DE69112160D1 - Mehrstufige Vakuumpumpe. - Google Patents

Mehrstufige Vakuumpumpe.

Info

Publication number: DE69112160D1
Authority: DE; Germany
Prior art keywords: vacuum pump; stage vacuum; stage; pump; vacuum
Prior art date: 1990-09-21
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

DE69112160T

Other languages

English (en)

Other versions

DE69112160T2 (de

Inventor

Yasuhiro Niimura

Harumitsu Saito

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Ebara Corp

Original Assignee

Ebara Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1990-09-21

Filing date

1991-09-18

Publication date

1995-09-21

Family has litigation

First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=17244941&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69112160(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.

1991-09-18 Application filed by Ebara Corp filed Critical Ebara Corp

1995-09-21 Application granted granted Critical

1995-09-21 Publication of DE69112160D1 publication Critical patent/DE69112160D1/de

1996-03-21 Publication of DE69112160T2 publication Critical patent/DE69112160T2/de

2011-09-19 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/28—Safety arrangements; Monitoring
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/0092—Removing solid or liquid contaminants from the gas under pumping, e.g. by filtering or deposition; Purging; Scrubbing; Cleaning

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Applications Or Details Of Rotary Compressors (AREA)

DE69112160T 1990-09-21 1991-09-18 Mehrstufige Vakuumpumpe. Expired - Fee Related DE69112160T2 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP2252988A JP2537696B2 (ja)	1990-09-21	1990-09-21	多段真空ポンプ

Publications (2)

Publication Number	Publication Date
DE69112160D1 true DE69112160D1 (de)	1995-09-21
DE69112160T2 DE69112160T2 (de)	1996-03-21

Family

ID=17244941

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE69112160T Expired - Fee Related DE69112160T2 (de)	1990-09-21	1991-09-18	Mehrstufige Vakuumpumpe.

Country Status (5)

Country	Link
US (1)	US5173041A (de)
EP (1)	EP0476631B1 (de)
JP (1)	JP2537696B2 (de)
KR (1)	KR100198475B1 (de)
DE (1)	DE69112160T2 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5217357A (en) *	1992-09-10	1993-06-08	Welch Robert E	Rotary vane pump with removable particulate collection chamber
DE4233142A1 (de) *	1992-10-02	1994-04-07	Leybold Ag	Verfahren zum Betrieb einer Klauenvakuumpumpe und für die Durchführung dieses Betriebsverfahrens geeignete Klauenvakuumpumpe
DE4234169A1 (de) *	1992-10-12	1994-04-14	Leybold Ag	Verfahren zum Betrieb einer trockenverdichteten Vakuumpumpe sowie für dieses Betriebsverfahren geeignete Vakuumpumpe
DE69601062T2 (de) *	1995-08-14	1999-06-10	Ebara Corp., Tokio/Tokyo	Vorrichtung zum Abscheiden von in Gasen dispergierten Teilchen
JPH09222083A (ja) *	1996-02-16	1997-08-26	Matsushita Electric Ind Co Ltd	冷凍サイクルと圧縮機
JP2000161269A (ja) *	1998-11-27	2000-06-13	Toyota Autom Loom Works Ltd	ルーツポンプ及びポンプ装置
JP2000170679A (ja) *	1998-12-04	2000-06-20	Toyota Autom Loom Works Ltd	多段ルーツポンプ及び多段ポンプ装置
US6318959B1 (en) *	1998-12-22	2001-11-20	Unozawa-Gumi Iron Works, Ltd.	Multi-stage rotary vacuum pump used for high temperature gas
FR2813104B1 (fr)	2000-08-21	2002-11-29	Cit Alcatel	Joint etancheite pour pompe a vide
US6896764B2 (en) *	2001-11-28	2005-05-24	Tokyo Electron Limited	Vacuum processing apparatus and control method thereof
GB0224709D0 (en)	2002-10-24	2002-12-04	Boc Group Plc	Improvements in dry pumps
GB0310615D0 (en) *	2003-05-08	2003-06-11	Boc Group Plc	Improvements in seal assemblies
WO2008010539A1 (fr) *	2006-07-19	2008-01-24	Kabushiki Kaisha Toyota Jidoshokki	Machine à fluide
KR100773358B1 (ko)	2006-11-17	2007-11-05	삼성전자주식회사	유체 노즐을 갖는 진공펌프 및 배기 시스템
KR100873104B1 (ko) *	2007-03-16	2008-12-09	삼성전자주식회사	회전체 크리닝 유니트 및 이를 갖는 진공펌프
JP4844489B2 (ja)	2007-07-19	2011-12-28	株式会社豊田自動織機	流体機械
KR20100091063A (ko) *	2009-02-09	2010-08-18	삼성전자주식회사	회전체 크리닝 장치 및 이를 갖는 진공 펌프
TWI518245B (zh) *	2010-04-19	2016-01-21	荏原製作所股份有限公司	乾真空泵裝置、排氣單元，以及消音器
WO2013184367A1 (en) *	2012-06-08	2013-12-12	Oxea Corporation	Vertical cooler with liquid removal and mist eliminator
JP6472653B2 (ja) *	2014-03-17	2019-02-20	株式会社荏原製作所	除害機能付真空ポンプ
JP6441660B2 (ja) *	2014-03-17	2018-12-19	株式会社荏原製作所	除害機能付真空ポンプ
JP6616611B2 (ja) *	2015-07-23	2019-12-04	エドワーズ株式会社	排気システム

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US1769153A (en) *	1928-03-07	1930-07-01	Meyer William Warren	Rotary blower or pump
US2489887A (en) *	1946-07-11	1949-11-29	Roots Connersville Blower Corp	Rotary pump
US2849173A (en) *	1956-01-31	1958-08-26	Charles J Surdy	Compressor system
DE2056353C3 (de) *	1970-11-17	1974-04-25	Claudius Peters Ag, 2000 Hamburg	Zweistufiger Vielzellenverdichter
US4010016A (en) *	1975-05-27	1977-03-01	Ingersoll-Rand Company	Gas compressor
GB1551725A (en) *	1975-09-06	1979-08-30	Rolls Royce	Primary systems for pumps
JPS59229072A (ja) *	1983-06-09	1984-12-22	Mitsui Toatsu Chem Inc	天然ガス井戸用ガス圧縮機
JPS61197793A (ja) *	1985-02-26	1986-09-02	Ebara Corp	多段複葉型真空ポンプにおける冷却方法
JPS62107287A (ja) *	1985-11-01	1987-05-18	Hitachi Ltd	真空ポンプ
JPH0733834B2 (ja) *	1986-12-18	1995-04-12	株式会社宇野澤組鐵工所	ロータ内蔵ハウジングの外周温度が安定化された内部分流逆流冷却多段式の三葉式真空ポンプ
JPS62189388A (ja) *	1987-01-30	1987-08-19	Ebara Corp	多段ル−ツ型真空ポンプ
US4943215A (en) *	1988-02-29	1990-07-24	Leybold Aktiengesellschaft	Multistage vacuum pump with bore for fouling removal
EP0332741B1 (de) *	1988-02-29	1991-09-18	Leybold Aktiengesellschaft	Mehrstufige Vakuumpumpe
JPH0219318A (ja) *	1988-06-30	1990-01-23	Carl R Thornfeldt	疝痛及び生歯に対する治療
FR2642479B1 (fr) *	1989-02-02	1994-03-18	Alcatel Cit	Pompe a vide du type roots, multietagee
JPH02245493A (ja) *	1989-03-20	1990-10-01	Hitachi Ltd	スクリュー真空ポンプ
EP0692635B1 (de) *	1990-03-27	1999-09-08	Balzers und Leybold Deutschland Holding Aktiengesellschaft	Mehrstufige trockenverdichtende Vakuumpumpe und Verfahren zu ihrem Betrieb

1990
- 1990-09-21 JP JP2252988A patent/JP2537696B2/ja not_active Expired - Lifetime
1991
- 1991-09-12 US US07/757,954 patent/US5173041A/en not_active Expired - Lifetime
- 1991-09-18 EP EP91115864A patent/EP0476631B1/de not_active Expired - Lifetime
- 1991-09-18 DE DE69112160T patent/DE69112160T2/de not_active Expired - Fee Related
- 1991-09-20 KR KR1019910016474A patent/KR100198475B1/ko not_active IP Right Cessation

Also Published As

Publication number	Publication date
JP2537696B2 (ja)	1996-09-25
EP0476631B1 (de)	1995-08-16
KR920006646A (ko)	1992-04-27
JPH04132895A (ja)	1992-05-07
EP0476631A1 (de)	1992-03-25
KR100198475B1 (ko)	1999-06-15
DE69112160T2 (de)	1996-03-21
US5173041A (en)	1992-12-22

Publication	Publication Date	Title
DE69109398D1 (de)	1995-06-08	Turbomolekularpumpe.
DE69125044D1 (de)	1997-04-17	Vakuumpumpe
DE69112160D1 (de)	1995-09-21	Mehrstufige Vakuumpumpe.
DE68914320D1 (de)	1994-05-11	Zusammengestellte Vakuumpumpe.
DE69308527D1 (de)	1997-04-10	Mehrstufige Vakuumpumpe
DE69310993D1 (de)	1997-07-03	Turbomolekularvakuumpumpen
DE59007218D1 (de)	1994-10-27	Magnetgelagerte Vakuumpumpe.
DE69103862D1 (de)	1994-10-13	Infusionspumpe.
DE69102711D1 (de)	1994-08-11	Pumpensystem.
DE69013883D1 (de)	1994-12-08	Pumpenanordnung.
FI894271A0 (fi)	1989-09-11	Turbomolekular vakuumpump.
DE69107997D1 (de)	1995-04-13	Balgpumpe.
DE69004566D1 (de)	1993-12-16	Vakuumpumpeneinheit.
IT9067113A0 (it)	1990-02-16	Statore per pompa turbomolecolare.
DE68903355D1 (de)	1992-12-10	Vakuumpumpen.
IT9067163A0 (it)	1990-03-09	Pompa turbomolecolare perfezionata.
DE68903862D1 (de)	1993-01-28	Vakuumpumpenanlagen.
DE3768593D1 (de)	1991-04-18	Hochvakuumpumpe.
DE59200347D1 (de)	1994-09-08	Trockenlaufende zweiwellenvakuumpumpe.
DE59104622D1 (de)	1995-03-23	Kolbenpumpe.
FI900866L (fi)	1991-08-22	Skovelhjul foer centrifugalpump.
DE68906929D1 (de)	1993-07-15	Turbomolekularpumpe.
DE58907121D1 (de)	1994-04-07	Zwei- oder mehrstufige Hochvakuumpumpe.
DE69100307D1 (de)	1993-09-30	Vordruck-Handpumpe.
NO905623D0 (no)	1990-12-28	Vakuumkloakkarrangement.

Legal Events

Date	Code	Title
1996-08-14	8363	Opposition against the patent
1999-08-26	8365	Fully valid after opposition proceedings
2010-07-22	8339	Ceased/non-payment of the annual fee