DE58907121D1 - Zwei- oder mehrstufige Hochvakuumpumpe. - Google Patents

Zwei- oder mehrstufige Hochvakuumpumpe.

Info

Publication number: DE58907121D1
Authority: DE; Germany
Prior art keywords: vacuum pump; high vacuum; stage high; stage; pump
Prior art date: 1989-06-06
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

DE89110196T

Other languages

English (en)

Inventor

Berthold Fischer

Peter Mueller

Dieter Vorberg

Hanns-Peter Dr Berges

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Balzers und Leybold Deutschland Holding AG

Original Assignee

Leybold AG

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1989-06-06

Filing date

1989-06-06

Publication date

1994-04-07

1989-06-06 Application filed by Leybold AG filed Critical Leybold AG

1994-04-07 Application granted granted Critical

1994-04-07 Publication of DE58907121D1 publication Critical patent/DE58907121D1/de

2009-06-07 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/0007—Injection of a fluid in the working chamber for sealing, cooling and lubricating
- F04C29/0014—Injection of a fluid in the working chamber for sealing, cooling and lubricating with control systems for the injection of the fluid
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/50—Pumps with means for introducing gas under pressure for ballasting

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Reciprocating Pumps (AREA)

DE89110196T 1989-06-06 1989-06-06 Zwei- oder mehrstufige Hochvakuumpumpe. Expired - Fee Related DE58907121D1 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
EP89110196A EP0401399B1 (de)	1989-06-06	1989-06-06	Zwei- oder mehrstufige Hochvakuumpumpe

Publications (1)

Publication Number	Publication Date
DE58907121D1 true DE58907121D1 (de)	1994-04-07

Family

ID=8201466

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE89110196T Expired - Fee Related DE58907121D1 (de)	1989-06-06	1989-06-06	Zwei- oder mehrstufige Hochvakuumpumpe.

Country Status (3)

Country	Link
US (1)	US5066202A (de)
EP (1)	EP0401399B1 (de)
DE (1)	DE58907121D1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2530765B2 (ja) *	1990-08-31	1996-09-04	株式会社神戸製鋼所	油冷式圧縮機の運転方法
GB9223804D0 (en) *	1992-11-13	1993-01-06	Boc Group Plc	Improvements in vacuum pumps
DE4325281A1 (de) *	1993-07-28	1995-02-02	Leybold Ag	Vakuumpumpe mit einer Gasballasteinrichtung
DE4325283A1 (de) *	1993-07-28	1995-02-02	Leybold Ag	Betriebsabhängig steuerbares Ventilsystem für eine Vakuumpumpe
DE4327583A1 (de) *	1993-08-17	1995-02-23	Leybold Ag	Vakuumpumpe mit Ölabscheider
DE19962445A1 (de)	1999-12-22	2001-06-28	Leybold Vakuum Gmbh	Trockenverdichtende Vakuumpumpe mit Gasballasteinrichtung
US6695591B2 (en) *	2002-05-20	2004-02-24	Grimmer Industries, Inc.	Multi-stage gas compressor system
DE10255792C5 (de) *	2002-11-28	2008-12-18	Vacuubrand Gmbh + Co Kg	Verfahren zur Steuerung einer Vakuumpumpe sowie Vakuumpumpensystem
GB0413776D0 (en) *	2004-06-18	2004-07-21	Boc Group Plc	Vacuum pump
JP5680972B2 (ja) *	2008-03-10	2015-03-04	ブルクハルトコンプレッションアーゲー	天然ガス燃料の供給装置および方法
DE102013203268A1 (de) *	2013-02-27	2014-08-28	Bitzer Kühlmaschinenbau Gmbh	Kältemittelverdichteranlage
IT201800021148A1 (it) *	2018-12-27	2020-06-27	D V P Vacuum Tech S P A	Pompa ausiliaria volumetrica per la generazione del vuoto.

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE228603C (de) *
US2779533A (en) *	1953-12-22	1957-01-29	Leybolds Nachfolger E	High-vacuum rotary oil pumps
US3395856A (en) *	1966-12-30	1968-08-06	Caterpillar Tractor Co	Air compressor oil control system
GB1303430A (de) *	1969-06-12	1973-01-17
US4063855A (en) *	1976-05-03	1977-12-20	Fuller Company	Compressor capacity and lubrication control system
DE2854741A1 (de) *	1978-12-19	1980-06-26	Dienes Werke	Entlastungsventil fuer verdichter
US4383802A (en) *	1981-07-06	1983-05-17	Dunham-Bush, Inc.	Oil equalization system for parallel connected compressors
DE3315748C2 (de) *	1983-04-30	1987-02-19	Westfalia Separator Ag, 4740 Oelde	Öldosiervorrichtung für Vakuumpumpen von Melkanlagen
US4605357A (en) *	1984-06-18	1986-08-12	Ingersoll-Rand Company	Lubrication system for a compressor
DE3706583A1 (de) *	1987-02-25	1988-09-08	Mannesmann Ag	Verteilung der schmier- und kuehlfluessigkeit in schraubenverdichtern

1989
- 1989-06-06 EP EP89110196A patent/EP0401399B1/de not_active Expired - Lifetime
- 1989-06-06 DE DE89110196T patent/DE58907121D1/de not_active Expired - Fee Related
1990
- 1990-06-05 US US07/533,535 patent/US5066202A/en not_active Expired - Fee Related

Also Published As

Publication number	Publication date
US5066202A (en)	1991-11-19
EP0401399B1 (de)	1994-03-02
EP0401399A1 (de)	1990-12-12

Publication	Publication Date	Title
DE3879423D1 (de)	1993-04-22	Schraubenkolben-vakuumpumpe.
DE59007218D1 (de)	1994-10-27	Magnetgelagerte Vakuumpumpe.
DE3885689D1 (de)	1993-12-23	Hochdruckverstellpumpe.
DE68914320D1 (de)	1994-05-11	Zusammengestellte Vakuumpumpe.
DE69109398D1 (de)	1995-06-08	Turbomolekularpumpe.
DE69008638D1 (de)	1994-06-09	Transfusionspumpe.
DE69009049D1 (de)	1994-06-23	Infusionspumpe.
NO164049C (no)	1990-08-22	Vakuumkloakkarrangement.
DE69308527D1 (de)	1997-04-10	Mehrstufige Vakuumpumpe
DE69112160D1 (de)	1995-09-21	Mehrstufige Vakuumpumpe.
FI894271A0 (fi)	1989-09-11	Turbomolekular vakuumpump.
DE3669356D1 (de)	1990-04-12	Vakuumpumpe.
DE69004566D1 (de)	1993-12-16	Vakuumpumpeneinheit.
DE68903355D1 (de)	1992-12-10	Vakuumpumpen.
DE3770367D1 (de)	1991-07-04	Turbomolekularpumpe.
DE3768593D1 (de)	1991-04-18	Hochvakuumpumpe.
DE68903862D1 (de)	1993-01-28	Vakuumpumpenanlagen.
DE59004887D1 (de)	1994-04-14	Sauggeregelte Zahnringpumpe.
DE58907121D1 (de)	1994-04-07	Zwei- oder mehrstufige Hochvakuumpumpe.
DE3860208D1 (de)	1990-07-12	Drehkolbenverdichter.
DE68906929D1 (de)	1993-07-15	Turbomolekularpumpe.
DE3885899D1 (de)	1994-01-05	Pumpenstufe für eine Hochvakuumpumpe.
DE69018278D1 (de)	1995-05-11	Kryopumpe.
DE69017284D1 (de)	1995-04-06	Vakuumsystem.
DE69018153D1 (de)	1995-05-04	Peristaltikpumpe.

Legal Events

Date	Code	Title	Description
1995-03-30	8364	No opposition during term of opposition
1999-08-12	8339	Ceased/non-payment of the annual fee