JP2011193553A - Coreless linear motor of two-degrees-of-freedom - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a coreless linear motor of two-degrees-of-freedom that is small size and easy to manufacture and assemble and movable in two directions, X direction and Y direction by one armature. <P>SOLUTION: The coreless linear motor 1 includes field poles obtained by linearly and alternately arranging multiple permanent magnets 21a, 21b different polarity with equal pitches on a pair of field yokes 22, and an armature 11 having a coil train 2A and a coil train 2B arranged linearly opposite to the field poles with a magnetic air gap therebetween and formed by arranging multiple armature windings formed by concentrated winding on both sides of a substrate 13 at equal intervals. The coil trains 2A, 2B provided on both sides of the substrate 13 includes armature winding 12e for movement both in the X and Y directions so arranged that the coil ends of the coil trains 2A, 2B in the linear direction of the armature 11 and in the direction orthogonal to the direction of the magnetic air gap are protruded from the end parts of the permanent magnets 21a, 21b. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a two-degree-of-freedom coreless linear motor that can be used in various industrial machines such as a semiconductor manufacturing apparatus and a machine tool and can be moved in two directions of an X direction and a Y direction with one armature.

Conventionally, as a two-degree-of-freedom coreless linear motor that is used in various industrial machines such as semiconductor manufacturing apparatuses and machine tools and that can be moved in two directions of the X direction and the Y direction with one armature, for example, Patent Document 1 discloses. What has been proposed is proposed.
7 is an overall perspective view of a conventional two-degree-of-freedom coreless linear motor, FIG. 8 is a front sectional view taken along line AA in FIG. 7, and FIG. 9 is an armature winding in the two-degree-of-freedom coreless linear motor of FIG. It is the schematic block diagram which looked at the arrangement | positioning relationship of a permanent magnet from the right side surface.
7 to 9, the stator 20 of the coreless linear motor is disposed on a substantially U-shaped field yoke 22 in a staggered pattern at regular pitches so that the polarities are alternately different in the stroke direction, and It consists of a plurality of permanent magnets 21a, 21b that are arranged so that the respective poles facing each other are different, and a magnetic field is formed by making two rows of permanent magnets 21a, 21b face each other.
On the other hand, the mover 10 of the coreless linear motor is disposed so as to be opposed to the magnetic field through a magnetic field, and has a three-phase (U, V) phase difference of 120 ° on both surfaces of the flat substrate 13. , W-phase) armature windings 12a, 12b made of a plurality of coils wound in a concentrated winding are arranged side by side at equal intervals, and X-direction movement armature windings 12a, A single-phase Y-direction moving armature winding 12c, 12d is attached to the outer periphery of 12b, and the substrate 13 and the windings 12a, 12b, 12c, 12d are fixed together with a mold resin 14, and an electric machine made of nonmagnetic metal The armature 11 is configured by being fixed integrally with the child attachment plate 15. Here, the board | substrate 13 gives the pattern of copper foil to the board | plate of the epoxy resin (GFRP) with which the glass fiber was filled. The mover 10 is supported by a linear guide or the like (not shown).
When a predetermined current is passed through the X-direction moving armature windings 12a and 12b through the power supply cable 19 to the linear motor having such a configuration, thrust is applied to the mover 10 by the action of the magnetic field created by the permanent magnets 21a and 21b. When the mover 10 moves in the X direction indicated by the arrow and a predetermined current flows through the Y-direction moving armature windings 12c and 12d, the mover 10 is acted on by the action of the magnetic field generated by the permanent magnets 21a and 21b. A thrust is generated at 10, and the movable part 10 moves in the Y direction indicated by the arrow.

Japanese Patent No. 4304709

However, the prior art has the following problems.
(1) Since a plurality of permanent magnets are arranged in a staggered pattern toward the stroke direction on the field yoke, compared to the case where the permanent magnets are arranged linearly, the manufacture of the field yoke and the assembly of the stator In addition to time and effort, the required amount of field yoke increases and the motor mass and physique increase.
(2) Since the armature winding having a different shape is used for each moving direction of the mover, it takes time and effort to manufacture the winding and assemble the armature.
The present invention has been made in view of such problems, and is a small-sized, easy-to-manufacture and assembly, and two-degree-of-freedom coreless linear motor that can be moved in two directions of the X direction and the Y direction with one armature. The purpose is to provide.

In order to solve the above-described problem, the invention according to claim 1 relates to a two-degree-of-freedom coreless linear motor, and a plurality of permanent magnets having different polarities alternately arranged linearly at equal pitches on a pair of field yokes. And a plurality of armature windings arranged in a concentrated manner on both sides of the substrate and arranged at equal intervals on both sides of the substrate. In the coreless linear motor, comprising: an armature each provided with a coil array, wherein either one of the field magnetic pole and the armature serves as a stator and the other serves as a mover. The coil arrays provided on both sides of the coil array are arranged such that the coil ends of the coil arrays in the direction perpendicular to the linear direction of the armature and the magnetic gap direction protrude from the end of the permanent magnet. It is characterized by being composed in both the mobile armature winding.
According to a second aspect of the present invention, in the two-degree-of-freedom coreless linear motor according to the first aspect of the present invention, the coil array constituting the XY bidirectional moving armature windings respectively disposed on both sides of the board is provided on the armature. Two sets are arranged side by side in the linear direction and the Y direction orthogonal to the magnetic air gap direction, and the length of one coil array in the direction perpendicular to the linear direction of the armature and the magnetic air gap direction is set to Hc. When the length of the magnet is Hm, the length 2Hc obtained by combining two sets of the coil arrays is set to a length that protrudes from the length Hm of the permanent magnet.
According to a third aspect of the present invention, in the two-degree-of-freedom coreless linear motor according to the first aspect, one of the coil arrays constituting the XY bidirectional moving armature windings respectively disposed on both sides of the substrate. The first coil group and the other coil group are arranged in such a manner that the center positions of the coil groups in the linear direction of the armature and the direction perpendicular to the magnetic gap direction are opposite to each other across the substrate. When the length of one coil array in the linear direction of the armature and the direction perpendicular to the magnetic air gap direction is Hc and the length of the permanent magnet is Hm, The length Hc is set to a length that protrudes from the length Hm of the permanent magnet.
According to a fourth aspect of the present invention, in the two-degree-of-freedom coreless linear motor according to any one of the first to third aspects, the number of XY bidirectional moving armature windings arranged in a linear direction of the armature. The number of permanent magnets is characterized by a 3: 4 relationship.

According to the invention described in the claims, two sets of coil rows made up of a plurality of XY bidirectional moving armature windings wound in concentrated winding are arranged in the Y direction, and the coil ends of the coils constituting the armature windings Since the permanent magnet is arranged so as to protrude from the end of the permanent magnet, it can be moved in two directions even when the permanent magnet is arranged in a straight line, and the permanent magnet is arranged in a straight line. The manufacture of the yoke and the assembly of the stator are facilitated, and the required input amount of the field yoke is reduced, so that the motor mass and the physique can be reduced.
Further, since the shape of the coil constituting the armature winding may be single, the manufacture of the winding and the assembly of the armature can be facilitated.

1 is an overall perspective view of a two-degree-of-freedom coreless linear motor showing a first embodiment of the present invention; Front sectional view taken along line AA in FIG. The schematic block diagram which looked at the arrangement | positioning relationship of the armature infection and permanent magnet in the 2 degrees of freedom coreless linear motor of FIG. 2 from the right side surface, The schematic diagram for demonstrating thrust generation of the 2 degree-of-freedom linear motor of 1st Embodiment of this invention, FIG. 6 is a front sectional view of a two-degree-of-freedom coreless linear motor showing a second embodiment of the present invention, corresponding to a section taken along line AA in FIG. The schematic block diagram which looked at the arrangement | positioning relationship of the armature infection and permanent magnet in the 2 degree-of-freedom coreless linear motor of 2nd Embodiment from the right side surface, Overall perspective view of a conventional two-degree-of-freedom coreless linear motor, Front sectional view along line AA in FIG. FIG. 8 is a schematic configuration diagram showing the arrangement relationship between armature windings and permanent magnets in the two-degree-of-freedom coreless linear motor of FIG. 8 as viewed from the right side.

Hereinafter, embodiments of the present invention will be described.
The basic structure of the two-degree-of-freedom linear motor in this embodiment is substantially the same as the structure of the linear motor in the prior art except for the armature winding, and the same or corresponding members as those in FIGS. 7 to 8 are the same. Reference numerals are assigned and description is omitted.

FIG. 1 is an overall perspective view of a two-degree-of-freedom coreless linear motor showing a first embodiment of the present invention, and FIG. 2 is a front sectional view in FIG. 1, corresponding to a section taken along line AA in FIG. FIG. 3 is a schematic configuration diagram of the arrangement relationship between the armature winding and the permanent magnet in the coreless linear motor of FIG. 2 as viewed from the right side.
2 and 3, 2A and 2B are coil arrays, and 12e is an XY bidirectional moving armature winding.
In FIG. 2, the mover 10 of the coreless linear motor is disposed so as to be opposed to the magnetic field via a magnetic field, an armature mounting plate 15 made of a nonmagnetic metal, a flat substrate 13, and a substrate 13. A plurality of coil arrays 2A and 2B are provided on both sides.
In FIG. 3, one coil array 2A is a plurality of coils wound in concentrated winding along the X direction of the armature (in this example, three of U, V, and W phases having a phase difference of an electrical angle of 120 °). The XY bi-directionally moving armature windings 12e are mounted as a set at equal intervals. In the arrangement relationship between the field and the armature shown in FIG. 3, three XY bidirectional moving electric machines that are also arranged in the X direction are the same as the four permanent magnets 21 a (21 b) arranged in the X direction. One set of the child windings 12e is orthogonal to the center position Co-Co line of the permanent magnets 21a and 21b in the Y direction (the X direction which is the linear direction of the armature and the Z direction which is the magnetic air gap direction). 2 sets are arranged in parallel in the vertical direction.
The other coil array 2B is provided on the opposite side across the substrate 13, and a plurality (three in this example) wound in concentrated winding along the X direction of the armature, as with the coil array 2B. ) XY bi-directionally moving armature windings 12e are mounted side by side at equal intervals, and three of the four permanent magnets 21a (21b) arranged in the X direction are arranged in the X direction. In this configuration, two sets of the XY bidirectional moving armature windings 12e are arranged in parallel in the Y direction. In particular, in FIG. 3, the point of interest is that the coil position (2A, 2B) consisting of three XY bidirectional moving armature windings 12e is arranged in the Y direction with the center positions Co-Co of the permanent magnets 21a, 21b. The length when two sets are arranged side by side in the vertical direction in the Y direction with respect to the line is set to a length that protrudes from the length of the permanent magnet 21a (21b). That is, when the height in the Y direction of the XY bidirectional moving armature winding 12e is Hc and the height in the Y direction of the permanent magnet is Hm, the relationship is 2Hc> Hm.

Next, the operation will be described.
When the thrust is generated in the X direction using the XY bidirectional moving armature windings 12e arranged as shown in FIG. 3, the operation of the linear motor will be described with reference to FIG. FIG. 4 is a schematic diagram for explaining thrust generation of the linear motor according to the first embodiment of the present invention.
When thrust is generated in the X direction using the XY bidirectional moving armature winding 12e, each of the two rows arranged in the Y direction as shown in FIG. 4A in accordance with the magnetic flux generated by the permanent magnets 21a and 21b. Current in the same direction is applied to the phase coil. Then, as indicated by an arrow in FIG. 4A, the thrust in the Y direction is not canceled and generated, and only the thrust in the X direction can be generated.
When thrust is generated in the Y direction, the current directions of the two phase coils arranged in the Y direction are opposite to each other as shown in FIG. 4B in accordance with the magnetic flux generated by the permanent magnets 21a and 21b. Energize the current so that Then, as indicated by an arrow in FIG. 4B, the thrust in the X direction is not canceled and generated, and only the thrust in the Y direction can be generated.

  Therefore, in the first embodiment, two sets of XY bidirectional moving armature windings wound in concentrated winding are arranged in the Y direction, and the coil ends of the coils constituting the armature windings are arranged. Since it is arranged so as to protrude from the end of the permanent magnet, it can be moved in two directions even when the permanent magnet is arranged linearly, and the field magnet is arranged by arranging the permanent magnet linearly. Manufacture and assembly of the stator are facilitated, and the required input amount of the field yoke is reduced, so that the motor mass and the physique can be reduced.

FIG. 5 is a front sectional view of a two-degree-of-freedom coreless linear motor showing the second embodiment, corresponding to a section taken along the line AA in FIG. 1, and FIG. 6 is a diagram of the coreless linear motor of the second embodiment. It is the schematic block diagram which looked at the arrangement | positioning relationship of an armature winding and a permanent magnet from the right side surface.
In FIG. 5, the mover 10 of the coreless linear motor according to the second embodiment is disposed so as to be opposed to the magnetic field via a magnetic field, an armature mounting plate 15 made of a nonmagnetic metal, and a flat substrate 13. And a plurality of XY bidirectional moving armature windings 12e wound in concentrated winding on both surfaces of the substrate 13 (in this example, three U, V, and W phases having a phase difference of 120 ° electrical angle). The point provided with the coil row | line | columns 2A and 2B attached side by side at equal intervals is the same as 1st Embodiment.
In FIG. 5, the second embodiment is different from the first embodiment in that one coil array 2 </ b> A (one set) and the other coil array 2 </ b> B (one set) are different from each other in the linear direction of the armature and the magnetic gap direction. The center position C1-C1 line and C2-C2 line of each coil row in the orthogonal direction are arranged so as to be shifted in opposite directions from the center position Co-Co line of the permanent magnets 21a, 21b with the substrate 13 interposed therebetween. When the length of one coil array in the direction perpendicular to the linear direction of the armature and the magnetic gap direction is Hc and the length of the permanent magnet is Hm, the length Hc of the coil array is the length of the permanent magnet. This is a point set to a length protruding from the length Hm (Hc> Hm).
Further, in this case, in the arrangement relationship between the field and the armature shown in FIG. 6, with respect to the four permanent magnets 21a arranged in the X direction, three XY bidirectional movements arranged in the same X direction are performed. It is the structure which has arrange | positioned 1 set of coil row | line | columns 2A which consist of the armature coil | winding 12e.
In addition, since the operation | movement in 2nd Embodiment of this invention is the same as 1st Embodiment, description is abbreviate | omitted.

  Therefore, in the second embodiment, a coil array composed of a plurality of XY bidirectional moving armature windings wound in concentrated winding is arranged in the X direction, and the coil ends of the coil arrays constituting the armature winding are arranged. Since two sets of the same ones are arranged on both sides of the substrate 13 so as to protrude from the permanent magnets 21a and 21b, the shape of the XY bidirectional moving armature winding 12e is made long in the Y direction. As a result, the thrust generated in the X direction with respect to the energized current can be increased compared to the first embodiment.

DESCRIPTION OF SYMBOLS 1 Coreless linear motor 10 Movable element 11 Armature 2A, 2B Coil row | line | columns 12a, 12b Armature winding 12c for X direction movement, 12d Armature winding 12e for Y direction movement Armature winding 13 for XY bidirectional movement 13 Substrate 14 Mold Resin 15 Armature mounting plate 16 Feed cable 20 Stator 21a, 21b Permanent magnet 22 Field yoke

Claims (4)

A plurality of permanent magnets having different polarities alternately arranged on a pair of field yokes, each arranged linearly at an equal pitch; and
Each of the coil arrays is arranged so as to be linearly opposed to the field magnetic pole via a magnetic gap, and provided with a plurality of armature windings arranged on the both surfaces of the substrate in a concentrated winding arranged at equal intervals. Armature,
In a coreless linear motor that is configured to travel relatively using either one of the field magnetic pole and the armature as a stator and the other as a mover,
Each coil array provided on both surfaces of the substrate is arranged such that coil ends of the coil array in a direction perpendicular to the linear direction of the armature and the magnetic gap direction protrude from the end of the permanent magnet. A two-degree-of-freedom coreless linear motor comprising an XY bidirectional moving armature winding.   Two sets of coil arrays constituting XY bidirectional moving armature windings respectively arranged on both sides of the substrate are arranged side by side in the linear direction of the armature and the Y direction orthogonal to the magnetic gap direction, and When the length of one coil array in the linear direction of the armature and the direction perpendicular to the magnetic air gap direction is Hc and the length of the permanent magnet is Hm, the length 2Hc obtained by combining two sets of the coil arrays is 2. The two-degree-of-freedom coreless linear motor according to claim 1, wherein the length is set to a length protruding from the length Hm of the permanent magnet.   Of one set of coil rows constituting the XY bidirectional moving armature windings arranged on both sides of the substrate, one set of coil rows and the other set of coil rows are in the linear direction of the armature. And the center position of each coil array in the direction orthogonal to the magnetic air gap direction is shifted in the opposite direction across the substrate, and the linear direction of the armature and the direction orthogonal to the magnetic air gap direction When the length of one coil array is Hc and the length of the permanent magnet is Hm, the length Hc of the coil array is set to a length that protrudes from the length Hm of the permanent magnet. The two-degree-of-freedom coreless linear motor according to claim 1.   4. The relationship between the number of XY bidirectional moving armature windings arranged in a linear direction of the armature and the number of permanent magnets is a 3: 4 relationship. The two-degree-of-freedom coreless linear motor according to any one of the above.

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