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DE69025237D1 - Supraleitende Mehrlagen-Schaltung und Verfahren zu deren Herstellung - Google Patents

Supraleitende Mehrlagen-Schaltung und Verfahren zu deren Herstellung

Info

Publication number
DE69025237D1
DE69025237D1 DE69025237T DE69025237T DE69025237D1 DE 69025237 D1 DE69025237 D1 DE 69025237D1 DE 69025237 T DE69025237 T DE 69025237T DE 69025237 T DE69025237 T DE 69025237T DE 69025237 D1 DE69025237 D1 DE 69025237D1
Authority
DE
Germany
Prior art keywords
production
multilayer circuit
superconducting multilayer
superconducting
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69025237T
Other languages
English (en)
Other versions
DE69025237T2 (de
Inventor
Shoji Shiga
Nakahiro Harada
Kiyoshi C O The Furuk Yamamoto
Koki Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Furukawa Electric Co Ltd
Original Assignee
Furukawa Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Furukawa Electric Co Ltd filed Critical Furukawa Electric Co Ltd
Publication of DE69025237D1 publication Critical patent/DE69025237D1/de
Application granted granted Critical
Publication of DE69025237T2 publication Critical patent/DE69025237T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0661—Processes performed after copper oxide formation, e.g. patterning
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0884—Treatment of superconductor layers by irradiation, e.g. ion-beam, electron-beam, laser beam or X-rays
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/80—Constructional details
    • H10N60/85—Superconducting active materials
    • H10N60/855—Ceramic superconductors
    • H10N60/857—Ceramic superconductors comprising copper oxide
    • H10N60/858—Ceramic superconductors comprising copper oxide having multilayered structures, e.g. superlattices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/701—Coated or thin film device, i.e. active or passive
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/701—Coated or thin film device, i.e. active or passive
    • Y10S505/702—Josephson junction present
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/701—Coated or thin film device, i.e. active or passive
    • Y10S505/703—Microelectronic device with superconducting conduction line
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
    • Y10S505/73—Vacuum treating or coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
    • Y10S505/73—Vacuum treating or coating
    • Y10S505/731—Sputter coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
    • Y10S505/73—Vacuum treating or coating
    • Y10S505/732—Evaporative coating with superconducting material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
    • Y10S505/742—Annealing

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
DE69025237T 1989-07-25 1990-07-24 Supraleitende Mehrlagen-Schaltung und Verfahren zu deren Herstellung Expired - Fee Related DE69025237T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1191956A JPH0355889A (ja) 1989-07-25 1989-07-25 超電導多層回路の製造方法

Publications (2)

Publication Number Publication Date
DE69025237D1 true DE69025237D1 (de) 1996-03-21
DE69025237T2 DE69025237T2 (de) 1996-07-25

Family

ID=16283245

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69025237T Expired - Fee Related DE69025237T2 (de) 1989-07-25 1990-07-24 Supraleitende Mehrlagen-Schaltung und Verfahren zu deren Herstellung

Country Status (5)

Country Link
US (1) US5194419A (de)
EP (1) EP0410374B1 (de)
JP (1) JPH0355889A (de)
KR (1) KR940002412B1 (de)
DE (1) DE69025237T2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2051048C (en) * 1990-09-10 1996-07-02 Takao Nakamura Superconducting device having a reduced thickness of oxide superconducting layer and method for manufacturing the same
EP0671764A2 (de) * 1990-10-31 1995-09-13 Sumitomo Electric Industries, Ltd. Verfahren zur Herstellung einer supraleitenden Schaltung
DE69219816T2 (de) * 1991-03-11 1997-10-23 Sumitomo Electric Industries Supraleitende Dünnschicht mit mindestens einer isolierten Region, gebildet aus oxydisch supraleitendem Material und Verfahren zu ihrer Herstellung
JP2827572B2 (ja) * 1991-05-24 1998-11-25 日本電気株式会社 層状超伝導体回路とその製造方法
EP0545811B1 (de) * 1991-12-02 1997-04-09 Sumitomo Electric Industries, Ltd. Supraleitende Mehrschichtenverschaltung aus supraleitendem oxidischen Material und Verfahren zu ihrer Herstellung
WO1994027329A1 (en) * 1993-05-14 1994-11-24 The University Of British Columbia Fabrication of oxide superconductor devices by impurity ion implantation
JPH07263767A (ja) 1994-01-14 1995-10-13 Trw Inc イオンインプランテーションを用いたプレーナ型の高温超伝導集積回路
US6188919B1 (en) 1999-05-19 2001-02-13 Trw Inc. Using ion implantation to create normal layers in superconducting-normal-superconducting Josephson junctions
EP2045009A4 (de) * 2006-07-05 2012-12-05 Cataler Corp Katalysator zur reinigung von abgas und herstellungsverfahren dafür

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0282360B1 (de) * 1987-03-12 1995-11-02 Semiconductor Energy Laboratory Co., Ltd. Verfahren zur Herstellung von Komponenten aus supraleitenden oxidkeramischen Materialien
DE3854238T2 (de) * 1987-04-08 1996-03-21 Hitachi Ltd Verfahren zur Herstellung eines supraleitenden Elements.
JPS63250880A (ja) * 1987-04-08 1988-10-18 Semiconductor Energy Lab Co Ltd 酸化物超電導材料
JPH0634418B2 (ja) * 1987-09-07 1994-05-02 株式会社半導体エネルギー研究所 超電導素子の作製方法
DE3851462T2 (de) * 1987-05-18 1995-05-04 Sumitomo Electric Industries Verfahren zur Herstellung eines supraleitenden Materials des Oxydverbundtyps.
JPS63291436A (ja) * 1987-05-25 1988-11-29 Hitachi Ltd 半導体装置の製造方法
JPS63304678A (ja) * 1987-06-03 1988-12-12 Fujikura Ltd 酸化物超電導回路の製造方法
DE3889015T2 (de) * 1987-06-22 1994-10-13 Sumitomo Electric Industries Verfahren zur Herstellung einer supraleitenden Schaltung.
JPS6443916A (en) * 1987-08-08 1989-02-16 Mitsubishi Electric Corp Characteristic control for compound system superconductor
JPS6489342A (en) * 1987-09-29 1989-04-03 Sony Corp Manufacture of semiconductor device
JPH01181444A (ja) * 1988-01-08 1989-07-19 Matsushita Electric Ind Co Ltd 半導体装置及びその製造方法
JPH01183138A (ja) * 1988-01-18 1989-07-20 Fujitsu Ltd 半導体装置
JPH01250880A (ja) * 1988-03-31 1989-10-05 Hoya Corp 角速度計
EP0358879A3 (de) * 1988-09-13 1991-02-27 Hewlett-Packard Company Verfahren zur Herstellung hochintegrierter Verbindungen

Also Published As

Publication number Publication date
US5194419A (en) 1993-03-16
EP0410374B1 (de) 1996-02-07
EP0410374A3 (en) 1991-07-03
KR940002412B1 (ko) 1994-03-24
DE69025237T2 (de) 1996-07-25
KR910003822A (ko) 1991-02-28
EP0410374A2 (de) 1991-01-30
JPH0355889A (ja) 1991-03-11

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee