CN113322445B - Heavy-calibre basement coating film frock - Google Patents

Abstract

The invention provides a large-caliber substrate coating tool, which belongs to the technical field of coating tools.A groove with the same shape as a substrate is arranged in the middle of the tool, the side wall of the groove forms a limiting structure, a supporting structure is arranged on the bottom surface of the groove, the substrate is assembled in the groove, and a fixing structure is arranged at the edge of the tool; the supporting structure is consistent with the supporting structure of the optical element after the film coating is finished in work and is used for supporting the substrate in the film coating process; the limiting structure is used for limiting the translation of the substrate and keeping the substrate still; the fixing structure is used for fixing the tool on a sample table of a coating machine. The large-caliber substrate coating tool can provide a supporting condition close to a working environment, ensures the consistency of the surface shape of the substrate in the film deposition process and the final use condition, and effectively ensures the surface shape change of the substrate before and after coating.

Description

A large-diameter substrate coating tool

technical field

The invention belongs to the technical field of coating tooling, and particularly relates to a large-diameter base coating tooling.

Background technique

Optical films are used in various fields such as industrial production, scientific research, work and life. With the development of technology, more stringent index requirements are put forward for optical films in some occasions. For example, in the EUV field, due to the physical properties of the material's absorption of short wavelengths and the refractive index approaching 1, the control of EUV light can only be achieved by using a Bragg reflector composed of alternating stacks of high and low refractive index materials. The plating of this type of optical film not only requires sub-nanometer control accuracy in the longitudinal direction, but also requires a certain surface shape index in the transverse direction. Typical mirrors used in EUV lithography machines use aspheric or free-form surfaces, with a diameter of about 200-500mm, while the surface shape index is as high as 0.01nmRMS, and the surface shape deviation introduced to the film is even 0.005nmRMS, thus Strict design and control are required throughout the coating process.

The coating tool is a supporting and clamping mechanism for the coating substrate during the film deposition process. Common coating tooling includes various forms such as using a groove shape consistent with the shape of the substrate to limit the position, and using a pressing sheet to fix it. However, due to the small size of the substrate and the low index accuracy, the support of the coating tooling is generally realized by a plane that is close to the substrate, or a collar of the same size as the substrate. However, in the case of large-diameter substrates like the above-mentioned large-diameter substrates with extremely high requirements on surface shape accuracy, certain surface shape changes will occur due to the combined action of support and gravity during use. To deduct the effect of this change, the inspection process has used the exact same tooling configuration as the working conditions. When coating, the use of conventional flat support coating tooling is no longer suitable for the index requirements.

To sum up, a large-diameter substrate coating tool is very important for the ultra-high-precision coating process requirements.

SUMMARY OF THE INVENTION

In view of this, the purpose of the present invention is to provide a large-diameter substrate coating tool, provide supporting conditions similar to the working environment, ensure the consistency of the substrate surface shape during the film deposition process and the final use conditions, and achieve high-precision surface shape control, Reduce the effect of gravity on the basal surface shape.

In order to achieve the above purpose, the present invention provides a large-diameter base coating tool, in which a groove with the same shape as the base is opened in the middle of the tool, the side wall of the groove constitutes a limit structure, and the bottom surface of the groove is formed. A support structure is arranged, the base is assembled in the groove, and a fixing structure is arranged on the edge of the tooling;

The support structure is consistent with the support structure of the optical element after the coating is completed during operation, and is used to support the substrate during the coating process;

The limiting structure is used to limit the translation of the base to keep the base still;

The fixing structure is used for fixing the tool on the sample stage of the coating machine.

Further, the support structure adopts three-point support, and the support structure is three hemispherical protrusions, which are evenly distributed on the bottom surface of the groove.

Further, three supporting through holes are arranged on the bottom surface of the base, the hemispherical protrusions enter into the supporting through holes during assembly, and the diameter of the hemispherical protrusions is larger than that of the supporting through holes.

Further, the bottom of the base is a triangular prism, and the upper part is a cylindrical shape, and the bottom part of the triangular prism is located in the groove during assembly; the groove is a triangular groove, and the three hemispherical protrusions are respectively located at the vertices of the triangle. Location.

Further, the tooling is cylindrical, and the fixing structure is a plurality of installation through holes, which are evenly distributed on the edge of the cylindrical tooling, and the fixing with the sample stage of the coating machine is realized by the installation through holes and screws.

Further, the number of mounting through holes is three.

Further, the material of the tooling is aluminum, or magnesium-aluminum alloy.

The large-diameter substrate coating tool of the invention can provide support conditions similar to the working environment, ensure the consistency of the film deposition process and the final use condition of the substrate surface, and greatly improve the coating accuracy.

Description of drawings

In order to explain the embodiments of the present invention or the technical solutions in the prior art more clearly, the following briefly introduces the accompanying drawings that need to be used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only These are some embodiments of the present invention, and for those of ordinary skill in the art, other drawings can also be obtained from these drawings without creative effort.

Fig. 1 is the structural representation of the large-diameter base coating tool of the present invention;

Fig. 2 is the assembly structure schematic diagram of the large-diameter base coating tool and base of the present invention;

Figure 3 is an ANSYS simulation diagram of the surface shape of a large-diameter substrate under the action of plane support and gravity;

Figure 4 is an ANSYS simulation diagram of the surface shape of a large-diameter substrate under the action of three-point support and gravity;

Description of reference numerals: 1-support structure; 2-limiting structure; 3-fixed structure; 4-base.

Detailed ways

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

In the coating process, when the size of the substrate is small and the index accuracy is not high, the support of the coating tool is generally realized by a plane that is close to the substrate, or a collar of the same size as the substrate. However, in the case of large-diameter substrates and extremely high surface shape accuracy requirements, the substrate will have certain surface shape changes during use due to the combined action of support and gravity.

As shown in Figures 3 and 4, they are the ANSYS simulation diagram of the surface shape of the large-diameter substrate under the action of plane support and gravity, and the ANSYS simulation diagram of the surface shape of the large-diameter substrate under the action of three-point support and gravity. In the simulation process, the tooling is circular as shown in the figure, with a diameter of 250mm and stainless steel; the mirror is a triangle with a side length of 150mm; . The through holes at the three corners of the mirror are in contact with the corresponding support structures, so that the force points of the mirror in the plane can be approximately regarded as three points. For traditional tooling, the mirrored lower surface is in direct contact with the metal plane. Through the finite element method, the deformation of the mirror surface under the influence of gravity under the two support conditions is analyzed.

As can be seen from Figures 3 and 4, the base surface shape under three-point support is significantly different from that using conventional planar support. In the case of high-precision coating, the use of coating tooling that is consistent with or similar to the working conditions can better control the surface shape.

The present invention provides a large-diameter substrate coating tool. As shown in Figures 1 and 2, a groove with the same shape as the substrate 4 is formed in the middle of the tool, and the sidewall of the groove constitutes a limiting structure 2. The bottom surface of the groove is provided with a support structure 1, the base 4 is assembled in the groove, and a fixing structure 3 is provided on the edge of the tooling;

The support structure 1 is consistent with the support structure of the optical element after the coating is completed during operation, and is used to support the substrate during the coating process;

The limiting structure 2 is used to limit the translation of the base 4 to keep the base stationary;

The fixing structure 3 is used to fix the tool on the sample stage of the coating machine.

Wherein, the support structure 1 may adopt three-point support, and the support structure 1 is three hemispherical protrusions, which are evenly distributed on the bottom surface of the groove. The bottom surface of the base 4 is matched with three supporting through holes, the hemispherical protrusions enter into the supporting through holes during assembly, and the diameter of the hemispherical protrusions is larger than that of the supporting through holes. Of course, the support structure 1 can also adopt multi-point support, and at this time, the number of supporting through holes formed on the base 4 is also changed synchronously.

In some embodiments, the bottom of the base 4 is in the shape of a triangular prism, and the upper part is in a cylindrical shape, and the bottom part of the triangular prism is located in the groove during assembly; the groove is a triangular groove, and the three hemispherical protrusions are respectively at the vertex of the triangle. The tooling is cylindrical, and the fixing structure 3 is a plurality of installation through holes, which are evenly distributed on the edge of the cylindrical tooling. The fixing to the sample stage of the coating machine is realized through the installation through holes and screws. In this embodiment, The number of mounting through holes is three, and in other embodiments, it can be designed to be more than one. Of course, the base 4 can also be in other shapes, and the design of the groove shape is also matched at this time.

The tooling in the present invention is made of materials with vacuum compatibility such as aluminum, magnesium-aluminum alloy, etc., and it is necessary to ensure that the surface is clean during use, and there is no pollution from the vacuum outgassing material.

The large-diameter substrate coating tool of the invention can provide support conditions similar to the working environment, ensure the consistency of the film deposition process and the final use condition of the substrate surface, and greatly improve the coating accuracy.

Of course, the present invention can also have various transformations and modifications, and is not limited to the specific structures of the above-mentioned embodiments. In a word, the protection scope of the present invention should include those changes or substitutions and modifications that are obvious to those of ordinary skill in the art.

Claims (2)

1. a large-diameter mirror base coating tooling is characterized in that, in the middle of the described tooling, a groove consistent with the shape of the mirror base is opened, and the sidewall of the groove constitutes a limit structure, and in the groove The bottom surface of the tool is provided with a support structure, the mirror base is assembled in the groove, and a fixed structure is provided on the edge of the tooling; The support structure is consistent with the support structure of the optical element after the coating is completed during operation, and is used to support the mirror substrate during the coating process; The limiting structure is used to limit the translation of the mirror base, so that the mirror base remains stationary; The fixing structure is used to fix the tooling on the sample stage of the coating machine; The support structure adopts three-point support, and the support structure is three hemispherical protrusions, which are evenly distributed on the bottom surface of the groove; The bottom surface of the reflector base is provided with 3 supporting through holes, the hemispherical protrusions enter into the supporting through holes during assembly, and the diameter of the hemispherical protrusions is larger than that of the supporting through holes; The tooling is cylindrical, and the fixing structure is a plurality of installation through holes, which are evenly distributed on the edge of the cylindrical tooling. The installation through holes and screws are used to realize the fixation with the sample stage of the coating machine; the number of installation through holes is 3 indivual. 2. large-diameter mirror base coating tooling according to claim 1 is characterized in that, the bottom of the mirror base is a triangular prism shape, and the upper part is a cylindrical shape, and the part at the bottom of the triangular prism is located in the groove during assembly; The groove is a triangular groove, and the three hemispherical protrusions are respectively located at the vertex positions of the triangle.

Images