DE69017284D1 - Vakuumsystem. - Google Patents

Vakuumsystem.

Info

Publication number: DE69017284D1
Authority: DE; Germany
Prior art keywords: vacuum system; vacuum
Prior art date: 1989-06-28
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

DE69017284T

Other languages

English (en)

Other versions

DE69017284T2 (de

Inventor

Willem Fredrik Mellink

Peter Johannes Gertrud Janssen

Jan Zwier

Harm Lotterman

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Koninklijke Philips NV

Original Assignee

Philips Electronics NV

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1989-06-28

Filing date

1990-06-25

Publication date

1995-04-06

Family has litigation

First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=19854916&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69017284(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.

1990-06-25 Application filed by Philips Electronics NV filed Critical Philips Electronics NV

1995-04-06 Application granted granted Critical

1995-04-06 Publication of DE69017284D1 publication Critical patent/DE69017284D1/de

1995-09-14 Publication of DE69017284T2 publication Critical patent/DE69017284T2/de

2010-06-26 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment

Landscapes

Engineering & Computer Science (AREA)
Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Condensed Matter Physics & Semiconductors (AREA)
Manufacturing & Machinery (AREA)
Computer Hardware Design (AREA)
Microelectronics & Electronic Packaging (AREA)
Power Engineering (AREA)
Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Sampling And Sample Adjustment (AREA)
Measuring Fluid Pressure (AREA)

DE69017284T 1989-06-28 1990-06-25 Vakuumsystem. Expired - Fee Related DE69017284T2 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
NL8901630A NL8901630A (nl)	1989-06-28	1989-06-28	Vacuuem systeem.

Publications (2)

Publication Number	Publication Date
DE69017284D1 true DE69017284D1 (de)	1995-04-06
DE69017284T2 DE69017284T2 (de)	1995-09-14

Family

ID=19854916

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE69017284T Expired - Fee Related DE69017284T2 (de)	1989-06-28	1990-06-25	Vakuumsystem.

Country Status (6)

Country	Link
US (1)	US5013384A (de)
EP (1)	EP0405668B1 (de)
JP (1)	JPH03116713A (de)
KR (1)	KR910001367A (de)
DE (1)	DE69017284T2 (de)
NL (1)	NL8901630A (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2661455B2 (ja) *	1992-03-27	1997-10-08	株式会社日立製作所	真空処理装置
US5308989A (en) *	1992-12-22	1994-05-03	Eaton Corporation	Fluid flow control method and apparatus for an ion implanter
US5718029A (en) *	1996-11-06	1998-02-17	Vanguard International Semiconductor Corporation	Pre-installation of pumping line for efficient fab expansion
US6105435A (en) *	1997-10-24	2000-08-22	Cypress Semiconductor Corp.	Circuit and apparatus for verifying a chamber seal, and method of depositing a material onto a substrate using the same
KR100379475B1 (ko) *	2000-08-18	2003-04-10	엘지전자 주식회사	탄소나노튜브의 무촉매 성장방법
KR100550342B1 (ko) *	2004-02-24	2006-02-08	삼성전자주식회사	가스 산포 방법, 및 샤워 헤드, 및 샤워 헤드를 구비하는반도체 기판 가공 장치
JP2008511138A (ja)	2004-08-18	2008-04-10	ニューウエイマシーンコンポーネントインコーポレイティッド	空気軸受と段差ポンプ溝を備えた移動真空チャンバステージ
US7927423B1 (en)	2005-05-25	2011-04-19	Abbott Kenneth A	Vapor deposition of anti-stiction layer for micromechanical devices
CN102464278B (zh) *	2010-10-29	2014-09-24	北京北方微电子基地设备工艺研究中心有限责任公司	一种直线驱动装置及应用该装置的半导体处理设备
KR101267150B1 (ko) *	2011-04-11	2013-05-24	(주)엘지하우시스	다단식 진공단열재의 진공도 측정 장치 및 이를 이용한 측정방법
CN103424303B (zh) *	2012-05-22	2015-12-02	中国科学院物理研究所	一种真空精密位移装置
KR102662055B1 (ko) *	2021-12-20	2024-04-29	세메스 주식회사	기판 반송 모듈 및 이를 포함하는 반도체 제조 설비

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4622918A (en) *	1983-01-31	1986-11-18	Integrated Automation Limited	Module for high vacuum processing
US4687542A (en) *	1985-10-24	1987-08-18	Texas Instruments Incorporated	Vacuum processing system
EP0219826B1 (de) *	1985-10-24	1994-09-07	Texas Instruments Incorporated	System für Vakuumbehandlung
US4718957A (en) *	1986-07-24	1988-01-12	Sensenbrenner Kenneth C	Process of creating an artificial fingernail
US4718975A (en) *	1986-10-06	1988-01-12	Texas Instruments Incorporated	Particle shield
FR2621887B1 (fr) *	1987-10-20	1990-03-30	Sgn Soc Gen Tech Nouvelle	Confinement dynamique et accostage sans contact

1989
- 1989-06-28 NL NL8901630A patent/NL8901630A/nl not_active Application Discontinuation
1990
- 1990-06-22 US US07/542,454 patent/US5013384A/en not_active Expired - Fee Related
- 1990-06-25 KR KR1019900009375A patent/KR910001367A/ko active IP Right Grant
- 1990-06-25 EP EP90201644A patent/EP0405668B1/de not_active Revoked
- 1990-06-25 JP JP2164340A patent/JPH03116713A/ja active Pending
- 1990-06-25 DE DE69017284T patent/DE69017284T2/de not_active Expired - Fee Related

Also Published As

Publication number	Publication date
JPH03116713A (ja)	1991-05-17
DE69017284T2 (de)	1995-09-14
EP0405668A1 (de)	1991-01-02
EP0405668B1 (de)	1995-03-01
US5013384A (en)	1991-05-07
KR910001367A (ko)	1991-01-30
NL8901630A (nl)	1991-01-16

Publication	Publication Date	Title
DE69005065D1 (de)	1994-01-20	Vakuumbenutzendes Füllsystem.
ATE106974T1 (de)	1994-06-15	Vakuum-entwässerungsanlage.
NO900746L (no)	1990-08-20	System for omraade-begrensning.
FI900130L (fi)	1990-07-11	Flytande detergentkomposition innehaollande enzymer och enzymstabiliserande system.
DE69013400D1 (de)	1994-11-24	Wandsystem.
DE69012911D1 (de)	1994-11-03	Lautsprechersystem.
NO905160L (no)	1991-05-31	System for aa detektere inntrengning.
FI895317A0 (fi)	1989-11-08	System foer byggklotsar.
NO901285D0 (no)	1990-03-20	Syklonsystem.
DE69001150D1 (de)	1993-04-29	Aufschnittsystem.
DE69017284D1 (de)	1995-04-06	Vakuumsystem.
FI890785A0 (fi)	1989-02-17	System av undertrycksmunstycken avsett foer behandling av roerliga aemnesbanor.
NO900303L (no)	1990-07-24	Hoeytrykk-tetningssystem.
NO893260L (no)	1991-02-15	Forskalingssystem.
NO903904D0 (no)	1990-09-07	Kretskort-behandlingssystem.
DE69007890D1 (de)	1994-05-11	Transportsystem.
DE69003302D1 (de)	1993-10-21	Erdungssystem.
TR24200A (tr)	1991-07-01	Vakum servomotoru.
ATE98175T1 (de)	1993-12-15	Vakuumbenutzendes fuellsystem.
NO892394D0 (no)	1989-06-12	Forskalingssystem.
FI894173A (fi)	1991-03-06	System foer byggnadskonstruktion.
FI893940A0 (fi)	1989-08-23	System foer maetning av braeders vankant.
FI900792A0 (fi)	1990-02-16	System foer dosering av utsprutad vaetska.
FI894915A0 (fi)	1989-10-17	System foer kontrollmaetning av braeders kantning.
FI893152A (fi)	1990-12-29	System foer dosering av utsprutad vaetska.

Legal Events

Date	Code	Title	Description
1996-03-28	8364	No opposition during term of opposition
1998-06-10	8339	Ceased/non-payment of the annual fee