CN105308839A - Linear motor and stage device - Google Patents

Abstract

Realize the compactness and weight reduction of the linear motor as a whole. The linear motor (1) is provided with an excitation part (10) and an armature (20), and the excitation part (10) has: two yoke plates (11a, 11b) respectively provided with opposing surfaces facing each other; On the respective facing surfaces of the yoke plates (11a, 11b), a plurality of X-direction moving magnets (14) are arranged in the first magnet row (64) along the X direction, and the armature (20) has a magnetic gap and the first The magnet column (64) is opposite and the first armature coil column (73) arranged along the X direction with a plurality of single-phase coils (23) for moving in the X direction, the linear motor (1) has the following configuration: in the first armature In the coil row (73) and the first magnet row (64), the single-phase coil (23) for moving in the X direction is wound with the X direction as the axis, and the two opposing magnets for moving in the X direction (14 ) pairs have the same polarity, and the polarities of the magnets (14) are alternately different along the X direction.

Description

Linear motor and table device

technical field

The invention relates to a linear motor and a workbench device.

Background technique

Patent Document 1 discloses a coreless linear motor including an exciter and an armature. A yoke base connects two flat yoke plates so that the exciter has a substantially U-shape. In this linear motor, a permanent magnet row is provided on the inner surface of each field yoke plate. In this permanent magnet row, the magnetic poles of two opposing permanent magnets in the same group are different from each other, and the magnetic poles of the two adjacent permanent magnets in the longitudinal direction of the field element are also different from each other.

prior art literature

patent documents

Patent Document 1: Japanese Patent Laid-Open No. 2013-27054

Contents of the invention

The problem to be solved by the present invention

However, in the structure described in Patent Document 1, since the two opposing permanent magnets provided on the two yoke plates have different poles, mutual attraction is generated. In order to prevent the yoke plate from coming into contact with the armature due to the deflection of the yoke plate due to the attractive force, it is necessary to increase the rigidity of the yoke. As a result, the thickness of the yoke plate increases, making it difficult to reduce the size and weight of the linear motor as a whole.

The present invention has been made in view of such a problem, and an object of the present invention is to provide a linear motor that realizes overall compactness and weight reduction.

solutions to problems

In order to solve the above problems, according to an aspect of the present invention, a linear motor is applied, and any one of the armature and the excitation part is used as a mover and the other is used as a stator, wherein the excitation parts have: two yoke plates on opposing surfaces; and a magnet row in which a plurality of permanent magnets are arranged in a predetermined direction along the respective opposing surfaces of the two yoke plates, and the armature has an armature a coil row, the armature coil row is opposed to the magnet row with a magnetic gap therebetween, and a plurality of armature coils are arranged in the predetermined direction, and the linear motor has the following arrangement: In the coil row and the magnet row, the armature coil is wound around the predetermined direction as an axis, and the two pairs of the permanent magnets facing each other have the same polarity and are aligned along the predetermined direction. The polarities of the permanent magnets are alternately changed.

Invention effect

According to the linear motor of the present invention, the overall size and weight can be reduced.

Description of drawings

1 is a perspective view showing the arrangement of permanent magnets and armature coils of a linear motor according to an embodiment showing the principle. The structure in FIG. An explanatory diagram of a road viewed from the Y direction side.

2 is a perspective view showing the arrangement of permanent magnets and armature coils of a linear motor of a comparative example. The structure of FIG. An explanatory diagram of the case viewed from one side in the Y direction.

3 is a perspective view showing the overall appearance of the linear motor according to the first embodiment.

Fig. 4 is a perspective view showing the field element and the armature of the linear motor separated.

Fig. 5 is a perspective view showing an exciter of the linear motor.

Fig. 6 is a perspective view showing a state in which a yoke plate of the field element is removed.

7 is a perspective view showing a state in which the X-direction moving magnet and the Y-direction moving magnet of a yoke plate are further removed from the field element.

Fig. 8 is a perspective view showing part of an armature mold part through.

Fig. 9 is a perspective view showing an extracted armature coil of the armature molding part in the structure shown in Fig. 8 .

10 is a perspective view showing the arrangement of armature coils in the armature molding part of the linear motor of the comparative example.

11 is a perspective view showing a coil arrangement of an armature molding part of a linear motor according to a second embodiment.

12 is a perspective view showing a coil arrangement of an armature mold part of a linear motor according to a third embodiment.

detailed description

Hereinafter, disclosed embodiments will be described with reference to the drawings.

<Example of the implementation of the principle>

The thrust generating principle of the linear motor having a single-phase winding according to this embodiment will be described using FIG. 1 and FIG. 2 . In addition, in the following description, the X direction, the Y direction, and the Z direction correspond to the X-axis direction, the Y-axis direction, and the Z-axis direction of three-dimensional Cartesian coordinates, and correspond to the directions appropriately shown in each figure such as FIG. 1( a ). arrow direction. For example, in Fig. 1 (a), the direction corresponding to the left front (corresponding to one side of the first direction) to the right depth (corresponding to the other side of the first direction) is the X direction (corresponding to the first direction), The direction corresponding to the front right (corresponding to one side of the second direction) to the deep left (corresponding to the other side of the second direction) is the Y direction (corresponding to the second direction), and the direction corresponding to the up and down direction is the Z direction (equivalent to the third direction).

<Summary Structure>

As shown in Fig. 1(a) ~ Fig. 1(c), the linear motor 100 has: an exciter 101 with a plurality (four in this example) of permanent magnets 104; a) the armature 105 of the armature coil 106.

The field element 101 includes a yoke base 102 having two yoke plates 103 a and 103 b facing in the Z direction (hereinafter referred to simply as "up and down direction", "up and down", etc. as appropriate). On the opposing surfaces (inner surfaces) of these two yoke plates 103a, 103b, two permanent magnets 104, 104 that are a pair of up and down are arranged in multiple pairs (two pairs in this example) along the X direction (equivalent to magnet column). Between the plurality of pairs of upper and lower permanent magnets 104, 104, a plurality (two in this example) of armature coils 106 faces each permanent magnet 104 with a magnetic gap therebetween along the X direction. Arrangement (equivalent to armature coil column).

At this time, the magnetic poles (N pole and S pole) of the permanent magnet 104 are different poles between the adjacent permanent magnets 104, 104 in the X direction and a pair of permanent magnets 104, 104 in the vertical direction (armature pole). The magnetic poles on the side of the coil 106) are arranged so as to have the same polarity. Furthermore, the armature coil 106 is wound around the X direction (corresponding to a predetermined direction) as an axis.

<magnetic circuit>

By the above structure, as shown in Fig. 1(c), from the X direction side (left side in Fig. 1(c) of a yoke plate (suitably called "upper yoke plate") 103a. Hereinafter, Appropriately referred to as "the left side") the magnetic flux from the N pole of the permanent magnet 104 provided forms a magnetic circuit Qa of a series of paths as follows: towards the other side in the X direction (the right side in FIG. 1( c). Below, suitably After being referred to as "the right side"), it enters the S pole of the permanent magnet 104 on the right side provided on the yoke plate 103a above, and then crosses the above-mentioned permanent magnet 104 on the right side from bottom to top, and from the permanent magnet on the right side The N pole of 104 enters the upper yoke plate 103a, goes leftward, and returns to the S pole of the permanent magnet 104 provided on the left side of the upper yoke plate 103a.

Likewise, the magnetic flux coming out from the N pole of the permanent magnet 104 provided on the left side of the other yoke plate (appropriately referred to as “lower yoke plate”) 103b forms a magnetic circuit Qb of a series of paths as follows: toward the right side Afterwards, it enters the S pole of the permanent magnet 104 arranged on the right side of the yoke plate 103b below, and then crosses the permanent magnet 104 on the right side from top to bottom, and enters from the N pole of the permanent magnet 104 on the right side. The lower yoke plate 103b then faces to the left, and returns to the S pole of the permanent magnet 104 on the left side of the lower yoke plate 103b.

In addition, the said one magnetic circuit Qa and the other magnetic circuit Qb are line-symmetric with respect to the line of X direction, and are mutually opposing.

<Effect on armature coil>

With respect to the magnetic circuits Qa and Qb constituted as described above, the upper winding of the left armature coil 106 is arranged so as to traverse in the Y direction in the downward magnetic field of the magnetic circuit Qa, and the left armature The winding on the lower side of the coil 106 is arranged so as to traverse in the Y direction in the upward magnetic field of the magnetic circuit Qb. Similarly, the winding on the upper side of the armature coil 106 on the right side is arranged so as to traverse in the Y direction in the upward magnetic field of the magnetic circuit Qa, and the winding on the lower side of the armature coil 106 on the right side is arranged in the direction Y in the magnetic circuit Qb. The downward magnetic field is configured in a way that traverses along the Y direction.

In addition, in the present embodiment, the current i flows in opposite directions with respect to the left and right armature coils 106 , 106 .

That is, in the armature coil 106 on the right side, in the winding on the upper side, the current i flows, for example, from one side in the Y direction (the right side in FIG. 1( a ), the right side in FIG. 1(c) from the front side) to the other side in the Y direction (left deep side in Fig. 1(a), left side in Fig. 1(b), deep side in Fig. 1(c)) flow up. As a result, the interaction between the upward magnetic field passing through the magnetic circuit Qa and the current, according to Fleming's left-hand law, acts on the upper winding from one side in the X direction (the left front side in Fig. 1(a), The front side in Fig. 1(b), the left side in Fig. 1(c)) towards the other side in the X direction (the right deep side in Fig. 1(a), the deep side in Fig. 1(b), and the 1(c) on the right). On the other hand, in the winding on the lower side of the right armature coil 106 , in the above case, the current i flows in the direction from the other side in the Y direction to the one side in the Y direction. As a result, the interaction between the downward magnetic field passing through the magnetic circuit Qb and the current acts on the lower winding to act on the other side in the X direction according to Fleming's left-hand law. As described above, a force toward the other side in the X direction is induced in the left armature coil 106 (see the white arrow in FIG. 1( a )).

Furthermore, in the left armature coil 106 , the current i flows in the direction from the other side in the Y direction to one side in the Y direction in the upper winding. As a result, the interaction of the downward magnetic field passing through the magnetic circuit Qa and the current acts on the upper winding to act on the other side in the X direction according to Fleming's left-hand law. On the other hand, in the lower winding of the left armature coil 106 , the current i flows in the direction from one side in the Y direction to the other side in the Y direction in the above case. As a result, the interaction of the upward magnetic field passing through the magnetic circuit Qb and the current acts on the lower winding to act on the other side in the X direction according to Fleming's left-hand law. As described above, the armature coil 106 on the left also induces a force toward the other side in the X direction (see the white arrow in FIG. 1( a )).

As a result of the above, thrust force to the other side in the X direction is generated in the armature 105 including the armature coils 106 , 106 on the left and right sides (see the white arrow in FIG. 1( c )). Then, when the current i flowing in the left and right armature coils 106 and 106 is in the opposite direction to the above, the armature 105 generates a thrust to the X direction side in the opposite direction by the above-mentioned principle. Accordingly, the armature 105 can be displaced in the X direction with respect to the upper and lower yoke plates 103a, 103b of the field element 101 in accordance with the energizing direction of the current i. As a result, the linear motor 100 can drive a driven portion of, for example, a table device (not shown) attached to the armature base 107 of the armature 105 to one side and the other side in the X direction.

<Comparative example of this embodiment>

Next, a comparative example relative to the above-mentioned embodiment showing the principle will be described with reference to FIGS. 2( a ) to ( c ). The same reference numerals are assigned to the same parts as those in the above-mentioned embodiment showing the principle, and descriptions are appropriately omitted or simplified.

As shown in FIGS. 2(a) to 2(c), in the linear motor 100' of this comparative example, the permanent magnets 104' are located between the yoke plates 103a, 103b above and below the yoke base 102 of the field member 101. A plurality of pairs (two pairs in this example) are arranged along the X direction in pairs up and down on the opposing surface. Among the plurality of permanent magnets 104', the permanent magnets 104', 104' that are adjacent to each other in the X direction have opposite poles, and the permanent magnets 104', 104' that are paired in the vertical direction (the armature coil 106' The magnetic poles on the side) are arranged so that they become opposite poles. Furthermore, one armature coil 106' of the armature 105 is disposed between the above-mentioned upper and lower permanent magnets 104', 104' so as to face each permanent magnet 104' via a magnetic gap. In addition, in this armature coil 106', a coil is wound around the Z direction as an axis.

<magnetic circuit>

With the above structure, the magnetic circuit Q' shown in FIG. 2(c) is formed. That is, in this magnetic circuit Q', the magnetic flux coming out from the N pole of the permanent magnet 104' on the left side provided on the upper yoke plate 103a enters the upper yoke 103a and goes to the right side, and then enters the upper yoke plate 103a. The S pole of the permanent magnet 104' arranged on the right side of the yoke 103a, after crossing the permanent magnet 104' of the right side from top to bottom, comes out from the N pole of the permanent magnet 104' of the right side and enters below. The S pole of the permanent magnet 104' is arranged on the right side of the yoke plate 103b. Then, the magnetic flux crosses the permanent magnet 104' on the right side from top to bottom, enters the yoke plate 103b below from the N pole of the permanent magnet 104' on the right side, and enters the yoke below toward the left side. After the S pole of the permanent magnet 104' arranged on the left side of the plate 103b, it crosses the permanent magnet 104' on the left side from bottom to top and comes out from the N pole, and returns to the permanent magnet 104 arranged on the left side of the upper yoke 103a. 'The S pole of this series of paths.

<Effect on armature coil>

With respect to the magnetic circuit Q' constituted as described above, the winding on the left side of the armature coil 106' is arranged so as to traverse in the Y direction in the upward magnetic field of the magnetic circuit Q', and the winding on the right side is arranged in the magnetic circuit Q'. It is arranged so that the downward magnetic field of Q' traverses along the Y direction.

In addition, in this comparative example, the current i flows in the direction shown, for example, in the armature coil 106'. In this case, in the winding on the left side of the armature coil 106', the current i flows from one side in the Y direction (the right side in FIG. 2(a), the right side in FIG. 2(b), the right side in FIG. 1( The front side in c) flows in the direction of the other side in the Y direction (left deep side in Fig. 2(a), left side in Fig. 2(b), deep side in Fig. 2(c)) . As a result, the interaction between the upward magnetic field passing through the magnetic circuit Q' and the current, according to Fleming's left-hand law, acts on the winding on the left side from the side of the X direction (the left front side in Fig. 2(a) , the front side in Fig. 2(b), the left side in Fig. 2(c)) toward the other side in the X direction (the right deep side in Fig. 2(a), the deep side in Fig. 2(b), The force on the right side in Figure 2(c). On the other hand, in the winding on the left side of the armature coil 106', in the above case, the current i flows from the other side in the Y direction to the one side in the Y direction similarly. Under the interaction between the magnetic field and the current, according to Fleming's left-hand law, the force toward one side of the X direction works. As described above, a force toward one side in the X direction is induced in one armature coil 106 ′, and a thrust toward one side in the X direction is generated in the armature 105 including the armature coil 106 ′. Then, when the current i flowing in the armature coil 106' is set in the direction opposite to the above, a thrust force directed to the other side in the X direction in the direction opposite to the above is generated in the armature 105 . Accordingly, the armature 105 can be displaced in the X direction with respect to the upper and lower yoke plates 103 a and 103 b of the field element 101 . As a result, in the linear motor 100' of this comparative example, as in the above-mentioned embodiment showing the principle, for example, the driven part (not shown) of the armature base 107 attached to the armature 105 can be moved to one side and the other side in the X direction. Drive on one side.

<Problem of the comparative example>

As mentioned above, in the linear motor 100' of the comparative example shown in FIG. However, in this linear motor 100', the pairs of the permanent magnets 104', 104' that face each other in the two yoke plates 103a, 103b are opposite to each other (N pole and S pole, or S pole with N pole). Therefore, in each pair of permanent magnets 104', mutual attractive forces are generated. Therefore, in order to prevent the yoke plates 103a, 103b from coming into contact with the armature 105 due to the deflection of the yoke plates 103a, 103b due to the attractive force, it is necessary to increase the rigidity of the field element 101 . As a result, the thickness dimension of the yoke plates 103a and 103b has to be relatively increased, making it difficult to reduce the size and weight of the linear motor 100' as a whole.

<Effects of this embodiment>

On the other hand, in the linear motor 100 of the present embodiment shown in FIG. 1 , the permanent magnets 104, 104 of the pairs facing each other in the two yoke plates 103a, 103b have the same polarity (N pole and N pole and N pole and N pole respectively). pole, or S pole and S pole). Thereby, in each pair of magnets 104, 104, mutual repulsive force is generated. As a result, unlike the above modification in which the attractive force is generated as described above, it is not necessary to increase the rigidity of the field member 101 in order to prevent the contact between the yoke plates 103a, 103b and the armature 105, and for example, the yoke plates 103a, 103b can be made The thickness dimension is relatively small. As a result, the overall size and weight of the linear motor 100 can be reduced.

<First Embodiment>

Next, a two-axis linear motor according to a first embodiment capable of moving an armature in both the X direction and the Y direction by applying the above-mentioned principle will be described with reference to FIGS. 3 to 10 .

<Summary Structure>

As shown in FIGS. 3 to 7 , the linear motor 1 according to this embodiment includes a field material 10 and an armature 20 , and the armature 20 is arranged inside the field material 10 .

The field element 10 has two rectangular plate-shaped yoke plates 11a, 11b arranged to face each other in the vertical direction (Z direction), and the upper and lower surfaces of the two yoke plates 11a, 11b face each other (inner surfaces). A pair of magnets 14 (equivalent to the first permanent magnets) for moving in the X direction and a plurality of magnets 15 (equivalent to the first permanent magnets) for moving in the Y direction (equivalent to the magnets 15 (equivalent to) second permanent magnet). In this example, the X-direction moving magnet 14 and the Y-direction moving magnet 15 are formed in a thin, flat, elongated cuboid shape, and both have substantially the same thickness in the height direction.

The ends of the two yoke plates 11 a and 11 b are connected by the yoke base body 12 on the other side (left deep side) in the Y direction, thereby constituting a yoke 13 having a substantially U-shaped cross section. The yoke 13 is open on three sides in the planar direction other than the other side in the Y direction, that is, one side in the Y direction, one side in the X direction, and the other side in the X direction.

The armature 20 includes: a rectangular plate-shaped armature molded part 21 having a surface parallel to the yoke plates 11a and 11b; and an armature base 22 provided at one end of the armature molded part 21 . The armature molded part 21 is disposed between the magnets 14 for moving in the X direction and the magnets 15 for moving in the Y direction of one yoke plate 11a and the magnets 14 for moving in the X direction and the magnets 15 for moving in the Y direction of the other yoke plate 11b. .

One end of the armature molded portion 21 is exposed from an opening on the side opposite to the yoke base 12 (the side in the Y direction), and the above-mentioned armature base 22 is fixed to the exposed end of the armature molded portion 21 . . The armature base 22 is a member that couples an unillustrated driven part driven by the linear motor 1, and connects the linear motor 1 to, for example, a table device via the armature base 22, and uses the drive of the linear motion mechanism as the table device. source. In this example, the armature base 22 is formed as a rectangular thick plate perpendicular to the armature molding portion 21 . In addition, for the purpose of preventing the armature base 22 from intruding into the yoke 13, the armature base 22 is provided with the X-direction moving magnet 14 extending over a yoke plate (appropriately referred to as an “upper yoke plate”) 11a. And the magnet 15 for moving in the Y direction and the height of the magnet 14 for moving in the X direction and the magnet 15 for moving in the Y direction of another yoke plate (appropriately referred to as “the lower yoke plate”) 11b are set.

<Magnet for X-direction movement of the exciter>

As shown in FIG. 6, a plurality of (in this example, four) X-direction moving magnets 14 provided on the yoke plate 11a above the field member 10 moves upward with the attitude that its longitudinal direction is substantially consistent with the Y direction. One side (left front side in FIG. 6 ) and the other side (right back side in FIG. 6 ) of the opposing surface of the yoke plate 11 a in the X direction are dispersed, and two are respectively arranged. And, among the four X-direction moving magnets 14 of the upper yoke plate 11a, the two X-direction moving magnets 14, 14 on the X-direction outer side are flush with the X-direction end surfaces of the upper yoke plate 11a. mode configuration. The remaining two X-direction moving magnets 14 and 14 on the inside of the X-direction are separated by a large interval (for forming an arrangement space for a Y-direction moving magnet 15 described later) on the X-direction central side of the yoke plate 11a, and are separated from The outer X-direction moving magnets 14 are arranged at predetermined small intervals. At this time, the four magnets 14 for X-direction movement of the upper yoke plate 11 a are arranged so that the magnetic poles of adjacent ones (on the side facing the armature 20 ) NS are different from each other. In this example, the N pole, S pole, N pole, and S pole are arranged from one side in the X direction (the front left side in FIG. 6 ) toward the other side in the X direction (the deep right side in FIG. 6 ). mode configuration.

On the other hand, as shown in FIG. 7, a plurality of (in this example, four) X-direction moving magnets 14 provided on the yoke plate 11b below the field member 10 are arranged so that their longitudinal direction is substantially consistent with the Y direction. The attitudes are distributed to one side (left front side in FIG. 7 ) and the other side (right back side in FIG. 7 ) in the X direction of the facing surface of the lower yoke plate 11b, and two are respectively arranged. At this time, as shown in FIG. 6 , the four magnets 14 for X-direction movement of the lower yoke plate 11 b and the four magnets 14 for X-direction movement of the above-mentioned upper yoke plate 11 a are paired in the vertical direction, respectively. And, among the four X-direction moving magnets 14 of the lower yoke plate 11b, the two X-direction moving magnets 14, 14 on the X-direction outer side are flush with the X-direction end surfaces of the lower yoke plate 11b. mode configuration. The remaining two X-direction moving magnets 14 and 14 on the inside of the X-direction are spaced apart from each other at a large distance (for forming a space for arranging the Y-direction moving magnet 15 described later) on the X-direction center side of the yoke plate 11b, and are separated from the yoke plate 11b. The outer X-direction moving magnets 14 are arranged at predetermined small intervals. In addition, the four magnets 14 for moving in the X direction of the lower yoke plate 11b are similar to the above-mentioned magnets 14 for moving in the X direction, so that the magnetic poles of NS adjacent to each other (on the side facing the side of the armature 20) are different from each other. way to arrange. In this example, the N pole, S pole, N pole, and S pole are arranged from one side in the X direction (the front left side in FIG. 7 ) toward the other side in the X direction (the deep right side in FIG. 7 ). way to configure. That is, the upper and lower pairs of the X-direction moving magnet 14 provided on the upper yoke plate 11a and the X-direction moving magnet 14 provided on the lower yoke plate 11b (on the side facing the armature 20 side) NS The magnetic poles are arranged in a mutually homopolar manner.

Furthermore, the first magnet row 64 is formed by the four X-direction moving magnets 14 of the upper yoke plate 11 a and the four X-direction moving magnets 14 of the lower yoke plate 11 b arranged along the X direction as described above.

<Magnet for Y-direction movement of the exciter>

Returning to Fig. 6, a plurality of (in this example, five) Y-direction moving magnets 15 arranged on the yoke plate 11a above the exciter is in the posture that its length direction is substantially consistent with the X direction, and the yoke on the top The central parts in the X direction of the opposing surfaces of the plates 11a are arranged in a row along the Y direction. The five magnets 15 for moving in the Y direction are arranged with a predetermined small gap therebetween along the Y direction. Among them, the Y-direction moving magnet 15 on the Y-direction side (the right side in FIG. 6 ) is arranged so as to be flush with the end surface on the Y-direction side of the upper yoke plate 11a. And among them, the Y-direction moving magnet 15 and the yoke base body 12 are arrange|positioned at the other side (left deep side in FIG. 6) of a Y direction with a predetermined gap. At this time, the five Y-direction moving magnets 15 of the upper yoke plate 11 a are arranged so that adjacent ones (on the side facing the armature 20 ) NS have different magnetic poles. In this example, N pole, S pole, N pole, S pole, N pole, N pole, S pole, N pole, N pole, S pole, N pole, N pole, S pole, N pole configured in the order of poles.

On the other hand, as shown in FIG. 7, a plurality of (in this example, five) magnets 15 for moving in the Y direction provided on the yoke plate 11b below the field member 10 are arranged such that their longitudinal direction is substantially consistent with the X direction. The posture is arranged in a row along the Y direction at the central portion in the X direction of the facing surface of the lower yoke plate 11b. The plurality of Y-direction moving magnets 15 of the lower yoke plate 11 b are arranged with a predetermined small gap therebetween in the Y direction. Among them, the Y-direction moving magnet 15 on the Y-direction side (right side in FIG. 7 ) is arranged so as to be flush with the end surface on the Y-direction side of the lower yoke plate 11b. And among them, the Y-direction moving magnet 15 and the yoke base body 12 are arrange|positioned at the other side (left deep side in FIG. 7) of a Y direction with a predetermined gap. At this time, as shown in FIG. 6 , the five Y-direction moving magnets 15 of the lower yoke plate 11 b and the five Y-direction moving magnets 15 of the above-mentioned upper yoke plate 11 a are vertically paired. And, as shown in FIG. 7, the magnetic poles of the NSs of the five Y-direction moving magnets 15 adjacent to each other (on the side facing the armature 20 side) of the yoke plate 11b below are different from each other and are paired with each other. The Y-direction moving magnets 15 of the upper yoke plate 11a are arranged so that they have different poles. That is, in this example, from one side in the Y direction (the right front side in FIG. 7 ) toward the other side in the Y direction (the left deep side in FIG. 7 ), there are S poles, N poles, S poles, and N poles. , The order of the S poles is configured.

Furthermore, the five Y-direction moving magnets 15 of the upper yoke plate 11 a and the five Y-direction moving magnets 15 of the lower yoke plate 11 b lined up in the Y direction as described above form the second magnet row 65 .

<Detailed structure of the armature>

As shown in FIGS. 8 and 9 , the armature molding part 21 of the armature 20 has a plurality of single-phase coils 23 (corresponding to the first armature coil) for moving in the X direction and a plurality of three-phase coils 24 for moving in the Y direction. (corresponding to the second armature coil) as the armature coil. In this example, the armature molding part 21 is formed in the shape of a rectangular plate by resin-molding the entirety of the plurality of X-direction moving single-phase coils 23 and Y-direction moving three-phase coils 24 .

In this example, the X-direction moving single-phase coil 23 is in the form of a horizontally elongated elliptical ring that is wound around the X direction as an axis and is long and thin in the Y direction. A plurality of (in this example, four) single-phase coils 23 for moving in the X direction is in a posture in which its longitudinal direction is substantially consistent with the Y direction. The other side of the direction is distributed and two are arranged respectively. Out of the four X-direction moving single-phase coils 23 , two X-direction moving single-phase coils 23 on the X-direction outer side are arranged so as to be close to both end faces of the armature molded portion 21 in the X direction. The remaining two single-phase coils 23 for X-direction movement on the inner side of the X-direction are separated by a large interval in the X-direction central part of the armature molded part 21 (for forming the arrangement of the three-phase coils 24 for Y-direction movement described later). space) and arranged at a predetermined small distance from the outer X-direction moving single-phase coil 23 . And, as shown in FIG. 8 , the four single-phase coils 23 for moving in the X direction all make the other side in the Y direction close to the end surface on the other side in the Y direction of the armature molding part 21 and make the one side in the Y direction close to the armature. The base body 22 is arranged with a predetermined gap therebetween.

Further, the first armature coil row 73 is formed by the four X-direction moving single-phase coils 23 arranged in the X direction as described above. The first armature coil row 73 faces the upper and lower first magnet rows 64 , 64 of the aforementioned field element 10 across a magnetic gap.

Moreover, in the area where the single-phase coil 23 for X-direction movement is arranged in the armature molded part 21, since the single-phase coil 23 for X-direction movement is wound around the X-direction as an axis, the hollow core of the coil 23 is utilized. A fluid flow path 28 (corresponding to a first fluid flow path) penetrating in the X direction is provided in the portion. By circulating the cooling fluid through the fluid flow path 28, the single-phase coil 23 for X direction movement can be cooled easily and reliably.

In this example, the Y-direction moving three-phase coil 24 is in the form of an upright elliptical ring that is elongated in the X direction and wound around the Z direction as an axis. A plurality of (in this example, three) three-phase coils 24 for moving in the Y direction are in a posture in which their longitudinal direction substantially coincides with the X direction. Configured as a column. These three three-phase coils 24 for moving in the Y direction are arranged adjacent to each other along the Y direction, and the three-phase coils 24 for moving in the Y direction on the other side of the Y direction (the deep left side in FIG. 8 ) are close to the armature die. The end surface on the other side of the Y direction of the control part 21 is arranged in such a manner. The three-phase coil 24 for Y-direction movement on the Y-direction side (right side in FIG. 8 ) is arranged with the same predetermined gap as the single-phase coil 23 for X-direction movement with respect to the armature base 22 .

Further, the second armature coil row 74 is formed by the three three-phase coils 24 for Y-direction movement arranged in the Y-direction as described above. The second armature coil row 74 faces the upper and lower second magnet rows 65 , 65 of the aforementioned field element 10 across a magnetic gap.

<Generation of thrust in the X direction by energizing the armature coil>

In the above-mentioned structure, as described in the above-mentioned embodiment showing the principle using FIG. As a result, the interaction between the magnetic circuit (a magnetic circuit equivalent to the aforementioned magnetic circuit Qa, Qb) formed by the X-direction moving magnet 14 provided on the yoke plates 11a, 11b and the current i can be performed in the armature. The molding part 21 generates a thrust force for displacement in the X direction with respect to the yoke plates 11a, 11b.

For example, as shown in FIG. 9, in the winding on the upper side of the X-direction moving single-phase coil 23 on the leftmost front side in the figure, the current i is on the other side from the Y direction (the deep left side in FIG. 9 ). The current i flows toward one side in the Y direction (right side in FIG. 9 ), and in the lower winding, the current i flows in a direction from one side in the Y direction to the other side in the Y direction. Thus, through the above-mentioned interaction between the magnetic circuit and the current, both the above-mentioned upper and lower windings act (as described above in the embodiment showing the principle) from one side in the X direction (left in FIG. 9 ). The force from the front side) toward the other side in the X direction (right deep side in Fig. 9 ). And, in the winding on the upper side of the X-direction moving single-phase coil 23 adjacent to the right deep side of the X-direction moving single-phase coil 23, the current i flows from one side in the Y direction to the other side in the Y direction. In the winding on the lower side, the current i flows in the direction from the other side in the Y direction to one side in the Y direction. Thus, both the upper and lower windings act (as described above in the embodiment showing the principle) from one side in the X direction (left front side in FIG. 9 ) toward the other side in the X direction (Fig. 9). 9 on the right deep side) force. As described above, a force toward the other side in the X direction is induced in both of the two X-direction moving single-phase coils 23 and 23 (see the white arrow in FIG. 9 ).

Similarly, in the winding on the upper side of the X-direction moving single-phase coil 23 on the far rightmost side in FIG. 9, the current i flows in the direction from one side in the Y direction to the other side in the Y direction. In the winding of , the current i flows in the direction from the other side in the Y direction to one side in the Y direction. And, in the winding on the upper side of the X-direction moving single-phase coil 23 adjacent to the left front side of the X-direction moving single-phase coil 23, the current i flows from the other side in the Y direction to the one side in the Y direction. In the winding on the lower side, the current i flows in the direction from one side in the Y direction to the other side in the Y direction. Thereby, similarly to the above, a force toward the other side in the X direction is induced in both of the two X-direction moving single-phase coils 23 and 23 (see the white arrow in FIG. 9 ).

As described above, the four X-direction moving single-phase coils 23 can induce force toward the other side in the X direction by the above-mentioned energization form, and a thrust force toward the other side in the X direction can be generated in the armature 20 . Moreover, when the current i flowing in the four single-phase coils 23 for moving in the X direction is set in the direction opposite to the above, according to the above-mentioned principle, the armature 20 can generate a current i that flows to the X direction side in the direction opposite to the above. thrust. As a result, in the linear motor 1 , the above-mentioned driven portion attached to the armature base 22 of the armature 20 can be driven to one side and the other side in the X direction.

<Generation of thrust in the Y direction by energizing the armature coil>

When a three-phase AC current is applied to the three Y-direction moving three-phase coils 24 arranged along the Y direction, the interaction between the magnetic circuit and the current can generate a force in the armature molded part 21 relative to the yoke plate 11a, 11b Thrust for displacement in the Y direction.

<Comparative example of this embodiment>

Next, a comparative example with respect to the first embodiment described above will be described with reference to FIG. 10 . The same reference numerals are assigned to the same parts as those of the above-mentioned first embodiment, and descriptions thereof are appropriately omitted or simplified.

As shown in FIG. 10 , in this comparative example, instead of the four X-direction moving single-phase coils 23 of the armature molded part 21 of the first embodiment shown in FIG. The single-phase coil 25 for X-direction movement of the wound winding is arranged one on each of the X-direction sides of the three three-phase coils 24 for Y-direction movement (two in total).

In addition, in this comparative example, although detailed illustration is omitted, on the opposing surfaces of the two yoke plates 11a, 11b of the field element 10, instead of the X-direction of the first embodiment shown in FIG. The first magnet column 64 that moves with the magnet 14 formation (with the pair of mutually opposing X direction moves with magnet 14 is mutual same polarity and these X direction moves with magnet 14 along X direction alternately arranged in the mode that polarity is different), And use the opposite polarity (N pole and S pole, or S pole and N pole) with the pair of magnet 14 that moves with X direction that mutually faces, and these X direction moves with magnet 14 alternately along X direction polarity is different. Columns of magnets arranged in the same way.

In the structure shown in FIG. 10, when the current i flows in the same direction as the two X-direction moving single-phase coils 25 and 25, as in the comparative example of the above-mentioned embodiment showing the principle, use FIG. 2 ( a) etc., the mutual interaction between the magnetic circuit (magnetic circuit equivalent to the magnetic circuit Q' in FIG. As a result, the armature molded portion 21 can generate a thrust force that displaces the yoke plates 11 a and 11 b in the X direction.

<Problem of the comparative example>

As mentioned above, in the structure of the comparative example demonstrated using FIG. 10, the thrust force which displaces in the X direction and a Y direction can be applied to yoke plates 11a and 1b, respectively. However, in this structure, the pair of magnets 14 for moving in the X direction and the pair of magnets 15 for moving in the Y direction that are opposed to each other in the two yoke plates 11a and 11b are mutually opposite poles (N pole and S pole, or S pole and N pole). As a result, each pair of magnets 14 for moving in the X direction and each pair of magnets 15 for moving in the Y direction generate mutual attractive forces. Therefore, in order to prevent the yoke plates 11a, 11b from coming into contact with the armature 20 due to the deflection of the yoke plates 11a, 11b due to the attractive force, it is necessary to increase the rigidity of the yoke 13 . As a result, the thickness dimension of the yoke plates 11 a and 11 b has to be relatively increased, making it difficult to reduce the size and weight of the entire linear motor.

<Effects of the first embodiment>

On the other hand, in the linear motor 1 of the present embodiment shown in FIGS. The magnetic poles on the side of the moving single-phase coil 23) have the same polarity (N pole and N pole, or S pole and S pole) (especially refer to FIG. 6 etc.), and mutual repulsion is generated in each pair. Thus, even if the pair of magnets 15 for moving in the Y direction (similar to the above-mentioned comparative example) have opposite polarities to each other, the attractive force generated in the two yoke plates 11a and 11b can be relaxed by the pair of magnets 15 for moving in the Y direction. . As a result, the thickness dimension of the yoke plates 11 a and 11 b can be reduced without increasing the rigidity of the yoke 13 , so that the overall size and weight of the linear motor 1 can be reduced.

Furthermore, in the present embodiment, the yoke 13 is particularly configured in a U-shape in which two yoke plates 11 a and 11 b are connected by the yoke base 12 . In the case of such a U-shaped yoke 13, when the pair of magnets 14 for moving in the X direction or the pair of magnets 15 for moving in the Y direction are opposite to each other, the above-mentioned deflection caused by the attractive force is particularly easy. produce. Therefore, the effect of preventing warpage by making the pairs of the magnets 14 for X-direction movement the same polarity as described above is particularly effective.

Furthermore, in the present embodiment, the magnets 14 for X-direction movement are arranged in a dispersed manner on both sides of the X-direction side and the other side of the Y-direction movement magnets 15 arranged in a row. Thus, the attractive force generated near the second magnet row 65 of the yoke plates 11a, 11b by the Y direction moving magnet 15 of different poles is generated by the same polarity in the X direction on both sides of the second magnet row 65. The repulsive force of the pair of moving magnets 14 is relaxed, so that the deflection preventing effect of the yoke 13 can be obtained relatively uniformly without deflection. As a result, contact between the yoke plates 11 a and 11 b and the armature 20 can be reliably prevented.

Furthermore, in this embodiment, in particular, in the armature molded part 21, the single-phase coil 23 for moving in the X direction is used to wind the winding with the X direction as the axis, so that the hollow core of the coil 23 can be effectively utilized. A fluid flow path 28 penetrating in the X direction is provided in such a manner. Thereby, the cooling of the single-phase coil 23 for X direction movement can be performed easily and reliably. Moreover, by inserting a magnetic body into the hollow part of the coil 23 to form a series of magnetic circuits, it is possible to improve the characteristics of the motor.

<Second Embodiment>

In the above-mentioned first embodiment, the case where the principle of the propulsion generating structure explained in the above-mentioned embodiment (see FIG. 1 ) demonstrating the principle is applied to the X direction has been described as an example. This second embodiment is an example of a case where the propulsion generating structure is applied in the Y direction. The same reference numerals are assigned to the same parts as those in the above-mentioned first embodiment, and appropriate descriptions are omitted or simplified.

That is, in this embodiment, as shown in FIG. 11 , the armature molded portion 21 of the armature 20 includes a first armature coil row 75 of single-phase winding and a second armature coil row 76 of three-phase winding.

As in the case shown in FIG. 10 as the aforementioned comparative example, the first armature coil row 75 mutually connects a plurality of (two in this example) X-direction moving single-phase coils 25, 25 along the X direction. arranged in a discrete manner. A winding is wound around each X-direction moving single-phase coil 25 with the Z direction as the axis. Moreover, at this time, although detailed illustration is omitted, in the first magnet row of the field member 10, there are two pairs of X-direction movement magnets 14 that face each other (the side facing the armature 20 side). The magnetic poles of the NSs are opposite to each other, and the magnets 14 for moving in the X direction are arranged so that the polarities are alternately different along the X direction.

In the second armature coil row 76, between the single-phase coils 25, 25 for X-direction movement, a plurality (six in this example) of three-phase coils 26 for Y-direction movement are arranged in a row along the Y direction. . A winding is wound around each Y-direction moving three-phase coil 26 with the Y direction as the axis. And, at this time, although the detailed illustration is omitted, in the second magnet row of the field member 10, there are two pairs of Y-direction movement magnets 15 that face each other (the one on the side facing the armature 20 side). The magnetic poles of the NSs have the same polarity and are arranged along the Y direction so that the Y-direction moving magnets 15 alternately have different polarities.

And, in the area where the three-phase coil 26 for moving in the Y direction is arranged in the armature molded part 21, the coil 26 for moving in the Y direction is used to wind the hollow core part of the winding with the Y direction as the axis, and a hole penetrating in the Y direction is provided. The fluid flow path 29 (corresponds to the second fluid flow path). By circulating the cooling fluid through the fluid flow path 29, the Y-direction moving coil 26 can be easily and reliably cooled.

In the above structure, when a three-phase AC current is applied to the six Y-direction moving three-phase coils 26 arranged along the Y direction, a magnetic circuit can be generated in the armature molded part 21 through the interaction between the magnetic circuit and the current. The thrust of the displacement of the yoke plates 11a, 11b along the Y direction. As a result, in the linear motor of the present embodiment, the above-mentioned drive unit attached to the armature base 22 of the armature 20 can be driven to one side and the other side in the Y direction.

In addition, in the two single-phase coils 25 for moving in the X direction arranged in the X direction, the current i moves in the two X directions as described with reference to FIG. The single-phase coils 25 each flow in the same direction, thereby passing through the magnetic circuit formed by the X-direction moving magnet 14 provided on the yoke plates 11a, 11b (a magnetic circuit equivalent to the aforementioned magnetic circuit Q'). The interaction with the current i can generate a thrust force in the armature molded part 21 that displaces the yoke plates 11 a and 11 b in the X direction. As a result, in the linear motor of the present embodiment, the above-mentioned driven portion attached to the armature base 22 of the armature 20 can be driven to one side and the other side in the X direction.

<Effect of the second embodiment>

In the linear motor of this embodiment, as described above, in the second magnet row of the field member 10, the pair of magnets 15 for moving in the Y direction (the magnetic poles on the side of the coil 26 for moving in the Y direction) that are opposed to each other are mutually formed. The same poles (N poles and N poles, or S poles and S poles) generate repulsive force against each other in each pair. Thereby, the pair of magnets 14 for X-direction movement are mutually opposite poles, and the attraction|suction force by the said pair of magnets 14 for X-direction movements which generate|occur|produces in two yoke plates 11a, 11b can be relaxed. As a result, the thickness dimension of the yoke plates 11 a and 11 b can be reduced without increasing the rigidity of the yoke 13 , and thus the overall size and weight of the linear motor can be reduced.

Furthermore, in the present embodiment, the yoke 13 is particularly configured in a U-shape in which two yoke plates 11 a and 11 b are connected by the yoke base 12 . In the case of such a U-shaped yoke 13, when the pair of magnets 14 for moving in the X direction or the pair of magnets 15 for moving in the Y direction are opposite to each other, the above-mentioned deflection caused by the attractive force is particularly easy. produce. Therefore, the warpage prevention effect by making the magnet 15 for Y direction movement mutually the same pole as mentioned above is especially effective.

Furthermore, in this embodiment, especially in the armature molding part 21, the three-phase coil 26 for moving in the Y direction is used to wind the winding with the Y direction as the axis, so that the air core part of the coil 26 can be effectively utilized. A fluid flow path 29 penetrating in the Y direction is provided in such a manner. Thereby, cooling of the three-phase coil 26 for Y direction movement can be performed easily and reliably. In addition, by inserting a magnetic material into the hollow core of the coil 26 to form a series of magnetic circuits, it is possible to improve the characteristics of the motor.

In addition, in the configuration of the second embodiment shown in FIG. 11 , the X-direction moving magnets 14 are dispersedly arranged on both the X-direction side and the other side of the Y-direction moving magnets 15 arranged in a row. Alternatively, (not shown) the X-direction moving magnets 14 may be dispersedly arranged on both sides of the Y-direction side and the other side of the Y-direction moving magnets 15 arranged in a row. In this case, the attractive force generated near the first magnet row of the yoke plates 11a, 11b by the pair of X-direction moving magnets 14 of different polarities is generated by Y magnets of the same polarity on both sides of the first magnet row. The repulsive force of the pair of magnets 15 for direction movement is moderated, and the deflection preventing effect of the yoke 13 can be obtained relatively uniformly without deflection. As a result, contact between the yoke plates 11 a and 11 b and the armature 20 can be reliably prevented.

<Third Embodiment>

In the above-mentioned second embodiment, the case where the principle of the propulsion generating structure explained in the above-mentioned embodiment (see FIG. 1 ) demonstrating the principle is applied to the Y direction has been described as an example. This third embodiment is an example of a case where this propulsion generating structure is applied in the X direction and the Y direction. The parts equivalent to those of the above-mentioned first and second embodiments are denoted by the same reference numerals, and descriptions thereof are appropriately omitted or simplified.

That is, in this embodiment, as shown in FIG. 12 , the armature molded part 21 of the armature 20 is provided with the same first armature coil row 73 as that of the above-mentioned first embodiment and the same first armature coil array 73 as that of the above-mentioned second embodiment. Second armature coil column 76 .

In the second armature coil row 76, as in the aforementioned case in the second embodiment, a plurality (six in this example) of three-phase coils 26 for moving in the Y direction are arranged in a row in the Y direction, and each The Y-direction moving coil 26 is wound around the Y-direction as an axis. Moreover, although detailed illustration is omitted, in the second magnet row of the field member 10, the magnetic poles of the pair (the side facing the side of the armature 20) NS of the two opposing Y-direction moving magnets 15 are The magnets 15 for moving in the Y direction are disposed so as to have the same polarity and alternately have different polarities along the Y direction.

In the first armature coil row 73, a plurality of (four in this example) single-phase coils 26 for moving in the X direction are transferred to the second armature coil row 76 in the same manner as described above in the first embodiment. Two are scatteredly arranged on one side and the other side in the X direction. A winding is wound around each X-direction moving single-phase coil 23 with the X direction as the axis. Moreover, although detailed illustration is omitted, in the first magnet row of the field member 10, the pair (the side facing the side of the armature 20) NS of the two opposing X-direction moving magnets 14 is The magnets 14 for moving in the X direction are arranged so that the magnetic poles are the same as each other and alternately have different polarities along the X direction.

In the above structure, similarly to the above, when a three-phase AC current is applied to the six Y-direction moving three-phase coils 26 arranged in the Y direction, the armature molded part 21 can Thrust force for displacement in the Y direction with respect to the yoke plates 11a and 11b is generated. Also, similarly, the current i flows in the four single-phase coils 23 for moving in the X direction so that the directions adjacent to each other are opposite to each other, thereby being formed by the magnets 14 for moving in the X direction provided on the yoke plates 11a and 11b. The interaction of the magnetic circuit (magnetic circuit equivalent to the aforementioned magnetic circuits Qa, Qb) and the current i can generate a thrust force to displace the yoke plates 11a, 11b in the X direction in the armature molded portion 21 . As a result of the above, in the linear motor of this embodiment, the above-mentioned driven part mounted on the armature base 22 of the armature 20 can be moved to one side and the other side in the Y direction, and to one side and the other side in the X direction, respectively. drive.

<Effect of the third embodiment>

In the linear motor of the present embodiment, the effects of the first and second embodiments described above can be obtained together. That is, as described above, in the first magnet row of the field member 10, the pair of magnets 14 for moving in the X direction (the magnetic poles on the side of the single-phase coil 23 for moving in the X direction) facing each other becomes the same pole (N pole). and N poles, or S poles and S poles), in each pair, generate repulsive force with each other. Moreover, in the second magnet row of the field element 10, the pair of magnets 15 for moving in the Y direction (the magnetic poles on the side of the coil 26 for moving in the Y direction) that are opposite to each other becomes the same polarity (N pole and N pole, or S pole and S pole), in each pair, mutual repulsion is generated. Like this, whether it is the centering of the magnet 14 for moving in the X direction or the centering of the magnet 15 for moving in the Y direction, it is the result of the (attractive force not acting) repulsive force that can more reliably reduce the yoke plate 11a, 11b thickness dimension, so the overall size and weight of the linear motor can be realized more reliably.

Furthermore, in addition to the cases already described above, it is also possible to appropriately combine and utilize the methods of the above-mentioned embodiment and modifications.

In addition, although not exemplifying one by one, the above-described embodiments and modifications can be implemented with various changes added without departing from the gist thereof.

Explanation of reference signs

1 linear motor

10 excitation parts

11a, b yoke plate

12 yoke base

13 yoke

14 Magnets for moving in the X direction (1st permanent magnet)

15 Magnet for movement in Y direction (second permanent magnet)

20 armature

21 Armature Molding Section

23 Single-phase coil for X direction movement (1st armature coil)

24 Three-phase coil for moving in the Y direction (second armature coil)

25X direction movement single-phase coil (first armature coil)

26 Three-phase coil for movement in Y direction (second armature coil)

28 Fluid flow path (first fluid flow path)

29 Fluid flow path (second fluid flow path)

64 first magnet column

65 second magnet column

73 first armature coil column

74 second armature coil column

75 first armature coil column

76 second armature coil column

i current

Qa, Qb magnetic circuit

Claims (11)

1. linear electric motors, using either party in armature and excitation member as mover and using the opposing party as stator, is characterized in that,

Described excitation member has:

Possess two yoke plates of mutually opposing opposed faces respectively; And

By the magnet row that multiple permanent magnet arranges in the prescribed direction along described two yoke plates described opposed faces separately,

Described armature has armature coil row, and described armature coil arranges and arranges opposed across magnetic gap with described magnet, and is arranged in described prescribed direction by multiple armature coil,

Described linear electric motors possess following configuration: in described armature coil row and the first magnet row, described armature coil with described prescribed direction for axle center and being wound, and mutually opposing two described permanent magnets to becoming mutually homopolarity and making along described prescribed direction the alternating polarity ground of this permanent magnet different.

2. linear electric motors according to claim 1, is characterized in that,

The described magnet row of described excitation member comprise:

By the first magnet row that multiple first permanent magnet arranges in a first direction along described two yoke plates described opposed faces separately; And

The second magnet that multiple second permanent magnet arranges in the second direction orthogonal with described first direction along the respective described opposed faces of described two yoke plates is arranged,

The described armature coil row of described armature comprise:

Arrange opposed across magnetic gap and described first magnet and the first armature coil that multiple first armature coil arranges in said first direction is arranged; And

Arrange opposed across magnetic gap and described second magnet and the second armature coil that multiple second armature coil arranges in this second direction arranged,

Described linear electric motors possess at least one party in the configuration of following (i), (ii):

I () is in described first armature coil row and described first magnet row, described first armature coil with described first direction for axle center and being wound, and mutually opposing two described first permanent magnets to becoming mutually homopolarity and making along described first direction the alternating polarity ground of this first permanent magnet different;

(ii) in described second armature coil row and described second magnet row, described second armature coil with described second direction for axle center and being wound, and mutually opposing two described second permanent magnets to becoming mutually homopolarity and making along described second direction the alternating polarity ground of this second permanent magnet different.

3. linear electric motors according to claim 2, is characterized in that,

Described excitation member has the yoke that shape of cross section is U-shaped,

This yoke possesses:

Described two yoke plates; And

By the yoke matrix that the end of the end of the described first direction side of these two yoke plates or described second direction side links.

4. linear electric motors according to claim 3, is characterized in that,

In described first armature coil row and described first magnet row, be configured to described first armature coil be wound for axle center with described first direction, and mutually opposing two described first permanent magnets to becoming mutually homopolarity and making along described first direction the alternating polarity of this first permanent magnet ground different

In described second armature coil row and described second magnet row, be configured to described second armature coil with the third direction orthogonal with described first direction and described second direction for axle center and being wound, and mutually opposing two described second permanent magnets to becoming mutually heteropole and making along described second direction the alternating polarity ground of this second permanent magnet different.

5. linear electric motors according to claim 3, is characterized in that,

In described second armature coil row and described second magnet row, be configured to described second armature coil be wound for axle center with described second direction, and mutually opposing two described second permanent magnets to becoming mutually homopolarity and making along described second direction the alternating polarity of this second permanent magnet ground different

In described first armature coil row and described first magnet row, be configured to described first armature coil with the third direction orthogonal with described first direction and described second direction for axle center and being wound, and mutually opposing two described first permanent magnets to becoming mutually heteropole and making along described first direction the alternating polarity ground of this first permanent magnet different.

6. linear electric motors according to claim 3, is characterized in that,

In described first armature coil row and described first magnet row, be configured to described first armature coil be wound for axle center with described first direction, and mutually opposing two described first permanent magnets to becoming mutually homopolarity and making along described first direction the alternating polarity of this first permanent magnet ground different

In described second armature coil row and described second magnet row, be configured to described second armature coil with described second direction for axle center and being wound, and mutually opposing two described second permanent magnets to becoming mutually homopolarity and making along described second direction the alternating polarity ground of this second permanent magnet different.

7. the linear electric motors according to claim 4 or 6, is characterized in that,

In described first magnet row,

The side along described first direction that described multiple first permanent magnet is arranged in row described second magnet to the described second permanent magnetic along described second direction arranges and opposite side configure dispersedly,

In described first armature coil row,

The side along described first direction that described multiple first armature coil is arranged in row described second armature coil to described second armature coil along described second direction arranges and opposite side configure dispersedly.

8. the linear electric motors according to claim 5 or 6, is characterized in that,

In described second magnet row,

The side along described second direction that described multiple second permanent magnet is arranged in row described first magnet to described first permanent magnet along described first direction arranges and opposite side configure dispersedly,

In described second armature coil row,

The side along described second direction that described multiple second armature coil is arranged in row described first armature coil to described first armature coil along described first direction arranges and opposite side configure dispersedly.

9. the linear electric motors according to claim 4 or 6, is characterized in that,

Described armature possesses the first fluid stream arranged along through described first armature coil of described first direction.

10. the linear electric motors according to claim 5 or 6, is characterized in that,

Described armature possesses the second fluid stream arranged along through described second armature coil of described second direction.

11. 1 kinds of table devices, is characterized in that,

Use the linear electric motors according to any one of claim 1 ~ 10 as the drive source of straight-moving mechanism.