 (en) 2004-09-27 2007-12-18 Idc, Llc Method and device for selective adjustment of hysteresis window
US7679627B2 (en) 2004-09-27 2010-03-16 Qualcomm Mems Technologies, Inc. Controller and driver features for bi-stable display
US7532195B2 (en) 2004-09-27 2009-05-12 Idc, Llc Method and system for reducing power consumption in a display
US7345805B2 (en) 2004-09-27 2008-03-18 Idc, Llc Interferometric modulator array with integrated MEMS electrical switches
US7545550B2 (en) 2004-09-27 2009-06-09 Idc, Llc Systems and methods of actuating MEMS display elements
US7626581B2 (en) 2004-09-27 2009-12-01 Idc, Llc Device and method for display memory using manipulation of mechanical response
US7136213B2 (en) 2004-09-27 2006-11-14 Idc, Llc Interferometric modulators having charge persistence
US7446927B2 (en) 2004-09-27 2008-11-04 Idc, Llc MEMS switch with set and latch electrodes
US8878825B2 (en) 2004-09-27 2014-11-04 Qualcomm Mems Technologies, Inc. System and method for providing a variable refresh rate of an interferometric modulator display
US7920136B2 (en) 2005-05-05 2011-04-05 Qualcomm Mems Technologies, Inc. System and method of driving a MEMS display device
EP1878001A1 (en) 2005-05-05 2008-01-16 QUALCOMM Incorporated, Inc. Dynamic driver ic and display panel configuration
US7948457B2 (en) 2005-05-05 2011-05-24 Qualcomm Mems Technologies, Inc. Systems and methods of actuating MEMS display elements
US7355779B2 (en) 2005-09-02 2008-04-08 Idc, Llc Method and system for driving MEMS display elements
US8391630B2 (en) 2005-12-22 2013-03-05 Qualcomm Mems Technologies, Inc. System and method for power reduction when decompressing video streams for interferometric modulator displays
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US8194056B2 (en) 2006-02-09 2012-06-05 Qualcomm Mems Technologies Inc. Method and system for writing data to MEMS display elements
US8049713B2 (en) 2006-04-24 2011-11-01 Qualcomm Mems Technologies, Inc. Power consumption optimized display update
US7702192B2 (en) 2006-06-21 2010-04-20 Qualcomm Mems Technologies, Inc. Systems and methods for driving MEMS display
US7593094B2 (en) * 2006-06-26 2009-09-22 Asml Netherlands B.V. Patterning device
US7777715B2 (en) 2006-06-29 2010-08-17 Qualcomm Mems Technologies, Inc. Passive circuits for de-multiplexing display inputs
US8736590B2 (en) 2009-03-27 2014-05-27 Qualcomm Mems Technologies, Inc. Low voltage driver scheme for interferometric modulators
US8723277B2 (en) * 2012-02-29 2014-05-13 Infineon Technologies Ag Tunable MEMS device and method of making a tunable MEMS device
EP3689918A4 (en) 2017-09-29 2021-09-15 Toho Titanium CO., LTD. OLEFIN POLYMERIZATION CATALYST, A METHOD FOR MANUFACTURING A CATALYST FOR OLEFIN POLYMERIZATION, A METHOD FOR MANUFACTURING AN OLEFINE POLYMER, AND PROPYLENE-OLEFINE COPOLYMER

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US4317611A (en) * 1980-05-19 1982-03-02 International Business Machines Corporation Optical ray deflection apparatus
EP0332953B1 (en) * 1988-03-16 1993-09-15 Texas Instruments Incorporated Spatial light modulator and method

Also Published As

Publication number Publication date
EP0417523B1 (en) 1996-05-29
DE69027163D1 (de) 1996-07-04
DE69027163T2 (de) 1996-11-14
EP0417523A2 (en) 1991-03-20
JPH03174112A (ja) 1991-07-29
KR0170393B1 (ko) 1999-03-20
JP2978224B2 (ja) 1999-11-15
EP0417523A3 (en) 1992-01-22

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