CN108796458A - 一种有机-无机复合透明薄膜 - Google Patents
一种有机-无机复合透明薄膜 Download PDFInfo
- Publication number
- CN108796458A CN108796458A CN201710282485.1A CN201710282485A CN108796458A CN 108796458 A CN108796458 A CN 108796458A CN 201710282485 A CN201710282485 A CN 201710282485A CN 108796458 A CN108796458 A CN 108796458A
- Authority
- CN
- China
- Prior art keywords
- organic
- inorganic
- coating
- transparent membrane
- composite transparent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002131 composite material Substances 0.000 title claims abstract description 31
- 239000012528 membrane Substances 0.000 title claims abstract description 26
- 238000000576 coating method Methods 0.000 claims abstract description 57
- 239000011248 coating agent Substances 0.000 claims abstract description 56
- 239000010408 film Substances 0.000 claims abstract description 48
- 239000010409 thin film Substances 0.000 claims abstract description 28
- 230000007704 transition Effects 0.000 claims abstract description 25
- 238000000151 deposition Methods 0.000 claims description 26
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 18
- 230000008021 deposition Effects 0.000 claims description 18
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 14
- -1 acrylic ester Chemical class 0.000 claims description 9
- 229910052681 coesite Inorganic materials 0.000 claims description 9
- 229910052906 cristobalite Inorganic materials 0.000 claims description 9
- 239000000377 silicon dioxide Substances 0.000 claims description 9
- 229910052682 stishovite Inorganic materials 0.000 claims description 9
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N titanium dioxide Inorganic materials O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 9
- 229910052905 tridymite Inorganic materials 0.000 claims description 9
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 7
- 238000001994 activation Methods 0.000 claims description 7
- 229910052593 corundum Inorganic materials 0.000 claims description 7
- 239000011347 resin Substances 0.000 claims description 7
- 229920005989 resin Polymers 0.000 claims description 7
- 229910001845 yogo sapphire Inorganic materials 0.000 claims description 7
- XOLBLPGZBRYERU-UHFFFAOYSA-N SnO2 Inorganic materials O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 6
- 229910002804 graphite Inorganic materials 0.000 claims description 6
- 239000010439 graphite Substances 0.000 claims description 6
- 238000004544 sputter deposition Methods 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 3
- 239000003822 epoxy resin Substances 0.000 claims description 3
- 229910044991 metal oxide Inorganic materials 0.000 claims description 3
- 150000004706 metal oxides Chemical class 0.000 claims description 3
- 229920003229 poly(methyl methacrylate) Polymers 0.000 claims description 3
- 229920000647 polyepoxide Polymers 0.000 claims description 3
- 239000004926 polymethyl methacrylate Substances 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 230000003647 oxidation Effects 0.000 claims description 2
- 238000007254 oxidation reaction Methods 0.000 claims description 2
- 238000002360 preparation method Methods 0.000 abstract description 4
- 238000010276 construction Methods 0.000 abstract description 3
- 239000010410 layer Substances 0.000 description 29
- 238000012360 testing method Methods 0.000 description 19
- 229920000620 organic polymer Polymers 0.000 description 18
- 238000000034 method Methods 0.000 description 17
- 238000004140 cleaning Methods 0.000 description 14
- 239000007789 gas Substances 0.000 description 9
- 238000001755 magnetron sputter deposition Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- 238000005240 physical vapour deposition Methods 0.000 description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 238000004506 ultrasonic cleaning Methods 0.000 description 6
- 239000000758 substrate Substances 0.000 description 5
- 238000001723 curing Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 229920000139 polyethylene terephthalate Polymers 0.000 description 4
- 239000011241 protective layer Substances 0.000 description 4
- 238000005507 spraying Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 238000009738 saturating Methods 0.000 description 3
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229920002799 BoPET Polymers 0.000 description 2
- 229920000742 Cotton Polymers 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 2
- 230000004913 activation Effects 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000009776 industrial production Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229920001483 poly(ethyl methacrylate) polymer Polymers 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 238000002310 reflectometry Methods 0.000 description 2
- 238000009991 scouring Methods 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 235000013339 cereals Nutrition 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229920001688 coating polymer Polymers 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000008246 gaseous mixture Substances 0.000 description 1
- 238000013007 heat curing Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000012044 organic layer Substances 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- VDGJOQCBCPGFFD-UHFFFAOYSA-N oxygen(2-) silicon(4+) titanium(4+) Chemical compound [Si+4].[O-2].[O-2].[Ti+4] VDGJOQCBCPGFFD-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 238000007761 roller coating Methods 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0605—Carbon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/081—Oxides of aluminium, magnesium or beryllium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/083—Oxides of refractory metals or yttrium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/10—Glass or silica
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Laminated Bodies (AREA)
Abstract
本发明提供了一种有机‑无机复合透明薄膜,包括依次接触的有机薄膜层、结合过渡层和无机涂层;所述结合过渡层为无机碳基薄膜。本发明在有机薄膜层和无机涂层间增加了结合过渡层,有效提高了有机薄膜层和无机涂层的结合力,制备的复合薄膜在保留有机涂层的光滑、耐磨的基础上,同时具备了无机涂层的耐磨、高硬性能。同时该结构可实现复合结构的高透明性,整体透过率>80%,以及优异的户外耐候性。使得该结构在多种领域得以广泛应用,譬如快消数码产品,汽车行业,太阳能领域等。
Description
技术领域
本发明涉及复合膜技术领域,尤其涉及一种有机-无机复合透明薄膜。
背景技术
透明有机聚合物具有很多优良的性能,如加工性能、耐候性、电绝缘性好,光学性能优异,且质轻性韧,广泛应用各个领域。然而透明有机聚合物也有其难以克服的弊端,如耐溶剂性差,耐热性差、吸水率高以及耐磨性不佳。公认的最大的缺陷便是表面硬度低,表面耐磨性能较差,容易被刮花,透明有机聚合物在平常的使用过程中,表面吸附的尘粒或砂砾会使基材在使用擦拭过程当中表面产生擦伤、划痕或沟槽,降低基材的透光率,严重影响其光学性质,极大制约了它的应用。尤其在日用品领域,例如数码产品,汽车零部件等,透明有机聚合物的耐磨性差使产品外观随时间影响很大,因此提高它们的耐磨性十分迫切。
人类为扩大透明有机聚合物的应用范围,对其进行改性处理,保留其以上优点,同时克服上述不足。常用的手段有三种:第一种,在透明有机聚合物中加入无机微粒子,常用的有SiO2,ZrO2,TiO2等颗粒,来提高透明有机聚合物薄膜的耐磨性,但其最终性能与无机粒子的含量、粒度有关,目前研究尚不成熟;第二种,透明有机聚合物表面改性,通过高温、等离子体处理或沉积新有机涂层,改善表面性能;第三种,通过PVD和CVD技术将无机耐磨层沉积在有机聚合物基板上,该方法由于沉积过程中温度的影响,造成无机薄膜和有机聚合物之间易剥落,且长期耐候性也很差,很容易在使用过程中脱膜,起不到保护作用。
同时由于有机聚合物作为耐磨耐候的保护层,需要不影响底层的性能(颜色、光泽以及反射率等),对结构的透光性提出了很高的要求。
发明内容
有鉴于此,本发明要解决的技术问题在于提供一种有机-无机复合透明薄膜,具有优良的耐磨以及耐候性。
本发明提供了一种有机-无机复合透明薄膜,包括依次接触的有机薄膜层、结合过渡层和无机涂层;所述结合过渡层为无机碳基薄膜。
优选的,所述结合过渡层为采用石墨靶材真空溅射方法制备的无机碳基薄膜。
优选的,所述无机碳基薄膜的厚度为1~50nm。
优选的,所述有机薄膜层为有机涂层或有机薄膜。
优选的,所述有机涂层为有机硅系树脂、丙烯酸酯系树脂或环氧树脂;
所述有机薄膜为PC、PET、PMMA、PEM或亚克力。
优选的,所述有机涂层的厚度为2~100微米;所述有机薄膜的厚度为50~1000微米。
优选的,所述无机涂层为Al2O3,SiO2,SiONx,ZrO2,TiO2和SnO2中的一种或几种及其金属氧化掺杂而成。
优选的,所述无机涂层为Al2O3,SiO2,SiONx,ZrO2,TiO2和SnO2中的一种或几种金属氧化物叠加而成的复合涂层。
优选的,所述无机涂层的厚度为100~2000nm。
优选的,在沉积结合过渡层前,对有机薄膜层进行活化处理。
与现有技术相比,本发明提供了一种有机-无机复合透明薄膜,包括依次接触的有机薄膜层、结合过渡层和无机涂层;所述结合过渡层为无机碳基薄膜。本发明在有机薄膜层和无机涂层间增加了结合过渡层,有效提高了有机薄膜层和无机涂层的结合力,制备的复合薄膜在保留有机涂层的光滑、耐磨的基础上,同时具备了无机涂层的耐磨、高硬性能。同时该结构可实现复合结构的高透明性,整体透过率>80%,以及优异的户外耐候性。使得该结构在多种领域得以广泛应用,譬如快消数码产品,汽车行业,太阳能领域等。
附图说明
图1是实施例1制备的有机-无机复合透明薄膜的结构示意图;
图2是实施例2制备的有机-无机复合透明薄膜的结构示意图。
具体实施方式
本发明提供了一种有机-无机复合透明薄膜,包括依次接触的有机薄膜层、结合过渡层和无机涂层;所述结合过渡层为无机碳基薄膜。
本发明在有机薄膜层和无机涂层间增加了结合过渡层,有效提高了有机薄膜层和无机涂层的结合力,制备的复合薄膜在保留有机涂层的光滑、耐磨的基础上,同时具备了无机涂层的耐磨、高硬性能。同时该结构可实现复合结构的高透明性,整体透过率>80%,以及优异的户外耐候性。使得该结构在多种领域得以广泛应用,譬如快消数码产品,汽车行业,太阳能领域等。
本发明首先提供有机薄膜层,所述有机薄膜层优选为有机涂层或有机薄膜。
所述有机涂层优选为有机硅系树脂、丙烯酸酯系树脂或环氧树脂,其厚度优选为2微米~100微米。
本发明对所述有机涂层的沉积方法并无特殊限定,可以为本领域技术人员熟知的方法,如喷涂、滚涂或浸涂等液相沉积方法。
本发明对所述有机涂层的固化方法并无特殊限定,可以为本领域技术人员熟知的固化方法,如热固化、湿气固化或UV紫外固化等。
本发明优选的,所述有机涂层远离结合过渡层的一侧复合有基材。本发明对所述基材的材质和厚度并无特殊限定,可以为本领域技术人员熟知的基材以及常规厚度。
所述有机薄膜优选为有机聚合物薄膜,更优选为PC、PET、PMMA、PEM或亚克力,其厚度优选为50微米~1000微米。
本发明对所述有机薄膜的制备方法并无特殊限定,可以为本领域技术人员熟知的方法。
然后在有机薄膜层表面沉积结合过渡层。
本发明所述结合过渡层为无机碳基薄膜。优选的,其为采用石墨靶材真空溅射方法制备的无机碳基薄膜。所述溅射过程中气氛优选为Ar、N2、CH4或C2H2等,制备出的无机碳基薄膜具有透光性能。所述无机碳基薄膜的厚度优选为1~50nm。
所述结合过渡层可以提供无机键合,进而实现有机薄膜层与无机涂层之间的复合结合,并提高无机涂层的附着力,进一步实现长期耐候和耐磨性能。
本发明优选的,在沉积结合过渡层前,对有机薄膜层进行活化处理。优选的,采用等离子体轰击清洗的方法进行活化处理,所述清洗的气氛优选为Ar、O2、O3、N2等。
然后在所述结合过渡层表面沉积无机透明涂层,作为外层保护层。
所述无机涂层优选采用PVD(溅射、蒸发)物理气相沉积或CVD化学气相沉积制备。
所述无机涂层优选采用Al2O3,SiO2,SiONx,ZrO2,TiO2,SnO2等金属氧化物及金属氧化掺杂而成。或者采用Al2O3,SiO2,SiONx,ZrO2,TiO2和SnO2中的一种或几种金属氧化物叠加而成。其厚度优选为100nm~2000nm。
经环境模拟试验(盐雾测试、湿毛刷测试,高温高湿测试,高低温循环测试),以及户外老化试验,证明本发明制备的有机-无机复合透明薄膜具有可靠稳定的耐磨及耐候性,作为透明保护层是一种理想的结构。
本发明中,上述多层结构采用喷涂,CVD,PVD(磁控溅射、磁控溅射)等手段制备,工艺重复稳定性好、生产效率高,易于大规模工业生产。
上述有机涂层或有机聚合物薄膜可以达到微米级别,很容易产业化获得,能起到底材的基础保护作用。但是由于有机材质本身硬度不高,抗划伤及耐磨性差,在作为外观要求高,使用环境苛刻的条件下很难单独胜任。经常会出现刮伤,花屏,变毛等影响底层性能(颜色,光泽,反射率等)的情况发生。而对于无机涂层,以现有工艺经常的SiO2层为例,其材料本征表面硬度为莫氏H7,要达到很好长久的耐磨性能,厚度达到微米级别才能胜任。而制约无机层增厚的除了沉积速率慢,成本高也是一大因素。现有的有机-无机复合膜常出现结合失效现象,因为有机薄膜层的表面张力比较低,不利于润湿和粘结。本发明在引入结合过渡层,以及可选择的有机层等离子清洗工序之后,上述问题得到了很好的解决。制备的复合膜大大提高了单层保护层(无论是有机膜还是无机膜)的耐磨,耐候性。本发明的有机-无机透明复合薄膜,工艺重复稳定性好、生产效率高,易于大规模工业生产。
为了进一步说明本发明,下面结合实施例对本发明提供的有机-无机复合透明薄膜进行详细描述。
实施例1
1)基片清洗:将1.1mm超白玻璃,切割成10*10cm见方,放入清洗机内,先进行软毛刷擦洗,然后进入超声清洗段,超声清洗的温度为30℃,时间为15min,超声清洗后进行纯水漂洗,之后用氮气吹干,保证吹干后的半成品表面洁净无油污。
2)有机涂层制备:选用TEOS(正硅酸乙酯)树脂作为有机涂层原料,制成硅氧烷类有机硅溶液。采用自动喷涂技术将有机硅液均匀喷涂于超白玻璃基材表面,控制喷涂液量以及喷枪行走速度至理想状态,室温下将成膜样品放置通风处30分钟,待其自然流平。所得涂层先在30~50℃烘箱中恒温30分钟,再缓慢升温至80℃,恒温固化8个小时,自然冷却至室温后即得到透明有机聚合物涂层。有机硅涂层厚度控制在5~45微米。
3)磁控溅射(PVD)沉积结合过渡层:a)样品表面预清洗:涂覆有机涂层的样品在真空腔体里,真空度达到10-3pa以下,通入氧气与氩气的混合气,采用等离子清洗工艺进行表面处理,轰击活化5min;b)沉积结合过渡层:表面清洁后的样品进入工艺腔,靶材为纯度4N的石墨靶,腔中气氛为Ar/N2混合气体,其中Ar比例80%,工作气压为1.0Pa,采用直流电源功率为700W(功率密度为2W/cm2);样片均匀镀膜,沉积的无机碳基薄膜厚度为20nm。
4)无机耐磨涂层:a)将样片继续在真空腔体内,进行磁控溅射沉积SiO2薄膜,沉积温度80℃,靶材为纯度5N的氧化硅靶,腔中气氛为Ar/O2混合气体,其中Ar比例75%,工作气压为1.0Pa,采用射频RF电源功率为700W(功率密度为2W/cm2);样片均匀镀膜,沉积的SiO2薄膜厚度为300nm。b)继续进行磁控溅射沉积TiO2薄膜,靶材为纯度5N的钛靶,腔中气氛为Ar/O2混合气体,其中Ar比例50%,工作气压为0.8Pa,采用直流脉冲电源功率为350W(功率密度为1W/cm2);样片均匀镀膜,沉积的TiO2薄膜厚度为100nm。
制备完成的样品有机涂层作为基础耐磨层,无机涂层为两种无机涂层复合,结构如图1所示,图1是制备的有机-无机复合透明薄膜的结构示意图。
经检测,其铅笔硬度达到7H,透过率>90%。按标准GBT9286-1998百格试验测试镀层之间的结合力,切口的边缘完全光滑,格子边缘没有任何剥落,测试结果为5B;根据ASTMD 2486标准,对本发明的无机-有机复合结构进行了湿毛刷耐磨测试,每10000次进行样品表面观察,结果表明耐磨性能有了较大的提高,湿毛刷测试50000次无任何划伤。以有机硅涂层作为参照,结果见表1。
表1 耐磨性能测试
实施例2
1)基片清洗:将0.2mm有机聚合物薄膜(选用高透PET薄膜),切割成10*10cm见方,放入清洗机内,先进行棉花粘酒精擦洗,然后进入超声清洗段,超声清洗的温度为50℃,时间为5min,超声清洗后进行纯水漂洗,之后用氮气吹干,保证吹干后的半成品表面洁净有光泽。
2)有机聚合物薄膜的预处理:干净的PET样品放置在真空腔体里,真空度达到10- 3pa以下,通入氧气至2pa,采用等离子清洗工艺进行表面处理,轰击活化5min。
3)磁控溅射(PVD)沉积结合过渡层:表面清洁后的样品进入工艺腔,靶材为纯度4N的石墨靶,腔中气氛为Ar气,工作气压为1.0Pa,沉积温度50℃,采用射频电源功率为350W(功率密度为1/cm2);样片均匀镀膜,沉积的无机碳基薄膜厚度为10nm。
4)无机耐磨涂层:将样片继续在真空腔体内,进行磁控溅射沉积Al2O3薄膜,沉积温度60℃,靶材为纯度5N的三氧化二铝靶,腔中气氛为Ar/O2混合气体,其中Ar比例90%,工作气压为1.2Pa,采用射频RF电源功率为700W(功率密度为2W/cm2);样片均匀镀膜,沉积的无机耐磨薄膜厚度为200nm。
制备完成的样品如图2所示,图2是本实施例制备的有机-无机复合透明薄膜的结构示意图。
经检测,其铅笔硬度达到6H,透过率>91%。按标准GBT9286-1998百格试验测试镀层之间的结合力,切口的边缘完全光滑,格子边缘没有任何剥落,测试结果为5B;根据ASTMD2486标准,对本发明的无机-有机复合结构进行了湿毛刷耐磨测试,每10000次进行样品表面观察,结果表明耐磨性能有了较大的提高,湿毛刷测试50000次无任何划伤。以有机硅涂层作为参照,结果见表2。
表2 耐磨性能测试
比较例1
1)基片清洗:将0.2mm有机聚合物薄膜(选用高透PET薄膜),切割成10*10cm见方,放入清洗机内,先进行棉花粘酒精擦洗,然后进入超声清洗段,超声清洗的温度为50℃,时间为5min,超声清洗后进行纯水漂洗,之后用氮气吹干,保证吹干后的半成品表面洁净有光泽。
2)有机聚合物的无机耐磨薄膜的沉积:干净的PET样品放置在真空腔体里,真空度达到10-3pa以下,进行磁控溅射沉积SiO2薄膜,沉积温度50℃,靶材为纯度5N的二氧化硅靶,腔中气氛为Ar/O2混合气体,其中Ar比例95%,工作气压为0.8Pa,采用射频RF电源功率为1000W(功率密度为3W/cm2);样片均匀镀膜,沉积的SiO2薄膜厚度为300nm。
经检测,其铅笔硬度达到3H,透过率>90%。按标准GBT9286-1998百格试验测试镀层之间的结合力,在划线的边缘有成片的透明膜层脱落,且比较严重,测试结果为2B;根据ASTM D 2486标准,对本发明的无机-有机复合结构进行了湿毛刷耐磨测试,每10000次进行样品表面观察,结果显示样品在第一个周期就已经发生了严重的脱膜现象。结果表明没有经过活化处理以及沉积无机碳基薄膜的无机-有机复合结构完全不耐磨。以有机薄膜基体、该比较例制备的不含过渡结合层的无机-有机复合薄膜作为对比,与本申请提供的有机-无机复合薄膜进行耐磨性能比较,结果见表3。
表3 耐磨性能测试
上述实施例中,结合过渡层是以高纯石墨靶作为靶材,采用PVD方法制备而成,在沉积之前可采用等离子清洗对有机涂层或有机薄膜进行处理;使用该方法制备的有机-无机复合薄膜具有高透、高耐磨、高耐候的特点,且工艺重复稳定性好、生产效率高。
以上实施例的说明只是用于帮助理解本发明的方法及其核心思想。应当指出,对于本技术领域的普通技术人员来说,在不脱离本发明原理的前提下,还可以对本发明进行若干改进和修饰,这些改进和修饰也落入本发明权利要求的保护范围内。
Claims (10)
1.一种有机-无机复合透明薄膜,其特征在于,包括依次接触的有机薄膜层、结合过渡层和无机涂层;所述结合过渡层为无机碳基薄膜。
2.根据权利要求1所述的有机-无机复合透明薄膜,其特征在于,所述结合过渡层为采用石墨靶材真空溅射方法制备的无机碳基薄膜。
3.根据权利要求1所述的有机-无机复合透明薄膜,其特征在于,所述无机碳基薄膜的厚度为1~50nm。
4.根据权利要求1所述的有机-无机复合透明薄膜,其特征在于,所述有机薄膜层为有机涂层或有机薄膜。
5.根据权利要求4所述的有机-无机复合透明薄膜,其特征在于,所述有机涂层为有机硅系树脂、丙烯酸酯系树脂或环氧树脂;
所述有机薄膜为PC、PET、PMMA、PEM或亚克力。
6.根据权利要求4所述的有机-无机复合透明薄膜,其特征在于,所述有机涂层的厚度为2~100微米;所述有机薄膜的厚度为50~1000微米。
7.根据权利要求1所述的有机-无机复合透明薄膜,其特征在于,所述无机涂层为Al2O3,SiO2,SiONx,ZrO2,TiO2和SnO2中的一种或几种及其金属氧化掺杂而成。
8.根据权利要求1所述的有机-无机复合透明薄膜,其特征在于,所述无机涂层为Al2O3,SiO2,SiONx,ZrO2,TiO2和SnO2中的一种或几种金属氧化物叠加而成的复合涂层。
9.根据权利要求1所述的有机-无机复合透明薄膜,其特征在于,所述无机涂层的厚度为100~2000nm。
10.根据权利要求1所述的有机-无机复合透明薄膜,其特征在于,在沉积结合过渡层前,对有机薄膜层进行活化处理。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710282485.1A CN108796458A (zh) | 2017-04-26 | 2017-04-26 | 一种有机-无机复合透明薄膜 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710282485.1A CN108796458A (zh) | 2017-04-26 | 2017-04-26 | 一种有机-无机复合透明薄膜 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN108796458A true CN108796458A (zh) | 2018-11-13 |
Family
ID=64068905
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201710282485.1A Pending CN108796458A (zh) | 2017-04-26 | 2017-04-26 | 一种有机-无机复合透明薄膜 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN108796458A (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110862235A (zh) * | 2019-08-29 | 2020-03-06 | 信利光电股份有限公司 | 一种2.5d防眩光减反射盖板及其制造方法 |
CN112644133A (zh) * | 2020-12-30 | 2021-04-13 | 江苏铁锚玻璃股份有限公司 | 有机透明器件表面增硬技术及有机透明器件表面结构 |
CN114550979A (zh) * | 2022-03-02 | 2022-05-27 | 辽宁科技大学 | 透明导电耐磨耐蚀的智能穿戴器件外用屏及其制备方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003011292A (ja) * | 2001-07-03 | 2003-01-15 | Bridgestone Corp | 耐摩耗性フィルム及び積層体 |
CN103035845A (zh) * | 2012-12-25 | 2013-04-10 | 中国科学院长春光学精密机械与物理研究所 | 高导电性有机(无机)/金属/无机(有机)多层结构透明导电薄膜的制备方法 |
CN103762321A (zh) * | 2013-12-31 | 2014-04-30 | 刘键 | 一种有机器件薄膜封装方法及装置 |
CN108663734A (zh) * | 2017-03-29 | 2018-10-16 | 杭州朗旭新材料科技有限公司 | 一种柔性反射镜 |
-
2017
- 2017-04-26 CN CN201710282485.1A patent/CN108796458A/zh active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003011292A (ja) * | 2001-07-03 | 2003-01-15 | Bridgestone Corp | 耐摩耗性フィルム及び積層体 |
CN103035845A (zh) * | 2012-12-25 | 2013-04-10 | 中国科学院长春光学精密机械与物理研究所 | 高导电性有机(无机)/金属/无机(有机)多层结构透明导电薄膜的制备方法 |
CN103762321A (zh) * | 2013-12-31 | 2014-04-30 | 刘键 | 一种有机器件薄膜封装方法及装置 |
CN108663734A (zh) * | 2017-03-29 | 2018-10-16 | 杭州朗旭新材料科技有限公司 | 一种柔性反射镜 |
Non-Patent Citations (1)
Title |
---|
姚宁等: "石墨缓冲层对有机电致发光期间性能的影响", 《功能材料》 * |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110862235A (zh) * | 2019-08-29 | 2020-03-06 | 信利光电股份有限公司 | 一种2.5d防眩光减反射盖板及其制造方法 |
CN112644133A (zh) * | 2020-12-30 | 2021-04-13 | 江苏铁锚玻璃股份有限公司 | 有机透明器件表面增硬技术及有机透明器件表面结构 |
CN114550979A (zh) * | 2022-03-02 | 2022-05-27 | 辽宁科技大学 | 透明导电耐磨耐蚀的智能穿戴器件外用屏及其制备方法 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN201294686Y (zh) | 一种具有金属膜层的壳体 | |
CN101760721B (zh) | 一种塑料表面镀铬方法 | |
CN105084778B (zh) | 一种绿色低辐射镀膜玻璃及其制备方法 | |
US20080241523A1 (en) | Substrate, Such As A Glass Substrate, With A Hydrophobic Surface And Improved Durability Of Hydrophobic Properties | |
JP5373235B1 (ja) | ガスバリアフィルムおよびガスバリアフィルムの製造方法 | |
CN101468538B (zh) | 一种镀膜材料及其制备方法 | |
CN108977782B (zh) | 一种长期稳固耐用的疏水涂层及其制备方法、应用 | |
CN108796458A (zh) | 一种有机-无机复合透明薄膜 | |
CN103966559A (zh) | 红外线反射薄膜的制造方法 | |
KR101524271B1 (ko) | 복수 개의 박막으로 이루어진 지문 방지층의 조성물과 그 제조 방법. | |
CN111992476A (zh) | 等离子化学气相沉积的纳米超亲水防雾涂层及其制备方法 | |
TWI503430B (zh) | 鍍膜件及其製造方法 | |
CN105084781B (zh) | 一种金色低辐射镀膜玻璃及其制备方法 | |
KR101662627B1 (ko) | 고경도 박막형 투명 박판 글라스, 이의 제조 방법, 고경도 박막형 투명 박판 도전성 글라스 및 이를 포함하는 터치 패널 | |
CN102744926B (zh) | 一种基体表面颜色可控的彩色防腐装饰膜及其制备方法 | |
Kondratiev et al. | Low temperature sol-gel technique for processing Al-doped Zinc Oxide films | |
CN107675134A (zh) | 一种烧结钕铁硼永磁体表面氮化物复合镀层及制备方法 | |
CN105420735B (zh) | 一种超疏水氟硅烷复合薄膜及其制备方法 | |
CN110845149B (zh) | 一种超疏水玻璃的制备方法 | |
US20130142995A1 (en) | Method for improving hydrophilicity of a coating film through treatment on a surface morphology and super-hydrophilic glass coating layer produced by the same | |
CN102677054A (zh) | 一种具有疏水自清洁功能的装饰性复合涂层及其制备方法 | |
TWI668320B (zh) | 提高抗汙膜之附著力的方法 | |
US20120183805A1 (en) | Coated article and method for making the same | |
US8592032B2 (en) | Coated article and method for making the same | |
CN113083640A (zh) | 一种防指纹纳米涂层的喷涂方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
RJ01 | Rejection of invention patent application after publication | ||
RJ01 | Rejection of invention patent application after publication |
Application publication date: 20181113 |