CN101632172B - 半导体元件的冷却构造 - Google Patents
半导体元件的冷却构造 Download PDFInfo
- Publication number
- CN101632172B CN101632172B CN2008800038764A CN200880003876A CN101632172B CN 101632172 B CN101632172 B CN 101632172B CN 2008800038764 A CN2008800038764 A CN 2008800038764A CN 200880003876 A CN200880003876 A CN 200880003876A CN 101632172 B CN101632172 B CN 101632172B
- Authority
- CN
- China
- Prior art keywords
- semiconductor element
- heat storage
- heat
- cooling structure
- storage member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/345—Arrangements for heating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/42—Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
- H01L23/427—Cooling by change of state, e.g. use of heat pipes
- H01L23/4275—Cooling by change of state, e.g. use of heat pipes by melting or evaporation of solids
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L24/36—Structure, shape, material or disposition of the strap connectors prior to the connecting process
- H01L24/37—Structure, shape, material or disposition of the strap connectors prior to the connecting process of an individual strap connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L24/39—Structure, shape, material or disposition of the strap connectors after the connecting process
- H01L24/40—Structure, shape, material or disposition of the strap connectors after the connecting process of an individual strap connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/84—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a strap connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/2612—Auxiliary members for layer connectors, e.g. spacers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L2224/36—Structure, shape, material or disposition of the strap connectors prior to the connecting process
- H01L2224/37—Structure, shape, material or disposition of the strap connectors prior to the connecting process of an individual strap connector
- H01L2224/37001—Core members of the connector
- H01L2224/37099—Material
- H01L2224/371—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/37138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/37147—Copper [Cu] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L2224/36—Structure, shape, material or disposition of the strap connectors prior to the connecting process
- H01L2224/37—Structure, shape, material or disposition of the strap connectors prior to the connecting process of an individual strap connector
- H01L2224/3754—Coating
- H01L2224/37599—Material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L2224/39—Structure, shape, material or disposition of the strap connectors after the connecting process
- H01L2224/40—Structure, shape, material or disposition of the strap connectors after the connecting process of an individual strap connector
- H01L2224/401—Disposition
- H01L2224/40135—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/40137—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L2224/39—Structure, shape, material or disposition of the strap connectors after the connecting process
- H01L2224/40—Structure, shape, material or disposition of the strap connectors after the connecting process of an individual strap connector
- H01L2224/401—Disposition
- H01L2224/40135—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/40137—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate
- H01L2224/40139—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate with an intermediate bond, e.g. continuous strap daisy chain
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L2224/39—Structure, shape, material or disposition of the strap connectors after the connecting process
- H01L2224/40—Structure, shape, material or disposition of the strap connectors after the connecting process of an individual strap connector
- H01L2224/404—Connecting portions
- H01L2224/40475—Connecting portions connected to auxiliary connecting means on the bonding areas
- H01L2224/40491—Connecting portions connected to auxiliary connecting means on the bonding areas being an additional member attached to the bonding area through an adhesive or solder, e.g. buffer pad
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/84—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a strap connector
- H01L2224/848—Bonding techniques
- H01L2224/84801—Soldering or alloying
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/84—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a strap connector
- H01L2224/848—Bonding techniques
- H01L2224/84801—Soldering or alloying
- H01L2224/84815—Reflow soldering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
- H01L23/473—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
Abstract
一种半导体元件的冷却构造,包括:半导体元件(1);安装半导体元件(1)的散热器(2);以及蓄热部件(3),以相对于半导体元件(1)位于与散热器(2)相反的一侧的方式安装在半导体元件(1)上,并且包括壳体(31)和潜热蓄热材料(32)。
Description
技术领域
本发明涉及半导体元件的冷却构造,特别涉及使用了潜热蓄热材料的半导体元件的冷却构造。
背景技术
以往公知有使用了潜热蓄热材料的冷却构造,该潜热蓄热材料利用伴随着物质的相变而产生的热量吸收来进行蓄热。
例如,在日本专利文献特开2006-240501号公报(专利文献1)中记载了以下技术:在混合动力车辆用的冷却系统中,将包含以马达和逆变器的冷却目标温度进行相变的潜热蓄热材料的粒子和包含以包括发动机在内的内燃机系统的冷却目标温度进行相变的潜热蓄热材料的粒子混入到冷却剂中。
另外,在日本专利文献特开2000-116505号公报(专利文献2)中记载了将潜热蓄热材料用于烹调用具的发热元件的冷却的技术。
另外,在日本专利文献特开平6-11286号公报(专利文献3)中记载了以下技术:通过蓄热材料吸收逆变器的热量,并且将该热量利用于暖气设备。
另外,在日本专利文献特开平9-223576号公报(专利文献4)中记载了通过注入到散热片中的蓄热材料来吸收烧饭机的主电路发出的热量的技术。
另外,在日本专利文献特开昭61-7378号公报(专利文献5)中记载了潜热蓄热材料的具体示例。
在将半导体元件安装在散热器上的冷却构造中,稳定状态下的冷却是通过散热器来进行的。然而,可能会出现半导体元件的发热量在短时间内急剧增大的情况,如果想要仅利用散热器来吸收这么大的发热量,则散热器的体积增大、热阻增大,因此会产生上述稳定状态下的冷却性能降低的问题。因此,需要一种能够在抑制散热器的体积增大的同时在短时间内吸收增大的发热量的构造。
另一方面,潜热蓄热材料主要是利用伴随着物质的相变而产生的对热量的吸收,例如在固相的蓄热材料熔解而变成了液相的情况下,该蓄热材料在再次恢复为固相之前无法通过潜热来吸收热量。因此,与散热器相比,潜热蓄热材料具有不适合稳定状态下的冷却的倾向。
在专利文献1~5中,没有公开能够充分地解决上述问题的构成方式。例如,在专利文献1中,只在冷却剂中混入了潜热蓄热材料,而并没有分别设置吸收稳定状态下的发热量的部分和吸收在短时间内剧增的发热量的部分。
发明内容
本发明的目的在于提供一种能够抑制散热器的体积增大、并且即使在半导体元件的发热量在短时间内急剧增大了的情况下也能够吸收该发热量的半导体元件的冷却构造。
本发明的半导体元件的冷却构造包括:半导体元件;安装所述半导体元件的散热器;以及蓄热部件,以相对于所述半导体元件位于与散热器相反的一侧的方式安装在所述半导体元件上,并且包括潜热蓄热材料。
根据上述构成方式,能够通过散热器来进行半导体元件的稳定状态下的冷却,并且在该半导体元件的发热量在短时间内急剧增大了的情况下,能够通过潜热蓄热材料的相变来吸收该热量。结果,能够在抑制散热器的体积增大的同时提高半导体元件的冷却性能。
优选的是,在上述半导体元件的冷却构造中,所述蓄热部件包括导电性的外壳体和贮存在该外壳体内的潜热蓄热材料,所述半导体元件和其它的部件经由所述外壳体电连接。
通过这样的构造,能够利用蓄热部件的外壳体来实现与半导体元件的电连接。因此,不需要避开蓄热部件来进行布线,从而能够使蓄热部件的面积较大,因此能够进一步提高半导体元件的冷却性能。
优选的是,所述蓄热部件经由热传导率比空气高的传热部件与其他的部件连接。
通过这样的构造,能够经由传热部件来促进来自蓄热部件的散热。结果,能够快速地进行蓄热部件的冷却,还能够应对连续短时间的高负载。
优选的是,在上述的半导体元件的冷却构造中,在固定在所述半导体元件上的所述蓄热部件上形成有能够缓和在所述蓄热部件上产生的应力的应力吸收部。
通过这样的构造,能够抑制伴随着潜热蓄热材料的相变而产生的体积变化或由于蓄热部件和半导体元件的线膨胀系数的差而产生的应力的增大。
作为一个示例,在上述的半导体元件的冷却构造中,所述半导体元件包括在对驱动车辆的旋转电机进行控制的控制装置中。
根据本发明,如上所述,能够抑制散热器的体积增大,并且即使在半导体的发热量在短时间内急剧增大了的情况下也能够吸收该发热。
也可以适当地组合上述构成方式中的两个以上的构成方式。
附图说明
图1是表示应用了本发明的一个实施方式中的半导体元件的冷却构造的PCU的主要部件的构成的电路图;
图2是表示本发明的一个实施方式中的半导体元件的冷却构造的剖面图;
图3是用于说明潜热蓄热材料的温度与它吸收的热量之间的关系的曲线图;
图4是表示本发明的一个实施方式中的半导体元件的冷却构造的变形例的剖面图;
图5是表示本发明的一个实施方式中的半导体元件的冷却构造的其他变形例的剖面图;
图6是表示构成本发明的一个实施方式中的半导体元件的冷却构造的散热器的立体图;
图7是表示将半导体元件安装在图6所示的散热器上的状态的一个示例的上表面图。
具体实施方式
下面,对本发明的实施方式进行说明。对于相同或相当的部分标注相同的参照符号,有时不对其重复进行说明。
在以下说明的实施方式中,在涉及个数、量等的情况下,除了有特殊记载的情况之外,本发明的范围并不一定局限于该个数、量等。另外,在以下的实施方式中,各个构成要素除了有特殊记载的情况之外并不一定是本发明所必需的。另外,以下在存在多个实施方式的情况下,除了有特殊记载的情况之外,最初就确定了可以对各个实施方式的构成进行适当的组合。
图1是表示应用了本发明的一个实施方式中的半导体元件的冷却构造的PCU的主要部件的构成的电路图。图1所示的PCU100是“驱动车辆的旋转电机的控制装置”。
参照图1,PCU100包含转换器110、逆变器120和130、控制装置140、电容器C1和C2。转换器110连接在蓄电池B和逆变器120、130之间,逆变器120、130分别与电动发电机MG1、MG2连接。
转换器110包括:功率晶体管Q1和Q2、二极管D1和D2、以及电抗器L。功率晶体管Q1、Q2串联连接,在基极接收来自控制装置140的控制信号。二极管D1、D2以使电流分别从功率晶体管Q1、Q2的发射极侧流向集电极侧的方式分别连接在功率晶体管Q1、Q2的发射极-集电极之间。电抗器L的一端连接在与蓄电池B的正极连接的电源线PL1上,另一端连接在功率晶体管Q1与Q2的连接点上。
该转换器110利用电抗器L对从蓄电池B接收的直流电压进行升压,将该升压后的升压电压提供给电源线PL2。另外,转换器110对从逆变器120、130接收的直流电压进行降压并对蓄电池B进行充电。
逆变器120、130分别包括:U相桥臂121U和131U、V相桥臂121V和131V、W相桥臂121W和131W。U相桥臂121U、V相桥臂121V、以及W相桥臂121W并联连接在节点N1和节点N2之间。同样地,U相桥臂131U、V相桥臂131V、以及W相桥臂131W并联连接在节点N1和节点N2之间。
U相桥臂121U包括串联连接的两个功率晶体管Q3、Q4。同样地,U相桥臂131U、V相桥臂121V和131V、以及W相桥臂121W和131W分别包括串联连接的两个功率晶体管Q5~Q14。另外,在各功率晶体管Q3~Q14的集电极-发射极之间分别连接有使电流从发射极侧流向集电极侧的二极管D3~D14。
逆变器120、130的各相桥臂的中间点分别与电动发电机MG1、MG2的各相绕组的各相端连接。并且,在电动发电机MG1、MG2中,U、V、W相的三个绕组的一端共同连接在中点上。
电容器C1连接在电源线PL1、PL3之间,对电源线PL1的电压电平进行平滑。另外,电容器C2连接在电源线PL2、PL3之间,对电源线PL2的电压电平进行平滑。
逆变器120、130基于来自控制装置140的驱动信号将来自电容器C2的直流电压转换成交流电压来驱动电动发电机MG1、MG2。
控制装置140基于马达扭矩指令值、电动发电机MG1和MG2的各相电流值、以及逆变器120和130的输入电压来计算电动发电机MG1、MG2的各相绕组电压,基于该计算结果生成用于使功率晶体管Q3~Q14导通/截止的PWM(Pulse Width Modulation,脉宽调制)信号,并输出给逆变器120、130。
另外,控制装置140基于上述马达扭矩指令值和马达转速来计算用于使逆变器120、130的输入电压最合适的功率晶体管Q1、Q2的占空比,基于该计算结果生成用于使功率晶体管Q1、Q2导通/截止的PWM信号,并输出给转换器110。
并且,控制装置140为了将由电动发电机MG1、MG2发出的交流电力转换成直流电力而对蓄电池B进行充电,对转换器110和逆变器120、130中的功率晶体管Q1~Q14的切换动作进行控制。
在PCU100进行动作时,构成转换器110和逆变器120、130的功率晶体管Q1~Q14、以及二极管D1~D14发热。因此,需要设置冷却构造,该冷却构造用于促进这些半导体元件的冷却。
图2是表示本实施方式中的半导体元件的冷却构造的剖面图。参照图2,本实施方式的半导体元件的冷却构造包括:半导体元件1、安装半导体元件1的散热器2。
半导体元件1例如是图1中的功率晶体管Q1~Q14和二极管D1~D14。半导体元件1经由安装构造1A安装在散热器2上。散热器2例如由铜、铝等热传导率比较高的金属构成。另外,在散热器2内形成有冷却剂流路20。通过使冷却剂在冷却剂流路20内流动来进行半导体元件1的稳定状态下的冷却。
在半导体元件1的与散热器2相反的一侧的面(以下称为“上表面”)上固定有蓄热部件3。蓄热部件3包含壳体31、壳体31内的潜热蓄热材料32。壳体31例如可以由铜等热传导率比较高、导电性良好的金属来构成。另外,构成潜热蓄热材料32的原材料可以适当地变更,例如可以采用Sn/Zn(熔点:199℃)或溶解盐NaOH-KOH(熔点:170℃)等。另外,蓄热部件3的厚度例如为4mm~5mm左右。
图3是用于说明潜热蓄热材料32的温度与它吸收的热量之间的关系的曲线图。如图3所示,随着潜热蓄热材料32吸收热量,其温度上升。然而,当潜热蓄热材料32的相发生变化(这里是从固相变成液相)时(即,潜热蓄热材料32熔解时),由于潜热蓄热材料32的熔解热,形成为保持恒定的温度来进行吸热(热量:ΔQ)的状态。在本实施方式中,将潜热蓄热材料32的熔点T设定得比半导体元件1的稳定时的温度高、并且比半导体元件1不稳定升温时的冷却目标温度低。通过进行上述设定,当稳定时,能够主要通过散热器2来进行半导体元件1的冷却,当不稳定升温时,能够在利用潜热蓄热材料32的溶解热将蓄热部件3的温度保持为恒定值的情况下吸收半导体元件1发出的热量。结果,能够降低半导体元件1的升温水平。
接下来,利用图4和图5,对上述冷却构造的变形例进行说明。
在图4所示的变形例中,在蓄热部件3的壳体31的表面上形成有凹部(dimple)33。当半导体元件1发热时,可能会出现由于蓄热部件3和半导体元件1的线膨胀系数的差而在蓄热部件3上产生应力的情况。另外,当潜热蓄热材料32发生相变时,可能会出现由于其体积发生变化而在蓄热部件3上产生应力的情况。与此相对,通过如上所述地设置凹部33,能够缓和在蓄热部件3上产生的应力。
另外,在如图4所示的变形例中,通过例如由铜等热传导率比较高的金属构成的传热片4来连接蓄热部件3和散热器2。通过采用上述构造,能够经由传热片4将蓄热部件3的热量释放到散热器2中,因此能够快速地进行蓄热部件3的冷却,并且能够应对连续的短时间的高负载。
传热片4不限于金属制品,可以用热传导率比空气高的任意的原材料来构成传热片4。
在图5所示的变形例中,经由导电性的壳体31和传热片4将半导体元件1和汇流条(バスバ一)5电连接。在图5所示的示例中,设置有两个半导体元件1,在一个半导体元件1的上表面设置有蓄热部件3A,在另一个半导体元件1的上表面设置有蓄热部件3B。并且,蓄热部件3A、蓄热部件3B和汇流条5通过传热片4连接。这里,两个半导体元件1例如是包括在U相桥臂121U内的功率晶体管Q3和二极管D3。根据图5所示的构成,当利用传热片4电连接汇流条5和半导体元件1时,在半导体元件1的上表面上不需要避开蓄热部件3来布线,能够增大蓄热部件3的面积,因此能够进一步提高半导体元件1的冷却性能。
图6是表示构成上述冷却构造的散热器的立体图。另外,图7是表示将半导体元件安装在图6所示的散热器上的状态的一个示例的上表面图。参照图6、图7,散热器2具有安装半导体元件1的安装面2A。如图7所示,包括在转换器110和逆变器120、130中的半导体元件1(功率晶体管Q1~Q14和二极管D1~D14)被安装在安装面2A上。散热器2具有入口部6和出口部7。在冷却器(radiator,没有图示)中被冷却了的冷却剂从入口部6流入到散热器(heat sink)2内,并流过在散热器2内形成的冷却剂流路20。流过冷却剂流路20的冷却剂从出口部7流出,被引导到冷却器中,并被再一次冷却。这样,促进了半导体元件1的冷却。
概括上述内容如下。即,本实施方式中的半导体元件的冷却构造包括:半导体元件1、安装半导体元件1的散热器2、以及蓄热部件3,其中所述蓄热部件3以相对于半导体元件1位于与散热器2相反的一侧的方式安装在半导体元件1上,并且包括作为“外壳体”的壳体31和潜热蓄热材料32。
在图4的变形例中,蓄热部件3经由作为“传热部件”的传热片4与作为“其他部件”的散热器2连接。
另外,在图4的变形例中,在蓄热部件3上形成有作为“应力吸收部”的凹部33,该凹部33能够缓和在固定在半导体元件1上的蓄热部件3上产生的应力。
在图5的变形例中,经由导电性的壳体31电连接半导体元件1和作为“其他部件”的汇流条5。
根据本实施方式中的半导体元件的冷却构造,如上所述,能够通过散热器2来进行半导体元件1的稳定状态下的冷却,并且在该半导体元件1的发热量在短时间内急剧增大了的情况下,能够通过蓄热部件3的相变来吸收该发热量。因此,能够抑制散热器2过度大型化,同时能够提高半导体元件1的冷却性能。
以上对本发明的实施方式进行了说明,但是应认为此次公开的实施方式在所有方面均仅为示例而不具有限制性。本发明的范围由权利要求表示,并且包括与权利要求的范围相等同的内容和范围内的所有变更。
产业上的可利用性
本发明能够应用于例如使用了潜热蓄热材料的半导体元件的冷却构造。
Claims (5)
1.一种半导体元件的冷却构造,包括:
半导体元件(1);
安装所述半导体元件(1)的散热器(2);
蓄热部件(3),以相对于所述半导体元件(1)位于与所述散热器(2)相反的一侧的方式安装在所述半导体元件(1)上,并且包括潜热蓄热材料(32);以及
传热部件(4),将所述蓄热部件(3)与所述散热器(2)或者设置在所述散热器(2)上的汇流条(5)连接,所述传热部件(4)的热传导率比空气的热传导率高。
2.如权利要求1所述的半导体元件的冷却构造,其中,
所述蓄热部件(3)包括导电性的外壳体(31)和贮存在该外壳体(31)内的潜热蓄热材料(32),
所述半导体元件(1)和其它的部件(5)经由所述外壳体(31)电连接。
3.如权利要求1所述的半导体元件的冷却构造,其中,
在固定在所述半导体元件(1)上的所述蓄热部件(3)上形成有能够缓和在所述蓄热部件(3)上产生的应力的应力吸收部(33)。
4.如权利要求1所述的半导体元件的冷却构造,其中,
所述半导体元件(1)包括在对驱动车辆的旋转电机(MG1、MG2)进行控制的控制装置(100)中。
5.如权利要求1所述的半导体元件的冷却构造,其中,
在所述半导体元件(1)的整个上表面上设置了所述蓄热部件(3)。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP028773/2007 | 2007-02-08 | ||
JP2007028773A JP4694514B2 (ja) | 2007-02-08 | 2007-02-08 | 半導体素子の冷却構造 |
PCT/JP2008/052094 WO2008096839A1 (ja) | 2007-02-08 | 2008-02-04 | 半導体素子の冷却構造 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101632172A CN101632172A (zh) | 2010-01-20 |
CN101632172B true CN101632172B (zh) | 2011-06-01 |
Family
ID=39681740
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2008800038764A Expired - Fee Related CN101632172B (zh) | 2007-02-08 | 2008-02-04 | 半导体元件的冷却构造 |
Country Status (5)
Country | Link |
---|---|
US (1) | US8919424B2 (zh) |
JP (1) | JP4694514B2 (zh) |
CN (1) | CN101632172B (zh) |
DE (1) | DE112008000371B8 (zh) |
WO (1) | WO2008096839A1 (zh) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102008004053A1 (de) * | 2008-01-11 | 2009-07-23 | Airbus Deutschland Gmbh | Spitzenlast-Kühlung von elektronischen Bauteilen durch phasenwechselnde Materialien |
JP5320354B2 (ja) * | 2010-07-28 | 2013-10-23 | 株式会社神戸製鋼所 | 放熱装置 |
CN103596407B (zh) * | 2012-08-13 | 2016-08-10 | 华硕电脑股份有限公司 | 热缓冲元件 |
US9210832B2 (en) * | 2012-08-13 | 2015-12-08 | Asustek Computer Inc. | Thermal buffering element |
US9793255B2 (en) | 2013-01-31 | 2017-10-17 | Infineon Technologies Ag | Power semiconductor device including a cooling material |
US9117748B2 (en) | 2013-01-31 | 2015-08-25 | Infineon Technologies Ag | Semiconductor device including a phase change material |
JP6179145B2 (ja) * | 2013-03-18 | 2017-08-16 | 富士通株式会社 | 電子機器システム |
FR3011067B1 (fr) * | 2013-09-23 | 2016-06-24 | Commissariat Energie Atomique | Appareil comportant un composant fonctionnel susceptible d'etre en surcharge thermique lors de son fonctionnement et un systeme de refroidissement du composant |
JP6217357B2 (ja) * | 2013-12-02 | 2017-10-25 | 株式会社デンソー | 機電一体型駆動装置 |
CN104780736B (zh) * | 2014-01-13 | 2018-05-25 | 潘晨曦 | 电机控制器 |
DE102014213545A1 (de) * | 2014-07-11 | 2015-04-23 | Siemens Aktiengesellschaft | Leistungshalbleitermodul |
JP6686813B2 (ja) * | 2016-09-15 | 2020-04-22 | トヨタ自動車株式会社 | 半導体装置 |
CN107144163B (zh) * | 2017-04-18 | 2018-12-07 | 西安交通大学 | 一种带有冷却系统的熔融盐蓄热罐 |
DE102017122053A1 (de) * | 2017-09-22 | 2019-03-28 | Infineon Technologies Ag | Magnetisches Phasenwechselmaterial zur Wärmeabfuhr |
JP6670868B2 (ja) * | 2018-02-16 | 2020-03-25 | 矢崎エナジーシステム株式会社 | 潜熱蓄熱体 |
JP7098574B2 (ja) * | 2019-05-28 | 2022-07-11 | 矢崎総業株式会社 | 放熱構造 |
JP2021086845A (ja) * | 2019-11-25 | 2021-06-03 | 矢崎総業株式会社 | 電子装置 |
FR3112241B1 (fr) * | 2020-07-02 | 2022-08-12 | Safran | Dispositif de refroidissement mis en œuvre dans une application d’électronique de puissance |
US20240047955A1 (en) * | 2022-08-08 | 2024-02-08 | Rivian Ip Holdings, Llc | Power distribution device with a thermal component |
CN117866755A (zh) * | 2023-03-24 | 2024-04-12 | 北京未神生物科技有限公司 | 一种快速变温的蓄热式pcr仪 |
FR3147682A1 (fr) * | 2023-04-07 | 2024-10-11 | Renault | Dispositif d’électronique de puissance à constante de temps thermique améliorée |
WO2025002570A1 (en) * | 2023-06-30 | 2025-01-02 | Hitachi Energy Ltd | Power module and method for producing a power module |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1779952A (zh) * | 2004-11-18 | 2006-05-31 | 丰田自动车株式会社 | 半导体器件的散热结构和半导体封装 |
CN1851908A (zh) * | 2006-05-22 | 2006-10-25 | 中国科学院电工研究所 | 一种功率半导体器件蒸发冷却装置 |
Family Cites Families (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4559580A (en) * | 1983-11-04 | 1985-12-17 | Sundstrand Corporation | Semiconductor package with internal heat exchanger |
JPS617378A (ja) | 1984-06-21 | 1986-01-14 | Matsushita Electric Ind Co Ltd | 蓄熱材 |
JP3069819B2 (ja) * | 1992-05-28 | 2000-07-24 | 富士通株式会社 | ヒートシンク並びに該ヒートシンクに用いるヒートシンク取付具及びヒートシンクを用いた可搬型電子装置 |
JPH0611286A (ja) | 1992-06-30 | 1994-01-21 | Toyota Motor Corp | 排熱利用型蓄熱器 |
US5455458A (en) * | 1993-08-09 | 1995-10-03 | Hughes Aircraft Company | Phase change cooling of semiconductor power modules |
DE4422113C2 (de) * | 1994-06-24 | 2003-07-31 | Wabco Gmbh & Co Ohg | Elektronikmodul |
US5864466A (en) * | 1994-07-19 | 1999-01-26 | Remsburg; Ralph | Thermosyphon-powered jet-impingement cooling device |
US5615735A (en) * | 1994-09-29 | 1997-04-01 | Hewlett-Packard Co. | Heat sink spring clamp |
JPH08148618A (ja) * | 1994-11-22 | 1996-06-07 | Hitachi Ltd | 放熱構造 |
JP3687169B2 (ja) | 1996-02-14 | 2005-08-24 | 松下電器産業株式会社 | 誘導加熱式炊飯器 |
US5920458A (en) * | 1997-05-28 | 1999-07-06 | Lucent Technologies Inc. | Enhanced cooling of a heat dissipating circuit element |
JPH11121666A (ja) * | 1997-10-20 | 1999-04-30 | Fujitsu Ltd | マルチチップモジュールの冷却装置 |
JP4121185B2 (ja) * | 1998-06-12 | 2008-07-23 | 新電元工業株式会社 | 電子回路装置 |
JP2000116505A (ja) | 1998-10-12 | 2000-04-25 | Matsushita Electric Ind Co Ltd | 電磁誘導加熱式調理器 |
JP3677403B2 (ja) * | 1998-12-07 | 2005-08-03 | パイオニア株式会社 | 発熱素子の放熱構造 |
TW411037U (en) * | 1999-06-11 | 2000-11-01 | Ind Tech Res Inst | Integrated circuit packaging structure with dual directions of thermal conduction path |
DE19950026B4 (de) * | 1999-10-09 | 2010-11-11 | Robert Bosch Gmbh | Leistungshalbleitermodul |
US6521982B1 (en) * | 2000-06-02 | 2003-02-18 | Amkor Technology, Inc. | Packaging high power integrated circuit devices |
JP4897133B2 (ja) * | 1999-12-09 | 2012-03-14 | ソニー株式会社 | 半導体発光素子、その製造方法および配設基板 |
JP3578335B2 (ja) | 2000-06-29 | 2004-10-20 | 株式会社デンソー | 電力用半導体装置 |
JP3853601B2 (ja) * | 2001-03-12 | 2006-12-06 | 株式会社東芝 | 半導体モジュールおよび冷却器 |
JP2002359329A (ja) * | 2001-05-30 | 2002-12-13 | Hitachi Ltd | 半導体装置 |
US6942018B2 (en) * | 2001-09-28 | 2005-09-13 | The Board Of Trustees Of The Leland Stanford Junior University | Electroosmotic microchannel cooling system |
JP2003142864A (ja) * | 2001-11-01 | 2003-05-16 | Hitachi Ltd | 電子装置 |
JP3958589B2 (ja) * | 2002-01-23 | 2007-08-15 | 株式会社オートネットワーク技術研究所 | 電気接続箱 |
JP3780230B2 (ja) * | 2002-07-03 | 2006-05-31 | 株式会社日立製作所 | 半導体モジュール及び電力変換装置 |
JP4155048B2 (ja) * | 2003-02-14 | 2008-09-24 | 住友電装株式会社 | パワーモジュール及びその製造方法 |
JP2005093848A (ja) * | 2003-09-19 | 2005-04-07 | Fuji Electric Holdings Co Ltd | 冷却装置 |
US20050077614A1 (en) * | 2003-10-10 | 2005-04-14 | Chengalva Suresh K. | Semiconductor device heat sink package and method |
DE10347518A1 (de) * | 2003-10-13 | 2005-05-25 | Siemens Ag | Elektronisches Bauelement, Schaltungsträgeraufbau und Elektronikeinheit mit Wärmespeicher |
JP2005150419A (ja) * | 2003-11-17 | 2005-06-09 | Nippon Soken Inc | 半導体装置 |
US20050111188A1 (en) * | 2003-11-26 | 2005-05-26 | Anandaroop Bhattacharya | Thermal management device for an integrated circuit |
EP1713169A1 (en) * | 2004-01-26 | 2006-10-18 | Hitachi, Ltd. | Semiconductor device |
JP2006093404A (ja) * | 2004-09-24 | 2006-04-06 | Sumitomo Wiring Syst Ltd | 電気接続箱 |
JP2006240501A (ja) | 2005-03-03 | 2006-09-14 | Nissan Motor Co Ltd | ハイブリッド車用の冷却システム |
US7365981B2 (en) * | 2005-06-28 | 2008-04-29 | Delphi Technologies, Inc. | Fluid-cooled electronic system |
JP4617209B2 (ja) | 2005-07-07 | 2011-01-19 | 株式会社豊田自動織機 | 放熱装置 |
JP4979909B2 (ja) * | 2005-08-19 | 2012-07-18 | 株式会社日立製作所 | 電力変換装置 |
-
2007
- 2007-02-08 JP JP2007028773A patent/JP4694514B2/ja not_active Expired - Fee Related
-
2008
- 2008-02-04 US US12/526,361 patent/US8919424B2/en active Active
- 2008-02-04 DE DE112008000371T patent/DE112008000371B8/de not_active Expired - Fee Related
- 2008-02-04 CN CN2008800038764A patent/CN101632172B/zh not_active Expired - Fee Related
- 2008-02-04 WO PCT/JP2008/052094 patent/WO2008096839A1/ja active Application Filing
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1779952A (zh) * | 2004-11-18 | 2006-05-31 | 丰田自动车株式会社 | 半导体器件的散热结构和半导体封装 |
CN1851908A (zh) * | 2006-05-22 | 2006-10-25 | 中国科学院电工研究所 | 一种功率半导体器件蒸发冷却装置 |
Non-Patent Citations (3)
Title |
---|
JP特开2005-150419A 2005.06.09 |
JP特开2005-93848A 2005.04.07 |
JP特开2007-19203A 2007.01.25 |
Also Published As
Publication number | Publication date |
---|---|
JP2008193017A (ja) | 2008-08-21 |
CN101632172A (zh) | 2010-01-20 |
DE112008000371B4 (de) | 2012-12-06 |
US8919424B2 (en) | 2014-12-30 |
DE112008000371T5 (de) | 2009-12-17 |
WO2008096839A1 (ja) | 2008-08-14 |
US20100319876A1 (en) | 2010-12-23 |
DE112008000371B8 (de) | 2013-02-28 |
JP4694514B2 (ja) | 2011-06-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN101632172B (zh) | 半导体元件的冷却构造 | |
JP4719187B2 (ja) | 半導体素子の冷却構造 | |
JP4506848B2 (ja) | 半導体モジュール | |
US7957145B2 (en) | Electric power converter | |
JP5855899B2 (ja) | Dc−dcコンバータ及び電力変換装置 | |
CN101578701B (zh) | 半导体元件的冷却构造 | |
CN103703667B (zh) | 电力变换装置 | |
JP4106061B2 (ja) | パワーユニット装置及び電力変換装置 | |
CN105637631B (zh) | 车载电子装置 | |
CN110520982A (zh) | 半导体布置 | |
JP6515836B2 (ja) | インバータ装置 | |
JP5338830B2 (ja) | 半導体装置 | |
JP6532567B1 (ja) | 電力変換装置 | |
JP2018121406A (ja) | 電力変換装置 | |
JP6594290B2 (ja) | 電力変換装置 | |
JP2013021008A (ja) | 素子モジュール | |
JP2004350400A (ja) | 電力変換装置 | |
JP7580233B2 (ja) | 半導体装置およびホイール内蔵システム | |
JP7564021B2 (ja) | 回路基板内に半導体素子を内蔵する半導体モジュール | |
JP7234845B2 (ja) | コンデンサユニット | |
WO2018142736A1 (ja) | 半導体装置 | |
CN110798076A (zh) | 元件模块 | |
JP2008154316A (ja) | 電気機器の搭載構造 | |
US20250107050A1 (en) | Systems and methods for a direct printed heat sink | |
JP2020005430A (ja) | 電力変換装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110601 |