CN106596057B - A surface shape inspection method for large-diameter mirror components - Google Patents
A surface shape inspection method for large-diameter mirror components Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
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- G01M11/0271—Testing optical properties by measuring geometrical properties or aberrations by using interferometric methods
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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Abstract
The present invention relates to a kind of face shape methods of inspection of large caliber reflecting mirror component, belong to technical field of optical precision measurement.Mirror in mirror assembly is face-up, with the face graphic data W of reflecting mirror in interferometer measurement mirror assembly0(m×n), the mirror in mirror assembly is face-down, with the face graphic data W of reflecting mirror in interferometer measurement mirror assembly180(i×j)；By W0(m×n)With step W180(i×j)The processing of carry out face graphic data matrix normalization, obtains F0(a×b)=Wa×b+G0(a×b)+Ka×bAnd F180(a×b)=Wa×b+G180(a×b)+Ka×b, by the face graphic data F after normalized0(a×b)And F180(a×b)Image superposition is carried out, gravity deformation is eliminated, obtains surface shape of reflector in zero gravity state data F=(F0(a×b)+F180(a×b))/2=Wa×b+Ka×bIf F and Wa×bDifference Ka×bRoot-mean-square value be not more than 0.003 λ (λ=632.8nm), it is believed that the assembly of mirror assembly meets the requirements, if F and Wa×bDifference Ka×bRoot-mean-square value be greater than 0.003 λ, it is believed that the assembly of mirror assembly is undesirable, need to re-start assembly to mirror assembly again.
Description
Technical field
The present invention relates to a kind of face shape methods of inspection of large caliber reflecting mirror component, belong to optical precision measurement technology neck
Whether domain, the assembly that this method is used to detect mirror assembly meet the requirements, and the heavy caliber refers to that aperture of a mirror is
Ф800mm-Ф1200mm。
Background technique
The discrete support construction of large-diameter optical part bipod has many advantages, such as that assembly is simple, and mechanic boundary condition is simple,
But disadvantage is exactly that optical module deforms larger, and the wavefront surface shape testing result of final optical module under gravity environment, it is past
It is that the multifactor interference such as the original face shape of optical element, gravity deformation, erection stress deformation are merged as a result, and due to weight toward containing
Power distortion inaccuracy is larger, and erection stress distortion inaccuracy can be submerged in gravity error, leads to not accurate judgement assembly precision.
Since optical sensor majority is to test and miss caused by gravity in ground adjustment, in-orbit use, ground adjustment
Difference can disappear automatically after in-orbit.Therefore, when the adjustment of optical sensor ground, it is important to which erection stress error and gravity are missed
Difference distinguishes, and strict control erection stress error, by the control of its influence degree within the scope of technical requirements.
Aiming at the problem that large caliber reflecting mirror gravity error is removed and tested, domestic scholars propose heavy caliber spacing reflection mirror
The method of the unloading in naked mirror stage carries out its gravity by special support construction to unload sanction, and strict control support force introduces anti-
Mirror deformation is penetrated, the requirement of reflecting mirror high-precision surface shape detection is met, specifically refers to the " big of 06 phase in 2011 " Application Optics "
The Research on Supporting Techniques of bore spacing reflection mirror high-precision surface shape detection " a literary or " China's Space science association sky in 2003
Between detect the 16th academic meeting paper collection of Professional Committee " in " light-duty high resolution camera Unloading Technology research " one
Text.It can be seen that these methods by its test method and be disadvantageous in that measuring accuracy is limited by unloading structure, gravity becomes
Shape cannot completely eliminate, and be not suitable for the zero-g face shape test of mirror assembly assembling stage.
Summary of the invention
Technology of the invention solves the problems, such as: having overcome the deficiencies of the prior art and provide a kind of large caliber reflecting mirror component
The face shape method of inspection, for the discrete support reflecting mirror adjustment test phase of heavy caliber the test of zero-g face shape provide it is reasonable
Engineering construction method, and test method does not include simulation analysis simply and calculates error, improves zero-g face shape measuring accuracy.
The technical solution of the invention is as follows:
A kind of face shape method of inspection of large caliber reflecting mirror component, it is characterised in that: mirror assembly includes reflecting mirror, six
A supporting leg and support plate, reflecting mirror to be tested are fixed together with six supporting legs by gluing, and six supporting legs and branch
Fagging is fixed together；
The device that the test method uses includes test tower, fold mirror, compensator and interferometer；The spherical surface issued from interferometer
It is reached in fold mirror after non-spherical wavefront light beam after the compensation that wavefront light beam or plane wave front light beam pass through compensator, light beam passes through folding
It is reached on reflecting mirror after the refraction of mirror, light beam is by forming interference fringe in backtracking to interferometer after reflecting mirror；
The test tower includes top braces platform and side plate, and reflecting mirror and six can be made by having on top braces platform
The through-hole that a supporting leg passes through and support plate cannot be made to pass through；Through-hole is had on one of side plate, is issued for interferometer
Light beam passes through；
When the mirror surface of reflecting mirror upward when, top braces platform is used to support fold mirror, compensator and interferometer, top braces
The cavity that platform, side plate and ground surround is for holding mirror assembly；Interferometer, compensator, fold mirror are placed on from right to left
It tests on the top braces platform of tower, mirror assembly is placed on the inside of test tower；
When the mirror surface of reflecting mirror downward when, reflecting mirror and six supporting legs in mirror assembly pass through top braces platform
On through-hole and limited on top braces platform by support plate；Fold mirror and compensator are placed on from left to right by top
In the cavity that support platform, side plate and ground surround, interferometer is placed on outside test tower, and the light beam that interferometer issues can
It is transferred on compensator by the through-hole on side plate；
The step of this method includes:
(1) mirror in mirror assembly is face-up, with the face shape of reflecting mirror in interferometer measurement mirror assembly
Data W0(m×n), and W0(m×n)=Wm×n+G0(m×n)+Km×n；Wherein, Wm×nOriginal face graphic data when for reflecting mirror part status,
Wm×nFor given value, G0(m×n)For gravity face graphic data, G0(m×n)For unknown-value, Km×nFor rigging error face graphic data, Km×nFor not
Know value；
(2) mirror in mirror assembly is face-down, with the face shape of reflecting mirror in interferometer measurement mirror assembly
Data W180(i×j), and W180(i×j)=Wi×j+G180(i×j)+Ki×j；Wherein, Wi×jOriginal face figurate number when for reflecting mirror part status
According to Wi×jFor given value, G180(i×j)For gravity face graphic data, G180(i×j)For unknown-value, Ki×jFor rigging error face graphic data,
Ki×jFor unknown-value；
(3) the face graphic data W for obtaining step (1)0(m×n)The face graphic data W obtained with step (2)180(i×j)Carry out face shape
Data matrix normalized, obtain obtaining after normalized mirror in mirror assembly it is face-up when face figurate number
According to F0(a×b)=Wa×b+G0(a×b)+Ka×bWith the face graphic data F of mirror in mirror assembly when face-down180(a×b)=Wa×b
+G180(a×b)+Ka×b, Wa×bOriginal face graphic data when for reflecting mirror part status, Wa×bFor given value；G0(a×b)To reflect microscope group
Gravity face graphic data when mirror in part is face-up, after normalized；G180(a×b)For the reflection in mirror assembly
Mirror mirror surface downward when, the gravity face graphic data after normalized；
(4) the face graphic data F after the normalized for obtaining step (3)0(a×b)And F180(a×b)Image superposition is carried out, is disappeared
Except gravity deformation, surface shape of reflector in zero gravity state data F=(F is obtained0(a×b)+F180(a×b))/2=Wa×b+Ka×bIf F and Wa×b
Difference Ka×bRoot-mean-square value be not more than 0.003 λ (λ=632.8nm), it is believed that the assembly of mirror assembly meets the requirements, such as
Fruit F and Wa×bDifference Ka×bRoot-mean-square value be greater than 0.003 λ, it is believed that the assembly of mirror assembly is undesirable, need again
Mirror assembly is assembled.
The advantages of the present invention over the prior art are that:
(1) the zero-g face shape test for the discrete support mirror assembly of heavy caliber provides more simple engineering construction
Method；
(2) support of Mechanics Simulation data is not needed, additional simulation calculation error will not be introduced.
(3) test result does not include gravity deformation error, provides objective technique base for erection stress error is accurately positioned
Plinth.
Detailed description of the invention
Fig. 1 is the flow diagram of the method for the present invention；
The structural schematic diagram of device when Fig. 2 faces upward for mirror；
Fig. 3 be mirror downwards when device structural schematic diagram；
Fig. 4 is emulation datagram.
Specific embodiment
A kind of face shape method of inspection of large caliber reflecting mirror component, mainly in large caliber reflecting mirror and bipod structure
Between carry out the test that injecting glue positioning is assembled into zero-g face shape after discrete support component, i.e., reflecting mirror to be tested and six branch
Leg is fixed together by gluing, and six supporting legs are fixed together with support plate, reflecting mirror, six supporting legs and
Support plate forms mirror assembly 5；The device that the test method uses includes test tower 4, fold mirror 3, compensator 2 and interferometer 1；
After non-spherical wavefront light beam after the compensation that spheric wave front light beam or plane wave front light beam that interferometer 1 issues pass through compensator 2
It reaches in fold mirror 3, is reached on reflecting mirror after the refraction that light beam passes through fold mirror 3, light beam passes through backtracking after reflecting mirror to interference
Interference fringe is formed on instrument 1；
The test tower 4 includes top braces platform and side plate, have on top braces platform can make reflecting mirror and
The through-hole that six supporting legs pass through and support plate cannot be made to pass through；Through-hole is had on one of side plate, is issued for interferometer 1
Light beam pass through；
When the mirror surface of reflecting mirror upward when, top braces platform is used to support fold mirror 3, compensator 2 and interferometer 1, top
The cavity that support platform, side plate and ground surround is for holding mirror assembly 5；Interferometer 1, compensator 2, fold mirror 3 are from dextrad
A left side is placed on the top braces platform of test tower 4, and mirror assembly 5 is placed on the inside of test tower 4；
When the mirror surface of reflecting mirror downward when, the reflecting mirror and six supporting legs in mirror assembly 5 are flat across top braces
Through-hole on platform is simultaneously limited on top braces platform by support plate；Fold mirror 3 and compensator 2 are placed on from left to right
In the cavity surrounded by top braces platform, side plate and ground, interferometer 1 is placed on 4 outside of test tower, and interferometer 1 issues
Light beam can be transferred on compensator 2 by the through-hole on side plate；
The step of this method includes:
(1) mirror in mirror assembly 5 is face-up, measures reflecting mirror in mirror assembly 5 with interferometer 1
Face graphic data W0(m×n), and W0(m×n)=Wm×n+G0(m×n)+Km×n；Wherein, Wm×nOriginal face figurate number when for reflecting mirror part status
According to Wm×nFor given value, G0(m×n)For gravity face graphic data, G0(m×n)For unknown-value, Km×nFor rigging error face graphic data, Km×n
For unknown-value；
(2) mirror in mirror assembly 5 is face-down, measures reflecting mirror in mirror assembly 5 with interferometer 1
Face graphic data W180(i×j), and W180(i×j)=Wi×j+G180(i×j)+Ki×j；Wherein, Wi×jOriginal face when for reflecting mirror part status
Graphic data, Wi×jFor given value, G180(i×j)For gravity face graphic data, G180(i×j)For unknown-value, Ki×jFor rigging error face figurate number
According to Ki×jFor unknown-value；
(3) the face graphic data W for obtaining step (1)0(m×n)The face graphic data W obtained with step (2)180(i×j)Carry out face shape
Data matrix normalized, obtain obtaining after normalized mirror in mirror assembly 5 it is face-up when face shape
Data F0(a×b)=Wa×b+G0(a×b)+Ka×bWith the face graphic data F of mirror in mirror assembly 5 when face-down180(a×b)=
Wa×b+G180(a×b)+Ka×b, Wa×bOriginal face graphic data when for reflecting mirror part status, Wa×bFor given value；G0(a×b)For reflection
Gravity face graphic data when mirror in mirror assembly 5 is face-up, after normalized；G180(a×b)For in mirror assembly 5
Mirror it is face-down when, the gravity face graphic data after normalized；
(4) the face graphic data F after the normalized for obtaining step (3)0(a×b)And F180(a×b)Image superposition is carried out, is disappeared
Except gravity deformation, surface shape of reflector in zero gravity state data F=(F is obtained0(a×b)+F180(a×b))/2=Wa×b+Ka×bIf F and Wa×b
Difference Ka×bRoot-mean-square value be not more than 0.003 λ (λ=632.8nm), it is believed that the assembly of mirror assembly 5 meets the requirements, such as
Fruit F and Wa×bDifference Ka×bRoot-mean-square value be greater than 0.003 λ, it is believed that the assembly of mirror assembly 5 is undesirable, need again
Mirror assembly 5 is assembled.
One kind can be realized heavy caliber discrete support mirror assembly gravity error removal test method, using heavy caliber from
Dissipating support mirror assembly mirror deformation under gravity field action is elastic deformation, and the deformation is straight up and perpendicular in mirror surface
The characteristics of numerical value is identical when straight test downwards, opposite in phase, passes through and surveys to the acquisition face shape of mirror surface straight up and straight down
Attempt picture, graph data matrix normalization then is carried out to the face graphic data of different matrix dimensions and center, and then be superimposed
The average image finally obtains the face shape under the discrete support reflecting mirror spare part gravity of heavy caliber.Such as Fig. 4 FEM Numerical Simulation institute
Show, Fig. 4 (a) is the emulation Deformation of surface figure figure that obtains straight up of mirror mirror, Fig. 4 (b) be mirror mirror straight down
Obtained emulation Deformation of surface figure figure, the case where not considering other external force and in the case where naked mirror surface-shaped, Fig. 4 (a) and Fig. 4 (b)
Emulate that Deformation of surface figure figure numerical value is identical, opposite in phase, it is superimposed to obtain Fig. 4 (c) zero-gravity simulation Deformation of surface figure figure.This method from
It is all accurate from the point of view of theoretical and emulation.
The process of the method for the present invention is as shown in Figure 1, test schematic is as shown in Figure 2 and Figure 3.The present invention keeps heavy caliber anti-
It is unchanged to penetrate the discrete support component state inside of mirror, and the deformation that reflecting mirror occurs, all within the scope of elastic deformation, having can be extensive
Renaturation and repeatability.180 ° of Turnover testing mirror assemblies, optical element wavefront difference caused by gravity is theoretically equal,
On the contrary, being superimposed by image unification in phase in place, so that it may effectively remove gravity influence, obtain surface shape of reflector in zero gravity state.
Specific method flow is as follows:
(1) mirror in mirror assembly 5 is face-up, measures reflecting mirror in mirror assembly 5 with interferometer 1
Face graphic data W0(m×n), and W0(m×n)=Wm×n+G0(m×n)+Km×n；Wherein, Wm×nOriginal face figurate number when for reflecting mirror part status
According to Wm×nFor given value, G0(m×n)For gravity face graphic data, G0(m×n)For unknown-value, Km×nFor rigging error face graphic data, Km×n
For unknown-value；
(2) mirror in mirror assembly 5 is face-down, measures reflecting mirror in mirror assembly 5 with interferometer 1
Face graphic data W180(i×j), and W180(i×j)=Wi×j+G180(i×j)+Ki×j；Wherein, Wi×jOriginal face when for reflecting mirror part status
Graphic data, Wi×jFor given value, G180(i×j)For gravity face graphic data, G180(i×j)For unknown-value, Ki×jFor rigging error face figurate number
According to Ki×jFor unknown-value；
(3) the face graphic data W for obtaining step (1)0(m×n)The face graphic data W obtained with step (2)180(i×j)Carry out face shape
Data matrix normalized, obtain obtaining after normalized mirror in mirror assembly 5 it is face-up when face shape
Data F0(a×b)=Wa×b+G0(a×b)+Ka×bWith the face graphic data F of mirror in mirror assembly 5 when face-down180(a×b)=
Wa×b+G180(a×b)+Ka×b, Wa×bOriginal face graphic data when for reflecting mirror part status, Wa×bFor given value；G0(a×b)For reflection
Gravity face graphic data when mirror in mirror assembly 5 is face-up, after normalized；G180(a×b)For in mirror assembly 5
Mirror it is face-down when, the gravity face graphic data after normalized；
(4) the face graphic data F after the normalized for obtaining step (3)0(a×b)And F180(a×b)Image superposition is carried out, is disappeared
Except gravity deformation, surface shape of reflector in zero gravity state data F=(F is obtained0(a×b)+F180(a×b))/2=Wa×b+Ka×bIf F and Wa×b
Difference Ka×bRoot-mean-square value be not more than 0.003 λ (λ=632.8nm), it is believed that the assembly of mirror assembly 5 meets the requirements, such as
Fruit F and Wa×bDifference Ka×bRoot-mean-square value be greater than 0.003 λ, it is believed that the assembly of mirror assembly 5 is undesirable, need again
Mirror assembly 5 is assembled.
One kind can be realized the discrete support mirror assembly gravity error removal test method of heavy caliber, it is characterized in that:
Using the discrete support mirror assembly of heavy caliber, mirror deformation is elastic deformation under gravity field action, and the deformation is in mirror surface
Straight up with the characteristics of numerical value is identical, opposite in phase when testing straight down, by mirror surface straight up and straight down
Acquisition face shape test image, graph data matrix normalizing then is carried out to the face graphic datas of different matrix dimensions and center
Change, and then superposed average image, finally obtains the face shape under the discrete support reflecting mirror spare part gravity of heavy caliber.The method of the present invention
Test philosophy is simple, engineering construction is strong, does not include simulation analysis and calculates error, measuring accuracy is higher；It is surveyed using objective
Principle and data processing method are tried, the requirement of space application reliability is met；It can be applied to large caliber reflecting mirror component adjustment rank
Section zero-g face shape test.
Present invention will be further explained below with reference to the attached drawings and examples.
Embodiment 1
A kind of face shape method of inspection of large caliber reflecting mirror component, mainly in large caliber reflecting mirror and bipod structure
Between carry out the test that injecting glue positioning is assembled into zero-g face shape after discrete support component, i.e., reflecting mirror to be tested and six branch
Leg is fixed together by gluing, and six supporting legs are fixed together with support plate, reflecting mirror, six supporting legs and
Support plate forms mirror assembly 5；The device that the test method uses includes test tower 4, fold mirror 3, compensator 2 and interferometer 1；
After non-spherical wavefront light beam after the compensation that spheric wave front light beam or plane wave front light beam that interferometer 1 issues pass through compensator 2
It reaches in fold mirror 3, is reached on reflecting mirror after the refraction that light beam passes through fold mirror 3, light beam passes through backtracking after reflecting mirror to interference
Interference fringe is formed on instrument 1；
The test tower 4 includes top braces platform and side plate, have on top braces platform can make reflecting mirror and
The through-hole that six supporting legs pass through and support plate cannot be made to pass through；Through-hole is had on one of side plate, is issued for interferometer 1
Light beam pass through；
As shown in Fig. 2, when the mirror surface of reflecting mirror upward when, top braces platform is used to support fold mirror 3, compensator 2 and dry
Interferometer 1, the cavity that top braces platform, side plate and ground surround is for holding mirror assembly 5；Interferometer 1, compensator 2,
Fold mirror 3 is placed on from right to left on the top braces platform of test tower 4, and mirror assembly 5 is placed on the inside of test tower 4；
As shown in figure 3, when the mirror surface of reflecting mirror downward when, reflecting mirror and six supporting legs in mirror assembly 5 pass through
Through-hole on top braces platform is simultaneously limited on top braces platform by support plate；Fold mirror 3 and compensator 2 from a left side to
The right side is placed in the cavity surrounded by top braces platform, side plate and ground, and interferometer 1 is placed on 4 outside of test tower, and interferes
The light beam that instrument 1 issues can be transferred on compensator 2 by the through-hole on side plate；
As shown in Figure 1, the step of this method, includes:
(1) mirror in mirror assembly 5 is face-up, measures reflecting mirror in mirror assembly 5 with interferometer 1
Face graphic data W0(m×n)(λ=632.8nm, the data are root mean square statistical value RMS to=0.118 λ, and all specific data are equal below
For RMS), and W0(m×n)=Wm×n+G0(m×n)+Km×n；Wherein, Wm×nOriginal face graphic data when for reflecting mirror part status, Wm×n
=0.023 λ, G0(m×n)For gravity face graphic data, G0(m×n)For unknown-value, Km×nFor rigging error face graphic data, Km×nIt is unknown
Value；
(2) mirror in mirror assembly 5 is face-down, measures reflecting mirror in mirror assembly 5 with interferometer 1
Face graphic data W180(i×j)=0.120 λ, and W180(i×j)=Wi×j+G180(i×j)+Ki×j；Wherein, Wi×jWhen for reflecting mirror part status
Original face graphic data, Wi×j=0.023 λ, G180(i×j)For gravity face graphic data, G180(i×j)For unknown-value, Ki×jIt is missed for assembly
Poor face graphic data, Ki×jFor unknown-value；
(3) the face graphic data W for obtaining step (1)0(m×n)The face graphic data W obtained with step (2)180(i×j)Carry out face shape
Data matrix normalized, obtain obtaining after normalized mirror in mirror assembly 5 it is face-up when face shape
Data F0(a×b)=Wa×b+G0(a×b)+Ka×b=W0(m×n)When mirror in=0.118 λ and mirror assembly 5 is face-down
Face graphic data F180(a×b)=Wa×b+G180(a×b)+Ka×b=W180(i×j)=0.120 λ, wherein Wa×bWhen for reflecting mirror part status
Original face graphic data, Wa×b=Wm×n=Wi×j=0.023 λ；G0(a×b)When face-up for the mirror in mirror assembly 5, return
One changes treated gravity face graphic data；G180(a×b)When face-down for the mirror in mirror assembly 5, normalized
Gravity face graphic data afterwards；
(4) the face graphic data F after the normalized for obtaining step (3)0(a×b)And F180(a×b)Image superposition is carried out, is disappeared
Except gravity deformation, surface shape of reflector in zero gravity state data F=(F is obtained0(a×b)+F180(a×b))/2=Wa×b+Ka×b=0.119 λ, most
K known to eventuallya×b=0.096 λ, judges F and W accordinglya×bDifference Ka×b0.003 λ of root-mean-square value > (λ=632.8nm), instead
The erection stress control errors for penetrating mirror assembly 5 are not in place, undesirable, need to ressemble to mirror assembly 5.
Claims (1)
1. a kind of face shape method of inspection of large caliber reflecting mirror component, it is characterised in that: mirror assembly (5) include reflecting mirror,
Six supporting legs and support plate, reflecting mirror to be tested are fixed together with six supporting legs by gluing, and six supporting legs with
Support plate is fixed together；
The device that the face shape method of inspection uses includes test tower (4), fold mirror (3), compensator (2) and interferometer (1)；From interference
It is reached on fold mirror (3) after the compensation that the spheric wave front light beam or plane wave front light beam that instrument (1) issues pass through compensator (2), light beam
By reaching on reflecting mirror after the refraction of fold mirror (3), light beam is by forming interference in backtracking to interferometer (1) after reflecting mirror
Striped；
The test tower (4) includes top braces platform and side plate, and reflecting mirror and six can be made by having on top braces platform
The through-hole that a supporting leg passes through and support plate cannot be made to pass through；Through-hole is had on one of side plate, is issued for interferometer (1)
Light beam pass through；
When the mirror surface of reflecting mirror upward when, top braces platform is used to support fold mirror (3), compensator (2) and interferometer (1), top
The cavity that portion's support platform, side plate and ground surround is for holding mirror assembly (5)；Interferometer (1), compensator (2), fold mirror
(3) it is placed on from right to left on the top braces platform of test tower (4), mirror assembly (5) is placed on the interior of test tower (4)
Portion；
When the mirror surface of reflecting mirror downward when, reflecting mirror and six supporting legs in mirror assembly (5) pass through top braces platform
On through-hole and limited on top braces platform by support plate；Fold mirror (3) and compensator (2) are placed on from left to right
In the cavity surrounded by top braces platform, side plate and ground, interferometer (1) is placed on outside test tower (4), and interferometer
(1) light beam issued can be transferred on compensator (2) by the through-hole on side plate；
The step of this method includes:
(1) mirror in mirror assembly (5) is face-up, with reflecting mirror in interferometer (1) measurement mirror assembly (5)
Face graphic data W0(m×n), and W0(m×n)=Wm×n+G0(m×n)+Km×n；Wherein, Wm×nOriginal face figurate number when for reflecting mirror part status
According to Wm×nFor given value, G0(m×n)For gravity face graphic data, G0(m×n)For unknown-value, Km×nFor rigging error face graphic data, Km×n
For unknown-value；
(2) mirror in mirror assembly (5) is face-down, with reflecting mirror in interferometer (1) measurement mirror assembly (5)
Face graphic data W180(i×j), and W180(i×j)=Wi×j+G180(i×j)+Ki×j；Wherein, Wi×jOriginal face when for reflecting mirror part status
Graphic data, Wi×jFor given value, G180(i×j)For gravity face graphic data, G180(i×j)For unknown-value, Ki×jFor rigging error face figurate number
According to Ki×jFor unknown-value；
(3) the face graphic data W for obtaining step (1)0(m×n)The face graphic data W obtained with step (2)180(i×j)Carry out face graphic data
Matrix normalization processing, obtain after normalized mirror in mirror assembly (5) it is face-up when face graphic data
F0(a×b)=Wa×b+G0(a×b)+Ka×bWith the face graphic data F of mirror in mirror assembly (5) when face-down180(a×b)=
Wa×b+G180(a×b)+Ka×b, Wa×bOriginal face graphic data when for reflecting mirror part status, Wa×bFor given value；G0(a×b)For reflection
Gravity face graphic data when mirror in mirror assembly (5) is face-up, after normalized；G180(a×b)For mirror assembly
(5) the gravity face graphic data when mirror in is face-down, after normalized；
(4) the face graphic data F after the normalized for obtaining step (3)0(a×b)And F180(a×b)Image superposition is carried out, weight is eliminated
Power deformation, obtains surface shape of reflector in zero gravity state data F=(F0(a×b)+F180(a×b))/2=Wa×b+Ka×bIf F and Wa×bDifference
Value Ka×bRoot-mean-square value be not more than 0.003 λ, λ=632.8nm, it is believed that the assembly of mirror assembly (5) meets the requirements, if F
With Wa×bDifference Ka×bRoot-mean-square value be greater than 0.003 λ, it is believed that the assembly of mirror assembly (5) is undesirable, need again
Mirror assembly (5) is assembled.
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