CN101887160A - Supporting system for processing large-aperture space optics mirrors - Google Patents
Supporting system for processing large-aperture space optics mirrors Download PDFInfo
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Abstract
本发明公开了一种用于大口径空间光学反射镜加工的支撑系统，包括加工支撑装置、检测支撑装置和转换机构(2)。转换机构安装在加工支撑底板(1)的上面并支撑检测支撑装置；检测支撑框架(8)的底板上安装浮动主动支撑机构(6)，并开有刚性支撑杆穿过孔(4)和重锤穿过孔(7)；刚性支撑杆(3)通过刚性支撑杆穿过孔在反射镜加工时支撑工件；检测时，由转换机构将检测支撑装置托起，由浮动主动支撑机构支撑工件。本发明采用相互独立可调的支撑方式和支撑结构，可根据所需要加工的反射镜的自身特点设计方案并进行各支撑点处支撑力的精确调整，能够将反射镜因重力变形造成的面形误差调整到空间使用可接受的状态，大大减小了地面检测误差。
The invention discloses a support system for processing a large-diameter space optical mirror, which comprises a processing support device, a detection support device and a conversion mechanism (2). The conversion mechanism is installed on the processing support base plate (1) and supports the detection support device; the floating active support mechanism (6) is installed on the base plate of the detection support frame (8), and a rigid support rod passes through the hole (4) and the weight The hammer passes through the hole (7); the rigid support rod (3) passes through the hole through the rigid support rod to support the workpiece during mirror processing; during detection, the detection support device is lifted by the conversion mechanism, and the workpiece is supported by the floating active support mechanism. The present invention adopts mutually independent and adjustable support methods and support structures, and can design a plan according to the characteristics of the reflector to be processed and accurately adjust the support force at each support point. The error is adjusted to an acceptable state for space use, which greatly reduces the ground detection error.
Description
Technical field
The present invention relates to the support technology of a kind of large-aperture optical catoptron in processing and detection, belong to processing of ultraprecise optics and detection range.
Background technology
Development along with optical technology, the bore of processed optical mirror constantly increases, the supported design of catoptron and enforcement become a very important sport technique segment, this is because the distortion of catoptron self will directly have influence on minute surface face shape under action of gravity, and can make a big impact and directly influence final mirror image quality detecting and processing when such distortion acquires a certain degree after.
Large diameter optical mirror face supporting way commonly used at present mainly contains single-row multiple row support, multi-point support.
Single-row support is meant circular optical mirror is lain in a horizontal plane on the very narrow cylindrical support ring that the radius of support ring is smaller or equal to the optical mirror radius.Catoptron is being placed on the support ring of complete " freedom ", is a kind of supporting way of passive support.Studies show that what support ring was positioned at catoptron radius 2/3 locates to be the maximum support position.Then can adopt multiple row to support when single-row support can not be satisfied the surface deformation requirement, as being disbursed from the cost and expenses pushing out ring when being separately positioned on optical mirror 1/3 endless belt, 2/3 endless belt and edge with three, they have born 0.253,0.484 and 0.263 of mirror general assembly (TW) separately.This supporting way lower support position is not uniform, supports the local gravity distortion easily takes place between the endless belt, is difficult to satisfy the requirement of complete discharge gravity.
Multi-point support is to adopt a plurality of strong points to bear the gravity of catoptron, as supported at three point, 6 supports, 9 supports etc.As everyone knows, 3 surfaces that can support Any shape on same straight line not, if add the 4th strong point then need accurately to adjust, this is difficulty very.So the simplest supporting way is that catoptron directly is placed on three rigid support points, three strong points can be distributed on the same circumference for the rotational symmetry optical mirror.In fact, three rigid support points only can play positioning action, then are difficult to guarantee that its deflection is controlled in the tolerance interval as all being used to bear catoptron gravity.If on three fixed support points, triangle bracket is installed respectively, adopt the connection of bulb hinge between carriage and the fixed support point and on each summit of carriage, indication is set, so just become the support that two-layer 3 * 3=9 is ordered.Can be extended to multi-point support such as 27 points, by that analogy at 81.This simple in structure clear, performance is also more stable, but determines that the distribution of (supporting construction and catoptron are determined) each strong point upper support power is just definite in case its shortcoming is a system, can't intervene, can't proofread and correct for local large deformation, also be a kind of passive supported design.
Above-mentioned method for supporting has all been realized successful Application in the telescopical large diameter optical mirror face manufacturing of ground, but do not see that success is used for the pertinent literature of spacing reflection mirror processing, its reason is that passive supporting way anchorage force can't human intervention by the automatic distribution of system, therefore be difficult to make the stress of optical mirror to approach the zero-g state, local large deformation is difficult to proofread and correct.
In sum, but the supporting point position and apply the anchorage force size though separate multi-point support can freely be arranged is rationally proofreaied and correct each regional local deformation is adjusted complicatedly, is under the equilibrium state in system and can't bears tonnage, brings difficulty to processing.Another kind of multi-point support design is that all strong points all are installed in on one deck, separate, utilize lever principle that the strong point and weight are arranged on the two ends of lever, realize adjusting the anchorage force at strong point place by changing the weight end arm of force, the anchorage force at each strong point place is all independent adjustable.This supporting way the strong point arrange and the adjustment of anchorage force on relatively flexibly, but its shortcoming also very obviously is a system reach the after-applied any external force of mechanical balance state all can the destruction of balance state, thereby can't bear the pressure of machining tool, inapplicable processing.
Simultaneously, because detection is depended in the processing of mirror mirror, detection therefore reasonable in design is supported and is effectively implemented and seems particularly important.For optical mirror, best supported design should be can realize processing, detection adopts identical support scheme with practical application, promptly the external environment condition of above-mentioned three kinds of states can be unified.The processing detection of ground telescope principal reflection mirror and user mode ratio are easier to unified, but the space-based Space Optical System then can't realize, this is to work in weightlessness of space or microgravity environment because of spacing reflection mirror, and the mechanical environment on space and ground is different fully.As long as the catoptron of based optical systems can guarantee to detect and the holding state basically identical that uses can guarantee to finish the consistance of face shape in the face shape of processing and actual the use in a sense, Deformation control to minute surface itself does not need very strict, be consistent and just must guarantee that its technical difficulty is much larger than the ground based optical systems and will realize that ground is finished the reflecting mirror surface shape after the processing and entered space back shape by the accurate support power of unloading.
Summary of the invention
The objective of the invention is to change the existing limitation of supporting way of present large-aperture optical catoptron processing, provide a kind of and be used for space large caliber optical mirror processing and can have enough anchorage forces to bear tonnage, eliminate the support system of gravity deformation during detection substantially near the stress of space weightlessness.
To achieve the above object of the invention, the technical solution used in the present invention is: a kind of support system that is used for large-caliber space optical reflectors processing is provided, comprise the process support device of forming by process support base plate and rigid supporting rod, also comprise and detect bracing or strutting arrangement and throw-over gear; Described detection bracing or strutting arrangement comprises detection support frame and floating active supporting mechanism; Detect on the base plate of support frame floating active supporting mechanism is installed, have also on the base plate that rigid supporting rod is passed the hole and weight passes the hole; Detect bracing or strutting arrangement and supported by throw-over gear, be installed in the top of process support device, rigid supporting rod is passed the hole by rigid supporting rod and is added the supporting workpiece in man-hour at large-caliber space optical reflectors; Throw-over gear be fixedly mounted on the process support base plate above, when large-caliber space optical reflectors detects, will detect bracing or strutting arrangement and hold up, by the floating active supporting mechanism supporting workpiece.
Described detection bracing or strutting arrangement, the method that floating active supporting mechanism is installed on the base plate of its detection support frame comprises the steps:
(1) determine that three strong points carry out detection and location as the fixed support point to large-caliber space optical reflectors, these 3 uniform on same circumference, and anchorage force equates;
Power such as (2) position of tentatively definite other each unsteady strong point, the anchorage force of each unsteady strong point are are uniform, press ∑ F
n+ 3F
z=G, wherein: F
nBe the anchorage force of each unsteady strong point, F
zBe the anchorage force at three fixed support point places, G is the gravity that catoptron is subjected to, and obtains the initial boundary condition of catoptron to be processed;
(3) the initial boundary condition of the catoptron to be processed that will determine adopts finite element method, obtains the surface deformation result under the initial support state;
(4) by the identical method of the anchorage force that is distributed in same circumference upper support point, adjust the anchorage force of float number of support points, Support Position and each strong point, treat the initial boundary condition of machined mirrors and carry out the iteration optimization processing, obtain the final boundary condition of catoptron to be processed.
Described throw-over gear is three hydraulic jack and the control system that are installed under the base plate that detects support frame.
Described floating active supporting mechanism comprises the unsteady strong point, lever arm, weight and fine-tuning nut.
Compared with prior art, the present invention has following tangible advantage:
1, the present invention has adopted separate adjustable supporting way and supporting construction in detecting bracing or strutting arrangement, can and carry out the accurate adjustment of each strong point place anchorage force according to the own characteristic design proposal of the catoptron of required processing, the face shape error that catoptron causes because of gravity deformation can be adjusted to the space and use acceptable state, reduce the ground detection error greatly.
2, the present invention adopts two cover support subsystem to form, and can realize respectively detecting and support and process support, and can overlap conversion fast between subsystems two, has improved conversion efficiency and conversion security under the prerequisite that guarantees machining precision greatly.
3, adopt support system provided by the present invention, in processing and the transfer process that detects, the position of catoptron is only along detecting light path light axis direction generation translation, therefore detects light path and need not to adjust repeatedly and can reach the detection requirement, improves detection efficiency greatly.
Description of drawings
Fig. 1 is a kind of structural profile synoptic diagram that is used for the support system of large-caliber space optical reflectors processing that the embodiment of the invention provides;
Wherein, 1, process support base plate; 2, throw-over gear; 3, rigid supporting rod; 4, support bar passes the hole; 5, the unsteady strong point; 6, floating active supporting mechanism; 7, weight passes the hole; 8, detect support frame.
Embodiment
Below in conjunction with drawings and Examples the present invention is further described.
Embodiment one:
Referring to accompanying drawing 1, it is a kind of structural profile synoptic diagram that is used for the support system of large-caliber space optical reflectors processing that present embodiment provides.Can be seen that by Fig. 1 two cover support systems are adopted in catoptron workpiece sensing and processing respectively, rigid supporting rod 3 is installed on the process support base plate 1, forms the process support device, and this device adopts the passive support of rigidity, is used to the power of providing support and bears tonnage; Detect support frame 8 and floating active supporting mechanism 6, form and detect bracing or strutting arrangement, on the base plate of detection support frame 8 floating active supporting mechanism 6 is installed, three strong points wherein are the fixed support point, they are evenly distributed on same circumference, and anchorage force equates; Have also on the base plate that rigid supporting rod is passed hole 4 and weight passes hole 7; Detect bracing or strutting arrangement and adopt the Active support of floating,, be used to unload carrying force and eliminate distortion by the unsteady strong point 5 supporting workpieces; Two cover bracing or strutting arrangements are implemented under the situation that does not change the catoptron laying state quick conversion each other by throw-over gear, in the present embodiment, 3 hydraulic jack 2 are adopted in throw-over gear, be fixedly mounted on the process support base plate 1, simultaneously, to detect support frame 8 and fix on it and picking-up, and control its motion by control system, rigid supporting rod 3 is passed hole 4 by rigid supporting rod and is added the supporting workpiece in man-hour at large-caliber space optical reflectors; Throw-over gear will detect bracing or strutting arrangement and hold up when workpiece sensing, by floating active supporting mechanism 6 supporting workpieces.This support system can realize process support and the automatic conversion that detects holding state, has improved conversion efficiency greatly.
The design of process support considers that mainly each zone bears the ability of tonnage, and the strong point needs uniform and adopts rigid support, because gravity deformation is very little to the influence of processing itself, can give no thought to when design.The rigid supporting rod of process support device passed the support frame that detects bracing or strutting arrangement and the rigid support base plate is connected with support frame and form a whole set of support system by throw-over gear.
Detect bracing or strutting arrangement with three fixed support points as the catoptron anchor point, the separate power of providing support of other strong points, arrange and the application of force size of the strong point are carried out preanalysis by FEM (finite element) calculation, require to realize surface deformation amount PV≤λ/20 (λ is a 632.8nm He-Ne Lasers wavelength).Detect bracing or strutting arrangement and adopt floating active supporting mechanism, be the adjustable support of lever, comprise the float strong point 5, lever arm, weight and fine-tuning nut, guarantee that the anchorage force at each strong point place is all accurately adjustable.Hollow out design in support frame bottom surface detects and has on the base of support frame 8 that support bar passes hole 4 and weight passes hole 7, so that hang weight and allow the rigid supporting rod of process support to pass through.
Throw-over gear is the stable jacking system of a cover, realizes the mutual conversion of two cover bracing or strutting arrangements by the lifting detection subsystem.When catoptron detects, throw-over gear will detect bracing or strutting arrangement and rise, and by detecting the support of supporting mechanism realization to catoptron, this state can be eliminated the influence of gravity deformation down, obtains face shape testing result accurately; Add and to detect bracing or strutting arrangement man-hour and put down, accept the support of catoptron and enough rigidity are provided, can bear tonnage by the process support device.
Concrete implementation step is as follows:
1, process support Design of device, processing and assembling
(1) according to the mirror back surface lightweight structure with detect the strong point and arrange, the position of arranging of design rigid support point, owing to need not considering problem on deformation, thus supporting point position to arrange with uniform be principle.
(2) machine supporting baseplate and rigid supporting rod, and support bar is installed in the base plate relevant position.
2, detect design, processing and the assembling of bracing or strutting arrangement
(1) according to the back side lightweight structure of the spacing reflection mirror of required processing, anchorage force according to circle distribution primary design supporting point position and strong point place, choose three strong points that are uniform on the same circumference therein, their anchorage force equates, as fixed support point catoptron is positioned, other strong point is as the strong point that floats, the unsteady strong point also according to the mirror back surface lightweight structure according to annular spread on different circumference.The application of force principle at strong point place is: ∑ F
n+ 3F
z=G, wherein F
nBe the anchorage force of each unsteady strong point, F
zBe the anchorage force at three fixed support point places, G is the gravity that catoptron is subjected to.Under the starting condition each unsteady strong point anchorage force according to etc. power uniform, obtain the initial boundary condition (stressed and constraint) of catoptron to be processed.
(2) the initial boundary condition with above-mentioned catoptron adopts the finite element process software to carry out modeling, and carries out analyzing and processing, obtains the surface deformation result under the initial support state.According to the surface deformation situation,, support scheme is optimized by adjusting the anchorage force of number of support points, Support Position and each strong point.Three principles are followed in the optimization of support scheme:
A. the strong point anchorage force on the same circumference is identical;
B. the zone that deflection is big increases the quantity and the anchorage force of this zone strong point, and the zone that deflection is little reduces this regional number of support points and anchorage force;
C. the surface density of the catoptron after the lightweight is inhomogeneous, and the zone that surface density is big increases anchorage force, and the zone that surface density is little reduces anchorage force.
(3) according to mentioned above principle with optimize direction the support scheme of catoptron is carried out repeatedly computation optimization, till the deflection that support scheme can meet the demands.
(4) design detects supporting construction and support frame, and carries out both assemblings.
3, the safe interferometer that is installed in of process support base plate is detected tower bottom,, will detect the safe arrangement of support frame more again on the lifting jack elevating lever 120 ° of uniform being installed on the base plate of three hydraulic lifting lifting jack peaces.So far support system assembling is finished.According to The results, the anchorage force that detects each strong point place on the bracing or strutting arrangement is adjusted to designing requirement.
4, fall the detection bracing or strutting arrangement, catoptron is positioned on the process support rigid supporting rod according to set angle, can process catoptron under this state.Slowly evenly rise three hydraulic jack, make the equal contact reflex mirror of each strong point back side gradually the power of providing support know that catoptron breaks away from the process support device fully, this moment, catoptron entered detected state.Detect the quick conversion that bracing or strutting arrangement can realize detecting support and process support state by lifting.
Good effect is supported and has obtained in spacing reflection mirror processing and detection that this support system is used for about bore 1m.
The catoptron bore is 1.07m, micro crystal material, and the centre has light hole, and has carried out the lightweight processing, and the back side has processed 156 not lightweight holes of even depth altogether, and weight reduction rate reaches more than 50%.Concrete parameter sees Table 1.
Table 1 non-spherical reflector parameter
| Bore | Material | Density (T/mm 3) | Quality (kg) | Poisson ratio | Elastic modulus |
| ??1070mm | Crystallite | ??2.52e-9 | ??188.8 | ??0.4 | ??9e4Gpa |
Utilize mechanical drawing software (as CATIA) to set up the catoptron geometric model, and adopt Finite Element Method to handle (as software PATRAN), adopt ten node tetrahedron elements to carry out the grid discretization of model.Node surplus the life of model common property has 220,000, surplus in the of 130,000 a unit.
At this catoptron model, 30 supports of primary design, 42 supports, 48 are supported and 54 supports, and on different circumference, and the anchorage force of adjusting each strong point under the different supporting way carries out, and a large amount of finite element simulations calculates and contrast with each strong point planning.
According to 3 principles of determining planes, in finite element model, 3 that choose the circumference symmetry as the fixed constraint point, the degree of freedom of three directions of about beam steering mirror, and other strong point places unload catoptron gravity by applying static(al).Application of force principle is:
∑F
n+3F
z＝G
F wherein
nBe the anchorage force of each unsteady strong point, F
zBe the anchorage force at three fixed support point places, G is the gravity that catoptron is subjected to.
Respectively the supported design of above-mentioned four kinds of number of support points is carried out FEM (finite element) calculation and analysis under operating mode such as support such as the power of grade, application of force distribution and result of calculation are as follows:
1,30 supports in mirror bottom surface
The support distribution situation:
The strong point is distributed on 4 circumference,
6 places on 350,
6 places on 570,
6 places on 790,
12 places on 1,010, strong point application of force 61.4N floats.
Result of calculation:
Minute surface largest deformation 1.21e-4mm
The minimum deformation 6.03e-5mm of minute surface
Minute surface PV value 6.07e-5mm
2,42 supports in catoptron bottom surface
The support distribution situation:
The strong point is distributed on 5 circumference,
6 places on 430,
6 places on 600,
6 places on 815,
6 places on 850,
18 places on 1,010, strong point application of force 43.9N floats.
Result of calculation:
Minute surface largest deformation 6.98e-5mm
The minimum deformation 1.40e-5mm of minute surface
Minute surface PV value 5.58e-5mm
3,45 supports in catoptron bottom surface
The support distribution situation:
The strong point is distributed on 6 circumference,
6 places on 350,
3 places on 430
6 places on 600,
6 places on 815,
6 places on 850,
18 places on 1,010, strong point application of force 40.9N floats.
Result of calculation:
Minute surface largest deformation 3.91e-5mm
The minimum deformation 1.22e-5mm of minute surface
Minute surface PV value 2.69e-5mm
4,51 places, catoptron bottom surface support
The support distribution situation:
The strong point is distributed on 7 circumference,
6 places on 350,
6 places on 430,
6 places on 600,
6 places on 815,
6 places on 850,
3 places on 890,
18 places on 1,010, strong point application of force 36.1N floats.
Result of calculation:
Minute surface largest deformation 7.03e-5mm
The minimum deformation 9.38e-6mm of minute surface
Minute surface PV value 6.09e-5mm
Above-mentioned several operating modes are compared see Table 2:
Surface deformation under several support operating modes of table 2 relatively
| Number of support points | The minute surface maximum distortion | The minute surface minimal deformation | Minute surface PV value |
| ??30 | ??1.21e-4mm | ??6.03e-5mm | ??6.07e-5mm |
| ??42 | ??6.98e-5mm | ??1.40e-5mm | ??5.58e-5mm |
| ??45 | ??3.91e-5mm | ??1.22e-5mm | ??2.69e-5mm |
| ??51 | ??7.03e-5mm | ??9.38e-6mm | ??6.09e-5mm |
More as can be known, increase the strong point and help improving the influence of gravity by The above results minute surface face shape.But the anchorage force that applies owing to point that each is floated after being increased to some diminishes gradually, can not effectively unload the primary mirror self gravitation at regional area, big poor trend has appearred becoming in surface deformation amount on the contrary, therefore our combination that need choose optimized number of support points and anchorage force size is effectively improved face shape, meets the demands.
Through FEM (finite element) calculation optimization, finally take following support scheme:
After scheme is determined, according to catoptron self structure design support frame and strong point supporting mechanism.The supporting mechanism at strong point place adopts the lever weighting principle, can accurately adjust anchorage force on each strong point by adjusting weight quality and afterbody knob position.Support frame and strong point supporting mechanism are assembled into the detection bracing or strutting arrangement.
Bore 1.07m spacing reflection mirror detects in this processing and finishes final surperficial face shape in support system and repair throwing, surface figure accuracy reach RMS1/40 λ (=632.8nm).
Claims (4)
1. a support system that is used for large-caliber space optical reflectors processing comprises the process support device of being made up of process support base plate and rigid supporting rod, it is characterized in that: it also comprises detects bracing or strutting arrangement and throw-over gear (2); Described detection bracing or strutting arrangement comprises detection support frame (8) and floating active supporting mechanism (6); Detect on the base plate of support frame (8) floating active supporting mechanism (6) is installed, have also on the base plate that rigid supporting rod is passed hole (4) and weight passes hole (7); Detect bracing or strutting arrangement and supported by throw-over gear (2), be installed in the top of process support device, rigid supporting rod (3) is passed hole (4) by rigid supporting rod and is added the supporting workpiece in man-hour at large-caliber space optical reflectors; Throw-over gear (2) be fixedly mounted on process support base plate (1) above, when large-caliber space optical reflectors detects, will detect bracing or strutting arrangement and hold up, by floating active supporting mechanism (6) supporting workpiece.
2. a kind of support system that is used for large-caliber space optical reflectors processing according to claim 1 is characterized in that: described detection bracing or strutting arrangement, the method that floating active supporting mechanism is installed on the base plate of its detection support frame comprises the steps:
(1) determine that three strong points carry out detection and location as the fixed support point to large-caliber space optical reflectors, these 3 uniform on same circumference, and anchorage force equates;
Power such as (2) position of tentatively definite other each unsteady strong point, the anchorage force of each unsteady strong point are are uniform, press ∑ F
n+ 3F
z=G, wherein: F
nBe the anchorage force of each unsteady strong point, F
zBe the anchorage force at three fixed support point places, G is the gravity that catoptron is subjected to, and obtains the initial boundary condition of catoptron to be processed;
(3) the initial boundary condition of the catoptron to be processed that will determine adopts finite element method, obtains the surface deformation result under the initial support state;
(4) by the identical method of the anchorage force that is distributed in same circumference upper support point, adjust the anchorage force of float number of support points, Support Position and each strong point, treat the initial boundary condition of machined mirrors and carry out the iteration optimization processing, obtain the final boundary condition of catoptron to be processed.
3. a kind of support system that is used for large-caliber space optical reflectors processing according to claim 1 is characterized in that: described throw-over gear is three hydraulic jack and the control system that are installed under the base plate that detects support frame.
4. a kind of support system that is used for large-caliber space optical reflectors processing according to claim 1 and 2, it is characterized in that: described floating active supporting mechanism (6) comprises the unsteady strong point (5), lever arm, weight and fine-tuning nut.
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| CN103344209A (en) * | 2013-06-27 | 2013-10-09 | 北京空间机电研究所 | Method for testing surface shape of reflector in zero gravity state |
| CN104062740A (en) * | 2014-06-06 | 2014-09-24 | 苏州华徕光电仪器有限公司 | Back supporting structure of reflecting mirror |
| CN104062742A (en) * | 2014-06-09 | 2014-09-24 | 苏州华徕光电仪器有限公司 | Supporting structure for downwards inclined state of large-caliber reflector |
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| CN106646818A (en) * | 2017-02-28 | 2017-05-10 | 南京航空航天大学 | Semi-active reflecting mirror surface supporting and positioning system |
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| CN108227234A (en) * | 2017-12-28 | 2018-06-29 | 中国科学院长春光学精密机械与物理研究所 | A kind of single-degree-of-freedom adaptive equalization assemble mechanism |
| CN109798840A (en) * | 2019-02-26 | 2019-05-24 | 中国科学院光电技术研究所 | The detection device of lens face shape deflection is detected in stitching interferometer instrument |
| CN111077633A (en) * | 2020-01-06 | 2020-04-28 | 北京卫星环境工程研究所 | A flexible hoisting mechanism for a metal mirror and a surface shape maintaining mechanism |
| CN113322445A (en) * | 2021-06-01 | 2021-08-31 | 中国科学院长春光学精密机械与物理研究所 | Heavy-calibre basement coating film frock |
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| CN101236288A (en) * | 2007-11-30 | 2008-08-06 | 北京空间机电研究所 | Space Observation Optical Remote Sensor Extra Large Aperture Deployable Primary Mirror Precision Locking Device |
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| CN107765388A (en) * | 2017-11-28 | 2018-03-06 | 中国科学院西安光学精密机械研究所 | Antigravity fine adjustment actuating device for optical machine |
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| CN108227234A (en) * | 2017-12-28 | 2018-06-29 | 中国科学院长春光学精密机械与物理研究所 | A kind of single-degree-of-freedom adaptive equalization assemble mechanism |
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| CN109798840A (en) * | 2019-02-26 | 2019-05-24 | 中国科学院光电技术研究所 | The detection device of lens face shape deflection is detected in stitching interferometer instrument |
| US11268808B2 (en) | 2019-02-26 | 2022-03-08 | The Institute Of Optics And Electronics, The Chinese Academy Of Sciences | Detection device for detecting lens surface in stitching interferometer |
| CN111077633A (en) * | 2020-01-06 | 2020-04-28 | 北京卫星环境工程研究所 | A flexible hoisting mechanism for a metal mirror and a surface shape maintaining mechanism |
| CN113322445A (en) * | 2021-06-01 | 2021-08-31 | 中国科学院长春光学精密机械与物理研究所 | Heavy-calibre basement coating film frock |
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