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DE68921258D1 - Halbleitereinrichtung mit hoher Durchbruchsspannung. - Google Patents

Halbleitereinrichtung mit hoher Durchbruchsspannung.

Info

Publication number
DE68921258D1
DE68921258D1 DE68921258T DE68921258T DE68921258D1 DE 68921258 D1 DE68921258 D1 DE 68921258D1 DE 68921258 T DE68921258 T DE 68921258T DE 68921258 T DE68921258 T DE 68921258T DE 68921258 D1 DE68921258 D1 DE 68921258D1
Authority
DE
Germany
Prior art keywords
semiconductor device
breakdown voltage
high breakdown
voltage semiconductor
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68921258T
Other languages
English (en)
Other versions
DE68921258T2 (de
Inventor
Mitsuru Kekura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Meidensha Electric Manufacturing Co Ltd
Original Assignee
Meidensha Electric Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Meidensha Electric Manufacturing Co Ltd filed Critical Meidensha Electric Manufacturing Co Ltd
Application granted granted Critical
Publication of DE68921258D1 publication Critical patent/DE68921258D1/de
Publication of DE68921258T2 publication Critical patent/DE68921258T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/102Constructional design considerations for preventing surface leakage or controlling electric field concentration
    • H10D62/103Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices
    • H10D62/104Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices having particular shapes of the bodies at or near reverse-biased junctions, e.g. having bevels or moats
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304Mechanical treatment, e.g. grinding, polishing, cutting
    • H01L21/3046Mechanical treatment, e.g. grinding, polishing, cutting using blasting, e.g. sand-blasting

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Thyristors (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Bipolar Transistors (AREA)
DE68921258T 1988-06-20 1989-06-20 Halbleitereinrichtung mit hoher Durchbruchsspannung. Expired - Fee Related DE68921258T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63151501A JPH01318263A (ja) 1988-06-20 1988-06-20 半導体素子

Publications (2)

Publication Number Publication Date
DE68921258D1 true DE68921258D1 (de) 1995-03-30
DE68921258T2 DE68921258T2 (de) 1995-06-22

Family

ID=15519890

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68921258T Expired - Fee Related DE68921258T2 (de) 1988-06-20 1989-06-20 Halbleitereinrichtung mit hoher Durchbruchsspannung.

Country Status (5)

Country Link
US (1) US5132769A (de)
EP (1) EP0350670B1 (de)
JP (1) JPH01318263A (de)
KR (1) KR970003899B1 (de)
DE (1) DE68921258T2 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6037632A (en) * 1995-11-06 2000-03-14 Kabushiki Kaisha Toshiba Semiconductor device
WO1998013881A1 (en) * 1996-09-24 1998-04-02 Mitsubishi Denki Kabushiki Kaisha Semiconductor device and production method thereof

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1091656A (en) * 1963-05-13 1967-11-22 Standard Telephones Cables Ltd Improvements in or relating to semiconductor devices
GB1089407A (en) * 1965-10-13 1967-11-01 Ass Elect Ind Improvements in thyristors
DE1589783B2 (de) * 1966-04-15 1977-08-04 Fuji Electric Co, Ltd, Kawasaki, Kanagawa (Japan) Halbleiterbauelement mit einem halbleiterkoerper mit einer p hoch + nn hoch + = oder n hoch + pp hoch + =schichtenfolge
GB1145392A (en) * 1967-03-08 1969-03-12 Ass Elect Ind Improvements in semi-conductor rectifiers
JPS5289474A (en) * 1976-01-22 1977-07-27 Toshiba Corp Reach-through type semiconductor device
JPS5933272B2 (ja) * 1978-06-19 1984-08-14 株式会社日立製作所 半導体装置
EP0144876B1 (de) * 1983-12-07 1988-03-09 BBC Brown Boveri AG Halbleiterbauelement
JPS62261172A (ja) * 1986-05-08 1987-11-13 Meidensha Electric Mfg Co Ltd 半導体素子の接合面加工方法

Also Published As

Publication number Publication date
EP0350670B1 (de) 1995-02-22
DE68921258T2 (de) 1995-06-22
US5132769A (en) 1992-07-21
KR970003899B1 (ko) 1997-03-22
JPH01318263A (ja) 1989-12-22
EP0350670A3 (en) 1990-12-05
KR910001878A (ko) 1991-01-31
EP0350670A2 (de) 1990-01-17

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee