DE60110685D1 - Montageanordnung für Ventile - Google Patents

Montageanordnung für Ventile

Info

Publication number: DE60110685D1
Authority: DE; Germany
Prior art keywords: valves; mounting arrangement; mounting; arrangement
Prior art date: 2000-06-30
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

DE60110685T

Other languages

English (en)

Other versions

DE60110685T2 (de

Inventor

George Hoshi

Tsuneyuki Okabe

Kenichi Goshima

Hideo Kobayashi

Akinori Nagaya

C Fujikin Incorporated Yamaji

Kazuhiro Yoshikawa

Yuji Kawano

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Tokyo Electron Ltd

CKD Corp

Fujikin Inc

Original Assignee

Tokyo Electron Ltd

CKD Corp

Fujikin Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2000-06-30

Filing date

2001-07-02

Publication date

2005-06-16

2001-07-02 Application filed by Tokyo Electron Ltd, CKD Corp, Fujikin Inc filed Critical Tokyo Electron Ltd

2005-06-16 Application granted granted Critical

2005-06-16 Publication of DE60110685D1 publication Critical patent/DE60110685D1/de

2006-01-26 Publication of DE60110685T2 publication Critical patent/DE60110685T2/de

2021-07-03 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/003—Housing formed from a plurality of the same valve elements
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B1/00—Installations or systems with accumulators; Supply reservoir or sump assemblies
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
- F16B2200/00—Constructional details of connections not covered for in other groups of this subclass
- F16B2200/30—Dovetail-like connections
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
- F16B2200/00—Constructional details of connections not covered for in other groups of this subclass
- F16B2200/40—Clamping arrangements where clamping parts are received in recesses of elements to be connected
- F16B2200/403—Threaded clamping parts
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/877—With flow control means for branched passages
- Y10T137/87885—Sectional block structure

Landscapes

Engineering & Computer Science (AREA)
General Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
Physics & Mathematics (AREA)
Fluid Mechanics (AREA)
Valve Housings (AREA)
Fluid-Pressure Circuits (AREA)
Pipeline Systems (AREA)
Quick-Acting Or Multi-Walled Pipe Joints (AREA)

DE2001610685 2000-06-30 2001-07-02 Montageanordnung für Ventile Expired - Lifetime DE60110685T2 (de)

Applications Claiming Priority (4)

Application Number	Priority Date	Filing Date	Title
JP2000200012		2000-06-30
JP2000200012		2000-06-30
JP2000343709		2000-11-10
JP2000343709		2000-11-10

Publications (2)

Publication Number	Publication Date
DE60110685D1 true DE60110685D1 (de)	2005-06-16
DE60110685T2 DE60110685T2 (de)	2006-01-26

Family

ID=26595204

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE2001610685 Expired - Lifetime DE60110685T2 (de)	2000-06-30	2001-07-02	Montageanordnung für Ventile

Country Status (6)

Country	Link
US (1)	US8973615B2 (de)
EP (1)	EP1167846B1 (de)
JP (1)	JP3482601B2 (de)
KR (1)	KR100750224B1 (de)
DE (1)	DE60110685T2 (de)
TW (1)	TW544751B (de)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP3482601B2 (ja)	2000-06-30	2003-12-22	東京エレクトロン株式会社	流体制御装置
US6776192B2 (en) *	2002-04-12	2004-08-17	Mead Fluid Dynamics, Inc.	Pneumatic valve and manifold mounting system
JP2004183771A (ja) *	2002-12-03	2004-07-02	Fujikin Inc	流体制御装置
WO2004088772A2 (en) *	2003-03-26	2004-10-14	Swagelok Company	Modular fluid components and assembly
CN100408900C (zh) *	2004-05-20	2008-08-06	喜开理株式会社	气体供给集成单元和气体单元的增设方法
JP2006083959A (ja)	2004-09-16	2006-03-30	Fujikin Inc	センサ付き継手部材
EP1873433A1 (de) *	2005-04-21	2008-01-02	Fujikin Incorporated	Flüssigkeitskontrollvorrichtung
DE102005020185B4 (de) *	2005-04-28	2008-01-24	Bosch Rexroth Teknik Ab	Ventilanordnung
JP2007152211A (ja) *	2005-12-02	2007-06-21	Asahi Organic Chem Ind Co Ltd	フラッシング装置
JP5081665B2 (ja) *	2008-02-28	2012-11-28	株式会社フジキン	流体制御装置
JP5216632B2 (ja)	2009-03-03	2013-06-19	東京エレクトロン株式会社	流体制御装置
TWI498502B (zh)	2009-10-29	2015-09-01	Parker Hannifin Corp	滑鎖氣體輸送系統
US9829121B2 (en) *	2010-03-24	2017-11-28	Haldex Brake Products Corporation	Manifold system
JP5775696B2 (ja) *	2011-01-31	2015-09-09	株式会社フジキン	流体制御装置
JP5775718B2 (ja) *	2011-03-28	2015-09-09	株式会社フジキン	下段部材の固定装置およびこれを備えた流体制御装置
JP5797010B2 (ja) *	2011-05-20	2015-10-21	株式会社フジキン	流体制御装置
JP5803552B2 (ja) *	2011-10-14	2015-11-04	東京エレクトロン株式会社	処理装置
JP5753831B2 (ja) *	2012-11-29	2015-07-22	株式会社フジキン	流体制御装置
JP6347969B2 (ja) *	2014-03-18	2018-06-27	株式会社フジキン	流体制御装置および流体制御装置用継手部材
JP6486035B2 (ja) *	2014-08-28	2019-03-20	株式会社フジキン	マニホールドバルブおよび流体制御装置
JP6632804B2 (ja) *	2015-03-18	2020-01-22	株式会社フジキン	継手および流体制御装置
JP6279521B2 (ja) *	2015-07-21	2018-02-14	Ckd株式会社	レール取付部品の位置決め装置
US11156305B2 (en) *	2016-06-21	2021-10-26	Fujikin Incorporated	Fluid control system
WO2017221893A1 (ja) *	2016-06-21	2017-12-28	株式会社フジキン	流体制御装置
US20180087684A1 (en) *	2016-09-27	2018-03-29	Fujikin Incorporated	Fluid control system and joint block used therefor
US9785154B2 (en) *	2017-02-13	2017-10-10	Robert M. McMillan	Reconfigurable modular fluid flow control system for liquids or gases
JP7253803B2 (ja)	2017-09-29	2023-04-07	株式会社フジキン	手動バルブ装置および流体制御装置
US10921096B2 (en) *	2017-09-30	2021-02-16	Robert E. Stewart	Mounting and fastening system and mounting adapter
KR102543591B1 (ko) *	2018-10-31	2023-06-13	가부시키가이샤 후지킨	유체 제어 장치 및 유체 제어 장치의 제조 방법
US11906062B2 (en)	2018-12-27	2024-02-20	Fujikin Incorporated	Fluid control device, joint block and manufacturing method for fluid control device
TWI861207B (zh)	2019-09-19	2024-11-11	美商應用材料股份有限公司	使用無滯留區閥的設備與方法
JP7425462B2 (ja)	2019-10-31	2024-01-31	株式会社フジキン	流体制御装置および半導体製造装置
JP7389461B2 (ja)	2019-10-31	2023-11-30	株式会社フジキン	バルブ装置および流体制御装置
WO2021236406A1 (en) *	2020-05-19	2021-11-25	Ichor Systems, Inc.	Seal insertion tool for a fluid delivery module and method of installing a seal into a fluid delivery module
KR102588596B1 (ko) *	2022-10-11	2023-10-12	마노 주식회사	범용 급수 밸브 세트
CN115839480A (zh) *	2022-11-25	2023-03-24	中科艾尔(北京)科技有限公司	一种特气柜

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3513606A (en) *	1968-02-21	1970-05-26	Vernon H Jones	Structural framework and connector joint therefor
FR2394703A1 (fr)	1977-06-17	1979-01-12	Climax France	Systeme modulaire pour la realisation de circuits logiques pneumatiques
DE3533955A1 (de) *	1985-09-24	1987-03-26	Festo Kg	Kolben-zylinder-anordnung
FR2600751B1 (fr)	1986-06-27	1988-09-23	Asm Sud Europe	Systeme modulaire de montage de lignes pour la distribution, le controle et la mesure de debits de fluides humides ou gazeux, notamment de gaz de haute purete et elements constitutifs dudit systeme
DE3827749A1 (de)	1988-08-16	1990-02-22	Festo Kg	Aufspannvorrichtung
US6394138B1 (en) *	1996-10-30	2002-05-28	Unit Instruments, Inc.	Manifold system of removable components for distribution of fluids
US6152175A (en) *	1997-06-06	2000-11-28	Ckd Corporation	Process gas supply unit
JP3387777B2 (ja) *	1997-06-11	2003-03-17	株式会社フジキン	混合ガス供給装置
US6231260B1 (en)	1997-07-11	2001-05-15	Insync Systems, Inc.	Mounting plane for integrated gas panel
JP4378553B2 (ja) *	1997-10-13	2009-12-09	忠弘大見	流体制御装置
US6076543A (en) *	1997-11-06	2000-06-20	United States Filter Corporation	Gas handling device
JP3941025B2 (ja)	1998-01-06	2007-07-04	Ｓｍｃ株式会社	レール取付形流体圧機器
US7048007B2 (en) *	1998-03-05	2006-05-23	Swagelok Company	Modular surface mount manifold assemblies
US6283155B1 (en) *	1999-12-06	2001-09-04	Insync Systems, Inc.	System of modular substrates for enabling the distribution of process fluids through removable components
JP3482601B2 (ja)	2000-06-30	2003-12-22	東京エレクトロン株式会社	流体制御装置

2001
- 2001-06-28 JP JP2001196210A patent/JP3482601B2/ja not_active Expired - Lifetime
- 2001-06-29 TW TW90115926A patent/TW544751B/zh not_active IP Right Cessation
- 2001-06-29 US US09/893,522 patent/US8973615B2/en not_active Expired - Lifetime
- 2001-06-30 KR KR1020010038748A patent/KR100750224B1/ko not_active Expired - Lifetime
- 2001-07-02 EP EP20010116067 patent/EP1167846B1/de not_active Expired - Lifetime
- 2001-07-02 DE DE2001610685 patent/DE60110685T2/de not_active Expired - Lifetime

Also Published As

Publication number	Publication date
JP2002206700A (ja)	2002-07-26
TW544751B (en)	2003-08-01
JP3482601B2 (ja)	2003-12-22
US20020031417A1 (en)	2002-03-14
EP1167846A2 (de)	2002-01-02
DE60110685T2 (de)	2006-01-26
KR20020002335A (ko)	2002-01-09
EP1167846A3 (de)	2003-03-26
EP1167846B1 (de)	2005-05-11
KR100750224B1 (ko)	2007-08-20
US8973615B2 (en)	2015-03-10

Publication	Publication Date	Title
DE60110685D1 (de)	2005-06-16	Montageanordnung für Ventile
DE50110649D1 (de)	2006-09-14	Zubereitung für restenoseprophylaxe
DE60230398D1 (de)	2009-01-29	Schlitzventile für katheter
DE60015362D1 (de)	2004-12-02	Zeitverzögerung für verbundene vorrichtungen
DE60206017D1 (de)	2005-10-13	Abdeckung für bohrlochfilter
DE60110674D1 (de)	2005-06-16	Befestigungsmechanismus für Behälter
DE60140296D1 (de)	2009-12-10	Anbringung für näherungsradar
DE50104646D1 (de)	2005-01-05	Ventilanordnung
DK1239199T3 (da)	2003-12-01	Ventilindretning
DE60215229D1 (de)	2006-11-16	Befestigungskonstruktion für Vorrichtungen für Fahrzeuge
DE50101190D1 (de)	2004-01-29	Schalteranordnung für strahlungsleiter
DE69915012D1 (de)	2004-04-01	Anschlussblock für mehrere Ventile
DE50101172D1 (de)	2004-01-29	Verbindungsanordnung für leitungen
DE69912382D1 (de)	2003-12-04	Ventilanordnung für schwingpumpe
DE60125639D1 (de)	2007-02-15	Scharnierstruktur für Motorhaube
DE60113668D1 (de)	2006-02-09	Belüftungsventil für kältegeräte
DE60140746D1 (de)	2010-01-21	Gefechtkopfssprengladungsvorrichtung für trägermunitionseinigkeiten
DE60225255D1 (de)	2008-04-10	Fadenführer für strick- oder kulierwirkmaschine
DE50106628D1 (de)	2005-08-04	Stützeinrichtung für fahrzeuge
DE50109628D1 (de)	2006-06-01	Befestigungssystem für strangförmige elastische dichtelemente
DE10194076T1 (de)	2003-02-20	Montagekonstruktion für Lagerdichtungen
DE50109815D1 (de)	2006-06-22	Querschwelle für eisenbahngleise
DE60126819D1 (de)	2007-04-05	Lanzette für hautstiche
DE50206365D1 (de)	2006-05-24	Diagnosesystem für Schaltventile
DE60102300D1 (de)	2004-04-15	Abfüllventil für abfüllanlage

Legal Events

Date	Code	Title	Description
2006-06-08	8364	No opposition during term of opposition