JP5470990B2 - Multi-degree-of-freedom actuator - Google Patents

Description

The present invention relates to a multi-degree-of-freedom actuator used in a precision device.

In precision devices such as semiconductor manufacturing equipment and liquid crystal manufacturing equipment, the robot floats in the vertical Z direction, moves in the horizontal X and Y directions, and further moves in the θ _X , θ _Y , and θ _Z directions (X axis, Y axis, Z axis). There is a demand for a multi-degree-of-freedom actuator that can be finely moved in the direction of rotation of the actuator.
As a conventional multi-degree-of-freedom actuator, it is composed of a mover in which permanent magnets are arranged on an XY plane and a stator in which coils are arranged. By supplying control currents with different phase differences to adjacent coils, it can be moved by electromagnetic force. There is one that lifts the child in the Z direction and propels it in the X direction. (For example, refer to Patent Document 1).

JP 2004-254489 A (19th page, FIGS. 1 and 2)

However, the conventional multi-degree-of-freedom actuator has an air-core part of the coil, and is laminated in order to float in the Z direction, propel it in two directions XY, and finely move it in the θ _X , θ _Y , and θ _Z directions. There was a need. In addition, since all six layers of coils are laminated, the magnetic gap becomes large, and there is a problem that thrust, levitation force, and variable levitation force are reduced for the physique.
The present invention has been made in order to solve the above-described problem, and is small in size, and has a large thrust, levitation force, and variable levitation force, levitation in the Z direction, propulsion in the XY direction, and θ _X , θ _Y , θ _An object is to provide a multi-degree-of-freedom actuator that performs fine movement in the _Z direction.

The invention according to claim 1 is composed of a mover having a plurality of permanent magnets and a stator having a plurality of coils, and generates an electromagnetic force in the permanent magnets by exciting the coils, and the moveable The child is moved in the first direction of the vertical direction and the horizontal direction, the permanent magnets are arranged side by side in the first direction and the second direction of the horizontal direction, and the coil is connected to the first direction driving coil. The vertical direction driving coil is composed of two types, and the vertical direction driving coil is disposed at a position facing the magnetic pole of the permanent magnet, and the first direction driving coil and the vertical direction driving coil , together with the folded respectively on opposite sides a pair of coil end to said movable element in one of the coils, the pair of the allowed cross the coil side of the other coil on the one coil Koirue It is both the empty core of the de those configured by arranging the one coil and the other coil so that the coil sides of the other coil passes.
According to a second aspect of the present invention, the vertical driving coils are arranged in n rows (n is an integer of 2 or more) in the second direction.
According to a third aspect of the present invention, the first direction driving coils are arranged in n rows (n is an integer of 2 or more) in the second direction.
According to a fourth aspect of the present invention, both the vertical direction driving coil and the first direction driving coil are arranged in n rows (n is an integer of 2 or more) in the second direction. is there.
According to a fifth aspect of the present invention, the second direction driving coil is arranged so as to be orthogonal to the gap surface of the vertical direction driving coil and the first direction driving coil or the back surface opposite thereto, and the number of poles The permanent magnet of P (P is an even number of 2 or more) is configured to be shifted in the second direction, or rotated and arranged around the vertical axis, and also to the second direction in the horizontal direction. Any one of the configurations may be used.
According to a sixth aspect of the present invention, a stator core is fixed to the back surfaces of the vertical direction driving coil and the first direction driving coil.
According to a seventh aspect of the present invention, a mover core is disposed on the mover on the back surface of the vertical direction drive coil and the first direction drive coil via a gap.

According to the present invention, the permanent magnets are arranged side by side in the X direction and the Y direction, the coil is composed of two types of coils, the Z direction driving coil and the X direction driving coil, and the Z direction driving coil is the magnetic pole of the permanent magnet. Arranged at opposite positions, of the X direction driving coil and the Z direction driving coil, a pair of coil ends in one coil are bent to the opposite side with respect to the mover, and one coil is connected to the other coil. One coil and the other coil are arranged so that the coil side of the other coil passes through both of the cores of the pair of coil ends in one coil across the coil side. Therefore, it is possible to reduce the magnetic gap as compared with the conventional example, the promotion of levitation and X direction of the Z-direction, in addition to three degrees of freedom operation of theta _Y direction fine movement, 4-DOF operation plus fine movement of theta _X direction Thus, it is possible to provide an actuator that is compact but has a high levitation force, variable levitation force, and large thrust.
Further, since the X-direction driving coil or the Z-direction driving coil is arranged in n rows (where n is an integer of 2 or more) in the Y direction, the magnetic gap can be made smaller than in the conventional example. In addition to the three-degree-of-freedom motion of levitation in the direction, propulsion in the X-direction, and fine movement in the θ- _Y direction, the four-degree-of-freedom operation with fine movement in the θ- _Z direction is performed. Large actuators can be provided.
According to the invention of claim 4, since both the Z direction driving coil and the X direction driving coil are arranged in n rows (where n is an integer of 2 or more) in the Y direction, the conventional example is provided. and comparison it is possible to reduce the magnetic gap, the promotion of levitation and X direction of the Z-direction, theta addition to three degrees of freedom operation of the _Y-direction fine movement, theta _X direction, 5 degrees of freedom operation plus fine movement of theta _Z direction Thus, it is possible to provide an actuator that is compact but has a high levitation force, variable levitation force, and large thrust.
Also, arrange the Y-direction driving coil so as to be orthogonal to the gap surface of the Z-direction driving coil and the X-direction driving coil or the opposite back surface, and shift the number of poles P permanent magnets in the Y-direction, or The structure is arranged by rotating around the Z axis. Therefore, promotion of levitation and X direction of the Z-direction, theta addition to three degrees of freedom operation of the _Y-direction fine movement, theta _X direction, theta _Z direction fine movement, multi performing up to 6 degrees of freedom operation plus promotion of Y-direction A degree of freedom actuator can be provided.
In addition, since the stator core is fixed to the back of the Z direction driving coil and the X direction driving coil, the gap magnetic flux density can be increased, and the levitation force, variable levitation force, and thrust can be increased while being compact. Large actuators can be provided.
In addition, since the mover core is arranged on the back surface of the Z-direction drive coil and the X-direction drive coil via a gap, the gap magnetic flux density can be increased, the levitation force is eliminated, and the variable levitation force Only thrust can be generated. It is possible to provide an actuator that is compact but has high levitation force, variable levitation force, and large thrust.

The bottom view of the multi-degree-of-freedom actuator which shows the 1st example of the present invention. The side view of the multi-degree-of-freedom actuator which shows the 1st example of the present invention. Sectional drawing seen from the front of the multi-degree-of-freedom actuator which shows 1st Example of this invention The figure which shows the generation principle of the variable levitation force and thrust in 1st Example of this invention 1 is a connection configuration diagram of a multi-degree-of-freedom actuator and an amplifier according to a first embodiment of the present invention. The bottom view of the multi-degree-of-freedom actuator which shows the 2nd example of the present invention. Side view of a multi-degree-of-freedom actuator showing a second embodiment of the present invention Connection diagram of multi-degree-of-freedom actuator and amplifier showing a second embodiment of the present invention The bottom view of the multi-degree-of-freedom actuator which shows the 3rd example of the present invention. Side view of multi-degree-of-freedom actuator showing third embodiment of the present invention Connection diagram of multi-degree-of-freedom actuator and amplifier showing a third embodiment of the present invention The bottom view of the multi-degree-of-freedom actuator which shows the 4th example of the present invention. Side view of a multi-degree-of-freedom actuator showing a fourth embodiment of the present invention Sectional drawing seen from the front of the multi-degree-of-freedom actuator which shows the 4th Example of this invention The figure which shows the generation principle of the Y direction thrust which shows the 4th Example of this invention The bottom view of the multi-degree-of-freedom actuator which shows the 5th example of the present invention. Side view of multi-degree-of-freedom actuator showing fifth embodiment of the present invention Sectional drawing seen from the front of the multi-degree-of-freedom actuator which shows the 6th Example of this invention

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

1 and 2 are a bottom view and a side view of a multi-degree-of-freedom actuator showing a first embodiment of the present invention, and FIG. 3 is a sectional view as seen from the front.
The mover 110 includes a permanent magnet 114 and a mover yoke 112, and the stator 100 includes a stator core 118, an X-direction drive coil 105, and a Z-direction drive coil 104.
Permanent magnets 114 are arranged alternately in the X direction so that the number of poles P = 2 and the polarity is reversed, and Z = 2 driving coils 104 are arranged at positions facing the magnetic poles of the permanent magnets 114, The permanent magnets 114 and the Z-direction drive coils 104 are arranged in n = 2 rows in the Y direction, and the X-direction drive is performed at a position where the coil side of the X-direction drive coil 105 coincides with the center of the Z-direction drive coil 104. The configuration is such that P / 2 = 1 coil 105 is disposed.
As shown in FIG. 2, the Z-direction driving coil 104 is configured such that the coil end is bent and the coil side of the X-direction driving coil 105 is embedded in the air core.
The stator core 118 is a magnetic body, and for example, a laminate of electromagnetic steel sheets for the purpose of reducing iron loss or a molded body using a dust core is used.
FIG. 4 is a diagram showing the principle of generation of levitation force, variable levitation force, and thrust in the first embodiment. The dotted line in the figure shows the magnetic flux line 119 by the permanent magnet 114.
First, a magnetic attractive force is generated between the permanent magnet 114 and the stator core 118. This is the levitation force.
Next, as indicated by the magnetic flux line 119 by the permanent magnet 114, the magnetic flux in the Z direction of the magnetic flux density passes through the X direction driving coil 105, and the magnetic flux in the X direction of the magnetic flux density passes through the Z direction driving coil 104. When a current is passed in the direction shown in FIG. 4, a Lorentz force in the + Z direction is generated in the Z direction driving coil 104, and as a result, the mover 110 generates a variable levitation force in the −Z direction. Further, a Lorentz force in the −X direction is generated in the X direction driving coil 105, and as a result, the mover 110 generates a thrust in the + X direction.
FIG. 5 is a connection configuration diagram of the multi-degree-of-freedom actuator and the amplifier according to the first embodiment of the present invention. In the figure, 104 is a Z direction driving coil, 105 is an X direction driving coil, 107a, 107b, 107c, and 107d are Z direction driving amplifiers, and 108a is an X direction driving amplifier.
Drive control is performed in the Z direction, θ _X direction, and θ _Y direction by using four amplifiers for a total of four Z direction driving coils and by making a difference in the magnitude of the current flowing through each coil. ing.
By such a configuration, in addition to the promotion of levitation and X direction of the Z-direction, theta _X-direction, it is possible to realize the four degrees of freedom operation for fine movement in the theta _Y direction.
By constructing as described above, in addition to floating in the Z direction and propulsion in the _X direction, a multi-degree-of-freedom actuator that finely moves in the θ _X direction and the θ _Y direction is realized, and the magnetic gap is reduced as compared with the conventional example. Therefore, it is possible to realize an actuator that is compact but has a high levitation force, a variable levitation force, and a large thrust.

Next, a second embodiment of the present invention will be described.
6 and 7 are a bottom view and a side view of a multi-degree-of-freedom actuator showing a second embodiment of the present invention. The cross-sectional view seen from the front is the same as FIG.
The second embodiment is different from the first embodiment in that P = 2 = 1 X direction driving coils 105 arranged in a position opposite to the center between the magnetic poles are arranged in n = 2 rows in the Y direction. , a configuration in which P = 2 pieces arranged in the Z direction driving coil 104 in the magnetic pole position opposed to the permanent magnets 114, bending the coil end in the X-direction drive coil 105, the Z-direction drive coil 104 to the air-core coil It is arranged so that the side is embedded.
FIG. 8 is a connection configuration diagram of a multi-degree-of-freedom actuator and an amplifier showing a second embodiment of the present invention. In the figure, 104 is a Z direction driving coil, 105 is an X direction driving coil, 107a and 107b are Z direction driving amplifiers, and 108a and 108b are X direction driving amplifiers.
By using two amplifiers for two Z-direction drive coils and using two amplifiers for two X-direction drive coils, the magnitude of the current flowing in each coil is differentiated, and the Z direction And drive control in the X direction, θ _Y direction, and θ _Z direction.
By such a configuration, in addition to promoting the floating and X direction of the Z-direction, theta _Y-direction, can be realized the four degrees of freedom operation for fine movement in the theta _Z direction.
By the structure described above, in addition to the promotion of levitation and X direction of the Z-direction, theta _Y-direction, with also realize a multi-degree-of-freedom actuator for fine movement in the theta _Z direction, to reduce the magnetic gap as compared with the conventional example Therefore, it is possible to realize an actuator that is compact but has a high levitation force, a variable levitation force, and a large thrust.

Next, a third embodiment of the present invention will be described.
FIGS. 9 and 10 are a bottom view and a side view of a multi-degree-of-freedom actuator showing a third embodiment of the present invention. The cross-sectional view seen from the front is the same as FIG.
The third embodiment is different from the first embodiment in that P / 2 = 1 X-direction driving coils are arranged at positions facing the center between the magnetic poles, and P is arranged at a position facing the magnetic pole of the permanent magnet. = 2 Z-direction drive coils are arranged in n = 2 rows in the Y direction, the coil end of the X-direction drive coil 105 is bent, and the coil side of the Z-direction drive coil 104 is centered on the air core. it is that arranged so as to fill the.

FIG. 11 is a connection configuration diagram of a multi-degree-of-freedom actuator and an amplifier showing a third embodiment of the present invention. In the figure, 104 is a Z direction driving coil, 105 is an X direction driving coil, 107a, 107b, 107c and 107d are Z direction driving amplifiers, and 108a and 108b are X direction driving amplifiers.
By using four amplifiers for a total of four Z-direction drive coils and using two amplifiers for two X-direction drive coils, the difference in the magnitude of the current passed through each coil is Drive control in the direction, the Z direction, the θ _X direction, the θ _Y direction, and the θ _Z direction.
By such a configuration, in addition to the promotion of levitation and X direction of the Z-direction, theta _X direction, theta _Y-direction, can be realized the five degrees of freedom operation for fine movement in the theta _Z direction.
The above configuration realizes a multi-degree-of-freedom actuator that finely moves in the θ _X direction, θ _Y direction, and θ _Z direction in addition to Z-direction levitation and X-direction propulsion, and is more magnetic than the conventional example. The gap can be reduced, and an actuator with a large thrust, levitation force, and variable levitation force can be realized while being compact.

Next, a fourth embodiment of the present invention will be described.
FIGS. 12, 13, and 14 are a bottom view, a side view, and a sectional view as seen from the front of the multi-degree-of-freedom actuator according to the fourth embodiment of the present invention. FIG. 15 is a diagram showing the principle of generation of Y-direction thrust in the fourth embodiment.
In the figure, 100 is a stator, 110 is a mover, 104 is a Z direction drive coil, 105 is an X direction drive coil, 103 is a Y direction drive coil, 112 is a mover yoke, 114 is a permanent magnet, and 118 is a permanent magnet. Stator core. Further, a dotted line in FIG. 15 indicates a magnetic flux line 119 by the permanent magnet 114.
The fourth embodiment is different from the first to third embodiments in that the Y-direction driving coil is arranged so as to be orthogonal to the gap surface of the Z-direction driving coil and the X-direction driving coil or the opposite back surface. The permanent magnet is arranged around the Z axis and is moved in the horizontal Y direction. Although not shown, the permanent magnets may be shifted in the Y direction.
As indicated by the magnetic flux line 119 by the permanent magnet 114, the magnetic flux in the Z direction of the magnetic flux density passes through the Y direction driving coil 103.
When a current is passed in the direction shown in FIG. 15, a Lorentz force in the + Y direction is generated in the Y direction driving coil 103, and as a result, the mover 110 generates a thrust in the -Y direction.
Here, the Y-direction drive coil 103 is a flattened coil for the purpose of reducing the magnetic gap.
By configuring as described above, a multi-degree-of-freedom actuator that performs four-degree-of-freedom motion with Y-direction propulsion in addition to three-degree-of-freedom motion of Z-direction levitation, X-direction propulsion, and θ- _Y direction fine movement. In addition, the magnetic gap can be made smaller than that of the conventional example, and an actuator having a large thrust, levitation force, and variable levitation force can be realized while being compact.

Next, a fifth embodiment of the present invention will be described.
16 and 17 are a bottom view and a side view of a multi-degree-of-freedom actuator showing a fifth embodiment of the present invention. A cross-sectional view seen from the front is the same as FIG.
The fifth embodiment differs from the fourth embodiment in that the Z direction driving coil, the X direction driving coil, the Y direction driving coil, and the permanent magnet are arranged in n = 2 rows in the Y direction. It is.
By configuring as described above, in addition to the three-degree-of-freedom operation of Z-direction levitation, X-direction propulsion, and θ- _Y direction fine movement, maximum Y-direction propulsion, θ _X- direction, and θ- _Z direction fine movement are added. In addition to realizing a multi-degree-of-freedom actuator that performs a 6-degree-of-freedom operation, the magnetic gap can be made smaller than that of the conventional example, and an actuator having a large thrust, levitation force, and variable levitation force can be realized while being compact.

Next, a sixth embodiment of the present invention will be described.
FIG. 18 is a sectional view of a multi-degree-of-freedom actuator as viewed from the front according to the sixth embodiment of the present invention. In the figure, reference numeral 120 denotes a mover core.
The sixth embodiment differs from the first to fourth embodiments in that the mover core can be moved to the back surface of the Z-direction drive coil, the X-direction drive coil, and the Y-direction drive coil via a gap. This is a configuration arranged in the child.
By configuring as described above, the gap magnetic flux density can be increased, the levitation force can be eliminated, and only the variable levitation force and thrust can be generated. In other words, it is possible to provide an actuator that has a high levitation force, a variable levitation force, and a large thrust while being compact for applications that do not require a levitation force.

In this embodiment, the case of P = 2 and n = 2 has been described. However, the configuration of this embodiment is arranged as P = 4, 6,..., N = 3, 4,. However, it goes without saying that the effects of the present invention can be obtained.

It can perform up to 6 degrees of freedom of Z-direction levitation, X-direction propulsion, Y-direction propulsion, θ _X- direction, θ _Y- direction, and fine movement in θ _Z- direction. Since an actuator having a large variable levitation force and thrust can be realized, the present invention can also be applied to a vacuum transfer device.

100 Stator 103 Y direction driving coil 104 Z direction driving coil 105 X direction driving coil 106 Teeth 107a, 107b, 107c, 107d Z direction driving amplifier 108a, 108b X direction driving amplifier 110 Movable element 112 Movable element yoke (Top board)
114 Permanent magnet 116 Six-layer coil 118 Stator core (base)
119 Magnet magnetic flux line 120 Mover core

Claims (7)

It is composed of a mover having a plurality of permanent magnets and a stator having a plurality of coils. Exciting the coils generates an electromagnetic force in the permanent magnets, and the mover is moved vertically and horizontally. The permanent magnet is moved in the first direction, the permanent magnets are arranged side by side in the first direction and the second direction in the horizontal direction, and the coil is divided into two types, a first direction driving coil and a vertical direction driving coil. The vertical direction driving coil is disposed at a position facing the magnetic pole of the permanent magnet, and a pair of coil ends in one of the first direction driving coil and the vertical direction driving coil. with bent respectively on the opposite side with respect to said movable element, said both air-core portion of the pair of the coil end by cross the coil side of the other coil on the one coil Multi-degree-of-freedom actuator, characterized in that the coil sides of the square of the coil is constructed by placing the one coil and the other coil to pass. 2. The multi-degree-of-freedom actuator according to claim 1, wherein the vertical driving coils are arranged in n rows (n is an integer of 2 or more) in the second direction. 2. The multi-degree-of-freedom actuator according to claim 1, wherein the first direction driving coils are arranged in n rows (n is an integer of 2 or more) in the second direction. 2. A multi-device according to claim 1, wherein both said vertical direction driving coil and said first direction driving coil are arranged in n rows (n is an integer of 2 or more) in said second direction. Freedom actuator. The second direction driving coil is arranged so as to be orthogonal to the gap surface of the vertical direction driving coil and the first direction driving coil or the back surface opposite thereto, and the number of poles P (P is an even number of 2 or more) The permanent magnet is configured to be shifted in the second direction, or configured to be rotated around the vertical axis, and moved in the second direction in the horizontal direction. The multi-degree-of-freedom actuator according to claim 1, wherein the multi-degree-of-freedom actuator is configured as follows. Multi-degree-of-freedom actuator according to any one of claims 1-5 in which the stator core is characterized in that fixed to the rear of the vertical drive coil and the first-direction drive coil. The armature core on a rear surface of the vertical drive coil and the first-direction drive coil, any one of claims 1-5, characterized in that is disposed in the mover with a gap multi-degree-of-freedom actuator according to.

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