CN111129272B - 发光二极管芯片的固接方法及固接装置 - Google Patents
发光二极管芯片的固接方法及固接装置 Download PDFInfo
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- CN111129272B CN111129272B CN201910065532.6A CN201910065532A CN111129272B CN 111129272 B CN111129272 B CN 111129272B CN 201910065532 A CN201910065532 A CN 201910065532A CN 111129272 B CN111129272 B CN 111129272B
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- 238000000034 method Methods 0.000 title claims abstract description 41
- 239000000758 substrate Substances 0.000 claims abstract description 84
- 239000004020 conductor Substances 0.000 claims abstract description 65
- 238000003466 welding Methods 0.000 claims abstract description 13
- 239000000463 material Substances 0.000 claims description 53
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 24
- 229910052594 sapphire Inorganic materials 0.000 claims description 8
- 239000010980 sapphire Substances 0.000 claims description 8
- 230000000149 penetrating effect Effects 0.000 abstract 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 12
- 229910002601 GaN Inorganic materials 0.000 description 12
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 8
- 239000003086 colorant Substances 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000009877 rendering Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/85—Packages
- H10H20/852—Encapsulations
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3114—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed the device being a chip scale package, e.g. CSP
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B45/00—Circuit arrangements for operating light-emitting diodes [LED]
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/85—Packages
- H10H20/857—Interconnections, e.g. lead-frames, bond wires or solder balls
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67144—Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/77—Apparatus for connecting with strap connectors
- H01L2224/7725—Means for applying energy, e.g. heating means
- H01L2224/77261—Laser
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
- H01L2224/7825—Means for applying energy, e.g. heating means
- H01L2224/78261—Laser
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/01—Manufacture or treatment
- H10H20/011—Manufacture or treatment of bodies, e.g. forming semiconductor layers
- H10H20/013—Manufacture or treatment of bodies, e.g. forming semiconductor layers having light-emitting regions comprising only Group III-V materials
- H10H20/0133—Manufacture or treatment of bodies, e.g. forming semiconductor layers having light-emitting regions comprising only Group III-V materials with a substrate not being Group III-V materials
- H10H20/01335—Manufacture or treatment of bodies, e.g. forming semiconductor layers having light-emitting regions comprising only Group III-V materials with a substrate not being Group III-V materials the light-emitting regions comprising nitride materials
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/01—Manufacture or treatment
- H10H20/036—Manufacture or treatment of packages
- H10H20/0364—Manufacture or treatment of packages of interconnections
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Led Device Packages (AREA)
Abstract
Description
Claims (10)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW107138610A TWI688317B (zh) | 2018-10-31 | 2018-10-31 | 發光二極體晶片的固接方法及固接裝置 |
TW107138610 | 2018-10-31 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN111129272A CN111129272A (zh) | 2020-05-08 |
CN111129272B true CN111129272B (zh) | 2021-03-16 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201910065532.6A Active CN111129272B (zh) | 2018-10-31 | 2019-01-23 | 发光二极管芯片的固接方法及固接装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US10910530B2 (zh) |
CN (1) | CN111129272B (zh) |
TW (1) | TWI688317B (zh) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
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TWI733450B (zh) * | 2020-05-15 | 2021-07-11 | 台灣愛司帝科技股份有限公司 | 晶片承載結構、晶片置放系統與晶片置放方法 |
TWI768349B (zh) * | 2020-05-22 | 2022-06-21 | 台灣愛司帝科技股份有限公司 | 晶片移轉系統以及晶片移轉模組 |
TWI744181B (zh) * | 2021-01-28 | 2021-10-21 | 台灣愛司帝科技股份有限公司 | 晶片移轉模組以及晶片移轉與固晶裝置與方法 |
KR102638010B1 (ko) * | 2021-10-21 | 2024-02-20 | 엔젯 주식회사 | 마이크로 LED 디스플레이의 칩 리페어를 위한 픽앤플레이스(Pick-and-Place) 장치 |
Citations (8)
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CN1319636A (zh) * | 2000-03-07 | 2001-10-31 | 索尼化学株式会社 | 电极连接用粘结剂及使用该粘结剂的连接方法 |
CN1351733A (zh) * | 1999-05-25 | 2002-05-29 | 格姆普拉斯公司 | 一种采用廉价绝缘材料的便携式集成电路电子设备的制造方法 |
CN102751257A (zh) * | 2011-04-22 | 2012-10-24 | 三星半导体(中国)研究开发有限公司 | Cob模块及其制造方法 |
CN102903646A (zh) * | 2011-07-25 | 2013-01-30 | 上海祯显电子科技有限公司 | 一种芯片的焊接方法 |
CN104010815A (zh) * | 2011-12-22 | 2014-08-27 | 太阳油墨制造株式会社 | 干膜及使用其的印刷电路板、印刷电路板的制造方法、以及倒装芯片安装基板 |
CN105580130A (zh) * | 2013-09-17 | 2016-05-11 | 普因特工程有限公司 | 用于安装芯片的衬底和芯片封装 |
CN107464873A (zh) * | 2017-05-03 | 2017-12-12 | 合肥彩虹蓝光科技有限公司 | 一种避免倒装芯片固晶漏电的方法 |
CN107511551A (zh) * | 2017-08-31 | 2017-12-26 | 歌尔股份有限公司 | 锡球激光焊接方法 |
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---|---|---|---|---|
EP2731126A1 (en) * | 2012-11-09 | 2014-05-14 | Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO | Method for bonding bare chip dies |
US9379525B2 (en) * | 2014-02-10 | 2016-06-28 | Soraa Laser Diode, Inc. | Manufacturable laser diode |
FR3033080B1 (fr) * | 2015-02-20 | 2018-02-02 | Jean Pierre FOUCAULT | Procede de fabrication de ponts dielectriques(straps en anglais) d'identification sans contact |
TWI574339B (zh) * | 2016-03-25 | 2017-03-11 | 國立臺北科技大學 | 固晶裝置 |
TWI674682B (zh) * | 2016-09-07 | 2019-10-11 | 優顯科技股份有限公司 | 光電半導體裝置及其製造方法 |
JP6366799B1 (ja) * | 2017-02-10 | 2018-08-01 | ルーメンス カンパニー リミテッド | マイクロledモジュール及びその製造方法 |
US10629577B2 (en) * | 2017-03-16 | 2020-04-21 | Invensas Corporation | Direct-bonded LED arrays and applications |
KR20190019745A (ko) * | 2017-08-18 | 2019-02-27 | 주식회사 루멘스 | 발광소자 및 그 제조방법 |
US10720751B2 (en) * | 2017-09-27 | 2020-07-21 | Advanced Semiconductor Engineering, Inc. | Optical package structure, optical module, and method for manufacturing the same |
-
2018
- 2018-10-31 TW TW107138610A patent/TWI688317B/zh active
-
2019
- 2019-01-23 CN CN201910065532.6A patent/CN111129272B/zh active Active
- 2019-04-15 US US16/384,267 patent/US10910530B2/en active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
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CN1351733A (zh) * | 1999-05-25 | 2002-05-29 | 格姆普拉斯公司 | 一种采用廉价绝缘材料的便携式集成电路电子设备的制造方法 |
CN1319636A (zh) * | 2000-03-07 | 2001-10-31 | 索尼化学株式会社 | 电极连接用粘结剂及使用该粘结剂的连接方法 |
CN102751257A (zh) * | 2011-04-22 | 2012-10-24 | 三星半导体(中国)研究开发有限公司 | Cob模块及其制造方法 |
CN102903646A (zh) * | 2011-07-25 | 2013-01-30 | 上海祯显电子科技有限公司 | 一种芯片的焊接方法 |
CN104010815A (zh) * | 2011-12-22 | 2014-08-27 | 太阳油墨制造株式会社 | 干膜及使用其的印刷电路板、印刷电路板的制造方法、以及倒装芯片安装基板 |
CN105580130A (zh) * | 2013-09-17 | 2016-05-11 | 普因特工程有限公司 | 用于安装芯片的衬底和芯片封装 |
CN107464873A (zh) * | 2017-05-03 | 2017-12-12 | 合肥彩虹蓝光科技有限公司 | 一种避免倒装芯片固晶漏电的方法 |
CN107511551A (zh) * | 2017-08-31 | 2017-12-26 | 歌尔股份有限公司 | 锡球激光焊接方法 |
Also Published As
Publication number | Publication date |
---|---|
CN111129272A (zh) | 2020-05-08 |
US20200135989A1 (en) | 2020-04-30 |
US10910530B2 (en) | 2021-02-02 |
TW202019253A (zh) | 2020-05-16 |
TWI688317B (zh) | 2020-03-11 |
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Effective date of registration: 20220531 Address after: 6th floor, No. 609, Section 1, Wanshou Road, Guishan District, Taoyuan City, Taiwan, China, China Patentee after: Stoke Precision Technology Co.,Ltd. Address before: TaiWan, China Patentee before: ASTI GLOBAL Inc. TAIWAN |
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Address after: 6th Floor, No. 609, Section 1, Wanshou Road, Guishan District, Taoyuan City, Taiwan, China, China Patentee after: Maike Advanced Co.,Ltd. Country or region after: TaiWan, China Address before: 6th Floor, No. 609, Section 1, Wanshou Road, Guishan District, Taoyuan City, Taiwan, China, China Patentee before: Stoke Precision Technology Co.,Ltd. Country or region before: TaiWan, China |
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