CN107872140A - A kind of voice coil motor and stage apparatus - Google Patents
A kind of voice coil motor and stage apparatus Download PDFInfo
- Publication number
- CN107872140A CN107872140A CN201610850239.7A CN201610850239A CN107872140A CN 107872140 A CN107872140 A CN 107872140A CN 201610850239 A CN201610850239 A CN 201610850239A CN 107872140 A CN107872140 A CN 107872140A
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- Prior art keywords
- voice coil
- coil motor
- magnet array
- coil group
- motor
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- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims abstract description 74
- 229910052742 iron Inorganic materials 0.000 claims abstract description 37
- 239000000463 material Substances 0.000 claims description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 6
- 229910001172 neodymium magnet Inorganic materials 0.000 claims description 6
- 238000004804 winding Methods 0.000 claims description 5
- 229910000831 Steel Inorganic materials 0.000 claims description 4
- 239000010959 steel Substances 0.000 claims description 4
- QJVKUMXDEUEQLH-UHFFFAOYSA-N [B].[Fe].[Nd] Chemical compound [B].[Fe].[Nd] QJVKUMXDEUEQLH-UHFFFAOYSA-N 0.000 claims description 3
- 238000011217 control strategy Methods 0.000 abstract description 3
- 230000000694 effects Effects 0.000 description 14
- 238000010586 diagram Methods 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000003491 array Methods 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 230000005611 electricity Effects 0.000 description 3
- 235000000396 iron Nutrition 0.000 description 3
- 230000002153 concerted effect Effects 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 241001212149 Cathetus Species 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 210000004209 hair Anatomy 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 230000001568 sexual effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/035—DC motors; Unipolar motors
- H02K41/0352—Unipolar motors
- H02K41/0354—Lorentz force motors, e.g. voice coil motors
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Electromagnetism (AREA)
- Power Engineering (AREA)
- Reciprocating, Oscillating Or Vibrating Motors (AREA)
Abstract
The invention provides a kind of voice coil motor and stage apparatus, the voice coil motor includes：First back iron and the second back iron are relative to be arranged in parallel；First magnet array and the second magnet array, it is relatively fixed on the inwall of first and second back iron；First coil group and the second coil group, between first and second magnet array and are stacked；Wherein described first coil group coordinates with first magnet array, and the first coil group provides first direction controling power after powered up so that the voice coil motor has first free degree；The second coil group coordinates with second magnet array, and the first coil group provides the controling power of second direction after powered up so that the voice coil motor has second free degree.The motion that the voice coil motor of the present invention realizes two frees degree is contributed, and the stage apparatus using the voice coil motor of the present invention passes through with control strategy so that a motor is the fine motion that may be implemented in a plane.
Description
Technical field
The present invention relates to IC manufacturing field, more particularly to a kind of voice coil motor and stage apparatus.
Background technology
In litho machine, in order to compensate the control accuracy of long stroke coarse motion platform, it is necessary to add ultraprecise on coarse motion platform
Micropositioner, the positioning precision and locating speed of micropositioner determine the exposure accuracy and production efficiency of litho machine to a certain extent,
Therefore micropositioner is increasingly becoming one of litho machine core technology.And voice coil motor is because its is simple in construction, small volume, high response speed
The features such as spending, be high-precision, is widely used in the short stroke fine motion unit in litho machine.
Fig. 7 be conventional panel type voice coil motor two dimensional cross-section schematic diagram, flat board voice coil motor include the first back iron 1a and
Second back iron 1b, the first and second magnet arrays and coil 5.Wherein, first and second back iron 1a, 1b are typically by magnetic conductivity material
Material is made and provides path for magnetic circuit；Coil 5 is typically by copper cash or aluminum steel coiling；And first magnet array include the first main magnetic
Iron 2a, the second main magnet 4a and the first H magnet 3, the second magnet array include the 3rd main magnet 2b, the 4th main magnet and 4b and the
Two H magnet 6.As shown in figure 1, first and the 3rd main magnet 2a, 2b magnetized along +Z direction ,-H magnet 3 magnetizes along+X-direction,
2nd H magnet 6 magnetizes along -X direction, second and the 4th main magnet 4a, 4b edge-Z-direction magnetize, therefore, in the first magnet battle array
In row, first and second main magnet 2a, 4a and the first H magnet 3 form Halbach array, in the second magnet array, the 3rd He
4th main magnet 2b, 4b and the 2nd H magnet 6 form Halbach array, so as to reach unilateral magnetic field-enhanced purpose.Based on peace
The plate voice coil motor of training power principle manufacture has that simple in construction, easy to maintenance, reliability is high, energy conversion efficiency is high, tool
There is the characteristics of fixed journey system and direct drive characteristic and the output of smooth force-stroke and Linear Control.However, this conventional class
Although the flat board voice coil motor technology relative maturity of type, the relatively wide motion that can only realize single-degree-of-freedom of application.Due to it
The free degree is restricted, and to realize that the motion in a plane at least needs two plate voice coil motors on micropositioner.
Fig. 8 shows the schematic diagram for the stage apparatus that two degrees of freedom is realized using conventional panel type voice coil motor.It is described flat
Table apparatus includes plummer (micropositioner) 80, the X that is arranged on plummer 80 to fine motion motor 81 and Y-direction fine motion motor 82, its
Described in X to being conventional panel type voice coil motor with Y-direction fine motion motor, fine motion motor is using coil as stator, using moving magnet
Mode of operation.The X provides X to fine motion motor 51 and provides Y-direction to output, the Y-direction fine motion motor 52 and contribute, the two combination
And the fine motion of X/Y plane is realized with rational control strategy.And if to reach multiple degrees of freedom, it is necessary to using corresponding multiple
Motor can be only achieved demand, and therefore, cost of implementation valency is high, space-consuming is big.
It should be noted that the information for being disclosed in the background of invention technology segment is merely intended to deepen to the general of the present invention
The understanding of background technology, and be not construed as recognizing or imply that the information structure has been those skilled in the art in any form
Known prior art.
The content of the invention
In view of the above the shortcomings that prior art, the present invention provides a kind of voice coil motor and stage apparatus, breaches one
Platform voice coil motor can only realize the chains of one degree of freedom motion, so as to save manufacturing cost and reduce hold facility sky
Between.
In order to achieve the above object, in the one side of the application, there is provided a kind of voice coil motor, the voice coil motor bag
Include：
First back iron and the second back iron are relative to be arranged in parallel；
First magnet array and the second magnet array, it is relatively fixed on the inwall of first and second back iron；
First coil group and the second coil group, between first and second magnet array and are stacked；
Wherein described first coil group and the second coil group are perpendicular, the first coil group and first magnet
Array coordinates, and the first coil group provides first direction controling power after powered up so that the voice coil motor has first certainly
By spending；
The second coil group coordinates with second magnet array, and the first coil group provides and first after powered up
The controling power of the vertical second direction in direction so that the voice coil motor has second free degree.
In certain embodiments, the mover of the first coil group and the second coil group as the voice coil motor,
First back iron and the first magnet array and second back iron and the second magnet array are determined as the voice coil motor
Son.
In certain embodiments, the stator of the first coil group and the second coil group as the voice coil motor,
First back iron and the first magnet array and second back iron and the second magnet array are as the dynamic of the voice coil motor
Son.
In certain embodiments, first magnet array is in the first direction according to Halbach array pattern cycle sexual intercourse
For distribution, second magnet array is alternately distributed according to Halbach array pattern cycle in a second direction.
In certain embodiments, the first coil group includes one or more coils of parallel arranged in the first direction,
The second coil group includes one or more coils of parallel arranged in a second direction.
In certain embodiments, the first direction is Y-direction, the second direction be X to.
In certain embodiments, the first coil group and the second coil group are all formed by copper wire winding.
In certain embodiments, first magnet array and second magnet array are by neodymium iron boron (NdFeB) material
Material is made.
In certain embodiments, first and second backboard is formed from steel.
In the another aspect of the application, a kind of stage apparatus, including plummer are also provided, and using in foregoing one side
Described voice coil motor drives the plummer motion.
The beneficial effects of the invention are as follows：Voice coil motor and stage apparatus provided by the present invention are not increasing motor number of units
On the basis of, pass through the first and second magnet arrays on the first and second back irons to voice coil motor and first therebetween and
The reasonable layout of two coil group, the entirety of one degree of freedom motion is formed with first coil group and the first magnet array, by
Second coil group coordinates the entirety for forming another free degree motion with the second magnet array, so as to realize the motion of two frees degree
Contribute, using the stage apparatus of the voice coil motor with two degrees of freedom by can be achieved with one motor of control strategy
Fine motion in a plane, so as to reduce the space shared by equipment and reduce the manufacturing cost of stage apparatus and can be with
The service condition of complicated high-precision structure is improved to a certain extent.
Brief description of the drawings
By Figure of description and then it is used for the specific reality for illustrating some principles of the present invention together with Figure of description
Mode is applied, further feature and advantage will be clear or more specifically illustrated possessed by the present invention.
Fig. 1 is the front view of the two-dimensional structure of voice coil motor according to embodiments of the present invention；
Fig. 2 is the left view of the two-dimensional structure of voice coil motor according to embodiments of the present invention；
Fig. 3 is the tomograph of voice coil motor according to embodiments of the present invention；
Fig. 4 is the thrust curve of two bodies of having an effect of voice coil motor according to embodiments of the present invention；
Fig. 5 is the schematic diagram using the stage apparatus of voice coil motor according to embodiments of the present invention；
Fig. 6 is the force analysis schematic diagram of voice coil motor according to embodiments of the present invention；
Fig. 7 is the two-dimensional structure profile of the conventional panel type voice coil motor of prior art；
Fig. 8 is the schematic diagram for the stage apparatus that two degrees of freedom is realized using conventional panel type voice coil motor.
It is to be appreciated that Figure of description might not be shown the concrete structure of the present invention by this ground, and in specification
It is used to illustrate that the n-lustrative feature of some principles of the present invention can also take the slightly simplified technique of painting in accompanying drawing.Disclosed herein
The specific design feature of invention includes for example specific size, direction, position and profile will be partly by specifically to be applied and be made
Environment determines.
In several accompanying drawings of Figure of description, identical reference represents the identical or equivalent part of the present invention.
Embodiment
Many details are elaborated in the following description in order to fully understand the present invention.But the present invention can be with
Much it is different from other manner described here to implement, those skilled in the art can be in the situation without prejudice to intension of the present invention
Under do similar popularization, therefore the present invention is not limited by following public specific embodiment.
Below, the specific embodiment of the present invention is described with reference to accompanying drawing.Refer to shown in Fig. 1-6, the present invention provides
A kind of voice coil motor and stage apparatus.Fig. 1 and Fig. 2 is the master of the two-dimensional structure of voice coil motor according to embodiments of the present invention respectively
View and left view.Voice coil motor provided by the present invention includes：First back iron 11a and the second back iron 11b, the first magnet array
12a and the second magnet array 12b and first coil group 13a and the second coil group 13b.The first and second back irons 11a,
11b be arranged in parallel and for providing work magnetic circuit for motor along Z-direction is relative, and preferably, its material is No. 1008 steel.Institute
First and second magnet array 12a, 12b are stated to be relatively fixed on described first and second back irons 11a, 11b inwall, it is described
First magnet array 12a is alternately distributed along Y-direction according to Halbach array pattern cycle, the second magnet array 12b along
X is alternately distributed to according to Halbach array pattern cycle, and preferably, described first and second magnet arrays 12a, 12b
It is made by neodymium iron boron (NdFeB) material.The first coil group 13a and the second coil group 13b is arranged at described first and
It is stacked between two magnet array 12a, 12b and along Z-direction, and preferably, the first and second coils group 13a is mutual
All formed vertically and by copper wire winding.
As shown in figure 1, the first magnet array 12a includes multiple main magnets and one or more H magnet.In the first magnetic
In iron array 12a, adjacent main magnet 121a-H magnet 122a- main magnets 121a combination forms Halbach array, the first magnetic
Iron array 12a is alternately distributed that (heavy solid line arrows in Fig. 1 show the first magnet battle array according to Halbach array pattern cycle
Arrange the magnetizing direction of 12a each magnet), so as to play mesh unilateral magnetic field-enhanced and then that increase working gas gap magnetic is close
's.
The first coil group 13a includes one or more coils along Y-direction parallel arranged, the first coil group 13a
Coordinate with the first magnet array 12a so that first coil group 13a is in the first magnet array 12a magnetic field after powered up
Effect is lower produce long-range navigation magnetic force (arrow in dashed rectangle in Fig. 1 show after coil electricity with corresponding magnet (main magnetic
Iron 121a-H magnet 122a- main magnet 121a) formed work magnetic circuit), so as to provide Y-direction controling power, there is voice coil motor
First free degree.
As shown in Fig. 2 the second magnet array 12b includes multiple main magnets and one or more H magnet.In the second magnetic
In iron array 12b, adjacent main magnet 121b-H magnet 122b- main magnets 121b combination forms Halbach array, the second magnetic
Iron array 12b is alternately distributed that (heavy solid line arrows in Fig. 2 show the second magnet battle array according to Halbach array pattern cycle
Arrange the magnetizing direction of 12b each magnet), play purpose unilateral magnetic field-enhanced and then that increase working gas gap magnetic is close.
The second coil group 13b includes one or more coils along X to arrangement, the second coil group 13b and institute
State the second magnet array 12b cooperations so that the second coil group 13b produces long-range navigation magnetic force (in Fig. 2 under magnetic fields after powered up
Dashed rectangle in arrow show after coil electricity with corresponding magnet (main magnet 121b-H magnet 122b- main magnets
121b) the work magnetic circuit formed)), so as to provide X to controling power, make voice coil motor that there is second free degree.
Specifically, the first coil group 13a is one group of coil by copper wire winding, after energization under the influence of a magnetic field
Produce long-range navigation magnetic force, there is provided the body of having an effect that Y-direction is contributed as one degree of freedom；Second coil group 13b is by the another of copper wire winding
One group of coil, produces long-range navigation magnetic force under the influence of a magnetic field after energization, there is provided X to contribute having an effect as another free degree
Body, so as to rationally coordinate by each coil group and corresponding magnet array, each realize that one degree of freedom is contributed.The two hairs
Power body collectively forms the mover of the voice coil motor with two degrees of freedom, and this free degree can be provided to any of which group coil electricity
Corresponding output, the first back iron and the first magnet array and the second back iron and the second magnet array are formed with two degrees of freedom
The stator of voice coil motor.
In certain embodiments, the voice coil motor is using described in the first coil group and the second coil group conduct
The stator of voice coil motor, made using first back iron and the first magnet array and second back iron and the second magnet array
For the mover of the voice coil motor.
Fig. 3 is the tomograph of voice coil motor according to embodiments of the present invention.
The voice coil motor includes stationary part 31a, 31b and subpart 13a, 13b, and the stationary part 31a is by the
One back iron 11a and the first magnet array 12a is formed, and the stationary part 31b is by the second back iron 11b and the second magnet array
12b is formed, so as to provide magnetic field and magnetic circuit for hot-wire coil, it is preferable that the first and second magnet arrays 12a, 12b are forever
Magnet.
The subpart has an effect body and X to body of having an effect including Y-direction, the Y-direction have an effect body and X to body of having an effect by coil group
Form, as shown in figure 3, the subpart includes first coil group 13a and the second coil group 13b, the first coil group 13a
Including the coil two along Y-direction parallel arranged, the second coil group 13b includes the coil two along X-axis parallel arranged, coil
Acted on when being powered in magnetic field by long-range navigation magnetic force, specifically, first coil group can under magnetic fields when being powered
As the body of having an effect of one degree of freedom, the second coil group can having an effect as another free degree under magnetic fields when being powered
Body, so that voice coil motor has two degrees of freedom.In certain embodiments, in the first and second coils group 13a, 13b
The number of coil is not limited to two, can be any suitable quantity, for example, one, three, four, five etc..
Fig. 4 is the thrust curve of two bodies of having an effect of voice coil motor according to embodiments of the present invention.With the voice coil loudspeaker voice coil shown in Fig. 3
Exemplified by motor, it is 100 circles to set each coil, and it is 1A to be passed through electric current, and abscissa represents two body of having an effect (the first and second lines
Circle group) stroke range, when two coil groups respectively from the -0.6mm of X-axis and Y-axis~0.6mm motion when, two coil groups
Thrust variation is as shown in two curves in Fig. 4.Its cathetus represents the change of the thrust size of one degree of freedom (Y direction),
Chain-dotted line represents the change of the thrust size of another free degree (X-direction), can be derived from the data in Fig. 4, two
The force oscillation of the free degree is respectively ± 1.83% and ± 3.13%.
Fig. 5 is the schematic diagram using the stage apparatus of voice coil motor according to embodiments of the present invention.The stage apparatus bag
Plummer 50 and the voice coil motor proposed by the present invention 51 being arranged on plummer 50 are included, passes through the first He to voice coil motor 51
The conducting electric current of second coil group is controlled the fine motion for realizing X/Y plane.Voice coil motor in use can using coil group as
Mover, also can be using back iron and magnet array as mover.In the present embodiment, voice coil motor employs coils as stator, back iron
With mode of operation of the magnet array as mover.In certain embodiments, voice coil motor can also employ coils as mover, back iron
With mode of operation of the magnet array as stator.
Fig. 6 is the force analysis schematic diagram of voice coil motor according to embodiments of the present invention.In order to principle analysis is convenient and
A part of part of voice coil motor, and wherein described first magnet array (not shown) and the second magnet are only shown for the sake of clear
Array 62 respectively includes three blocks of magnet, i.e. the main magnet-H magnet-main magnet for forming Halbach array is followed successively by, to provide magnetic
；Second magnet array 62 is arranged on the inwall of the second backboard 62；The line of the coil group 63 of first coil group 64 and second
Number of turns amount is respectively 1, i.e. the coil group 63 of first coil group 64 and second namely coil 64 and coil 63.
The second coil group 63 is to be produced after X is powered to the actuating coil of the free degree in the presence of the second magnetic field array 62
X is given birth to output；The first coil group 64 is the actuating coil of the Y-direction free degree, after energization in the presence of the first magnetic field array
X is produced to output.Herein, for simplicity, output situations of the X to free degree coil (that is, coil 63) is only analyzed.Coil
63 sense of current is such as I11、I12Arrow shown in, its stress in magnetic field is F11And F12, power F11And F12Both directions are identical
And size is identical, then the two make a concerted effort be：F=F11+F12；The sense of current of coil 64 is such as I21、I22Arrow shown in, it is in magnetic
Stress is F in21And F22, power F21And F22Both are in opposite direction and size is identical, then the two make a concerted effort be：F=F21-F22=0.Cause
This second magnet array 62 is on first coil group 64 without influence.Similarly, the first magnet array on the second coil group 63 also without influence.
Therefore, the coil group 63 of first coil group 64 and second can contribute in the two directions respectively, respectively having an effect as one degree of freedom
Body, so as to realize the voice coil motor with two degrees of freedom.
Being illustrative for property of above-described embodiment illustrate the present invention principle and its effect, but the present invention be not limited to it is above-mentioned
Embodiment.Those skilled in the art can be under the spirit and scope without prejudice to the present invention, in claims
It is interior, above-described embodiment is modified.Therefore protection scope of the present invention, should be covered such as claims of the present invention.
Claims (10)
- A kind of 1. voice coil motor, it is characterised in that including：First back iron and the second back iron are relative to be arranged in parallel；First magnet array and the second magnet array, it is relatively fixed on the inwall of first and second back iron；First coil group and the second coil group, between first and second magnet array and are stacked；Wherein described first coil group and the second coil group are perpendicular, the first coil group and first magnet array Coordinate, the first coil group provides first direction controling power after powered up so that the voice coil motor has first free degree；The second coil group coordinates with second magnet array, after powered up the first coil group offer and first direction The controling power of vertical second direction so that the voice coil motor has second free degree.
- 2. voice coil motor as claimed in claim 1, it is characterised in that the first coil group and the second coil group conduct The mover of the voice coil motor, first back iron and the first magnet array and second back iron and the second magnet array are made For the stator of the voice coil motor.
- 3. voice coil motor as claimed in claim 1, it is characterised in that the first coil group and the second coil group conduct The stator of the voice coil motor, first back iron and the first magnet array and second back iron and the second magnet array are made For the mover of the voice coil motor.
- 4. voice coil motor as claimed in claim 1, it is characterised in that first magnet array in the first direction according to Halbach array pattern cycle is alternately distributed, and second magnet array is in a second direction according to Halbach array pattern week Phase property is alternately distributed.
- 5. voice coil motor as claimed in claim 4, it is characterised in that the first coil group includes parallel row in the first direction One or more coils of row, the second coil group include one or more coils of parallel arranged in a second direction.
- 6. voice coil motor as claimed in claim 5, it is characterised in that the first direction is Y-direction, and the second direction is X To.
- 7. voice coil motor as claimed in claim 1, it is characterised in that the first coil group and the second coil group all by Copper wire winding forms.
- 8. voice coil motor as claimed in claim 1, first magnet array and second magnet array are by neodymium iron boron (NdFeB) material is made.
- 9. voice coil motor as claimed in claim 1, it is characterised in that first and second backboard is made up of Steel material.
- 10. a kind of stage apparatus, including plummer, it is characterised in that using the sound described in any one of claim 1~9 Enclose motor and drive the plummer motion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610850239.7A CN107872140A (en) | 2016-09-26 | 2016-09-26 | A kind of voice coil motor and stage apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610850239.7A CN107872140A (en) | 2016-09-26 | 2016-09-26 | A kind of voice coil motor and stage apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107872140A true CN107872140A (en) | 2018-04-03 |
Family
ID=61751715
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610850239.7A Pending CN107872140A (en) | 2016-09-26 | 2016-09-26 | A kind of voice coil motor and stage apparatus |
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| Country | Link |
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| CN (1) | CN107872140A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112242785A (en) * | 2019-07-17 | 2021-01-19 | 华为技术有限公司 | Linear motor, lens assembly and electronic equipment |
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|---|---|---|---|---|
| JPH07131966A (en) * | 1993-11-05 | 1995-05-19 | Sharp Corp | Two-dimensional linear motor |
| JP2010161838A (en) * | 2009-01-06 | 2010-07-22 | Toshiba Mach Co Ltd | Linear motor and linear movement stage device |
| US20100238425A1 (en) * | 2009-03-23 | 2010-09-23 | Nikon Corporation | Coil Variations for an Oval Coil Planar Motor |
| JP2012060853A (en) * | 2010-09-13 | 2012-03-22 | Yaskawa Electric Corp | Actuator with two-degrees of freedom |
| US20130069449A1 (en) * | 2011-09-15 | 2013-03-21 | Nikon Corporation | Modular coil arrays for planar and linear motors |
| US20130164687A1 (en) * | 2011-06-30 | 2013-06-27 | Michael B. Binnard | Hybrid cooling and thermal shield for electromagnetic actuators |
| CN103872876A (en) * | 2012-12-07 | 2014-06-18 | 上海微电子装备有限公司 | Linear motor and platform device |
| CN105308839A (en) * | 2013-05-27 | 2016-02-03 | 株式会社安川电机 | Linear motor and stage device |
-
2016
- 2016-09-26 CN CN201610850239.7A patent/CN107872140A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07131966A (en) * | 1993-11-05 | 1995-05-19 | Sharp Corp | Two-dimensional linear motor |
| JP2010161838A (en) * | 2009-01-06 | 2010-07-22 | Toshiba Mach Co Ltd | Linear motor and linear movement stage device |
| US20100238425A1 (en) * | 2009-03-23 | 2010-09-23 | Nikon Corporation | Coil Variations for an Oval Coil Planar Motor |
| JP2012060853A (en) * | 2010-09-13 | 2012-03-22 | Yaskawa Electric Corp | Actuator with two-degrees of freedom |
| US20130164687A1 (en) * | 2011-06-30 | 2013-06-27 | Michael B. Binnard | Hybrid cooling and thermal shield for electromagnetic actuators |
| US20130069449A1 (en) * | 2011-09-15 | 2013-03-21 | Nikon Corporation | Modular coil arrays for planar and linear motors |
| CN103872876A (en) * | 2012-12-07 | 2014-06-18 | 上海微电子装备有限公司 | Linear motor and platform device |
| CN105308839A (en) * | 2013-05-27 | 2016-02-03 | 株式会社安川电机 | Linear motor and stage device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112242785A (en) * | 2019-07-17 | 2021-01-19 | 华为技术有限公司 | Linear motor, lens assembly and electronic equipment |
| CN112242785B (en) * | 2019-07-17 | 2022-06-14 | 华为技术有限公司 | Linear motor, lens assembly and electronic equipment |
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Application publication date: 20180403 |